• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.1033-1036
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• 2002

Wafer bonding methods such as fusion and anodic bonding suffer from high temperature treatment, long processing time, and possible damage to the micro-scale sensor or actuators. In the localized bonding process, beating was conducted locally while the whole wafer is maintained at a relatively low temperature. But previous research of localized heating has some problems, such as non-uniform soldering due to non-uniform heating and micro crack formation on the glass capsule by thermal stress effect. To address this non-uniformity problem, a new heater configuration is being proposed. By keeping several points on the heater strip at calculated and constant potential, more uniform heating, hence more reliable wafer bonding could be achieved. The proposed scheme has been successfully demonstrated, and the result shows that it will be very useful in hermetic packaging. Less than 0.2 ㎫ contact Pressure were used for bonding with 150 ㎃ current input for 50${\mu}{\textrm}{m}$ width, 2${\mu}{\textrm}{m}$ height and 8mm $\times$ 8mm, 5mm$\times$5mm, 3mm $\times$ 3mm sized phosphorus-doped poly-silicon micro heater. The temperature can be raised at the bonding region to 80$0^{\circ}C$, and it was enough to achieve a strong and reliable bonding in 3minutes. The IR camera test results show improved uniformity in heat distribution compared with conventional micro heaters. For gross leak check, IPA (Isopropanol Alcohol) was used. Since IPA has better wetability than water, it can easily penetrate small openings, and is more suitable for gross leak check. The pass ratio of bonded dies was 70%, for conventional localized heating, and 85% for newly developed FP scheme. The bonding strength was more than 30㎫ for FP scheme packaging, which shows that FP scheme can be a good candidate for micro scale hermetic packaging.

• Journal of Korean Society of Water and Wastewater
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• v.30 no.4
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• pp.401-408
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• 2016

Desalination is getting more attention as an alternative to solve a global water shortage problem in the future. Especially, a desalination technology is being expected as a new growth engine of Korea's overseas plant business besides one of the solutions of domestic water shortage problem. In the past, a thermal evaporation technology was a predominant method in desalination market, but more than 75% of the current market is hold by a membrane-based reverse osmosis technology because of its lower energy consumption rate for desalination. In the future, it is expected to have more energy efficient desalination process. Accordingly, various processes are being developed to further enhance the desalination energy efficiency. One of the promising technologies is a desalination process combined with Pressure Retarded Osmosis (PRO) process. The PRO technology is able to generate energy by using osmotic pressure of seawater or desalination brine. And the other benefits are that it has no emission of $CO_2$ and the limited impact of external environmental factors. However, it is not commercialized yet because a high-performance PRO membrane and module, and a PRO system optimization technology is not sufficiently developed. In this paper, the recent research direction and progress of the SWRO-PRO hybrid desalination was discussed regarding a PRO membrane and module, an energy recovery system, pre-treatment and system optimization technologies, and so on.

• Fire Science and Engineering
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• v.30 no.3
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• pp.1-6
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• 2016

More than five thousands transportation fires occurannually in Korea and the resulting destruction of property and loss of life is huge and results in traffic and environmental pollution. The recent development of automobile technology such as the hybrid concept and use of bio fuels makes fire protection even more difficult due to a lack of understanding of the new adapted system including vehicle engines. In this study, a numerical simulation was performed on a PSR (perfectly Stirred Reactor) to simulate an automobile engine and to clarify the effect of gasoline/ethanol surrogates as a fuel. The temperature, NOx and soot emissions were predicted to decrease with increasing ethanol content, but that of unburned hydrocarbons was found to increase dramatically. The result will provide not only the basic thermal characteristics for engines and their after-treatment systems, but also make it possible to assess the potential for fire events in these systems when an ethanol mixed fuel is used in gasoline vehicles.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.159-160
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• 2012

지난 30년 동안 플래시 메모리의 주류 역할을 하였던 부유 게이트 플래시 메모리는 40 nm 기술 노드 이하에서 셀간 간섭, 터널 산화막의 누설전류 등에 의한 오동작으로 기술적 한계를 맞게 되었다. 또한 기존의 비휘발성 메모리는 동작 시 높은 전압을 요구하므로 전력소비 측면에서도 취약한 단점이 있다. 그러나 이러한 문제점들을 기존의 Si기반의 소자기술이 아닌 새로운 재료나 공정을 통해서 해결하려는 연구가 최근 활발하게 진행되고 있다. 특히, 플래시 메모리의 중요한 구성요소의 하나인 터널 산화막은 메모리 소자의 크기가 줄어듦에 따라서 SiO2단층 구조로서는 7 nm 이하에서 stress induced leakage current (SILC), 직접 터널링 전류의 증가와 같은 많은 문제점들이 발생한다. 한편, 기존의 부유 게이트 타입의 메모리를 대신할 것으로 기대되는 전하 포획형 메모리는 쓰기/지우기 속도를 향상시킬 수 있으며 소자의 축소화에도 셀간 간섭이 일어나지 않으므로 부유 게이트 플래시 메모리를 대체할 수 있는 기술로 주목받고 있다. 특히, TBM (tunnel barrier engineered memory) 소자는 유전율이 큰 절연막을 적층하여 전계에 대한 터널 산화막의 민감도를 증가시키고, 적층된 물리적 두께의 증가에 의해 메모리의 데이터 유지 특성을 크게 개선시킬 수 있는 기술로 관심이 증가하고 있다. 본 연구에서는 Si3N4/Ta2O5를 적층시킨 staggered구조의 tunnel barrier를 제안하였고, Si기판 위에 tunnel layer로 Si3N4를 Low Pressure Chemical Vapor Deposition (LPCVD) 방법과 Ta2O5를 RF Sputtering 방법으로 각각 3/3 nm 증착한 후 e-beam evaporation을 이용하여 게이트 전극으로 Al을 150 nm 증착하여 MIS- capacitor구조의 메모리 소자를 제작하여 동작 특성을 평가하였다. 또한, Si3N4/Ta2O5 staggered tunnel barrier 형성 후의 후속 열처리에 따른 전기적 특성의 개선효과를 확인하였다.

• Journal of Powder Materials
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• v.17 no.2
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• pp.142-147
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• 2010

The ultrafine titanium carbonitride ($TiC_xN_y$) particles below 100 nm in mean size, including various carbon and nitrogen contents (x=0.55~0.9, y=0.1~0.5), were successfully synthesized by new Mg-thermal reduction process. Nanostructured sub-stoichiometric titanium carbide ($TiC_x$) particles were initially produced by the magnesium reduction of gaseous $TiCl_4+x/2C_2Cl_4$ at $890^{\circ}C$ and post heat treatments in vacuum were performed for 2 hrs to remove residual magnesium and magnesium chloride mixed with $TiC_x$. Finally, well C/N-controled $TiC_xN_y$ phases were successfully produced by nitrification heat treatment under normal $N_2$ gas atmosphere at $1150^{\circ}C$ for 2 hrs. The values of purity, mean particle size and oxygen content of produced particles were about 99.3%, 100 nm and 0.2 wt.%, respectively.

• Journal of the Korean Society of Clothing and Textiles
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• v.16 no.3 s.43
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• pp.335-344
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• 1992

This study was conducted to investigate the influence of addition of cetyl trimethyl ammo­nium bromide (CTAB), and amine [ethylamine (EA) or ethylene diamine (EDA)] to aqueous sodium hydroxide (NaOH) solution on polyester alkaline hydrolysis, The experimental vari­ables such as CTAB concentration, EA or EDA concentration, NaOH concentration, tempera­ture and time were compared, and the changes in physical and chemical properties of alkaline­hydrolyzed PET fabrics depending on their treated conditions were measured, The results are as follows: 1. By adding CTAB and amine in aqueous NaOH solution, increasing effect on weight loss of PET fabrics was obtained in simultaneous addition of CTAB and EDA, but not in CTAB and EA. 2. By adding CTAB & EDA simultaneously, increasing effect on weight loss was obtained regardless of EDA concentration, time and temperature, and it was more effective at lower NaOH concentration. :l. The increase of void space (or irregularly grooved surface), of softness, of wickability, of dyeability on PET fabric, and the decrease of tensile strength, of molecular weight were observed according to the weight loss on the PET fabrics. These changes were equal to all alkaline-hydrolyzed PET fabrics regardless of addition of CTAB and amine. l. There was little changes on crystallinity, thermal behavior when PET fiber was treated with ,aqueous NaOH solution with CTAB and EDA. These results supported that increasing effect on weight loss take place without inducing of fine structural change of PET fibers.

• Applied Chemistry for Engineering
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• v.23 no.3
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• pp.253-258
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• 2012

The effects of active sites and valence states were investigated over $Pd/TiO_2$ catalyst on simultaneous oxidation of $CH_4$ and CO. The Pd species (PdO) crystallite size increased with increasing Pd loadings, which results in enhancement of the activity of $CH_4$ oxidation. Different results from the activity of $CH_4$ and CO oxidation were shown to be dependent on the Pd valence state on the surface of the catalyst prepared through a thermal treatment. XRD and $H_2-TPR$ analysis confirmed that $Pd^{2+}$species was predominated in the calcination catalyst, while $Pd^0$species was predominated in the reduction catalyst. Additionally, it could be found that the valence state of Pd was a more important factor on the catalytic activity than that of factors as the surface area and pore volume. The reaction mechanism of $CH_4$ and CO followed by the valence state of Pd could be identified using FT-IR analysis.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.41 no.12
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• pp.975-986
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• 2013

This paper dealt with the fabrication and performance evaluation of the electronics housing made of lightweight composite materials, aiming at the enhancement of satellite mass savings by replacing conventional aluminum alloy widely used for satellite avionics with lightweight composite material. For this purpose, a fabrication process was designed to overcome low machinability of CFRP and to minimize the post-treatment. The composite housing with grid-stiffened and monolithic frame was made using co-curing method. Its performance was also evaluated regarding endurance, stiffness, thermal conductivity, electrical grounding, EMI protection and radiation shielding. The composite housing can provide the considerable mass savings over the aluminum housing with same dimension.

• Journal of Sensor Science and Technology
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• v.7 no.2
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• pp.103-110
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• 1998

Pyroelectric infrared detectors based on La-modified $PbTiO_{3}$ (PLT) thin films have been fabricated by RF magnetron sputtering and rnicrornachining technology. The detectors form $Pb_{l-x}La_{x}Ti_{1-x/4}O_{3}$ (x=0.05) thin film ferroelectric capacitors epitaxially grown by RF magnetron sputtering on Pt/MgO (100) substrate. The sputtered PLT thin film exhibits highly c-axis oriented crystal structure that no poling treatment for sensing applications is required. This is an essential factor to increase the yield for realization of an infrared image sensor. Micromachining technology is used to lower the thermal mass of the detector by giving maximum sensor efficiency. Polymide is coated on top of the sensing elements to support the fragile structure and the backside of the MgO substrate is selectively etched to reduce the heat loss. The sensing element exhibited a very high detectivity D* of $8.5{\times}10^{8}cm{\cdot}\sqrt{Hz}/W$ at room temperature and it is about 100 times higher than the case of micromachining technology is not used. A sensing system that detects the position as well as the existence of a human body is realized using the array sensor.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2014.11a
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• pp.300-300
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• 2014

해양환경 하에서 대형 강구조물의 경우 장기간 부식손상을 방지하기 위해 아크 용사코팅 기술이 오래전부터 유용하게 이용되어 왔다. 아크 용사코팅 기술은 타 용사코팅 기술에 비해 경제성과 생산성이 뛰어나 대형 강구조물에 적용되고 있다. 용사재료로는 Al, Zn 또는 그 합금들이 주로 사용되어 강재에 대해 희생양극 방식효과를 나타낸다. 그러나 아크용사에 의해 적층된 코팅 층은 용사공정 중 불가피하게 수많은 기공과 산화물이 포함되어 내식성 및 내구성에 악영향을 미치게 된다. 따라서 본 연구에서는 알루미늄 합금의 용사코팅 층에 대하여 다양한 후처리를 통해 내식성과 더불어 내구성을 향상시키고자 하였다. 용사코팅은 알루미늄 합금 선재(1.6 ${\varnothing}$)를 사용하여 아크용사를 실시하였다. 용사 시 용사거리는 200 mm, 공기압력은 약 $7kg/cm^2$ 정도로 유지하면서 용사코팅을 실시하여 약 $200{\mu}m$ 두께로 코팅 층을 형성시켰다. 이후 용사코팅 층의 표면에 다양한 후처리재를 적용하였으며, 내구성을 평가하기 위하여 후처리 적용 전후 시험편에 대하여 캐비테이션 실험을 실시하였다. 캐비테이션 실험은 ASTM G32-92에 의거하여 주파수 20 kHz의 초음파 진동 장치(ultrasonic vibratory device)를 사용하였다. 그리고 시험편 표면과 발진 혼에 부착된 팁(tip)과의 거리는 1 mm로 일정하게 유지시킨 뒤, 캐비테이션 발생 시간을 변수로 하여 실험을 실시하였다. 손상된 용사코팅 층의 표면은 주사전자현미경과 광학현미경으로 관찰하였으며, 시험편 손상깊이는 3D 현미경으로 비교 분석하였다. 또한 캐비테이션 실험 전후의 무게를 측정하여 무게 감소량을 상호 비교하였다. 그리고 전기화학적 실험은 천연해수 속에서 자체 제작한 홀더(holder)를 이용하여 $0.33183cm^2$의 용사코팅 층만을 노출시켜 실시하였다. 그리고 기준전극은 은/염화은 전극을, 대극은 백금전극을 사용하였다. 분극실험을 통해 후처리 적용에 따른 용사코팅 층의 부식전위 및 부식전류밀도를 비교 평가하였다. 그 결과, 용사코팅 층에 의하여 강재에 대한 희생양극 방식전위가 확보되었으며, 후처리재가 적용된 용사코팅 층에서 내식성 및 캐비테이션 저항성이 향상되었다.