• E2M - 전기 전자와 첨단 소재
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• 제11권10호
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• pp.94-99
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• 1998

Suitable replacement materials for ultrathin SiO2 in deeply scaled MOSFETs such as lattice polarizable films, which have much higherpermittivities than SiO2, have bandgaps of only 3.0 to 4.0 eV. Due to these small bandgaps, the reliability of these films as a gate insulator is a serious concern. Ramped voltage, time dependent dielectric breakdown, and hot carrier effect measurements were done on 190 layers of TiO2 which were deposited through the metal-organic chemical vapor deposition of titanium tetrakis-isopropoxide (TTIP). Measurements of the high and low frequency capacitance indicate that virtually no interface state are created during constant current injection stress. The increase in leakage upon electrical stress suggests that uncharged, near-interface states may be created in the TiO2 film near the SiO2 interfacial layer that allow a tunneling current component at low bias.

• 대한기계학회논문집B
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• 제33권3호
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• pp.186-193
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• 2009

In this article, the effect of silica addition on the phase transformation characteristics of $TiO_2$ nanoparticles synthesized by using an $O_2$-enriched coflow, hydrogen, diffusion flame was investigated. TTIP(titanium tetra-isopropoxide) and TEOS(tetraethyl-orthosilicate) were used as precursors for $TiO_2$ and $SiO_2$ nanoparticles, respectively. Based on the results from TEM and XRD analysis, it is believed that the silica addition on the flame synthesis of $TiO_2$ nanoparticles reduces the particle size distribution and raises the temperature of the phase transition from anatase to rutile. But the reduced sizes of the synthesized particles due to the silica addition made the sintering and phase transformation of particles more easily.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.370-370
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• 2011

ZnO 나노 라드 위에 Quantum dot을 형성하고 최종적으로 TiO2를 Atomic Layer Deposition방법으로 증착하여, 그 passivation 효과가 solar cell의 효율에 미친 영향에 대한 실험을 진행하였다. 암모니아 솔루션을 이용한 Hydrothermal 방법으로 수직한 1차원 형태의 ZnO 나노라드를 TCO 기판 위에 성장시킨다. 여기에 잘 알려진 SILAR와 CBD 방법으로 CdS, CdSe 양자점을 증착한다. 그리고 amorphous TiO2로 표면을 덮는 과정을 거치는데, TiO2가 좁은 간격으로 형성된 ZnO라드 구조 위에서 균일하고 정밀하게 증착되도록 하기 위해 Atomic Layer Deposition을 이용하였다. 사용된 precursor는 Titanium isopropoxide와 H2O이며, 실험상에서 0~5 nm 두께의 TiO2 박막을 형성해 보았다. 다양한 분석 방법을 통해 TiO2/QDs/ZnO의 shell-shell-core 구조를 조사했다. (Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), X-Ray Diffraction (XRD), and X-ray Photoelectron Spectroscopy (XPS)). 이를 solar cell에 적용하고 I-V curve를 통해 그 효율을 확인하였으며, Electrochemical Impedance Spectroscopy (EIS)를 통해서 재결합 측면에서 나타나는 변화 양상을 확인하였다.

• 한국세라믹학회지
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• 제39권4호
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• pp.336-340
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• 2002

Pure and nano-sized $TiO_2$ and $CaTiO_3$ powders were fabricated by a polymeric steric entrapment route and planetary milling process. An ethylene glycol was used as a polymeric carrier for the preparation of organic-inorganic precursors. Titanium isopropoxide and calcium nitrate were dissolved in liquid-type ethylene glycol without any precipitation. At the optimum amount of the polymer, the metal cations were dispersed in solution and a homogeneous polymeric network was formed. The dried precursor ceramic gels were turned to porous powders through calcination process. The porous powders were crystallized at low temperatures and the crystalline powders were planetary milled to nano size.

• 한국세라믹학회지
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• 제43권11호
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• pp.710-714
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• 2006

Barium titanate nanoparticles were synthesized under N$_2$ atmosphere by the hydrolysis and condensation of barium hydroxide octahydrate and titanium (IV) isopropoxide. The synthesized particles were aggregates of nanosized primary particles. The primary particles of about 20-50 nm in diameter became building blocks of larger secondary particles, which are in most cases spherical in shape. The size and morphological evolution of secondary particles are strongly related to the precursor concentration. The observations suggest that formation and control of secondary particles is an essential step in the alkoxidehydroxide sol-precipitation process to obtain monodispersed barium titanate nanopowders.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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• pp.440-441
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• 2006

Several titanate powders ($Al_2TiO_5,\;SrTiO_3$, etc.) were synthesized by an ethylene glycol solution route. Titanium isopropoxide and nitrate salts were dissolved in stoichiometric proportions in liquid-type ethylene glycol without any precipitation. The parent precursor sols were dried to porous gels, and then the gels were calcined and crystallized. All synthesized titanate powders had stable crystallization behavior at low temperature and high specific surface area after a simple ball-milling process. A three-component PZT $(Pb(Zr_{0.52}{\cdot}Ti_{0.48})O_3)$ powder was also synthesized successfully by the ethylene glycol method. In this study, the characteristics of the multi-component titanate powders by the ethylene glycol method are examined.

• 한국분말재료학회지
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• 제17권1호
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• pp.59-64
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• 2010

8 mol% Y-doped $SrTiO_3$ powder was synthesized by Pechini method from titanium isopropoxide, strontium nitrate, yttrium nitrate, citric acid and ethylene glycol. A $Y_2Ti_2O_7$ pyrochlore phase-free perovskite powder was obtained by calcining a polymeric resin, which was prepared from a precursor solution, at $500^{\circ}C$ in an air atmosphere. Low temperature calcination could lead to a fine-grained microstructure. In the case of a solid-state reaction, an extended heat-treatment at high temperature in a reduced atmosphere needed to obtain a single phase perovskite $SrTiO_3$.

• Journal of information and communication convergence engineering
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• 제1권2호
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• pp.70-73
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• 2003

We have studied the effects of solvents and additives in the precursor solutions on the characteristics of barium strontium titanate (BST) thin films. The solution having two solvents, ie. acetic acid for barium acetate and strontium acetate and 2-methoxyethanol for titanium isopropoxide and also having an additive of ethylene glycol shows good stability and remains homogeneous even after a month of ageing. It produces excellent BST thin film without cracks. Dielectric constant, loss tangent at 10KHz and leakage current density at 3V of the BST (70/30) thin film made from this solution are 339, 0.052 and 13.3 ${\mu}\textrm{A}$/$\texmrm{cm}^2$, respectively.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 추계학술대회 논문집
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• pp.290-293
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• 1999

(Ba$_{0.5}$Sr$_{0.5}$)TiO$_3$ thin films were fabricated at different RTA temperatures and thicknesses by Sol-Gel method. Solution consisting of acetate powders and titanium isopropoxide in a mixture of acetic acid and ethylene glycol were spin coated onto Pt/Ti/SiO$_2$/Si substrates. The films were annealed in the temperature range of 650~80$0^{\circ}C$ for 3 minutes by rapid thermal annealing. These BST thin films were fully crystallized at 75$0^{\circ}C$ and showed a maximum dielectric constant value of $\varepsilon$$_{r}$=~468 and dielectric loss was ~0.025 at a thickness of approximately 4000$\AA$.EX>.>.

• Bulletin of the Korean Chemical Society
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• 제22권12호
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• pp.1366-1370
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• 2001

Thin films of the SiO2-TiO2-PDMS composite material have been prepared by the sol-gel dip coating method. Acid catalyzed solutions of tetraethoxy silane (TEOS) and polydimethyl siloxane (PDMS) mixed with titanium isopropoxide Ti(OiPr) were used as precursors. The optical and structural properties of the organically modified 70SiO2-30TiO2 composite films have been investigated with Fourier Transform Infrared Spectroscopy (FT-IR), UV-Visible Spectroscopy (UV-Vis), Differential Thermal Analysis (DTA) and prism coupling technique. The films coated on the soda-lime-silicate glass exhibit 450-750 nm thickness, 1.56-1.68 refractive index and 88-94% transmittance depending on the experimental parameters such as amount of PDMS, thermal treatment and heating rate. The optical loss of prepared composite film was measured to be about 0.34 dB/cm.