• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.743-746
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• 2000

The removal of contaminants of silicon wafers has been investigated by various methods. Laser cleaning is the new dry cleaning technique to replace wafer wet cleaning in the near future. A dry laser cleaning uses inert gas jet to remove contaminant particles lifted off by the action of a KrF excimer laser. A laser cleaning model is developed to simulate the cleaning process and analyze the influence of contaminant particles and experimental parameters on laser cleaning efficiency. The model demonstrates that various types of submicrometer-sized particles from the front sides of silicon wafer can be efficiently removed by laser cleaning. The laser cleaning is explained by a particle adhesion model. including van der Waals forces and hydrogen bonding, and a particle removal model involving rapid thermal expansion of the substrate due to the thermoelastic effect. In addition, the experiment of wafer laser cleaning using KrF excimer laser was conducted to remove various contaminant particles.

• Structural Engineering and Mechanics
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• v.30 no.5
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• pp.577-592
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• 2008

Laplace-Fourier transform techniques are used to investigate the interaction caused by mechanical, thermal and microstress sources in a generalized thermomicrostretch elastic medium with temperature-dependent mechanical properties. The modulus of elasticity is taken as a linear function of reference temperature. The integral transforms are inverted using a numerical technique to obtain the normal stress, tangential stress, tangential couple stress, microstress and temperature distribution. Effect of temperature dependent modulus of elasticity and thermal relaxation times have been depicted graphically on the resulting quantities. Comparisons are made with the results predicted by the theories of generalized thermoelasticity. Some particular cases are also deduced from the present investigation.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.7 s.238
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• pp.976-982
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• 2005

This paper is dedicated to the thermoelastic modeling and dynamic response of the rotating blades made of functionally graded ceramic-metal based materials. The blades are modeled as non-uniform thin walled beams fixed at the hub with various selected values of setting angles and pre-twisted angles. In this study, the blade is rotating with a constant angular velocity and exposed to a steady temperature field as well as external excitation. Moreover, the effect of the temperature gradient through the blade thickness is considered. Material properties are graded in the thickness direction of the blade according to the volume fraction power law distribution. The numerical results highlight the effects of the volume fraction, temperature gradient, taper ratio, setting angle and pre-twisted angle on the dynamic response of bending-bending coupled beam characteristics and pertinent conclusions are outlined.

• Journal of Advanced Marine Engineering and Technology
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• v.22 no.6
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• pp.800-808
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• 1998

In this study the thermal stress distribution and deformantion characteristics resulting from the nonuniform temperature fields of the cylinder block of a light 3-cylinder 4-stroke gasoline engine were analyzed using the 3-dimensional finite element method. The temperature distributions req-uisite for the thermoelastic behavior alalysis were obtained from the steady-state heat conduction analysis performed on the basis of experimental data. in order to examine the effect of a ceramic material the cylinder liner was replaced by the silicon nitride($Si_{3}N_{4}$) and its thermal behaviors were compared with those of the original block.

• Korean Journal of Computational Design and Engineering
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• v.18 no.5
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• pp.321-328
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• 2013

A method of designing a manufacturing shape of ship plate parts considering welding deformation is introduced. In this paper, the design shape of a bracket is deformed not by a thermoelastic method but by a pure geometric method. Deformation quantities are estimated based on data captured in the field and then a manufacturing design shape is obtained by deforming an original design shape by a geometric deformation method. The proposed method has been implemented and tested in the shipyard.

• Korea-Australia Rheology Journal
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• v.20 no.3
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• pp.117-125
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• 2008

Viscoelastic instabilities are of fundamental importance to understanding the physics of complex fluids and of practical importance to materials processing and fluid characterization. Significant progress has been made over the past 15 years in understanding instabilities in viscoelastic flows with curved streamlines and is reviewed here. Taylor-Couette flow, torsional flow between a cone and plate, and torsional flow between parallel plates have received special attention due to both the basic significance of these flows and their critical role in rheometry. First, we review the criteria for determining when these flows become unstable due to elasticity in the absence of inertia, and discuss the generalization of these criteria to more complex flows with curved streamlines. Then, focusing on experiments and simulations in the Taylor-Couette problem, we review how thermal sensitivity (i.e., the dependence of fluid viscosity and elasticity on temperature) and inertia affect the stability of viscoelastic flows. Finally, we conclude with some general thoughts on unresolved issues and remaining challenges related to viscoelastic instabilities.

• Journal of Mechanical Science and Technology
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• v.19 no.5
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• pp.1116-1122
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• 2005

A finite element method was used to simulate the wave propagation of laser-generated ultrasound and its interaction with surface breaking cracks in an elastic material. Thermoelastic laser line source on the material surface was approximated as a shear dipole and loaded as nodal forces in the plane-strain finite element (FE) model. The shear dipole- FE model was tested for the generation of ultrasound on the surface with no defect. The model was found to generate the Rayleigh surface wave. The model was then extended to examine the interaction of laser generated ultrasound with surface-breaking cracks of various depths. The crack-scattered waves were monitored to size the crack depth. The proposed model clearly reproduced the experimentally observed features that can be used to characterize the presence of surface-breaking cracks.

• Tribology and Lubricants
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• v.15 no.2
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• pp.199-205
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• 1999

Using a coupled thermal-mechanical analysis, the thermal distortion of the ventilated disk brakes has been investigated based on the air cooling effects during 15 braking operations. The FEM results show that the bendings and distortions of the disk toward the left side are decreased, but the sinusoidal distortion of the disk rubbing surface along the arc length of the vent hole is highly increased by increasing the convective air cooling effects, which is heavily related to the squeal, wear and micro-thermal crackings at the rubbing surfaces due to uneven dissipation rates of friction heatings.

• Economic and Environmental Geology
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• v.24 no.1
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• pp.57-62
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• 1991

This study presents results of thermal stress calculations around the uplifted province within the continental lithosphere. A set of thermal stresses for the uplifted provinces are calculated using by assumption of two dimensions along the extension of the strike. The calculations utilize thermoelastic displacement potential function. Thermal stress distribution-faulting conditions inferred from this study are consistent with the suggested surface heat flow and place an important constraint on the thermal state of the uplifted provinces within the continental lithosphere.

• Journal of the Semiconductor & Display Technology
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• v.3 no.2
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• pp.35-40
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• 2004

The total relaxed stress in annealing and the thermal strain/stress were obtained from the identification of the residual stress-free state using electronic speckle pattern interferometry (ESPI). The residual stress fields in case of both single and film / substrate systems were modeled using the thermo-elastic theory and the relationship between relaxed stresses and displacements. We mapped the surface residual stress fields on the indented bulk Cu and the 0.5 $\mu\textrm{m}$ Au film by ESPI. In indented Cu, the normal and shear residual stress are distributed over -1.7 GPa to 700 MPa and -800 GPa to 600 MPa respectively around the indented point and in deposited Au film on Si wafer, the tensile residual stress is uniformly distributed on the Au film from 500 MPa to 800 MPa. Also we measured the residual stress by the x-ray diffractometer (XRD) for the verification of above residual stress results by ESPI...