Texture control and optical properties of ZnO films by inductively coupled assited chemical vapor deposition (유도결합 화학 기상 증착법(ICP-CVD)를 이용한 ZnO 박막의 texture조절 및 광학적 특성 평가)
-
- Proceedings of the Korean Institute of Surface Engineering Conference
- /
- 2009.05a
- /
- pp.204-204
- /
- 2009