• 제목/요약/키워드: surface damage

검색결과 2,322건 처리시간 0.032초

Evaluation of Particle Removal Efficiency during Jet Spray and Megasonic Cleaning for Aluminum Coated Wafers

  • Choi, Hoomi;Min, Jaewon;Kulkarni, Atul;Ahn, Youngki;Kim, Taesung
    • 반도체디스플레이기술학회지
    • /
    • 제11권3호
    • /
    • pp.7-11
    • /
    • 2012
  • Among various wet cleaning methods, megasonic and jet spray gained their popularity in single wafer cleaning process for the efficient removal of particulate contaminants from the wafer surface. In the present study, we evaluated these two cleaning methods for particle removal efficiency (PRE) and pattern damage on the aluminum layered wafer surface. Also the effect of $CO_2$ dissolved water in jet spray cleaning is assessed by measuring PRE. It is observed that the jet spray cleaning process is more effective in terms of PRE and pattern damage compared to megasonic cleaning and the mixing of $CO_2$ in the water during jet sprays further increases the PRE. We believe that the outcome of the present study is useful for the semiconductor cleaning process engineers and researchers.

Atypical viscous fracture of human femurs

  • Yosibash, Zohar;Mayo, Romina Plitman;Milgrom, Charles
    • Advances in biomechanics and applications
    • /
    • 제1권2호
    • /
    • pp.77-83
    • /
    • 2014
  • Creep phenomenon at the scale of bone tissue (small specimens) is known to be present and demonstrated for low strains. Here creep is demonstrated on a pair of fresh-frozen human femurs at the organ level at high strains. Under a constant displacement applied on femur's head, surface strains at the upper neck location increase with time until fracture, that occurs within 7-13 seconds. The monotonic increase in strains provides evidence on damage accumulation in the interior (probably damage to the trabeculae) prior to final fracture, a fact that hints on probable damage of the trabecular bone that occurs prior to the catastrophic fracture of the cortical surface layer.

유한요소법을 이용한 철도 차륜에서 구름 접촉으로 인한 피로손상 평가 (Estimation of Fatigue Damage Due to Rolling Contact in a Railway Wheel Using FEM Analysis)

  • 이상훈;김호경
    • 한국안전학회지
    • /
    • 제26권3호
    • /
    • pp.1-7
    • /
    • 2011
  • Fatigue damage on the train wheel surface was estimated by considering the effect of friction coefficient of rolling on the contact surface between the wheel and rail during operation. From FEM analys, the maximum Tresca stress was 550.7 MPa at a depth of 2.07 mm under the maximum contact pressure ($P_{max}$ = 894.3 MPa) between wheel and rail. The maximum stress continued to increase along with the increase in the frictional coefficient. The fatigue initiation lifetime of the wheel by the rolling contact was predicted using the Smith-Watson-Topper (SWT) equation and the maximum principal strain equation (${\varepsilon}$-N).

코팅된 시편과 레이저 빔과의 상호 작용 연구 (Interaction of Beam and Coated Metals at High Power Continuous Irradiation)

  • 김용현;백원계;신완순;여재익
    • 한국군사과학기술학회지
    • /
    • 제14권6호
    • /
    • pp.974-978
    • /
    • 2011
  • The beam-matter interaction with various coating effects has received continued attention in the high power laser community. Previous works suggest that coatings promote target damage when compared to beaming on uncoated surface. Three types of paint coatings(Acrylic urethane, Silicone alkyd and Stealth blend) and a water coat on metals(Al, Ti and STS) are irradiated with a $CO_2$ laser. Both strain and temperature measurements are provided for assessing the instantaneous response characteristics of each coating on different metals. A selective combination of surface coats with metals has proven effective in either preventing or enhancing damage, both thermal and mechanical, associated with focused beaming on a target.

n형 GaN의 doping 농도에 따르는 건식 식각 손상 (Doping-level dependent dry-etch damage of in n-type GaN)

  • 이지면
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
    • /
    • pp.417-420
    • /
    • 2004
  • The electrical effects of dry-etch on n-type GaN by an inductively coupled $Cl_2/CH_4/H_2/Ar$ plasma were investigated as a function of ion energy, by means of ohmic and Schottky metallization method. The specific contact resistivity(${\rho}_c$) of ohmic contact was decreased, while the leakage current in Schottky diode was increased with increasing ion energy due to the preferential sputtering of nitrogen. At a higher rf power, an additional effect of damage was found on the etched sample, which was sensitive to the dopant concentration in terms of the ${\rho}_c$ of ohmic contact. This was attributed to the effects such as the formation of deep acceptor as well as the electron-enriched surface layer within the depletion layer. Furthermore, thermal annealing process enhanced the ohmic and Schottky property of heavily damaged surface.

  • PDF

표면반발경도를 활용한 물-시멘트비별 콘크리트의 동결융해 손상 평가 (Evaluating the Freeze-Thaw Damage of Concrete with Respect to Water to Cement Ratio Using Surface Rebound Value)

  • 박지선;안기홍;유영준;이종석
    • 한국건설순환자원학회논문집
    • /
    • 제10권2호
    • /
    • pp.143-151
    • /
    • 2022
  • 동결융해에 의한 콘크리트 손상 발생 시기를 평가하기 위하여 상대동탄성계수와 표면반발경도를 이용하여 비교하였다. 비교 결과 W/C 70 실험체군에서는 표면반발경도에 의한 콘크리트 손상 발생 평가가 200 싸이클 이상 빠르게 나타나는 것으로 관찰되었다. 뿐만 아니라 이후 점점 심해지는 동해를 표현할 수 있는 데이터를 지속적으로 제공해주어 동해 발생하는 초기 시점부터 동해를 확인할 수 있다는 것을 나타냈다. W/C 60과 50 실험체군에서도 표면반발경도가 콘크리트 동해 손상을 상대동탄성계수 보다 빠르게 평가했으며, 물-시멘트비에 변화에 상관없이 전반적으로 동결융해 손상시기 상대적으로 빠르고 정확하게 평가한 것으로 판단된다.

유한요소해석에 의한 압입 접촉손상 특성 연구 (Study of the Damage Property of a Contacted Indent by Finite Element Method)

  • 조재웅;김춘식;이희성;김영춘
    • 한국산학기술학회논문지
    • /
    • 제15권10호
    • /
    • pp.5974-5979
    • /
    • 2014
  • 압입 방식으로서 경량화된 부품이 매우 균질한 정밀도로 생산이 되며 프레스의 기술이 향상되고 있다. 압입 방식으로 조립하였을 시 핀과 구멍사이에는 압축력에 의한 변형력이 발생되고 접촉면이 손상을 입는다. 따라서 본 연구에서는 CATIA 프로그램을 이용하여 3D 모델링하였으며, ANSYS 프로그램을 통하여 압입 접촉된 평면에서 손상평가를 하였다. 해석결과, 핀이 들어갈 때 PCB판에 작용하는 하중은 약 21.3N인 것으로 확인되었으며, PCB판이 Pin에서 빠져나올 때의 하중은 약 19.24N으로 나타났다. 또한 구조 해석결과, Pin 1이 본 연구 모델의 모든 부품들 중에서 가장 최대응력이 많이 발생하므로, 대표적으로 Pin 1의 최대 등가응력이 192.96MPa로 나타났다. 압입 접촉 손상 특성을 규명하고 본 연구결과를 실제의 압입 공정의 설계에 응용함으로서 그 파손을 방지하고 내구성을 평가할 수 있다고 사료된다.

신경회로망을 이용한 이산 비선형 재형상 비행제어시스템 (Nonlinear Discrete-Time Reconfigurable Flight Control Systems Using Neural Networks)

  • 신동호;김유단
    • 제어로봇시스템학회논문지
    • /
    • 제10권2호
    • /
    • pp.112-124
    • /
    • 2004
  • A neural network based adaptive reconfigurable flight controller is presented for a class of discrete-time nonlinear flight systems in the presence of variations of aerodynamic coefficients and control effectiveness decrease caused by control surface damage. The proposed adaptive nonlinear controller is developed making use of the backstepping technique for the angle of attack, sideslip angle, and bank angle command following without two time separation assumption. Feedforward multilayer neural networks are implemented to guarantee reconfigurability for control surface damage as well as robustness to the aerodynamic uncertainties. The main feature of the proposed controller is that the adaptive controller is developed under the assumption that all of the nonlinear functions of the discrete-time flight system are not known accurately, whereas most previous works on flight system applications even in continuous time assume that only the nonlinear functions of fast dynamics are unknown. Neural networks learn through the recursive weight update rules that are derived from the discrete-time version of Lyapunov control theory. The boundness of the error states and neural networks weight estimation errors is also investigated by the discrete-time Lyapunov derivatives analysis. To show the effectiveness of the proposed control law, the approach is i]lustrated by applying to the nonlinear dynamic model of the high performance aircraft.

PGSFR 소듐냉각고속로 원자로용기 설계 및 구조건전성 평가 (Structural design and integrity evaluations for reactor vessel of PGSFR sodium-cooled fast reactor)

  • 구경회;김성균
    • 한국압력기기공학회 논문집
    • /
    • 제12권1호
    • /
    • pp.70-77
    • /
    • 2016
  • In this paper, the structural design and integrity evaluations for a reactor vessel of PGSFR sodium-cooled fast reactor(150MWe) are carried out in compliance with ASME BPV III, Division 5 Subsection HB. The reactor vessel is designed with a direct contact of primary sodium coolant to its inner surface and has a double vessel concept enclosing by containment vessel. To assure the structural integrity for 60 years design lifetime and elevated operating temperature of $545^{\circ}C$, which can invoke creep and creep-fatigue damage, the structural integrity evaluations are carried out in compliance with the ASME code rules. The design loads considered in this evaluations are primary loads and operation thermal cycling loads of normal heat-up and cool-down. From the evaluations, the PGSFR reactor vessel satisfies the ASME code limits but it was found that there is a little design margin of creep damage for inner surface at the region of cold pool free surface.