• Journal of the Korean institute of surface engineering
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• v.55 no.6
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• pp.353-362
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• 2022

Recently, transmittance of photomasks for ultra-violet (UV) region is getting more important, as the light source wavelength of an exposure process is shortened due to the demand for technologies about high integration and miniaturization of devices. Meanwhile, such problems can occur as damages or the reduction of yield of photomask as electrostatic damage (ESD) occurs in the weak parts due to the accumulation of static electricity and the electric charge on chromium metal layers which are light shielding layers, caused by the repeated contacts and the peeling off between the photomask and the substrate during the exposure process. Accordingly, there have been studies to improve transmittance and antistatic performance through various functional coatings on the photomask surface. In the present study, we manufactured antireflection films of Nb₂O₅, | SiO₂ structure and antistatic films of ITO designed on 100 × 100 × 3 mmt sodalime glass by DC magnetron sputtering system so that photomask can maintain high transmittance at I-line (365 nm). ITO thin film deposited using In/Sn (10 wt.%) on sodalime glass was optimized to be 10 nm-thick, 3.0 × 103 𝛺/☐ sheet resistance, and about 80% transmittance, which was relatively low transmittance because of the absorption properties of ITO thin film. High average transmittance of 91.45% was obtained from a double side antireflection and antistatic thin films structure of Nb₂O₅ 64 nm | SiO₂ 41 nm | sodalime glass | ITO 10 nm | Nb₂O₅ 64 nm | SiO₂ 41 nm.

• Journal of the Korea Fashion and Costume Design Association
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• v.3 no.2
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• pp.51-62
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• 2001

This study was intended to investigate the contemporary meaning of transparent design expressed in contemporary fashion by inquiring into its plasticity expressed in contemporary design and fashion and analyzing the association between them. It used the comparative anesthetic method widely used by H. W lfflin and other scholars in eliciting the differences and similarities in styles. It attempted to investigate the plasticity of transparent design expressed in contemporary design by dividing it into the epidermal, spatial and ideological effects. Contemporary design expressed the epidermal effects such as lightness(nimbleness), smoothness, contrast and stress It expressed the spatial effects such as spatial flexibility through the interpenetration of interior and exterior spaces, expansion of the space and the like. And it expressed ideological effects such as openness, pureness, playfulness and the like. In terms of lightness, contemporary design expressed actual or visual lightness by using transparent materials. In terms of the interpenetration of interior and exterior spaces, it expressed the interpenetration of the interior space into the exterior spaces and vice versa. In terms of spatial expansion, contemporary design expressed the infinite spatial connection by drawing the exterior space into the interior space. Contrast and stress were formed by imposing visual unity on contemporary fashion by using opaque and transparent materials. In terms of openness, contemporary design expressed contemporary people's candor and dependability by making the inside of the building or object look outward. To express pureness, contemporary design used the clear and transparent image by using the glass or translucent materials taking on the pure property. To express playfulness, contemporary made use of the vagueness of the spatial boundary, the locational switching of inner and outer spaces, and interesting external forms occurring when light pass through opaque and transparent materials.

• Proceedings of the IEEK Conference
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• 2001.10a
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• pp.76-79
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• 2001

In Japan in of today, there is no aspect in which the quantity of waste glass bottle discharged from ordinary homes decreases. Moreover, the kind of shape and color of the waste glass bottles are increasing little by little. In the recycling of the glass bottle, it becomes a problem that many kind of the color is abounding. It is possible to use the transparent glass bottle as raw material of the glassware. Since the reproduction of the color is difficult, the colored glass bottle is not possible to use as a raw material. Therefore, the processing of these glass bottles entirely depends on the reclamation. In Japan, the security of the new reclaimed land is very difficult for the reason of the environmental damage. Moreover, the life expectancy in many reclaimed lands is anticipated with within two years. Therefore, the development of the processing method of glass bottle other than reclamation becomes a rapid problem. At present it is examined that it is used of an aggregate of the colored pavement, as one of the application methods of colored glass bottle. The particle size of produced glass aggregate is also 5mm or less, because the thickness is 5mm or less on almost glass bottles. And almost glass particles have the sharp tip. The application as the aggregate is limited for this sharpness of the particle. This study was carried out for the purpose of the establishment of sharpness measuring method of the glass aggregate particle. It is possible that the injury degree to human in the handling is known, if showing the sharpness of the aggregate particle at the objective numerical value is possible. And the application of the glass aggregate is spread. In this research, the balloon fracture method was used for the sharpness measurement of the glass particle. This method is based on the completely new idea, and it is possible to express completely the possibility of injury to the human. It is reported with the detailed result in full paper, because this study is continuous in order to get the JIS which is industrial standard of Japan.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.296-296
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• 2016

ITO films doped with a small amount of high-permittivity materials not only retain the basic properties of ITO films but also improve some of their properties. We report the highly conductive and transparent (ITO:Zr) films with various substrate (RT to 300oC) temperatures on glass substrate for the HIT solar cell applications. We observed a decrease in sheet resistance from 36 to $11.8{\Omega}/{\Box}$ with the increasing substrate temperature from RT to 300oC, respectively. The ITO:Zr films showed also lowest resistivity of $1.38{\times}10-4{\Omega}.cm$ and high mobility of 42.37cm-3, respectively. The surface and grain boundaries are improved with the increase of substrate temperature as shown by SEM and AFM surface morphologies. The highly conductive and transparent ITO:Zr films were employed as front electrode in HIT solar cell and the best performance of device was found to be Voc = 710 mV, Jsc = 33.70 mA/cm2, FF = 0.742, ${\eta}=17.76%$ at the substrate temperature of $200^{\circ}C$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.77-78
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• 2008

ZnO thin films were deposited on glass substrates by pulsed laser deposition (PLD) at various oxygen pressures. We observed structural, electrical and optical properties of ZnO films. Structural properties were analysed by XRD and FE-SEM. Electrical properties for applications of transparent thin film transistors (TTFTs) were measured by hall measurement using van der pauw methods at room temperature. In order to apply in transparent devices, we measured transmittance, and optical bandgap energy was calculated by Tauc's equation. The results showed that ZnO films deposited at 200mTorr oxygen pressure were applicable to channel layers of transparent TFTs. It had high hall mobilities ($52.92cm^2$/V-s) and suitable transmittance at visible wavelength region (above 80%).

• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.34-35
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• 2006

Transparent ZnO thin film transistor (TFT) is fabricated on the glass substrates. The device consists of a high mobility intrinsic ZnO as a semiconductor active channel, Ga doped ZnO (GZO) as an electrode, $HfO_2$ as a gate insulator. GZO and $HfO_2$ layers are prepared by using a pulsed laser deposition and intrinsic ZnO layers are fabricated by using an rf-magnetron sputtering, respectively. The transparent TFT is highly transparent (> 87 %) and exhibits n-channel, enhancement mode behavior with a field-effect mobility as large as $11.7\;cm^2/Vs$ and a drain current on-to-off ratio of about $10^5$.

• Journal of Electrical Engineering and Technology
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• v.6 no.5
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• pp.684-687
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• 2011

In this study, we investigate the photovoltaic performance of transparent conductive indium tin oxide (ITO), titanium-doped indium oxide (ITiO), and fluorine-doped tin oxide (FTO) films. ITO and ITiO films are prepared by radio frequency magnetron sputtering on soda-lime glass substrate at $300^{\circ}C$, and the FTO film used is a commercial product. We measure the X-ray diffraction patterns, AFM micrographs, transmittance, sheet resistances after heat treatment, and transparent conductive characteristics of each film. The value of electrical resistivity and optical transmittance of the ITiO films was $4.15{\times}10^{-4}\;{\Omega}-cm$. The near-infrared ray transmittance of ITiO is the highest for wavelengths over 1,000 nm, which can increase dye sensitization compared to ITO and FTO. The photoconversion efficiency (${\eta}$) of the dye-sensitized solar cell (DSC) sample using ITiO was 5.64%, whereas it was 2.73% and 6.47% for DSC samples with ITO and FTO, respectively, both at 100 mW/$cm^2$ light intensity.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.320-320
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• 2007

Nowadays, ZnO thin films are investigated as transparent conductive electrodes for use in optoelectronics devices including flat displays, thin films transistors, solar cells because of their unique optical and electrical properties. For the use as transparent conductive electrodes, a film has to have low resistivity, high absorption in the ultra violent light region and high optical transmission in the visible region. Different technologies such as electron beam evaporation, chemical vapor deposition, laser evaporation, DC and RF magnetron sputtering and have been reported to produce thin films of ZnO with adequate performance for applications. However, highly transparent and conductive doped-ZnO thin films deposited by a metal-organic decomposition method have not been reported before. In this work, the effect of dopant concentration, heating treatment and annealing in areducing atmosphere on the structure, morphology, electrical and optical properties of ZnO thin films deposited on glass substrates by a Sol-gel method are investigated.

• Journal of the Semiconductor & Display Technology
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• v.16 no.4
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• pp.41-45
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• 2017

We have investigated the light extraction efficiency of large-area OLED lighting panels with a microlens array (MLA) or external scattering layer (ESL) by ray tracing simulation. The application of MLA and ESL to transparent OLEDs (TOLEDs) with an auxiliary metal electrode is also studied. It is found that MLA shows higher light extraction efficiency, compared with ESL. However, we have demonstrated that ESL is more suitable for TOLEDs having dual-sided equal light emission. Namely, equal light emission from the front and rear surfaces of TOLED can be achieved by increasing the scattering particle density of ESL. To compensate for a loss in light emission induced by auxiliary metal electrode, we come out with an OLED structure partially covered with MLA at the outer surface of glass substrate, which is aligned with metal electrode. With this scheme, it is observed that the light extraction efficiency can be boosted more than 20% from opaque OLED and 50% from transparent OLED.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.4 s.193
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• pp.36-43
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• 2007