• Title/Summary/Keyword: temperature cycles

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Clean Room Structure, Air Conditioning and Contamination Control Systems in the Semiconductor Fabrication Process (반도체 웨이퍼 제조공정 클린룸 구조, 공기조화 및 오염제어시스템)

  • Choi, Kwang-Min;Lee, Ji-Eun;Cho, Kwi-Young;Kim, Kwan-Sick;Cho, Soo-Hun
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.25 no.2
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    • pp.202-210
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    • 2015
  • Objectives: The purpose of this study was to examine clean room(C/R) structure, air conditioning and contamination control systems and to provide basic information for identifying a correlation between the semiconductor work environment and workers' disease. Methods: This study was conducted at 200 mm and 300 mm semiconductor wafer fabrication facilities. The C/R structure and air conditioning method were investigated using basic engineering data from documentation for C/R construction. Furthermore, contamination parameters such as airborne particles, temperature, humidity, acids, ammonia, organic compounds, and vibration in the C/R were based on the International Technology Roadmap for Semiconductors(ITRS). The properties of contamination control systems and the current status of monitoring of various contaminants in the C/R were investigated. Results: 200 mm and 300 mm wafer fabrication facilities were divided into fab(C/R) and sub fab(Plenum), and fab, clean sub fab and facility sub fab, respectively. Fresh air(FA) is supplied in the plenum or clean sub fab by the outdoor air handling unit system which purifies outdoor air. FA supply or contaminated indoor air ventilation rates in the 200 mm and 300 mm wafer fabrication facilities are approximately 10-25%. Furthermore, semiconductor clean rooms strictly controlled airborne particles(${\leq}1,000{\sharp}/ft^3$), temperature($23{\pm}0.5^{\circ}C$), humidity($45{\pm}5%$), air velocity(0.4 m/s), air change(60-80 cycles/hr), vibration(${\leq}1cm/s^2$), and differential pressure(atmospheric pressure$+1.0-2.5mmH_2O$) through air handling and contamination control systems. In addition, acids, alkali and ozone are managed at less than internal criteria by chemical filters. Conclusions: Semiconductor clean rooms can be a pleasant environment for workers as well as semiconductor devices. However, based on the precautionary principle, it may be necessary to continuously improve semiconductor processes and the work environment.

Study on the Physical Characteristics of Water Supply Steel Pipe according to Temperature Change (수도용 강관의 온도변화에 따른 물리적 특성에 대한 연구)

  • Kim, Woo-young;Jang, Am
    • Journal of Korean Society of Environmental Engineers
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    • v.39 no.12
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    • pp.733-740
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    • 2017
  • 'The facilities standards of water supply' issued by the Ministry of Environment in 2004 indicates that expansion joints cannot be used in welding water supply steel pipes. However, their reason is not clear and it is difficult to confirm the stability of the steel pipe for a water supply pipeline. The purpose of this study is to determine whether or not an expansion joint is necessary to improve the stability of water supply in steel pipe through a displacement analysis of the pipework. The test results are as follows. Firstly, it was found that expansion and contraction of the water supply steel pipe (D 2,400 mm) occur repeatedly in 4 cycles per year, and the maximum expansion and contraction amount of the pipe is 13.03 mm in 1.24 km pipelines. Secondly, the thermal stress caused by expansion and contraction of the steel pipe is $13.7{\sim}36.1kgf/cm^2$ according to the burial depth (0~4 m). The main comparison factors to determine the stability of the steel pipe (STWW 400) were the allowable tensile strength and the fatigue limit, which were computed to be $4,100kgf/cm^2$ and $1,840kgf/cm^2$, respectively. Finally, the thermal stress of the steel pipe is very small compared to the allowable tensile stress and fatigue stress. Therefore, thermal stress does not affect the stability of the steel pipe, although the expansion and contraction of the steel pipe occurs by temperature changes. In conclusion, the study demonstrated that expansion joints are not required in water supply steel pipelines.

Preparation and Properties of Quasi-Carbon Fibers from Stabilized PAN Fibers (안정화 PAN 섬유로부터 준탄소섬유의 제조 및 물성)

  • Cho, Dong-Hwan;Choi, Yu-Song;Park, Jong-Kyoo
    • Polymer(Korea)
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    • v.25 no.4
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    • pp.575-586
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    • 2001
  • Stabilized polyacrylonitrile (PAN) fibers can be transformed into quasi-carbon fibers with different properties depending on heat-treatment processing parameters at lower temperatures than temperature for the fabrication of carbon fibers. It has been investigated from the preliminary work that appropriate quasi-carbonization processes at about 1100$^{\circ}C$ strongly influence various properties of quasi-carbon fiber/polymer composite as well as quasi-carbon fiber itself. The objective of the present work is to prepare quasi-carbon fibers from stabilized PAN fibers using various quasi-carbonization cycles and to examine their properties. Two temperature regions, up to 800$^{\circ}C$ and above 1000$^{\circ}C$, were used for quasi-carbonization processes. The chemical composition, physical properties, thermal stability, microstructure, mechanical properties and electrical resistivity of the quasi-carbon fibers prepared with different final heat-treatment temperatures, heating rates, holding times, heating steps, and purging gas purity were extensively examined. The results were also compared with those from stabilized PAN fiber and commercial PAN-based carbon fiber. The present study showed that a variety of properties of quasi-carbon fibers significantly depended on several quasi-carbonization process parameters.

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Ferroelectric Properties of Pb[(Zr,Sn)Ti]N$bO_3$ Thin Films by Annealing (열처리에 따른 Pb[(Zr,Sn)Ti]N$bO_3$ 박막의 강유전 특성)

  • Choe, U-Chang;Choe, Hyeok-Hwan;Lee, Myeong-Gyo;Gwon, Tae-Ha
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.38 no.7
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    • pp.473-478
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    • 2001
  • Ferroelectric P $b_{0.99}$[(Z $r_{0}$ 6S $n_{0.4}$)/0.9/ $Ti_{0.1}$]0.98/N $b_{0.02}$ $O_3$(PNZST) thin films were deposited by a RF magnetron sputtering on L $a_{0.5}$S $r_{0.5}$Co $O_3$(LSCO)/Pt/Ti/ $SiO_2$/Si substrate using a PNZST target with excess PbO of 10 mole%. The crystallinity and electrical properties of the thin films annealed at various temperature and time were investigated. The thin films deposited at the substrate temperature of 500 $^{\circ}C$ and the power of 80 W were crystallized to a perovskite phase after rapid thermal annealing(RTA). The thin films annealed at 650 $^{\circ}C$ for 10 seconds in air exhibited the good crystal structures. The remanent polarization and coercive field of the PNZST capacitor were about 20 $\mu$C/$\textrm{cm}^2$ and 50 kV/cm, respectively. The reduction of the polarization after 2.2$\times$10$^{9}$ switching cycles was less than 10 %..10 %......

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Basic performance analysis of ocean thermal energy conversion using the refrigerant mixture R32/R152a (R32/R152a 혼합냉매를 적용한 해양온도차발전의 기초성능해석)

  • Cha, Sang Won;Lee, Ho Saeng;Moon, Deok Soo;Kim, Hyeon Ju
    • Journal of Advanced Marine Engineering and Technology
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    • v.38 no.4
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    • pp.502-507
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    • 2014
  • In this paper, performance characteristics of cycles were studied when mixed working fluid was used for ocean thermal energy conversion (OTEC). Among the various mixed refrigerants for industrial heat-pump, R32/R152a used in ocean thermal energy conversion system. For simulations, R32/R152a were used in existing closed cycle and Kalina cycle which is used only ammonia and water as mixed refrigerant. Temperature of the warm heat source was 26 and 29 celsius degree, temperature of the cold heat source was 5 celsius degree. In results of simulation, Gross power of the closed cycle on R32 was 22kW, and efficiency of the cycle was 2.02%. When the mixed refrigerant of R32/R152a, in the ratio of 90 to 10, gross power of the closed cycle was 29.93kW, and efficiency of the cycle was 2.78%. Gross power and cycle efficiency of R32/R152a increased by 36% and 37% than those of existing single refrigerant. Additionally, the same simulations were conducted in Kalina cycle with the same various composition ratio of mixed refrigerant.

Electrochemical Characteristics of Sn Added Li4Ti5O12 as an Anode Material (Sn이 첨가된 Li4Ti5O12 음극활물질의 전기화학적 특성)

  • Jeong, Choong-Hoon;Kim, Sun-Ah;Cho, Byung-Won;Na, Byung-Ki
    • Journal of the Korean Electrochemical Society
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    • v.14 no.1
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    • pp.16-21
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    • 2011
  • $Li_4Sn_xTi_{5-x}O_{12}$ was manufactured by high energy ball milling (HEBM) and used as an anode material for lithium ion battery. Various amount of $SnO_2$was added to $Li_4Ti_5O_{12}$ and heated at different temperatures. The purpose of this research was to see the effect of $SnO_2$ addition into $Li_4Ti_5O_{12}$. Manufactured samples were analyzed by TGA, XRD, SEM, PSA. Battery cycler was used to test the charge/discharge properties of active materials. Heat treatment temperature of $800^{\circ}C$ was needed to make a stable structure of $Li_4Sn_xTi_{5-x}O_{12}$ and the particle size distribution was $0.2{\sim}0.6\;{\mu}m$. Charge/discharge process was repeated for 50 cycles at room temperature. The initial capacity was 168mAh/g and the voltage plateau was observed at 1.55V(Li/$Li^+$).

Use of Accelerated Solvent Extraction Method for Determination of Residual Pesticides in Agricultural Products (농산물의 잔류농약분석을 위한 가속용매추출 (Accelerated Solvent Extraction) 방법의 이용)

  • Lee, Sung-Woo;Seo, Hye-Young;Han, Byung-Jae;Jeong, Yang-Mo;Kim, Jun-Hyoung;No, Ki-Mi;Kim, Kyong-Su
    • Applied Biological Chemistry
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    • v.47 no.2
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    • pp.228-237
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    • 2004
  • ASE (accelerated solvent extraction) was used to develop an analytical method for reducing the sample preparation time in pesticide residues analyses of agricultural produce. The conditions of ASE were as follows: preheat 1 min, heat 5 min, static 1 min, solvent flush% 60 vol., nitrogen purge 60 sec, 4 cycles, 1,500 psi pressure, and $100^{\circ}C$ temperature. When n-hexane:acetone (4 : l, v/v) was used as, an extraction solvent, the extraction and purification efficiency of ASE did not show the considerable difference compared with solvent extraction, and the reduction of extraction solvent did not affect the performance of extraction. It was proved that ASE method can reduce, sample preparation time as the extraction and purification steps were combined, and the extraction solvent was significantly reduced.

Poloxamer 407 Hydrogels for Intravesical Instillation to Mouse Bladder: Gel-Forming Capacity and Retention Performance

  • Kim, Sang Hyun;Kim, Sung Rae;Yoon, Ho Yub;Chang, In Ho;Whang, Young Mi;Cho, Min Ji;Kim, Myeong Joo;Kim, Soo Yeon;Lee, Sang Jin;Choi, Young Wook
    • The Korean Journal of Urological Oncology
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    • 제15권3호
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    • pp.178-186
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    • 2017
  • Purpose: Poloxamer 407 (P407) thermo-sensitive hydrogel formulations were developed to enhance the retention time in the urinary bladder after intravesical instillation. Materials and Methods: P407 hydrogels (P407Gels) containing 0.2 w/w% fluorescein isothiocyanate dextran (FD, MW 4 kDa) as a fluorescent probe were prepared by the cold method with different concentrations of the polymer (20, 25, and 30 w/w%). The gel-forming capacities were characterized in terms of gelation temperature (G-Temp), gelation time (G-Time), and gel duration (G-Dur). Homogenous dispersion of the probe throughout the hydrogel was observed by using fluorescence microscopy. The in vitro bladder simulation model was established to evaluate the retention and drug release properties. P407Gels in the solution state were administered to nude mice via urinary instillation, and the in vivo retention behavior of P407Gels was visualized by using an in vivo imaging system (IVIS). Results: P407Gels showed a thermo-reversible phase transition at $4^{\circ}C$ (refrigerated; sol) and $37^{\circ}C$ (body temperature; gel). The G-Temp, G-Time, and G-Dur of FD-free P407Gels were approximately $10^{\circ}C-20^{\circ}C$, 12-30 seconds, and 12-35 hours, respectively, and were not altered by the addition of FD. Fluorescence imaging showed that FD was spread homogenously in the gelled P407 solution. In a bladder simulation model, even after repeated periodic filling-emptying cycles, the hydrogel formulation displayed excellent retention with continuous release of the probe over 8 hours. The FD release from P407Gels and the erosion of the gel, both of which followed zero-order kinetics, had a linear relationship ($r^2=0.988$). IVIS demonstrated that the intravesical retention time of P407Gels was over 4 hours, which was longer than that of the FD solution (<1 hour), even though periodic urination occurred in the mice. Conclusions: FD release from P407Gels was erosion-controlled. P407Gels represent a promising system to enhance intravesical retention with extended drug delivery.

Infrared Spectroscopic Evidences for the Superconductivity of $La_2CuO_4$-related Compounds: A Superconductivity Probe

  • Park, Jeong Cheol;Jo, Seon Woog;Jeong, Jong Hak;Jeong, Gi Ho
    • Bulletin of the Korean Chemical Society
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    • v.21 no.10
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    • pp.1041-1043
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    • 2000
  • We present the effects of temperature (between 10 K and 298 K) and of hole concentration on the frequency and intensity of characteristic phonons in polycrystalline $La_2CuO_4-related$ compounds using FT-IR spectros-copy. The influences of the concentration of carrier doped on the phonon modes are prominent in the IR spectra of $La_2CuO_4-related$ compounds. For $La_2-xSrxCuO_4({\chi}=$ 0.00, 0.03, 0.07, 0.10, and 0.15) and electrochemically (or chemically) oxidized $La_2CuO_4$, the intensities of the transverse oxygen mode around 680cm $-^1$ which cor-responds mainly to Cu-O(1) stretching vibration in the basal plane of CuO6 octahedron, are decreased and dis-appeared depending on the Sr-substitution rate and the amount of excess oxygen, while the longitudinal oxygen mode around 510 cm $-^1$ corresponding to the Cu-O(2) stretching in the basal plane of CuO6 octahedron are near-ly invariable. In particular, after two cycles of cooling-heating between 10 K and 298 K for these sample, the phonons around 680 cm $-^1$ are blue shif 13-15 cm $-^1$, while the phonons around 510 cm $-^1$ are nearly constant. The introduction of the charge carrier by doping would give rise to the small contraction of CuO6 oc-tahedron as Cu $^3+$ requires a smaller site than Cu $^2+$, which results in the shortening of the Cu-O(1) bond length and Cu-O(2) bond length with the increased La-O(2) bond length. These results in the frequency shift of the characteristic phonons. The IR spectra of $La_2Li0.5Cu0.5O_4$ which exhibits an insulator behavior despite the $Cu^3+$ of nearly 100%, corroborate our IR interpretations. The mode around 710 cm $-^1$ corresponding to Cu-O(1) stretching vibration is still strongly remained even at low temperature (10 K). Thus, we conclude that the con-duction electrons formed within $CuO_2$ planes of $La_2CuO_4-related$ superconductors screen more effectively the transverse oxygen breathing mode around 680 $cm-^1$ depending on the concentration of the doped charge carrier in $La_2CuO_4-related$ compounds, which might use as a superconductivity probe.

Evaluation on the Additional CO2 by Mobile Air Conditioning Systems of Korean Light-duty Vehicles (국내 소형자동차의 에어컨 가동에 따른 CO2 배출량 평가)

  • Park, Junhong;Lee, Jongtae;Kim, Sunmoon;Kim, Jeongsoo;Kang, Gunwoo
    • Journal of Climate Change Research
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    • v.3 no.4
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    • pp.259-270
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    • 2012
  • Mobile air conditioning(MAC) systems of light-duty vehicles consume the most energy among auxiliary parts. Vehicle $CO_2$ reduction policies in Korea, US EPA and EU include the strategies to reduce additional $CO_2$ by MAC operation with providing incentive for the high-efficient MAC technologies. It is under development how to estimate MAC $CO_2$ and to differentiate advanced or high-efficient MAC system in US EPA and EU. The additional energy by MAC operation would beaffected by not only driving patterns but also environmental conditions such as temperature and humidity. In this study, we estimated MAC $CO_2$ of Korean light-duty vehicles with various driving cycles and environmental conditions. Test results were corrected to reference conditions for varied temperature and humidity during tests to get the comparable data for test vehicles. The test results showed that high-efficient MAC technologies have potential to reduce MAC $CO_2$ approximately by 50%. Considering the rate of MAC $CO_2$ to vehicle $CO_2$, it is expected that the introduction of high-efficient MAC technologies would considerably reduce vehicle $CO_2$ emission in MAC operation.