• Journal of the Korean Institute of Telematics and Electronics
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• v.16 no.4
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• pp.36-46
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• 1979

Using N_ Ch silicon gate technology . the capacitors and transistors with various dimenssion were fabricated. Although the applied process was somewhat standard the conditions of ion implantation for the gate were varied by changing the implant energies from 30keV to 60keV for B and from 100 keV to 175keV for P . The doses of the implant also changed from 3 $\times$ 10 /$\textrm{cm}^2$ to 5 $\times$ 10 /$\textrm{cm}^2$ for B and from 4$\times$ 10 /$\textrm{cm}^2$ to 7 $\times$ 10 /$\textrm{cm}^2$ for P . The D. C. parameters such as threshold voltage. substrate doping level, the degree of inversion, capacitance. flat band voltage, depletion layer width, gate oxide thickless, surface states, motile charge density, electron mobility. leakage current were evaluated and also compared with the corresponing theoretical values and / or good numbers for application. The threshold voltages measured using curve tracer and C-V plot gave good agreements with the values calculated from SUPREM II which has been developed by Stanford University process group. The threshold vol tapes with back gate bias were used to calculate the change of the substrate doping level. The measured subthreshold slope enabled the prediction of the degree of inversion The D. C. testing results suggest the realized capacitors and transistors are suited for the memory applications.

• Applied Chemistry for Engineering
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• v.22 no.3
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• pp.277-285
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• 2011

Polysulfone (PSf) membranes were prepared via the phase inversion process. Polyvinylpyrrolidone (PVP) was added as a nonsolvent additive in the casting solution containing a mixture of PSf and n-methylpyrrolidone. The added PVP played a role of enhancing liquid-liquid phase separation of the casting solution, and significantly reduced the solution fluidity. When prepared via the diffusion-induced process using water as a precipitation nonsolvent, the solidified membranes revealed a typical asymmetric structure irrespective of the addition of PVP. With 5 wt% PVP content, the finger-like cavities were more developed in the membrane sublayer compared to that of the membranes prepared without PVP. In contrast, with more than 10 wt% of PVP, the formation of finger-like cavities was suppressed, and the thickness of polymer nodule layer was increased. The surface porosity was also increased with the PSf content in the casting solution. The water permeability curve as a function of PVP addition revealed the inflection point. The maximum water permeability for 12 wt% PSf membrane was obtained with 5 wt% PVP content, and that for 18 wt% PSf membrane with 15 wt% PVP.

• 한국지구물리탐사학회:학술대회논문집
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• 2000.09a
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• pp.132-146
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• 2000

Seismic refraction survey was performed for 10 lines along NE-SW and NW-SE directions above Nampoong gallery at Makyo-ri, Dogye, Samcheok, Kangwon-do. 48 geophones were laid in line with the interval of 1m, and a 5Kg hammer was used as a source at 5 points for each line. Data processing was done using reciprocal time method, GRM, and traveltime tomography which utilizes wavefront expansion method for forward process and STRT for inversion. The result shows that the first layer has its lower boundary between 3.49m and 8.88m. The P-wave velocity of the first and the second layer were estimated as 270${\~}$360m/s and 1550${\~}$1940m/s respectively. When the boundary of the first and second layer is smooth enough and the velocity difference is large enough, GRM has little advantage over reciprocal time method. The result of reciprocal method and traveltime tomography shows consistency. The northeast part of the boundary has syncline structure, which is similar to the topography above. This implies that the collapse of the cavities of Nampoong gallery result in the subsidence of the ground surface. The subsidence is in progress across the Youngdong railroad, therefore a proper reinforcement work is required.

• JSTS:Journal of Semiconductor Technology and Science
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• v.10 no.3
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• pp.203-212
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• 2010

In this paper, we present an analytical model for the first eigen energy level ($E_0$) of the carriers in the inversion layer in present generation MOSFETs, having ultrathin gate oxides and high substrate doping concentrations. Commonly used approaches to evaluate $E_0$ make either or both of the following two assumptions: one is that the barrier height at the oxide-semiconductor interface is infinite (with the consequence that the wave function at this interface is forced to zero), while the other is the triangular potential well approximation within the semiconductor (resulting in a constant electric field throughout the semiconductor, equal to the surface electric field). Obviously, both these assumptions are wrong, however, in order to correctly account for these two effects, one needs to solve Schrodinger and Poisson equations simultaneously, with the approach turning numerical and computationally intensive. In this work, we have derived a closed-form analytical expression for $E_0$, with due considerations for both the assumptions mentioned above. In order to account for the finite barrier height at the oxide-semiconductor interface, we have used the asymptotic approximations of the Airy function integrals to find the wave functions at the oxide and the semiconductor. Then, by applying the boundary condition at the oxide-semiconductor interface, we developed the model for $E_0$. With regard to the second assumption, we proposed the inclusion of a fitting parameter in the wellknown effective electric field model. The results matched very well with those obtained from Li's model. Another unique contribution of this work is to explicitly account for the finite oxide-semiconductor barrier height, which none of the reported works considered.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.106-106
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• 2000

반도체 소자가 미세화 됨에 따라 게이트 유전막으로 사용되는 SiO2의 박막화가 요구되나, boron penetration에 의한 Vt shift, 게이트 누설전류, 다결정 실리콘 게이트의 depletion effect 그리고 quantum mechanical effect 때문에 ~20 급에서 한계를 나타내고 있다. 이에 0.1$\mu\textrm{m}$이상의 design rule을 갖는 logic이나 memory 소자에서 요구되어지는 ~10 급 게이트 산화막은 SiO2(K=3.9)를 대신하여 고유전율을 갖는 재료의 채택이 필수 불가결하게 되었다. 고유전 박막 재료를 사용하면, 두께를 두껍게 해도 동일한 inversion 특성이 유지되고 carrier tunneling 이 덜하여 등가 산화막의 두께를 줄일 수 있다. 이러한 고유전박막 재료중 가장 활발히 연구되고 있는 재료는 Ta2O5, Al2O3, STO 그리고 BST 등이 있으나 Ta2O5, STO, BST 등은 실리콘 기판과 직접 반응을 한다는 문제를 가지고 있으며, Al2O3는 유전율이 낮의 재료가 최근 주목받고 있다. 본 실험에서는 ZrO2, HfO2 또는 그 silicates 등의 재료가 최근 주목 받고 있다. 본 실험에서는 ZrO2 박막의 증착조건에 따른 물리적, 전기적 특성 변화에 대하여 연구하였다. RCA 방식으로 세정한 P-type (100) 실리콘 기판위에 reactive DC sputtering 방법으로 압력 5mtorr, power 100~400W, 기판온도는 100-50$0^{\circ}C$로 변화시켜 ZrO2 박막을 증착한 후 산소와 아르곤 분위기에서 400-80$0^{\circ}C$, 10-120min으로 열처리하였다. 증착직후의 시편들과 열처리한 ZrO2 박막의 미세구조와 전기적 특성 변화를 관찰하였다. 우선 굴절율(RI)를 이용해 ZrO2 박막의 밀도를 예측하여 power와 기판온도에 따라 이론값 2.0-2.2 에 근접한 구조를 얻은 후 XRD, XPS, AFM, 그리고 TEM을 사용하여 ZrO2 박막의 chemical bonding, surface roughness 그리고 interfacial layer의 특성을 관찰하였다. 그리고 C-V, I-V measurement를 이용해 capacitance, 유전율, 누설전류 등의 전기적 특성을 관찰해 최적 조건을 설정하였다.

• Journal of Environmental Science International
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• v.17 no.9
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• pp.1053-1068
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• 2008

This study aims to produce fundamental database for Environment Impact Assessment by monitoring vertical structure of the atmosphere due to the mountain valley wind in spring season. For this, we observed surface and upper meteorological elements in Sangin-dong, Daegu using the rawinsonde and automatic weather system(AWS). In Sangin-dong, the weather condition was largely affected by mountains when compared to city center. The air temperature was low during the night time and day break, and similar to that of city center during the day time. Relative humidity also showed similar trend; high during the night time and day break and similar to that of city center during the day time. Solar radiation was higher than the city, and the daily maximum temperature was observed later than the city. The synoptic wind during the measurement period was west wind. But during the day time, the west wind was joined by the prevailing wind to become stronger than the night time. During the night time and daybreak, the impact of mountain wind lowered the overall temperature, showing strong geographical influence. The vertical structure of the atmosphere in Dalbi valley, Sangin-dong had a sharp change in air temperature, relative humidity, potential temperature and equivalent potential temperature when measured at the upper part of the mixing layer height. The mixing depth was formed at maximum 1896m above the ground, and in the night time, the inversion layer was formed by radiational cooling and cold mountain wind.

• Economic and Environmental Geology
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• v.31 no.2
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• pp.127-139
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• 1998

A new technique of simultaneous inversion for 3-D seismic velocity structure by using direct, reflected, and refracted waves is applied to the southeast part of the Korean Peninsula including Pohang Basin, Kyongsang Basin and Ryongnam Massif. Pg, Sg, PmP, SmS, Pn, and Sn arrival times of 44 events with 554 seismic rays are inverted for locations and crustal structure. $6{\times}6$ with $0.5^{\circ}$ and 8 layers (4 km each layer) model was inverted. 3-D seismic crustal velocity tomography including eight sections from surface to Moho, ten profiles along latitude and longitude are analyzed. The results are as follows: 1) the average velocity and thickness of sediment are 5.04 km/s and 3-4 km, and the velocity of basement is 6.11 km/s. The shape of velocity in shallower layer is agreement with Bouguer gravity anomaly (Cho et al., 1997). 2) the velocities fluctuate strongly in the upper crust. The velocity distribution of the lower crust under Conrad appears basically horizontal. 3) the average depth of Moho is 30.4 km, and velocity is 8.01 km/s. 4) from the velocity and depth of the sediment, the thickness, velocity and form of the upper crust, and the depth and form of Moho, we can find the obvious differences among Ryongnam Massif, Kyongsang Basin and Pohang Basin. 5) the deep faults (a Ulsan series faults) near Kyongju and Pohang areas can be found to be normal and/or thrust faults with detachment extended to the bottom of the upper crust.

• Korean Journal of Optics and Photonics
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• v.8 no.6
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• pp.445-449
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• 1997

The complex refractive indices of $Ge_2Se_2Te_5$ which show reversible phase change between the crystalline phase and an amorphous one depending upon the annealing process have been determined in the spectral range of 0.7-4.5 eV. The $Ge_2Se_2Te_5$ films were DC sputter deposited on the crystalline silicon substrate. The spectro-ellipsometry data of a thick film were analyzed following the modelling procedure where the quantum mechanical dispersion relation were used for the complex refractive indices of both the cryastalline phase $Ge_2Se_2Te_5$ and and amorphous phase $Ge_2Se_2Te_5$, respectively. On the other hand, with the surface micro-roughness layer whose effective thickness was determined from AFM analysis, the spectro-ellipsometry data were numerically inverted to yield the complex refractive index of $Ge_2Se_2Te_5$ at each wavelength. With these set of complex refractive indices, the reflectance spectra were calculated and those spectra obtained from the numerical inversion showed better agreement with the experimental reflection spectra for both the cryastalline phase and an amorphous phase. Finally, the thin $Ge_2Se_2Te_5$ film which has the optimum thickness of 26 nm as the medium for optical recording was also analyzed and the quantitative result of the film thickness and the surface microroughness has been reported.

• Journal of the Korean earth science society
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• v.30 no.2
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• pp.153-164
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• 2009

We examined the regional 1-D deep resistivity structure of the Korean Peninsula using MT data acquired at seven sites located in the Kyongsang Basin and Kyonggi Massif. At the sites located in the Kyongsang Basin, surrounding sea distorts observed MT response and hence this distortion, so called "sea effect", is corrected using an iterative tensor stripping method. The 1-D layered inversion results for the seven MT sites reveal 4 layered structure, which is composed of 1) near surface layer, 2) upper crust, 3) lower crust and upper mantle, and 4) asthenosphere from the surface downward. Conrad interface, which is a boundary between upper and lower crust, is distinctly identified beneath all the MT sites. Conrad interface depth is estimated to about be 17km in the Kyongsang Basin and about 12km in the Kyonggi Massif, while the upper crust of the Kyongsang Basin is about 5 times more resistive than that of the Kyonggi Massif. Finally, asthenosphere is inferred to exist below a depth of approximately 100km with a resistivity of 200-300 ohm-m.

• Journal of the Korean earth science society
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• v.21 no.3
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• pp.287-301
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• 2000

In order to investigate the factors and processes affecting the vertical distributions of ozone, we analyzed the ozone profile data measured using ozonesonde from 1995 to 1997 at Pohang city, Korea. In the course of our study, we analyzed temporal and spatial distribution characteristics of ozone at four different heights: surface (100m), troposphere (10km), lower stratosphere (20km), and middle stratosphere (30km). Despite its proximity to a local, but major, industrial complex known as Pohang Iron and Steel Co. (POSCO), the concentrations of surface ozone in the study area were comparable to those typically observed from rural and/or unpolluted area. In addition, the findings of relative enhancement of ozone at this height, especially between spring and summer may be accounted for by the prevalence of photochemical reactions during that period of year. The temporal distribution patterns for both 10 and 20km heights were quite compatible despite large differences in their altitudes with such consistency as spring maxima and summer minima. Explanations for these phenomena may be sought by the mixed effects of various processes including: ozone transport across two heights, photochemical reaction, the formation of inversion layer, and so on. However, the temporal distribution pattern for the middle stratosphere (30km) was rather comparable to that of the surface. We also evaluated total ozone concentration of the study area using Brewer spectrophotometer. The total ozone concentration data were compared with those derived by combining the data representing stratospheric layers via Umkehr method. The results of correlation analysis showed that total ozone is negatively correlated with cloud cover but not with such parameter as UV-B. Based on our study, we conclude that areal characteristics of Pohang which represents a typical coastal area may be quite important in explaining the distribution patterns of ozone not only from surface but also from upper atmosphere.