• Title/Summary/Keyword: thermoelectric thin film

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Fabrication Process and Sensing Characteristics of the In-plane Thermoelectric Sensor Consisting of the Evaporated p-type Sb-Te and n-type Bi-Te Thin Films (n형 Bi-Te와 p형 Sb-Te 증착박막으로 구성된 in-plane 열전센서의 형성공정 및 감지특성)

  • Bae, Jae-Man;Kim, Min-Young;Oh, Tae-Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.19 no.1
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    • pp.33-38
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    • 2012
  • An in-plane thermoelectric sensor was processed on a glass substrate by evaporation of the n-type Bi-Te and p-type Sb-Te thin films, and its sensing characteristics were evaluated. The n-type Bi-Te thins film used to fabricate the inplane sensor exhibited a Seebeck coefficient of -165 ${\mu}V$/K and a power factor of $80{\times}10^{-4}W/K^2-m$. The p-type Sb-Te thin film used to fabricate the in-plane sensor exhibited a Seebeck coefficient of 142 ${\mu}V$/K and a power factor of $51.7{\times}10^{-4}W/K^2-m$. The in-plane thermoelectric sensor consisting of 15 pairs of the n-type Bi-Te and the p-type Sb-Te evaporated thin films exhibited a sensitivity of 2.8 mV/K.

A NOx gas sensor based on thennopile and embedded tin oxide catalyst (Thermopile과 삽입된 $SnO_2$ catalyst를 이용한 NOx 센서)

  • Lee, Chung-Il;Yoon, Seung-Il;Kim, Yong-Jun
    • Proceedings of the KSME Conference
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    • 2008.11a
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    • pp.1829-1832
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    • 2008
  • This paper reports a novel gas sensing method by using a thermoelectric device, thermopile in this case, with an embedded tin oxide catalyst. By using a thin catalyst film, the response time and recovery time were remarkably improved. The fabricated gas sensor was characterized through detecting NOx gas with various concentrations.

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Comparison of Thermal Energy Harvesting Characteristics of Thermoelectric Thin-Film Modules with Different Thin-Film Leg Diameters (박막레그 직경에 따른 열전박막모듈의 열에너지 하비스팅 특성 비교)

  • Kim, Woo-Jun;Oh, Tae Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.25 no.4
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    • pp.67-74
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    • 2018
  • Thermoelectric thin film modules were fabricated by electroplating p-type $Sb_2Te_3$and n-type $Bi_2Te_3$ thin film legs with the same thickness of $20{\mu}m$ and different diameters of $100{\mu}m$, $300{\mu}m$, and $500{\mu}m$, respectively. The output voltage and output power of thin film modules were measured and compared as a function of the leg diameter. The modules processed with thin film legs of $100{\mu}m$, $300{\mu}m$, and $500{\mu}m$-diameter exhibited open circuit voltages of 365 mV at ${\Delta}T=36.7K$, 142 mV at ${\Delta}T=37.5K$, and 53 mV at ${\Delta}T=36.1K$, respectively. Maximum output powers of $845{\mu}W$ at ${\Delta}T=36.7K$, $631{\mu}W$ at ${\Delta}T=37.5K$, and $276{\mu}W$ at ${\Delta}T=36.1K$ were obtained for the modules fabricated with the thin film legs of $100{\mu}m$, $300{\mu}m$, and $500{\mu}m$-diameter, respectively.

Thermoelectric Characteristics of the Electroplated Bi-Te Films and Photoresist Process for Fabrication of Micro Thermoelectric Devices (전기도금 공정으로 제조한 Bi-Te 박막의 열전특성 및 미세열전소자 형성용 포토레지스트 공정)

  • Lee, Kwang-Yong;Oh, Tae-Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.14 no.2 s.43
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    • pp.9-15
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    • 2007
  • Thermoelectric properties of the electrodeposited Bi-Te films and photoresist process have been investigated to apply for thermoelectric thin film devices. After plating in Bi-Te solutions of 20 mM concentration, which were prepared by dissolving $Bi_2O_3$ and $TeO_2$ into 1M $HNO_3$, thermoelectric properties of the films were characterized with variation of the Te/(Bi+Te) ratio in a plating solution. With increasing the Te/(Bi+Te) ratio in the plating solution from 0.5 to 0.65, Seebeck coefficient of Bi-Te films changed from $-59{\mu}V/K$ to $-48{\mu}V/K$ and electrical resistivity was lowered from $1m{\Omega}-cm$ to $0.8m{\Omega}-cm$ due to the increase in the electron concentration. Maximum power factor of $3.5{\times}10^{-4}W/K^2-m$ was obtained for the Bi-Te film with the $Bi_2Te_3$ stoichiometric composition. Using multilayer overhang process, the photoresist pattern to form thermoelectric legs of 30 m depth and 100m diameter was successfully fabricated fur micro thermoelectric device applications.

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Correlation between a Structural Change and a Thermoelectric Performance of a Glassy Carbon Thin Film Induced by Electron Beam Irradiation (전자빔 조사에 의한 유리상 탄소에서의 구조적 변화와 열전 성능의 상관관계)

  • Oh, Inseon;Jo, Junhyeon;An, Ki-Seok;Yoo, Jung-woo
    • Composites Research
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    • v.29 no.4
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    • pp.156-160
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    • 2016
  • Glassy carbon can be utilized in a variety of harsh environment due to exceptional thermal stability and chemically impermeability along with scalability and low electrical resistance. In this work, we studied effects of electron(e)-beam irradiation on thermoelectric properties of the glassy carbon film. E-beam irradiation triggered local crystallization and/or amorphization of glassy carbon thin films, which was determined by a Raman spectroscopy. The structural change by e-beam irradiation leads to the change in the doping level of the glassy carbon, which can be inferred from the change of a Seebeck coefficient and an electric conductivity. The optimal power factor we obtained for the irradiated glassy carbon film was ~200% higher than that of the non-irradiated sample.

A Study of Thermoelectric Effect in Resistance Spot Welding of Aluminium Alloy (알루미늄 합금의 저항점용접에서의 열전 효과에 대한 연구)

  • ;K. T. Rie
    • Transactions of the Korean Society of Automotive Engineers
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    • v.6 no.5
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    • pp.10-19
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    • 1998
  • The erosion of electrode in spot welding of aluminium alloy by direct current is dependent on the electric polarity. The positive electrode is much more eroded than the negative one. To explain this phenomenon, Peltier effect has been generally accepted as a unique theory. In this study Peltier effect was evaluated by calculations on the basis of some references and experiments. The difference of heat generated by Peltier effect on both electrode surfaces was, however, only 4% of total heat generated during wel- ding. Because of insufficient explanation, Kohler theory, which is mainly affected by thin oxide film, was introduced. A theoretical calculation showed 17% of the temperature difference between the positive and negative electrode, in case "surface voltage" resulted from oxide film was 30% of total contact voltage. This revealed that the erosion of electrode could be more affected by Kohler theory than effect.an effect.

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