• Journal of the Computational Structural Engineering Institute of Korea
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• v.32 no.2
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• pp.103-108
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• 2019

Non-equilibrium molecular dynamics simulation on the thermal boundary resistance(TBR) of an aluminum(Al)/silicon(Si) interface was performed in the present study. The constant heat flux across the Si/Al interface was simulated by adding the kinetic energy in hot Si region and removing the same amount of the energy from the cold Al region. The TBR estimated from the sharp temperature drop at the interface was independent of heat flux and equal to $5.13{\pm}0.17K{\cdot}m^2/GW$ at 300K. The simulation result was experimentally confirmed by the time-domain thermoreflectance technique. A 90nm thick Al film was deposited on a Si(100) wafer using an e-beam evaporator and the TBR on the film/substrate interface was measured using the time-domain thermoreflectance technique based on a femtosecond laser system. A numerical solution of the transient heat conduction equation was obtained using the finite difference method to estimate the TBR value. Experimental results were compared to the prediction and discussions on the nanoscale thermal transport phenomena were made.

• Journal of the Korean Society for Nondestructive Testing
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• v.36 no.4
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• pp.266-272
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• 2016

This paper presents the investigation of the propagation behavior of bulk longitudinal waves generated by an ultrafast laser system in thin films. A train of femtosecond laser pulses was focused onto the surface of a 150-nm thick metallic (chromium or aluminum) film on a silicon substrate to excite elastic waves, and the change in thermoreflectance at the spot was monitored to detect the arrival of echoes from the film/substrate interface. The experimental results show that the film material characteristics such as the wave velocity and Young's modulus can be evaluated through curve-fitting in numerical solutions. The material properties of nanoscale thin films are difficult to measure using conventional techniques. Therefore, this research provides an effective method for the nondestructive characterization of nanomaterials.