• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.464-468
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• 1996

To evaluate the surface integrity of machined products such as die, the surface roughness measurement is being much used. Especially, for machining automation and promotion of productivity, the surface roughness measurement technique changes from sepatate measuring system after machining process to the on-the-machine measurement. This study is on the surface roughness measurement by using scattered lights for on-the-machine measurement. This system is designed with a simple optical construction. And experiments are implemented with standard roughness specimen to obtain the parameters which are specularly reflected region parameter and diffusely reflected region parameter. To determine the surface roughness quickly, neural network is used. And this system gives the possibility to apply to the various production processes.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.803-807
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• 2000

This paper deals wi th the establishment of the method of non-contact surface roughness measurement by developed system. One of the most Important factor of determinating quality of a produced manufacture is surface roughness The tendency of manufacturing method is changing from small amount manufactures / high-volume production to large amount manufactures / low volume production, and the study of reducing time for surface roughness measurement has been actively investigated The non-contact surface roughness method by using laser which is different from contact method has been only used to the polished surface, so new surface roughness measurement method was adopted by virtue of Fraunhofer diffraction in the periodic surface for on-the-machine. in this paper, we establish the method of non-contact surface roughness measurement which can reduce measuring time in the periodic surface

• 제어로봇시스템학회:학술대회논문집
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• 1993.10b
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• pp.541-544
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• 1993

This paper attempts to propose new procedures to evaluate roughness of ground metallic surface in the range of 1-10.mu.m from data gained by an optical, in-process measurement of the surfaces. Studies are made to process the data of reflected lights pointed at the surface to be measured. Results obtained are compared with those of measurement by stylus roughness meter. Correlations between the two types of roughness measurement are well. The proposed method can be used as a sensor for a polishing robot.

• 대한공업교육학회지
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• v.34 no.2
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• pp.346-362
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• 2009

The purpose of this study was to develop the handy non-contact measurement device of the surface roughness by using the optical fiber sensor. The advantages of fiber optic sensors are high-speed responsibility, non-effect of the magnetic, convenience of the product and high precision. The measurement theory for surface roughness of optical fiber sensor is one to one correspondence between the reflected light intensity based on the surface roughness of the object and the measurement value of previously known for surface roughness. The reflected light intensity was determined using the distance to the surface from the sensor probe and the limit reflection angle based on the surface roughness. Therefore, in this study, the sensor probe was produced for determining the value of surface roughness only using the limit reflection angle based on the surface roughness with the fixed distance from the surface. A prototype measurement system was composed of a transmitting part, a receiving part and a signal processing circuit. The materials of standard measurement which was used in this experiment were SM45C, STS303 and Al60. According to the results of this study, approximation surface roughness formulas which was deduced from the correlation of between the standard surface roughness and the sensing output were verified that they were effect against the surface roughness measurement value of the option sample. And handy optical fiber surface roughness measurement device which was produced by an order was verified that it was effect for measuring of the precision surface roughness.

• Journal of the Korean Society for Precision Engineering
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• v.11 no.6
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• pp.168-178
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• 1994

This paper presents an optical surface roughness sensor developed for intermediate- process measurement on the machine. The light scattering method is adopted for the sensor, which is designed conpact and flexible enough to apply to 'on the machine' measurement of surface roughness. The developed sensor has special features such that it makes use, as the measurement parameter, of the ratio between fluxes of the incident light, and the specularly and partly diffusely reflected light, and that it can adjust the incident light angle. The experimental investigation reveals not only the sensor has good performance as a surface roughness sensor but the sensor is very robust so as to be useful in in-process measurement.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.681-686
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• 2000

Machining information such as machined form and surface roughness accuracy is an important factor for manufacturing precise parts. To this regard, OMM(On the Machine Measurement) has been issued for last several decades to alternate with CMM. In this research, measuring system consisting of a laser probe is developed for machined form and surface roughness measurement on the machine tool. The obtained machined form accuracy is compared with reference one defined in CAD model. The measured surface roughness data is compared with measured master surface beforehand. Furthermore, using the pre-defined volumetric error map approach compensates the geometric accuracy of the machine tool. The overall performance is compared with CMM, and verified the feasibility of the measurement system.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.7
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• pp.232-240
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• 2000

Machining information such as machined form and surface roughness accuracy is an important factor for manufacturing precise parts. To this regard, OMM(On the Machine Measurement) has been issued for last several decades to alternate with CMM. In this research, measuring system consisting of a laser probe is developed for machined form and surface roughness measurement on the machine tool. The obtained machined form accuracy is compared with reference one defined in CAD model. The measured surface roughness data is compared with measured master surface beforehand. Furthermore, using the pre-defined volumetric error map approach compensates the geometric accuracy of the machine tool. The overall performance is compared with CMM, and verified the feasibility of the measurement system.

• Tribology and Lubricants
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• v.40 no.2
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• pp.47-53
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• 2024

Surface topography plays a decisive role in determining the performance of several precision components. In particular, the surface roughness of semiconductor devices affects the precision of the circuit. In this regard, the surface topography of a given surface needs to be appropriately assessed. Typically, the average roughness is used as one of the main indicators of surface finish quality because it is influenced by both dynamic and static parameters. Owing to the increasing demand for such accurate and reliable surface measurement systems, studies are continuously being conducted to understand the parameters of surface roughness and measure the average roughness with high reliability. However, the differences in the measurement methods of surface roughness are not clearly understood. Hence, in this study, the surface roughness of the back of a silicon wafer was measured using both contact and noncontact methods. Subsequently, a comparative analysis was conducted according to various surface roughness parameters to identify the differences in surface roughness depending on the measurement method. When using a 3D laser confocal microscope, even smaller surface asperities can be measured compared with the use of a 3D profiler. The results are expected to improve the understanding of the surface roughness characteristics of precision components and be used as a useful guideline for selecting the measurement method for surface topography assessment.

• Tunnel and Underground Space
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• v.12 no.4
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• pp.268-276
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• 2002

In this study, a 3D coordinate measurement system equipped with a laser displacement meter for digitizing rock joint surface was established and the digitized data were used to calculate several roughness parameters. The parameters used in this study were micro avenge inclination $angle(i_{ave})$, average slope of joint $asperity(SL_{ ave})$, root mean square of $i-angle(i_{rms})$, standard deviation of height(SDH), standard deviation of $i-angle(SD_i)$, roughness profile $index(R_P)$, and fractal dimension(D). The relationships between the roughness parameters based on the digitzation of the surface profile were analyzed. Since the measured value varied according to the degree of reflection and the variation of colors at the measuring point, rock joint surface was painted in white to minimize the influence of the surface conditions. The comparison of the measured values and roughness parameters before and after painting revealed the better consequence from measurement on the painted surfaces. Also, effect of measuring interval was studied. As measured interval was increased, roughness parameters were exponentially decreased. The incremental sequence of degree of decrease was $SDH\; i_{ave},\; i_{rms},\; SD_i,\;and\; R_ p-1$. As a result of comparison of parameters from pin-type measurement system and laser type measurement system, all value of parameters were higher when laser-type measurement system was used, except SDH.

• Journal of the Korean Society of Safety
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• v.9 no.1
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• pp.19-27
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• 1994

A laser-based in-process measurement system for the evaluation of surface roughness In turning Is reported. The proposed measuring system makes it possible to detect the surface roughness not only circumferential path but also along the feed direction even during machining. Also, it permits the real-time measurement of surface roughness In dynamic condition.