• 한국공작기계학회논문집
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• 제14권6호
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• pp.101-109
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• 2005

Ultra-precision positioning systems basically require high natural frequency and sufficient workspace. To cope with this requirement, flexure hinge mechanisms have been proposed. However, previous designs are hard to satisfy the functional requirements of the system due to difficulty in modeling and optimizing process applying an independent axiomatic design. Therefore, this paper proposes a new design and design-order based on semi-coupled axiomatic design. A planar 3 DOF parallel type micro mechanism is chosen as an exemplary device. Based on preliminary kinematic analysis and dynamic modeling of the system, an optimal design has been carried out. To check the effectiveness of the optimal parameters obtained from theoretical approach, simulation is performed by FEM. The simulation result shows that a natural frequency of 200.53Hz and a workspace of $2000{\mu}m{\times}2000{\mu}m$ can be ensured, which is in very close agreement with the specified goal of design.

• 한국공작기계학회논문집
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• 제17권2호
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• pp.1-6
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• 2008

In recent years, developments in the semiconductor and electronic industries have brought a rapid increase in the use of large size silicon wafer. For further improvement of the ultra precision surface and flatness of Si wafer necessary to high density ULSI, it is known that polishing is very important. However, most of these investigation was experiment less than 300mm diameter. Polishing is one of the important methods in manufacturing of Si wafers and in thinning of completed device wafers. This study reports the machining variables that has major influence on the characteristic of wafer polishing. It was adapted to polishing pressure, machining speed, and the slurry mix ratio, the optimum condition is selected by ultra precision wafer polishing using load cell and infrared temperature sensor. The optimum machining condition is selected a result data that use a pressure and table speed data. By using optimum condition, it achieves a ultra precision mirror like surface.

• 한국기계가공학회지
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• 제5권4호
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• pp.27-32
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• 2006

This study aims to find the optimal cutting conditions, when are nonferrous metals(aluminum and silicon) are machined with diamond tool of diamond turning machine. Diamond turning machine has been widely used in manufacturing optical reflectors of nonferrous metals. Such as aluminium and copper are easy to be machined because of their proper ductility. But optical crystals being discussed here are characterized by their high brittleness which makes it difficult to obtain high quality optical surfaces on them. The purpose of this study is to find the optimum machining conditions for ductile cutting of silicon and aluminium.

• 한국정밀공학회지
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• 제11권1호
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• pp.89-96
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• 1994

This study is to develop a new composite material, a mixture of epoxy resin and granite aggergates which is called Expoxy-Granite, to overcome the inherent disadvantages of conventional materials commonly used as a bed structure material of long-term dimensional/ thermal stability. Under the various manufacturing conditions which could be formulated through experimental investigation, we have constructed 6 kinds of Epoxy-Granite structure models having one fifth the size of the ultra-precision machine tool bed structure. They are compared with cast iron and pure granite models through the dynamic test and the thermal deformation test. Both in the steel ball dropping test and in the forced vibration test, three types of epoxy-granite models made in this study have shown much better dynamic characteristics than the cast iron model and almost the same characteristics as compared with the pure granite model. In the thermal deformation test the above composite materials have also represented lower thermal displacements in the vertical direction of each model as compared with other specimens. It is therefore seen that the epoxy-granite complsite material can be applied to the construction of high-precision machine tool bed, instead of cast iron or pure granite.

• 한국기계가공학회지
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• 제2권3호
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• pp.56-61
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• 2003

This paper described about on-machine profile measurement of aspheric surfaces using contact probing technique in ultra precision machine. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime using a circle leaf spring mechanism and a capacitive-type sensor. The contact probe which is installed on the z-axis is In touch with the aspheric objects which is fixed on the spindle of the diamond turning machine(DTM) during the measuring procedure. The x, z-axis motions of the machine are monitored by a set of two orthogonal plane mirror type laser interferometers. As a results, the developed contact probe on-machine measurement system showed 10 nanometers repeatability with a ${\pm}2{\sigma}$ and uncertainty of 200 nmPv.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.655-656
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• 2012

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.233-234
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• 2013

• 한국공작기계학회논문집
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• 제12권2호
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• pp.31-36
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• 2003

Electronic or measuring instruments equipped with aspherical lens have recently been used since aspherical lens is more effective than spherical one. for the mass production of aspherical lenses, specific molds with precisely machined cores should be prepared. Some researches on the aspherical lens machining have been carried out to date. However, ultra-precise finding of aspherical or mold core has not been fully studied. In this study, the ultra-precise grinding and evaluating system were established to investigate the finding characteristics of aspherical lenses. Unlike conventional grinding process, since a highly-precise lathe were operated in a clean room without vibration the experimental results can be very useful for further studies on ultra-precise grinding process.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.472-477
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• 2004

Miniaturization is the central theme in modern fabrication technology. Many of the components used in modem products are becoming smaller and smaller. The direct write FIB technology has several advantages over contemporary micromachining technology, including better feature resolution with low lateral scattering and capability of mastless fabrication. Therefore, the application of focused ion beam(FIB) technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}{\textrm}{m}$. It is not unsuitable to the sputtering and the deposition to make the high-precision structure in micro or macro scale. Our research is the development of nano stage of 200mm strokes and l0nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about 1$\times$10$^{-5}$ pa. This paper presents the concept of nano stages and the discussion of the material treatment for ultra tush vacuum.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 추계학술대회(한국공작기계학회)
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• pp.243-249
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• 2001

This paper has been presented the hydrodynamic effect by the journal speed, eccentricity and source positions in order to overcome the defects of air bearing such as low stiffness and damping coefficient. Choosing the two row source position of air bearing is different from existed investigations in the side of pressure distribution of air film because of the high speed of journal and the wedge effects by the eccentricity. These optimal chooses of the two row source positions enable us to improve the performance of the film reaction force and loading force as making the high speed spindle. In this paper, the pressure behavior in theory of air film according to the eccentricity of journal and the source positions analyzed. The theoretical analysis have been identified by experiments. The results of investigated characteristics may be applied to precision devices like ultra-precision grinding machine and ultra high speed milling.