• 센서학회지
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• 제11권5호
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• pp.294-300
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• 2002

In this study, we fabricated thermopile infrared sensor with floating membrane structure. Floating membrane was formed by SOI(Silicon On Insulator) structure. In SOI structure, silicon dioxide layer between top silicon layer and bottom silicon substrate was etched by HF solution, then membrane was floated over substrate. After membrane was floated, thermopile pattern was formed on membrane. By insertion of SOI technology, we could obtain thermal isolation structure easily and passivation process for sensor pattern protection was not required during fabrication process. Then, the amplifier circuit for thermopile sensor was fabricated by using $1.5{\mu}m$ CMOS process. The voltage gain of fabricated amplifier was about two hundred.

• 센서학회지
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• 제25권2호
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• pp.124-130
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• 2016

NDIR $CO_2$ gas sensor was built with ASIC implemented thermopile sensor which included temperature sensor and unique elliptical waveguide structures in this paper. The temperature dependency of dual infrared sensor module ($CO_2$ and reference IR sensors) has been characterized and its output voltage characteristics according to the temperature and gas concentration were proposed for the first time. NDIR $CO_2$ gas and reference IR sensors showed linear output voltages according to the variation of ambient temperatures from 243 K to 333 K and their slopes were 14.2 mV/K and 8.8 mV/K, respectively. The output voltages of temperature sensor also presented a linear dependency according to the ambient temperature and could be described with V(T)=-3.191+0.0148T(V). The output voltage ratio between $CO_2$ and reference IR sensors revealed irrelevant to the changes of ambient temperatures and gave a constant value around 1.6255 with standard deviation 0.008 at 0 ppm. The output voltage of $CO_2$ gas sensor at zero ppm $CO_2$ gas consisted of two components; one is caused by the HPB (half pass-band) of IR filter and the other is attributed to the part of $CO_2$ absorption wavelength. The characteristics of output voltages of $CO_2$ gas sensor could be accurately modeled with three parameters which are dependent upon the ambient temperatures and represented small average error less than 1.5% with 5% standard deviation.

• 센서학회지
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• 제6권1호
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• pp.6-15
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• 1997

이 논문은 빔의 구조를 갖거나 멤브레인의 구조를 갖는 써모파일 센서의 다목적 최적설계에 관한 연구이다. 연구대상의 써모파일 센서는 $Si_{3}N_{4}/SiO_{2}$ 박막위에 알루미늄과 다결정 실리콘을 사용하여 열전쌍을 형성하고, 박막중심부에 $RuO_{2}$를 사용하여 적외선 흡수부를 만들어 중심부와 실리콘림부 사이의 온도차이에 따른 Seebeck 효과에 의한 유기전압을 감지하는 센서를 대상으로 하였다. 최적설계의 목적함수는 센서의 감도, 검출능 (detectivity) 및 열시정수를 대상으로 하였다. 패키지를 고려하여 모델링을 하였으며, 기존의 식의 고찰에 의한 단순 설계방법이 아닌 수학적 계획법을 사용한 다목적 최적화 방법을 이용하여 최적해를 구하였다. 최종적인 최적설계 수식화에는 퍼지계획법에서 사용되는 소속함수를 정의하여 설계자가 우선적으로 신뢰할 수 있는 해를 구 할 수 있도록 하였다. 또한, 제한조건으로서 주위 온도변화에 따른 센서의 출력전압변화를 포함시켜 실제 사용되는 환경을 고려하였다.

• 센서학회지
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• 제15권3호
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• pp.179-185
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• 2006

We have developed a noncontact temperature sensor using a silver halides infrared optical fiber. An infrared radiation from a heat source is transferred by a silver halides infrared optical fiber and measured by infrared sensors such as a thermopile and a thermal optical power-meter. The relationships between the temperature of a heat source and the output voltage of the thermopile and the optical power of a thermal optical power-meter are determined. The measurable temperature range using a thermopile and a thermal optical power-meter are from 100 to $750^{\circ}C$ and from 30 to $750^{\circ}C$ respectively. It is expected that a noncontact temperature sensor using infrared optical fiber can be developed for medical and industrial usages based on the results of this study.

• 한국정밀공학회지
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• 제26권11호
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• pp.138-145
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• 2009

A suspended membrane micro fluidic heat flux sensor that is able to measure the heat flow rate was designed and fabricated by a complementary-metal-oxide-semiconductor-compatible process. The combination of a thirty-junction gold and nickel thermoelectric sensor with an ultralow noise preamplifier, low pass filter, and lock-in amp has enabled the resolution of 50 nW power and provides the sensitivity of $11.4\;mV/{\mu}W$. The heater modulation method was used to eliminate low frequency noises from sensor output. It is measured with various heat flux fluid of DI-water to test as micro fluidic application. In order to estimate the heat generation of samples from the output measurement of a micro fluidic heat-flux sensor, a methodology for modeling and simulating electro-thermal behavior in the micro fluidic heat-flux sensor with integrated electronic circuit is presented and validated. The electro-thermal model was constructed by using system dynamics, particularly the bond graph. The electro-thermal system model in which the thermal and the electrical domain are coupled expresses the heat generation of samples converts thermal input to electrical output. The proposed electro-thermal system model shows good agreement with measured output voltage response in transient state and steady-state.

• 센서학회지
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• 제25권5호
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• pp.377-381
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• 2016

NDIR $CO_2$ gas sensor was prototyped with ASIC implemented thermopile sensor which included temperature sensor and White-Cell structure in this paper. The temperature dependency of dual infrared sensors ($CO_2$ and reference IR sensors) has been characterized and their output voltage ratios according to the temperature and gas concentration were presented in this paper for achieving temperature compensation algorithm. The initial output voltages of NDIR $CO_2$ gas and reference IR sensors showed $3^{rd}$ order polynomial and linear output voltages according to the variation of ambient temperatures from 253 K to 333 K, respectively. The output voltages of temperature sensor presented a linear dependency according to the ambient temperature and could be described with V(T) = -3.0069+0.0145T(V). The characteristics of output voltage ratios could be modeled with five parameters which are dependent upon the ambient temperatures and gas concentration. The estimated $CO_2$ concentrations showed relatively high error below 300 ppm (maximum 572 % at 7 ppm $CO_2$ concentration), however, as the concentration increased from 500 ppm to 2,000 ppm, the overall estimated errors of $CO_2$ concentrations were less than ${\pm}10%$ in this research.

• 전자공학회논문지D
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• 제35D권11호
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• pp.46-54
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• 1998

직선 또는 필라멘트 모양의 NiCr 박막 히터 및 Bi-Sb 박막 열전퇴(thermopile)로 구성되는 평면형 Bi-Sb 다중접합 열전변환기를 제작하고, 10 Hz에서부터 10 ㎑까지의 교류 입력신호에 대한 변환기의 교류-직류 변환 특성을 논의하였다. 변환기의 열감도를 증가시키고 또한 교류-직류 변환오차를 감소시키기 위하여, NiCr 히터 및 Bi-Sb 열전퇴의 고온 접합부를 열차단막 역할을 하는 Si₃N₄/SiO₂/Si₃N₄ 다이아프램위에 각각 형성하였고, 열전퇴의 저온 접합부는 방열판 역할을 하는 실리콘 림(rim)에 의해 지지되는 Si₃N₄/SiO₂/Si₃N₄ 박막위에 형성하였다. 단일 bifilar NiCr 히터가 내장된 변환기의 열감도는 공기 및 진공중에서 각각 약 14.0 ㎷/㎽ 및 54.0 ㎷/㎽였고, 교류-직류 전압 및 전류 변환 오차범위는 공기중에서 각각 약 ±0.60 ppm 및 ±0.11 ppm이었다. 변환기의 교류-직류 변환 정확도가 상용 3차원 구조의 다중접합 열전변환기의 것보다 훨씬 더 높게 개선되었으나, 시간에 따른 출력 열기전력의 변화는 비교적 높게 나타났다.

• 한국가스학회:학술대회논문집
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• 한국가스학회 2006년도 추계학술발표회 논문집
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• pp.123-128
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• 2006

This paper describes NDIR $CO_2$ gas sensor that shows the characteristics of temperature compensation. It consists of novel optical cavity that has two elliptical mirrors and a thermopile detector that includes ASIC chip in the same metal package for the amplification of detector output voltage and temperature sensor. The newly developed sensor modules shows high accuracy (less than +/-40 ppm) throughout the measuring concentration of $CO_2$ gas from 0 ppm to 2,000 ppm. After implementing the calculation methods of gas concentration, which is based upon the experimental results, the sensor module shows high accuracy less than +/- 5 ppm error throughout the measuring temperature range $(15^{\circ}C\;to\; 35^{\circ}C)$ and gas concentrations.

• 한국산업융합학회 논문집
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• 제19권2호
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• pp.95-100
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• 2016

This study proposes the temperature compensation algorithm using thermopile detector for non-dispersive infrared Nitrogen gas sensor. From the output voltage of thermistor that is attached onto the infrared detector, the ambient temperature was extracted. The effects of temperatures on the properties of sensor module characteristics of narrow bandpass filter, optical cavity and infrared lamp, and air mixing gas have been introduced in order to implement the temperature compensation algorithm.

• 한국가스학회지
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• 제15권4호
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• pp.51-55
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• 2011

본 논문에서는 써모파일을 사용한 비분산 적외선 메탄가스센서의 온도보상 알고리즘을 제시하였다. 가스측정을 위해 적외선 감지부에 내장된 써미스터의 출력전압과 분위기 온도와의 상관성을 도출하고, 협 대역통과 필터 특성과 온도 변화에 따른 센서모듈(광 공동과 적외선램프)의 출력전압 특성 및 메탄가스의 흡수계수와 광 경로에 따른 출력특성 해석을 통하여 가스센서 모듈의 온도보상 알고리즘을 도출하였다.온도보상 전 약 $\pm$ 1,500 ppm 이상의 오차를 갖는 센서는 온도보상 알고리즘을 적용함으로써 $20^{\circ}C$온도변화 구간에서 최대 약 180 ppm 이하의 정밀한 센서모듈을 제작하였다.