• 한국입자에어로졸학회지
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• 제5권1호
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• pp.17-27
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• 2009

Particle deposition on a semiconductor wafer larger than 100 mm was studied experimentally and numerically. Particularly the electrostatic effect on particle deposition velocity was investigated. The experimental apparatus consisted of a particle generation system, a particle deposition chamber and a wafer surface scanner. Experimental data of particle deposition velocity were obtained for a semiconductor wafer of 200 mm diameter with the applied voltage of 5,000 V and PSL particles of the sizes between 83 and 495 nm. The experimental data of particle deposition velocity were compared with the present numerical results and the existing experimental data for a 100 mm wafer by Ye et al. (1991) and Opiolka et al. (1994). The present numerical method took into consideration the particle transport mechanisms of convection, Brownian diffusion, gravitational settling and electrostatic attraction in an Eulerian frame of reference. Based on the comparison of the present experimental and numerical results with the existing experimental results the present experimental method for a 200 mm semiconductor wafer was found to be able to present reasonable data.

• Journal of Advanced Marine Engineering and Technology
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• 제29권4호
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• pp.453-460
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• 2005

Experiments were conducted to investigate the effect of the surface roughness on the flat plate turbulent boundary layer. The square rods were installed at the leading edge to make surface roughness. The particle image velocimetry was used to measure the mean velocities and velocity fluctuation component. All measurements were made over a range of w/k=1. 2 5 and $Re_x=80.000{\sim}360,000$. Friction velocity was measured by using Clauser plot method. The level of turbulent intensities on roughness surface appears more strongly than that of turbulent intensities on flat plate. A correlation of boundary layer thickness in term of $Re_x$ and w/k are presented.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2006년도 하계학술발표대회 논문집
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• pp.779-785
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• 2006

Particle transport and deposition characteristics on semiconductor wafers inside the chamber were experimentally investigated via a particle generation & deposition system and a wafer surface scanner. Especially the relation between particle size($0.083{\sim}0.495{\mu}m$) and particle deposition velocity with ESA(Electrostatic Attraction) effect was studied. Spot deposition technique with the deposition system using nozzle type outlets of the chamber was newly conducted to derive particle deposition velocity and all experiment results were compared with the previous study and were in a good agreement as well.

• 대한기계학회논문집B
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• 제26권3호
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• pp.474-481
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• 2002

Fouling deposits due to surface-coated particles have been calculated using CFD techniques. The sticking probabilities of the surface-coated particles are also evaluated on the basis of an energy balance. The sticking probabilities of the deposit surface are also included in the prediction of the deposition occurring through the multiple impaction of particles with the deposit surface. The sticking probability of an impacting particle is expressed in terms of such parameters as particle viscosity, surface tension, impact velocity, impact angle and the thickness of the sticky layer on a particle. Particulate behavior around a tube in cross flow was studied using the Lagrangian approach. Three important parameters i.e. impact velocity, impact angle, and particulate concentration, were used in the prediction of deposition rate. The computational predictions were found to be in good agreement with the experimental data.

• 한국해양공학회지
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• 제25권4호
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• pp.23-27
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• 2011

This experimental study was performed to find rpms of the impeller and the surface flow accelerator to make a uniform velocity vertical distribution in the circular water channel. PIV technique was employed to measure the water velocity profiles into the water depth from the free surface. The number of instantaneous velocity profiles was decomposed into mean and turbulence velocity components, and the distribution of velocity fluctuation and turbulence intensity were computed for each experimental condition. From these results, the velocity uniformity was quantitatively determined to present the flow quality in the measuring section of the circular water channel. It has been shown that the proper operation of the surface flow accelerator would make the uniform velocity profiles and reduce the velocity fluctuation near the free surface.

• 대한기계학회논문집
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• 제18권1호
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• pp.175-183
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• 1994

To investigate thermophoretic effect on particle deposition, average deposition velocity toward a horizontal wafer surface in vertical airflow is measured keeping the wafer surface temperature different from the surrounding air temperature. In the present measurement, the temperature difference is maintained in the range from -10 to $4^{\circ}$ C Polystyrene latex (PSL) spheres of diameter between 0.3 and 0.8 .mu.m are used for the experiment. The number of particles deposited on a wafer surface is estimated from the measurements using a wafer surface scanner (PMS SAS-3600). Experimental data are compared with prediction model results.

• Korean Chemical Engineering Research
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• 제44권3호
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• pp.294-299
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• 2006

백-형상 필터의 투과율에 따른 필터 표면에서의 유동속도와 입자궤적을 수치해석 하였다. 필터의 투과율이 널리 사용되는 저급의 부직포 백필터의 투과율 이하의 조건에서는, 투과율에 따른 필터 표면에서의 유동속도와 입자궤적 분포의 변화가 아주 미미하였다. 필터의 바닥면 모서리와 출구 근처를 제외한 필터 표면에서 유선들과 반경 방향 유속들이 균일하게 분포하였다. 필터 표면으로의 입자궤적은 필터의 바닥면 모서리 근처에 더 조밀하게 분포하여 그 위치에 도달하는 입자의 수가 가장 많았고, 필터의 출구 쪽으로 향함에 따라 필터 표면에 위치하는 입자의 수는 점점 감소하는 추세를 보였다.

• 한국전산유체공학회지
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• 제16권2호
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• pp.66-74
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• 2011

The SCR catalyst in coal-fired power plant is eroded by the collision of fly ash on the catalyst surface. However the erosion of SCR catalyst by the collision of fly ash has not been fully studied, especially in terms of fluid dynamics. Hence, in the present study, we focus on the gas and solid flows inside the SCR catalyst duct and their consequent effect on the erosion characteristics. For this purpose, computational fluid dynamics is applied to investigate the two-phase flows and to evaluate the erosion rate for different flow and particle injection conditions. Also, the erosion rate and pressure drop of commonly used square shape are compared with equilateral triangle and hexagon shapes. The pressure drop of SCR catalyst is increased when SCR catalyst surface area per unit volume increases. The erosion rate of SCR catalyst is enhanced when the particle velocity, mass flow rate of particle, particle diameter and cell density of SCR catalyst are increased. From the results, the pressure drop and erosion rate at the catalyst surface can be minimized by reducing cell density of SCR catalyst to decrease particle velocity and number of particle impacts.

• 대한화장품학회지
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• 제19권1호
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• pp.85-107
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• 1993

화장품에 사용되는 미분체의 혼합특성을 알기 위하여 화장품용 미분체 혼합기인 ribbon mixer, powder mixer micropulverizer, fine impact mill에 미립자, 구상 및 판상의 형태를 가진 bulk powders를 혼합시간을 변화 시키면서 혼합하는 실험을 하였다. 혼합분체의 혼합정도를 평가하기 위하여 산화철을 tracer로 사용하였으며, 원료 및 혼합물의 particle size distribution, specific surface area, density 및 표면색상을 측정하였다. 미분체 혼합물의 혼합시간과 표면색상변화, 입도분포 및 비표면적과의 사이에 대수적 1차 상관관계가 성립되었고, 색상의 변화로부터 혼합정도를 평가할 수 있는 간단한 식을 도출하였다. 사용된 혼합기에 대해 혼합기구별 modelling과 혼합에 따른 입도 분포 및 비표면적의 변화로부터 혼합기 impellar tip에서의 linear velocity별 혼합기는 대류혼합, 전단혼합 및 확산혼합으로 분류되었다.

• 반도체디스플레이기술학회지
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• 제19권2호
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• pp.37-44
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• 2020

In improving laser cutting of optical plastic films for mass production of optoelectronics display units, it is important to understand particle contamination over optical film surface due to fume particle generation and dispersion. This numerical study investigates the effects of downward and upward air flow motions on fume particle dispersion around laser cut line. The simulations employ random particle sampling of up to one million fume particles by probabilistic distributions of particle size, ejection velocity and angle, and fume particle dispersion and surface landing are predicted using Basset-Boussinesq-Oseen model of low Reynolds number flows. The numerical results show that downward air flow scatters fume particles of a certain size range farther away from laser cut line and aggravate surface contamination. However, upward air flow pushes fume particles of this size range back toward laser cut line or sucks them up with rising air motion, thus significantly alleviating surface contamination.