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New Approaches for Overcoming Current Issues of Plasma Sputtering Process During Organic-electronics Device Fabrication: Plasma Damage Free and Room Temperature Process for High Quality Metal Oxide Thin Film

  • Hong, Mun-Pyo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.100-101
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    • 2012
  • The plasma damage free and room temperature processedthin film deposition technology is essential for realization of various next generation organic microelectronic devices such as flexible AMOLED display, flexible OLED lighting, and organic photovoltaic cells because characteristics of fragile organic materials in the plasma process and low glass transition temperatures (Tg) of polymer substrate. In case of directly deposition of metal oxide thin films (including transparent conductive oxide (TCO) and amorphous oxide semiconductor (AOS)) on the organic layers, plasma damages against to the organic materials is fatal. This damage is believed to be originated mainly from high energy energetic particles during the sputtering process such as negative oxygen ions, reflected neutrals by reflection of plasma background gas at the target surface, sputtered atoms, bulk plasma ions, and secondary electrons. To solve this problem, we developed the NBAS (Neutral Beam Assisted Sputtering) process as a plasma damage free and room temperature processed sputtering technology. As a result, electro-optical properties of NBAS processed ITO thin film showed resistivity of $4.0{\times}10^{-4}{\Omega}{\cdot}m$ and high transmittance (>90% at 550 nm) with nano- crystalline structure at room temperature process. Furthermore, in the experiment result of directly deposition of TCO top anode on the inverted structure OLED cell, it is verified that NBAS TCO deposition process does not damages to the underlying organic layers. In case of deposition of transparent conductive oxide (TCO) thin film on the plastic polymer substrate, the room temperature processed sputtering coating of high quality TCO thin film is required. During the sputtering process with higher density plasma, the energetic particles contribute self supplying of activation & crystallization energy without any additional heating and post-annealing and forminga high quality TCO thin film. However, negative oxygen ions which generated from sputteringtarget surface by electron attachment are accelerated to high energy by induced cathode self-bias. Thus the high energy negative oxygen ions can lead to critical physical bombardment damages to forming oxide thin film and this effect does not recover in room temperature process without post thermal annealing. To salve the inherent limitation of plasma sputtering, we have been developed the Magnetic Field Shielded Sputtering (MFSS) process as the high quality oxide thin film deposition process at room temperature. The MFSS process is effectively eliminate or suppress the negative oxygen ions bombardment damage by the plasma limiter which composed permanent magnet array. As a result, electro-optical properties of MFSS processed ITO thin film (resistivity $3.9{\times}10^{-4}{\Omega}{\cdot}cm$, transmittance 95% at 550 nm) have approachedthose of a high temperature DC magnetron sputtering (DMS) ITO thin film were. Also, AOS (a-IGZO) TFTs fabricated by MFSS process without higher temperature post annealing showed very comparable electrical performance with those by DMS process with $400^{\circ}C$ post annealing. They are important to note that the bombardment of a negative oxygen ion which is accelerated by dc self-bias during rf sputtering could degrade the electrical performance of ITO electrodes and a-IGZO TFTs. Finally, we found that reduction of damage from the high energy negative oxygen ions bombardment drives improvement of crystalline structure in the ITO thin film and suppression of the sub-gab states in a-IGZO semiconductor thin film. For realization of organic flexible electronic devices based on plastic substrates, gas barrier coatings are required to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency flexible AMOLEDs needs an extremely low water vapor transition rate (WVTR) of $1{\times}10^{-6}gm^{-2}day^{-1}$. The key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required (under ${\sim}10^{-6}gm^{-2}day^{-1}$) is the suppression of nano-sized defect sites and gas diffusion pathways among the grain boundaries. For formation of high quality single inorganic gas barrier layer, we developed high density nano-structured Al2O3 single gas barrier layer usinga NBAS process. The NBAS process can continuously change crystalline structures from an amorphous phase to a nano- crystalline phase with various grain sizes in a single inorganic thin film. As a result, the water vapor transmission rates (WVTR) of the NBAS processed $Al_2O_3$ gas barrier film have improved order of magnitude compared with that of conventional $Al_2O_3$ layers made by the RF magnetron sputteringprocess under the same sputtering conditions; the WVTR of the NBAS processed $Al_2O_3$ gas barrier film was about $5{\times}10^{-6}g/m^2/day$ by just single layer.

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Changes of Soil Properties through the Remediation Processes and Techniques for the Restoration of Remediated Soils (오염 토양 정화공정에 의한 토양의 특성 변화 및 정화토의 회복기술)

  • Lee, Sang-Woo;Lee, Woo-Chun;Lee, Sang-Hun;Kim, Soon-Oh
    • Economic and Environmental Geology
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    • v.53 no.4
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    • pp.441-477
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    • 2020
  • There have been raised other environmental issues related to remediated soils piled up in numerous carry-out processing facilities because a considerable quantity of them have been produced every year, but most of them have not been relevantly reused or recycled. Thus, this article reports the trend of researches on the development of techniques to restore the quality of remediated soils to activate their reuse and recycling. Firstly, the tendency of change in soil properties through remediation processes was looked over, and then the degradation of soil quality was characterized according to the type of remediation processes. Besides, the direction of policy to promote the reuse and recycling of remediated soils was introduced, and finally, the future works needed were suggested. This article was prepared based on the results of the survey of domestic and foreign literature. A number of literature were reviewed to scrutinize the change of soil properties due to remediation processes and diverse techniques for the amendment and restoration of remediated soils. Furthermore, the policies related to the reuse and recycling of remediated soils were arranged with the reference of the first and second versions of the Soil Conservation Master Plan of Korea. The literature survey focused on three kinds of remediation technologies, such as land farming, soil washing, and thermal desorption, which were most frequently used so far in Korea. The results indicate that the tendency of change in soil properties was significantly different depending on the type of remediation processes applied, and the degradation characteristics of soil quality were also totally different between them. The soil amendment and restoration can be categorized as three techniques depending on the type of substances used, such as inorganic, organic, and biological ones. Diverse individual materials have been used, and the soil properties improved or enhanced were dependent on the type of specific materials utilized. However, few studies on the restoration of soil qualities degraded during the remediation processes have not been carried out so far. The second Soil Conservation Master Plan states the quality certification and target management system of remediated soils, and it is expected that their reuse and recycling will be facilitated hereafter. With the consideration of the type of remediation processes implemented and public utility, the restoration technologies of remediated soils should be developed for the vitalization of their reuse and recycling. Besides, practical and specific measures should be taken to support the policy specified in the second Soil Conservation Master Plan and to promote reuse/recycling of remediated soils.

Improvement of Energy Efficiency of Plants Factory by Arranging Air Circulation Fan and Air Flow Control Based on CFD (CFD 기반의 순환 팬 배치 및 유속조절에 의한 식물공장의 에너지 효율 향상)

  • Moon, Seung-Mi;Kwon, Sook-Youn;Lim, Jae-Hyun
    • Journal of Internet Computing and Services
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    • v.16 no.1
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    • pp.57-65
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    • 2015
  • As information technology fusion is accelerated, the researches to improve the quality and productivity of crops inside a plant factory actively progress. Advanced growth environment management technology that can provide thermal environment and air flow suited to the growth of crops and considering the characteristics inside a facility is necessary to maximize productivity inside a plant factory. Currently running plant factories are designed to rely on experience or personal judgment; hence, design and operation technology specific to plant factories are not established, inherently producing problems such as uneven crop production due to the deviation of temperature and air flow and additional increases in energy consumption after prolonged cultivation. The optimization process has to be set up in advance for the arrangement of air flow devices and operation technology using computational fluid dynamics (CFD) during the design stage of a facility for plant factories to resolve the problems. In this study, the optimum arrangement and air flow of air circulation fans were investigated to save energy while minimizing temperature deviation at each point inside a plant factory using CFD. The condition for simulation was categorized into a total of 12 types according to installation location, quantity, and air flow changes in air circulation fans. Also, the variables of boundary conditions for simulation were set in the same level. The analysis results for each case showed that an average temperature of 296.33K matching with a set temperature and average air flow velocity of 0.51m/s suiting plant growth were well-maintained under Case 4 condition wherein two sets of air circulation fans were installed at the upper part of plant cultivation beds. Further, control of air circulation fan set under Case D yielded the most excellent results from Case D-3 conditions wherein air velocity at the outlet was adjusted to 2.9m/s.

Prevention of Discoloration and Storage Stability in Canned Ark Shell (새고막 통조림 변색방지 및 저장중 품질변화)

  • 배태진;김귀식
    • The Korean Journal of Food And Nutrition
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    • v.11 no.2
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    • pp.243-248
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    • 1998
  • Ark shell was known as shellfish that had hemoglobin as blood pigment and the action of mecidine, was consumed the great part of it as raw material, though it was produced about 13,000 M/T per year. Ark shell was processed the infinitesimal quantity as conned product, bout canned ark shell had problem that occurrenced discoloration after heat treatment during processing and storage. This discoloration mechanism during processing and storage was not cleared. This study was carried out to understand characteristics of the hemoglobin as blood pigment and carotenoid as meat pigment in ark shell and management of proper processing conditions for prevention of oxidation and discoloration by thermal treatment. When treated by digestion of 0.1% BHA, 0.1% Tenox-II, 0.5% Na2EDTA, 0.05% NDGA and 3% salt soln., 0.1% BHA solution was most suitable for stability of carotenoid that the retention ratio of carotenoids were 63.1% after heating to 116$^{\circ}C$ for 120 minutes. In preparation of canned ark shell and storage at 37$\pm$1$^{\circ}C$ for 60 days, the chemical composition, pH and salinity ere stable. And contents of total carotenoid were decreased slightly from 0.83mg% to 0.727mg%. The viable cell count were 6.92$\times$103 cfu/ml at raw ark shell, after processed and storage were not detected. The predominant amino acids in the raw ark shell were glutamic acid(19.7%), arginine(16.0%), glycine(12.6%), alanine(12.2%) and aspartic acid(7.6%). When 60 days stored, the contents of amino acid were stable. And the predominant nuclotide and their related compounds in the raw ark shell were hypoxanthine(2.14$\mu$mol/g), IMP(1.94$\mu$mol/g) and ATP(0.87$\mu$mol/g), and storage at 37$\pm$1$^{\circ}C$ for 60 days, the quantity order were same as raw material.

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Marine Environment and the Distribution of Phytoplankton Community in the Southwestern Sea of Korea in Summer 2005 (여름 한국서남해역의 해양환경과 식물플랑크톤 군집분포)

  • Yoon, Yang-Ho;Park, Jong-Sick;Park, Yeong-Gyun;Noh, Il-Hyeon
    • Journal of the Korean Society for Marine Environment & Energy
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    • v.10 no.3
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    • pp.155-166
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    • 2007
  • We carried out a study on the marine environment, such as water temperature, salinity, density and chlorophyll ${\alpha}$, and the distribution of phytoplankton community, such as species composition, dominant species and standing crops in the Southwestern Sea of Korea during early summer 2005. According to the analysis of a T-S diagram, three characteristics of water masses were identified. We classified them into Korean and Chinese coastal water, the cold water and the oceanic water. The first was characterized by high temperature and low salinity in the surface layer influenced by river run offs from China and Korea, the second by low temperature and salinity in bottom layer originated from the bottom cold water of the Yellow Sea, and the third by high temperature and high salinity influenced by Tsushima warm currents. The internal discontinuous layer among them was formed at the intermediate depth (about $10{\sim}20\;m$ layer). And the thermal front appeared in the central parts between Tsushima warm currents and Korean and Chinese coastal waters in the Southwestern Sea of Korea. Chlorophyll ${\alpha}$ concentration was high values in the Korean coastal waters and sub-surface layers. But It was low concentration in the Tsushima warm currents regions. The $Chl-{\alpha}$ maximum layers appeared in the sub-surface layer below thermocline. The phytoplankton community in the surface and stratified layers was composed of a total of 40 species belonging to 26 genera. Dominant species were 2 diatoms, Paralia sulcata, Skeletonema costatum and a dinoflagellate, Scripsiella trochoidea. Standing crops of phytoplankton in the surface layer were very low with cell density ranging from 5 to $3.8\;{\times}\;10^3\;cells/L$. Diatoms were controlled by the expanded low salinity coastal waters of the low salinity with high concentrations of nutrients. Otherwise phytoflagellates were dominant in the high temperature regions where the Tsushima warm currents approches the Southwestern Sea of Korea in early summer.

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Estimation of Soil Cooling Load in the Root Zone of Greenhouses (온실내 근권부의 지중냉각부하 추정)

  • 남상운
    • Journal of Bio-Environment Control
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    • v.11 no.4
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    • pp.151-156
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    • 2002
  • Root zone cooling, such as soil or nutrient solution cooling, is less expensive than air cooling in the whole greenhouse and is effective in promoting root activity, improving water absorption rate, decreasing plant temperature, and reducing high temperature stress. The heat transfer of a soil cooling system in a plastic greenhouse was analyzed to estimate cooling loads. The thermal conductivity of soil, calculated by measured heat fluxes in the soil, showed the positive correlation with the soil water content. It ranged from 0.83 to 0.96 W.m$^{[-10]}$ .$^{\circ}C$$^{[-10]}$ at 19 to 36% of soil water contents. As the indoor solar radiation increased, the temperature difference between soil surface and indoor air linearly increased. At 300 to 800 W.m$^{-2}$ of indoor solar radiations, the soil surface temperature rose from 3.5 to 7.$0^{\circ}C$ in bare ground and 1.0 to 2.5$^{\circ}C$ under the canopy. Cooling loads in the root zone soil were estimated with solar radiation, soil water content, and temperature difference between air and soil. At 300 to 600 W.m$^{-2}$ of indoor solar radiations and 20 to 40% of soil water contents,46 to 59 W.m$^{-2}$ of soil cooling loads are required to maintain the temperature difference of 1$0^{\circ}C$ between indoor air and root zone soil.

The Effect of Cold Shock on Function and Morphology of Dog Epididymal Spermatozoa (개에서 cold shock이 정소상체유래의 정자의 기능과 형태에 미치는 영향)

  • Yu Il-jeoung
    • Journal of Veterinary Clinics
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    • v.21 no.4
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    • pp.329-335
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    • 2004
  • Dog spermatozoa were recovered from the caudae epididymides of 23 domestic dogs which were 11 pure breed and 12 mix-breed dogs ranging in age from 0.6 to 3 years. The experimental designs were as follows: 1) the effect of chilling to 0. 10 or 37$^{\circ}C$. 2) the kinetics of chilling injury at 0 or 4$^{\circ}C$, and 3) the effect of sugars at $0^{\circ}C$. Viable spermatozoa were recovered by percoll gradient separation and adjusted to 5${\times}$10$^{7}$ spermatozoa/ml. In experiment 1, spermatozoa were diluted with 0.33 M glucose supplemented with 3% BSA (G-BSA) at 1:2 dilution. Spermatozoa were loaded into straws and exposed at 0, 10 or 37$^{\circ}C$ for 30 min. In experiment 2, spermatozoa were prepared as the experiment 1 and exposed for 0.5, 5, 15, or 30 min at 0 or 4$^{\circ}C$. In experiment 3, spermatozoa were diluted with different sugars (0.33 M galactose, glucose, fructose, mannitol, lactose, sucrose, raffinose) and cooled to $0^{\circ}C$ for 30 min. Sperm membrane integrity, motility and acrosome integrity were assayed after rewarming at 37$^{\circ}C$ for 5 min. Sperm motility and membrane integrity abruptly decreased with decreasing temperature but acrosome integrity gradually decreased (P<0.05). Sperm motility was more sensitive to cold shock than membrane integrity and acrosome integrity. Spermatozoa cooled to $0^{\circ}C$ were more damaged than those at 4$^{\circ}C$. Sperm motility was not different among exposed times at both. 0 and 4$^{\circ}C$. However, membrane integrity of spermatozoa exposed for 30 min at both 0 and 4$^{\circ}C$ was significantly lower (P<0.05). Spermatozoa diluted in 0.33 M fructose or galactose showed lower motility and higher morphological abnormality with coiled tail at $0^{\circ}C$. These sperm characteristics were strongly related. These results indicate that dog epididymal spermatozoa are relatively sensitive to rapid cooling and higher morphological abnormality at $0^{\circ}C$ was shown in spermatozoa diluted in fructose and galactose.

Petrological Study of Cretaceous Granitic Recks in the Waryongsan Area, Southwestern Gyeongsang Basin: Compositional Change of Granitic Rocks by Magma Mingling (경상분지 남서부 와룡산 일대에 분포하는 백악기 화강암류에 관한 암석학적 연구: 마그마 불균질 혼합에 의한 화강암류의 조성변화)

  • Kim Kun-Ki;Kim Jong-Sun;Jwa Yong-Joo
    • The Journal of the Petrological Society of Korea
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    • v.14 no.1
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    • pp.12-23
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    • 2005
  • Cretaceous granitic rocks in the Waryongsan area occur as a stock and show compositional changes with altitude. They include mafic microgranular enclaves (MME) with various sizes and types. The MMEs present clear evidence of magma mingling such as supercooling zone, mantling texture and back veining. The granitic rocks are divided into porphyritic granite, porphyritic granodiorite and fined-grained granite by their petrographic characteristics and modal compositions. The MMEs are discriminated to quartzdioritie, quartzmonzodiorite and tonalite. They have varying areal proportions in each granitic rock-type: 10∼l5% in the porphyritic granite, about 50% in the porphyritic granodiorite, and about 20% in the fined-grained granite. SiO₂ contents shows compositional change of 61.2∼72.0wt.%. Mean SiO₂ contents have 61.7wt.% in the porphyritic granodiorite, 68.6wt.% in the porphyritic granite. and 71.9wt.% in the fined-grained granite, respectively. Major oxide contents of the granitic rocks linearly vary with SiO₂ contents from the porphyiritic granodiorite to the fine-grained granite on Harker diagrams. Linear compositional variations seem to have been caused by differential degrees of mingling between mafic magma and host granite. Where larger amount of mafic magma was injected into the host granitic magma, the two magmas reached to thermal equilibrium more quickly and eventually chemical mixing occurred to produce the composition of the porphyritic granodiorite. On the other hand. less amount of injected mafic magma would have been responsible for mechanical mixing to produce the compositions of the porphyritic granite and the fined-grained granite. Therefore, it is considered that the granitic rocks in the Waryongsan area experienced magmas mingling resulting from the injection of more mafic magma into differentiating granitic magma, and that the compositional changes of the granitic rocks were ascribed to the degree of mingling between the two magmas.

Separation of Hydrogen-Nitrogen Gases by PDMS-SiO2·B2O3 Composite Membranes (PDMS-SiO2·B2O3 복합막에 의한 수소-질소 기체 분리)

  • Lee, Suk Ho;Kang, Tae Beom
    • Membrane Journal
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    • v.25 no.2
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    • pp.115-122
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    • 2015
  • $SiO_2{\cdot}B_2O_3$ was prepared by trimethylborate (TMB)/tetraethylorthosilicate (TEOS) mole ratio 0.01 at $800^{\circ}C$. PDMS[poly(dimethysiloxane)]-$SiO_2{\cdot}B_2O_3$ composite membranes were prepared by adding porous $SiO_2{\cdot}B_2O_3$ to PDMS. To investigate the characteristics of PDMS-$SiO_2{\cdot}B_2O_3$ composite membrane, we observed PDMS-$SiO_2{\cdot}B_2O_3$ composite membrane using TG-DTA, FT-IR, BET, X-ray, and SEM. PDMS-$SiO_2{\cdot}B_2O_3$ composite membrane was studied on the permeabilities of $H_2$ and $N_2$ and the selectivity ($H_2/N_2$). Following the results of TG-DTA, BET, X-ray, FT-IR, $SiO_2{\cdot}B_2O_3$ was the amorphous porous $SiO_2{\cdot}B_2O_3$ with $247.6868m^2/g$ surface area and $37.7821{\AA}$ the mean of pore diameter. According to the TGA measurements, the thermal stability of PDMS-$SiO_2{\cdot}B_2O_3$ composite membrane was enhanced by inserting $SiO_2{\cdot}B_2O_3$. SEM observation showed that the size of dispersed $SiO_2{\cdot}B_2O_3$ in the PDMS-$SiO_2{\cdot}B_2O_3$ composite membrane was about $1{\mu}m$. The increasing of $SiO_2{\cdot}B_2O_3$ content in PDMS leaded the following results in the gas permeation experiment: the permeability of both $H_2$ and $N_2$ was increased, and the permeability of $H_2$ was higher than $N_2$, but the selectivity($H_2/N_2$) was decreased.

Materialistic Characterization of Waste Egg Shell and Fundamental Studies for Its Application to Wastewater Treatment (폐달걀껍질의 활용을 위한 물성조사 및 폐수처리 응용에의 기초연구)

  • Kuh, Sung-Eun;Kim, Dong-Su
    • Journal of Korean Society of Environmental Engineers
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    • v.22 no.4
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    • pp.733-742
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    • 2000
  • Fundamental materialistic characterization and adsorption/neutralization behavior of waste egg shell for heavy metal ion have been studied for its application to wastewater treatment. To investigate the structural change and thermal decomposition characteristics of egg shell. X-ray diffraction and FT-IR analysis were conducted for egg shell treated at $105^{\circ}C$ and $700^{\circ}C$, respectively. For the result of FT-IR analysis, the sample treated at $700^{\circ}C$ showed a reduced C-O absorption band compared with that of egg shell treated at $105^{\circ}C$, which may be due to the $CO_2$ release. Unlike to the result of FT-IR analysis, the XRD patterns of egg shell were almost similar for the cases of $105^{\circ}C$ and $700^{\circ}C$ treatment. however, characteristic diffraction pattern of CaO was observed for $850^{\circ}C$ treatment, at which $CaCO_3$ is known to be completely converted to CaO. TGA/DTA analysis showed a slow decline in weight loss up to $600^{\circ}C$ and, for $600{\sim}800^{\circ}C$ range, the weight loss became drastic by reason of $CO_2$ discharge, which was accompanied by an appearance of major endothermic peak. The ratio of practical breakthrough time to ideal one, total transfer unit, and mass transfer coefficient were observed to be increased as the adsorption was progressed in a multiple-column fixed-bed reactor using egg shell as an adsorbent, which signified the distribution effect of mass transfer for continuous adsorption reaction. The neutralization effect of egg shell for several types of acidic wastewater made of different mineral acids was not much different from each other except for the case of $H_2SO_4$, for which the neutralization reaction was thought to be retarded by the formation of gypsum.

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