Traveling wave reactor atomic layer epitaxy process and characterization of ZnS and Tb-doped ZnS films (Traveling Wave Reactor Atomic Layer Epitaxy를 이용한 ZnS와 ZnS : Tb박막의 성장과 박막 특성의 연구)
-
- Journal of the Korean Vacuum Society
- /
- v.7 no.1
- /
- pp.51-58
- /
- 1998