• Transactions of Materials Processing
• /
• v.13 no.3
• /
• pp.253-261
• /
• 2004

The machining technology for the brittle materials such as ceramics are applied to the fields of MEMS(micro electromechanical system) by the progress of new machining technologies such as Etching, Diamond machining, Micro drilling, EDM(Electro discharge machining), ECDM(Electro discharge machining), USM(Ultrasonic machining), LBM(Laser beam machining), EBM(Electron beam machining). Especially, the USM technology can be applied to the dieletric brittle materials such as silicon, borosilicate glass, silicon nitride, quartz and ceramics with high aspect ratio. The micro machining system with machining force controlled position servo is developed in this paper and the optimized ultrasonic machining algorithm is constructed by the force controlled position servo control. The load cell is adapted in the force measuring and the servo control algorithm, suit for the ultrasonic machining characteristics, is estabilished with using the PID auto-tunning functions at the PMAC system which is generally adapted in the field of robot industries. The precision force signal amplifier is constructed with high precision operational amplifier AD524. The vacuum adsorption chuck which is made of titanum and internal flow line is engraved, is used in the workpiece fixing. The mahining results by USM shows that there are some deviation between the force command and the actual machining force that the servo control algorithm should be applied in the machining procedures. Therefore, the constant force controlled position servo system is developed for the micro USM system and by the examination machining process in USM, the stable USM system is realized by tracking the average value of machining force.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2000.11a
• /
• pp.237-242
• /
• 2000

The areal recording density of HDD(Hard Disk Drive) has been increasing by about 60% a year. In order to achieve high areal density, less track pitch is expected and more servo bandwidth is required. Dual stage actuator and servo controller for HDD have been suggested for achieving high track density as a possible solution. Dual-loop servo system is generally classified into a two-input-two-output system, but if we use an estimator for a two-input-two-output system, it can be converted into two input one output system. Since we can't control the dual stage servo system by the classical method, it requires a special technique; for example, Parallel Loop System, Master-Slave Loop System, Decoupled Master-Slave Loop System, and Dual Feedback Loop System. In this paper, we performed experimental evaluations of several types of control algorithm. Further experiments will be made in the future.

• 정보저장시스템학회:학술대회논문집
• /
• 2005.10a
• /
• pp.145-149
• /
• 2005

We describe holographic ROM system to read bit-type data. It has optical system similar to general optical data storage system such as DVD. But because holographic data storage systems have to adopt imaging optical system, in our system bit-type data can be read out by different servos with DVD. We devised 3-hole method similar to 3- beam method for the tracking servo and used astigmatic optical system for the focusing servo. Also we developed the reference beam servo to measure movement of reference beam because especially holographic data storage systems need reference beam. The system was operated by these three servos and objective lens of NA 0.6. We obtained eye pattern from random data of 3T-2um track pitch. We also obtained another eye pattern from DVD disk by only using focusing servo PDIC in our system to verify the compatibility with DVD.

• 제어로봇시스템학회:학술대회논문집
• /
• 1996.10b
• /
• pp.844-847
• /
• 1996

This paper describes the servo position control for the 2-axis positioning table the servo controller consists of conventional feedback loops, disturbance observer. To reduce the contour error, which occurs in the multi-dimensions machines, cross-coupled controller(CCC) is suggested. A weak point of the CCC is their low effectiveness in dealing with arbitrary nonlinear contour such as circles and parabolas. This paper introduces a new nonlinear CCC that is based on control gains that vary during the contour movement The gains of CCC and adjusted in real time according to the shape of nonlinear contour. The feedback controller based on the disturbance observer compensated for external disturbance, plant uncertainty and bad effectiveness by friction model. Suggested servo controller which improve the contouring accuracy, apply to the 2-axis system. Simulation results on 2-axis table verify the effectiveness of the proposed servo controller.

• Proceedings of the KIEE Conference
• /
• 2007.10a
• /
• pp.129-130
• /
• 2007

Self servo track writing(SSTW)은 servo track writer(STW)를 이용하지 않고 hard disk drive의 내부 VCM을 이용하여 servo track을 기록하는 방식이다. SSTW는 이전 servo track을 상대적인 reference로 하여 기록하게 되므로 초기에 발생된 error와 외부의 disturbance의 영향으로 error는 급속하게 증가된다. 이것을 radial error propagation 이라 한다. 본 논문에서는 radial error propagation을 억제하기 위한 correction signal을 설계하고 servo writing 과정에서 발생하는 disturbance의 영향을 제거하기 위하여 disturbance observer(DOB)를 add-on type으로 구성하여 tracking 제어기를 설계하였다. 또한 DOB를 적용한 경우와 유사한 gain margin, phase margin과 sensitivity function을 갖는 제어기를 설계하여 그 성능을 비교하였다. 제안된 방식은 radial error propagation을 억제 하였을 뿐만 아니라 disturbance의 최소화하여 쓰여진 track의 DC track spacing과 AC track Squeeze가 개선된 것을 모의실험을 통하여 검증하였다.

• Journal of the Korean Society for Precision Engineering
• /
• v.18 no.1
• /
• pp.147-153
• /
• 2001

This paper proposes a shaker system design for acceleration test of gimbal. Main reason of shaker system design is to give acceleration to the gimbal, which is moving and tracking the target on the tracking test equipment. The shaker system is mounted on the tracking test equipment. It uses the scotch yoke mechanism to have the constant movement in return. The Scotch yoke mechanism changes the rotational movement of constant velocity to simple harmonic motion.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1997.04a
• /
• pp.729-733
• /
• 1997

Due to the variety of disturbance, it is not ease to accomplish the in-process detection of weld line with non-contact sensor. To get around this difficulties problem develop an automatic seam tracking weld system, the reliable signal processing algorithm has been recommanded. In this research, laser displacement sensor is applied as a seam finder in the automatic tracking system. The sensor is controlled by a dc servo motor which is mounted at X-Y moving table. X-Y moving table manipulated by an ac servo motor controls the position and velocity of the welding torch. First, X-Y table moves to Y-axis to search the welding joint feature before starting the welding, and welding joint is from the scanning data and weighting factor for each other. Second, weld line is determined using proposed signal processing algorithm during welding process. Form the experimental results, we could see the possibility that laser displacement sensor with procesed algorithm can be used as a seam finder in welding process under the severe noise (spatter,arc light etc.) condition

• 제어로봇시스템학회:학술대회논문집
• /
• 2001.10a
• /
• pp.111.2-111
• /
• 2001

The research focuses on controlling a gap to measure the surface defect in semi-conductor fabrication device. The measurement is available accompanying a near field image gap control. In this article, a pneumatic servo system is adopted for the near field gap control. The advantage of the pneumatic servo system is on the preventing the possibility of contacting the device to the wapper surface, fence arising fatal damage. Furthermore, the air from the pneumatic system blows the some particle on the wapper during controlling. The target gap is less than 20 $\mu$m and the gap should keep same amount while the device moves around the surface. The experiment by the pneumatic servo control system is done by employing a simple PID control, and the tracking performance is remarkably verified. The target gap is set from 10 $\mu$m to 100 $\mu$m ...

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.31 no.11
• /
• pp.1069-1076
• /
• 2007

This paper presents the road simulator control technology for reproducing the road input signal to implement the real road data. The simulator consists of the hydraulic pump, servo valve, hydraulic actuator and its control equipment. The QFT(Quantitative Feedback Theory) is utilized to control the simulator effectively. The control system illustrates a tracking performance of the closed-loop controller with low order transfer function G(s) and pre-filter F(s) for a parametric uncertain model. A force controller is designed to communicate the control signal between simulator and digital controller. Tracking specification is satisfied with upper and lower bound tolerances on the steep response of the system to the reference signal. The efficacy of the QFT force controller is verified through the numerical simulation, in which combined dynamics and actuation of the hydraulic servo system are tested. The simulation results show that the proposed control technique works well under uncertain hydraulic plant system. The conventional software (Labview) is used to make up for the real controller in the real-time basis, and the experimental works show that the proposed algorithm works well for a single road simulator.

• Proceedings of the KSME Conference
• /
• 2000.04a
• /
• pp.440-445
• /
• 2000

Robust tracking controller of optical disk drive(ODD) is designed using quantitative feedback theory(QFT). Nominal plant model is identified from real system through modal test. Uncertainties and control performance of tracking servo are specified, and robust controller satisfying these specifications is designed in the QFT framework. To verify the performances of designed controller, experiment are performed in a digital signal processor(DSP) environment, and experimental results are compared with simulations.