• Journal of the Korean Institute of Gas
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• v.24 no.5
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• pp.74-81
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• 2020

In general, when manufacturing a semiconductor, a number of hazardous and dangerous substances such as flammability, toxic, and corrosiveness are used. In particular, semiconductors are manufactured using specialty gas in processes such as CVD and etching. The specialty gas is filled in a container in the state of compressed or liquefied gas, and a gas cylinder cabinet is used as a facility for supplying this specialty gas to the semiconductor manufacturing process. When a accident occurs in the gas supply system, gas is released through a pressure release device installed in the gas cylinder to secure the safety of the supply system. In this case, the gas released inside the gas cabinet, there is a risk of leaking to the outside. After that, by analyzing the gas flow in the gas cabinet, it is intended to identify the risk associated with leak and to provide measures to prevent accidents.

• Journal of the Semiconductor & Display Technology
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• v.5 no.4 s.17
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• pp.23-27
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• 2006

Semiconductor industry has been dramatically developed with the information era of 21C, and the trend now is to consider that the technology of management system of the computer utility that has a high efficiency is important. This study investigated the intelligent decision system for residual gas purge process to effectively remove the residual gas in the tube after replacing the cylinder that is used for the gas cabinet or BSGS(Bulk Specialty Gas Supply System) of the semiconductor process. It was suggest from this study that it is possible to decide the type, frequency and volume of purge gas using various toxic gases which is necessary for each process. Also, this result will be utilized for operating the system, increasing the efficiency of management and saving energy.

• Proceedings of the Korean Society of Disaster Information Conference
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• 2015.11a
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• pp.212-214
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• 2015

독성가스는 반도체, LCD, 태양전지 등 첨산 산업 발달로 그 수요가 증가하고 있으나, 독성가스 용기 무단폐기 등 관리 및 유통에 대한 체계가 열악한 실정이다. 독성가스를 제조 유통하는 시설이 2013년 기준으로 2,774개소가 있으며, 2012년 가스사용량은 2010년 대비 62.5% 급증하였다. 대학교, 연구소 등 사용량은 적으나 독성가스를 사용하지만 고압가스안전관리법의 검사 대상에서 제외되는 기관도 4천개 이상이 되는 상태에서 이에 대한 유통 이력 추적 관리는 매우 중요한 상태이다. 이에 따라 본 연구에서는, RFID를 이용하여 독성가스 용기의 제조, 유통, 충전 및 폐기 전 영역에서 이력정보를 관리하는 독성가스 용기 유통 이력추적관리기술을 개발하였으며, 본 기술을 통하여 투명하고 추적 가능한 독성가스 용기 관리 체계를 갖추었다.

• Transactions of the Korean Society of Automotive Engineers
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• v.16 no.3
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• pp.144-150
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• 2008

This research aims to develop parts for advanced fuel/oil filtering re-circulation applicable to this kind of regulation proof engines. These parts can playa role of converting traditional air emission type crankcase into recovery type crankcase so that the engine can deal with environmental regulations, which do not allow minimal amount of toxic gas discharge. For the experiment, test method and specially made testing equipment are prepared. The results showed that oil separation efficiency of the cone type CCV(Crank Case Ventilation) system was higher than one of cylinder type both in bench test and in engine.