• 제목/요약/키워드: surface approximation

검색결과 510건 처리시간 0.033초

초미세 공정에 적합한 ICP(Inductive Coupled Plasma) 식각 알고리즘 개발 및 3차원 식각 모의실험기 개발 (Development of New Etching Algorithm for Ultra Large Scale Integrated Circuit and Application of ICP(Inductive Coupled Plasma) Etcher)

  • 이영직;박수현;손명식;강정원;권오근;황호정
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 1999년도 하계종합학술대회 논문집
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    • pp.942-945
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    • 1999
  • In this work, we proposed Proper etching algorithm for ultra-large scale integrated circuit device and simulated etching process using the proposed algorithm in the case of ICP (inductive coupled plasma) 〔1〕source. Until now, many algorithms for etching process simulation have been proposed such as Cell remove algorithm, String algorithm and Ray algorithm. These algorithms have several drawbacks due to analytic function; these algorithms are not appropriate for sub 0.1 ${\mu}{\textrm}{m}$ device technologies which should deal with each ion. These algorithms could not present exactly straggle and interaction between Projectile ions and could not consider reflection effects due to interactions among next projectile ions, reflected ions and sputtering ions, simultaneously In order to apply ULSI process simulation, algorithm considering above mentioned interactions at the same time is needed. Proposed algorithm calculates interactions both in plasma source region and in target material region, and uses BCA (binary collision approximation4〕method when ion impact on target material surface. Proposed algorithm considers the interaction between source ions in sheath region (from Quartz region to substrate region). After the collision between target and ion, reflected ion collides next projectile ion or sputtered atoms. In ICP etching, because the main mechanism is sputtering, both SiO$_2$ and Si can be etched. Therefore, to obtain etching profiles, mask thickness and mask composition must be considered. Since we consider both SiO$_2$ etching and Si etching, it is possible to predict the thickness of SiO$_2$ for etching of ULSI.

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The role of heliospheric current sheet on solar energetic particles with enhanced Fe/O

  • Park, Jinhye;Bucik, R.;Moon, Yong-Jae;Kahler, S.W.
    • 천문학회보
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    • 제43권1호
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    • pp.52.1-52.1
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    • 2018
  • We investigate initial Fe/O enhancements for 44 large gradual solar energetic particles events from 2010 to 2014 and examine the associations of the Fe/O enhancements with the structures of the heliospheric current sheet (HCS). For this study, we use STEREO SIT Fe and O data in 0.32-0.45 MeV channel as well as ACE ULEIS Fe and O data in 0.32-0.64 MeV channel. We determine 1) the magnetic polarities of the SEP source regions using the potential field source surface (PFSS) model of the coronal field and 2) the spacecraft magnetic footpoints with Parker spiral approximation of interplanetary magnetic field using the in-situ measurements of STEREO and ACE. We find that 29 out of 44 events have initial Fe/O enhanced more than 5 times of the typical gradual event values. In the 6 events, the enhancements are simultaneously observed by two spacecraft. There is a tendency that the high Fe/O enhancements are observed near SEP source regions. It is also noted that the Fe/O enhancements are associated with the polarity of the magnetic footpoints. The high Fe/O enhancements are usually observed where their footpoints lie in the same polarity regions of SEP sources rather than the opposite polarity regions. Although Fe/O enhancements could be due to a transport effect and/or a flare contribution, our result implies that the structure of HCS is likely to affect particle propagations in the interplanetary space.

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피로시험 데이터의 산포를 고려한 스프링의 신뢰성 최적설계 (Reliability based optimization of spring fatigue design problems accounting for scatter of fatigue test data)

  • 안다운;원준호;최주호
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2008년도 추계학술대회A
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    • pp.1314-1319
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    • 2008
  • Fatigue reliability problems are nowadays actively considered in the design of mechanical components. Recently, Dimension Reduction Method using Kriging approximation (KDRM) was proposed by the authors to efficiently calculate statistical moments of the response function. This method, which is more tractable for its sensitivity-free nature and providing the response PDF in a few number of analyses, is adopted in this study for the reliability analysis. Before applying this method to the practical fatigue problems, accuracies are studied in terms of parameters of the KDRM through a number of numerical examples, from which best set of parameters are suggested. In the fatigue reliability problems, good number of experimental data are necessary to get the statistical distribution of the S-N parameters. The information, however, are not always available due to the limited expense and time. In this case, a family of curves with prediction interval, called P-S-N curve, is constructed from regression analysis. Using the KDRM, once a set of responses are available at the sample points at the mean, all the reliability analyses for each P-S-N curve can be efficiently studied without additional response evaluations. The method is applied to a spring design problem as an illustration of practical applications, in which reliability-based design optimization (RBDO) is conducted by employing stochastic response surface method which includes probabilistic constraints in itself. Resulting information is of great practical value and will be very helpful for making trade-off decision during the fatigue design.

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Effects of Latin hypercube sampling on surrogate modeling and optimization

  • Afzal, Arshad;Kim, Kwang-Yong;Seo, Jae-won
    • International Journal of Fluid Machinery and Systems
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    • 제10권3호
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    • pp.240-253
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    • 2017
  • Latin hypercube sampling is widely used design-of-experiment technique to select design points for simulation which are then used to construct a surrogate model. The exploration/exploitation properties of surrogate models depend on the size and distribution of design points in the chosen design space. The present study aimed at evaluating the performance characteristics of various surrogate models depending on the Latin hypercube sampling (LHS) procedure (sample size and spatial distribution) for a diverse set of optimization problems. The analysis was carried out for two types of problems: (1) thermal-fluid design problems (optimizations of convergent-divergent micromixer coupled with pulsatile flow and boot-shaped ribs), and (2) analytical test functions (six-hump camel back, Branin-Hoo, Hartman 3, and Hartman 6 functions). The three surrogate models, namely, response surface approximation, Kriging, and radial basis neural networks were tested. The important findings are illustrated using Box-plots. The surrogate models were analyzed in terms of global exploration (accuracy over the domain space) and local exploitation (ease of finding the global optimum point). Radial basis neural networks showed the best overall performance in global exploration characteristics as well as tendency to find the approximate optimal solution for the majority of tested problems. To build a surrogate model, it is recommended to use an initial sample size equal to 15 times the number of design variables. The study will provide useful guidelines on the effect of initial sample size and distribution on surrogate construction and subsequent optimization using LHS sampling plan.

하이브리드 발견적 탐색기법을 이용한 천부 굴절법 자료의 파형역산 (Waveform inversion of shallow seismic refraction data using hybrid heuristic search method)

  • Takekoshi, Mika;Yamanaka, Hiroaki
    • 지구물리와물리탐사
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    • 제12권1호
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    • pp.99-104
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    • 2009
  • 본 연구에서는 천부 토양층의 2차원 불균질 S파 단면을 결정하기 위해 천부 굴절법 탐사로부터 얻은 SH파 자료에 대한 파형역산 기법을 제안한다. 2차원 매질에서 SH파의 전파를 모사하기 위해 2.5차원 파동 방정식을 사용한다. 합성탄성파를 계산하기 위해 공간축으로 4차, 시간축으로 2차 근사한 staggered grid 유한차분법을 사용하여 파동 방정식을 푼다. 계산된 파형과 측정 파형의 잔여오차로 정의되는 목적함수를 하이브리드 발견적 탐색기법에 의해 최소화한다. 2차원 지하구조 모형은 각기 다른 심도 경계면을 갖는 블록과 블록 내부의 S파 속도에 의해 매개화한다. 수치실험은 암영층파 불규칙한 경계를 갖는 모델에 대해 백색잡음을 추가한 합성 SH파 자료를 이용하여 수행하였다. 지표 굴절법 자료로부터 암영층을 포함한 구조를 적절한 계산시간 내에 영상화할 수 있었다

펀측 상지에 적용된 고유수용성 신경근 촉진법이 반대측 하지의 근 활성도에 미치는 영향 (Effect of Proprioceptive Neuromuscular Facilitation Applied to the Unilateral Upper Extremity on the Muscle Activation of Contralateral Lower Extremity)

  • 김경환;박지원;배성수
    • PNF and Movement
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    • 제4권1호
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    • pp.9-18
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    • 2006
  • Purpose: The purpose of this study was to investigate the effect of Proprioceptive Neuromuscular Facilitation (PNF) applied to the unilateral upper extremity on the muscle activation of contralateral lower extremity. Twenty-two healthy subjects (mean age of 23.7 years) participated in this study. Method : PNF patterns applied on the unilateral upper extremity in all subjects were the flexion/abduction/external rotation and lifting pattern. The hold and appoximation techniques for the irradiation were applied to end range of both patterns. Muscle activations in four patterns were measured in vastus medialis, tibialis anterior, rectus femoris, and gastrocnemius medial muscles of contralateral lower extremity using surface EMG system. Each EMG value in individual muscle was normalized for maximal voluntary contraction. The data were analyzed by one factor analysis of variance with repeated measure test. Result : There were significant differences in the between-subject effect (muscles) and within-subject effect (patterns) in comparison of muscle activation by application of PNF patterns (p<.05). The irradiation led to higher activation in the flexion/abduction/external rotation pattern than that of lifting pattern in all muscles (p<.05). The approximation techniques revealed more activations than these of hold technique in all muscles (p<.05). Conclusion : These results suggest that the application of PNF patterns to the unilateral upper extremity affect on the muscle activation of contralateral lower extremity and increase according to the intensity of resistance. This mechanism of contralateral effect might provide a help to the development of treatment method for the affected side and functional improvement for the patients who have damages of central nervous system or musculoskeletal problems by orthopedic injury.

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포텐셜 유동에 의한 프로펠러-WIG선의 상호작용 및 성능해석 (Analysis of Propeller-WIG Interaction and Performance in Potential Flow)

  • 전호환;김민규
    • 대한조선학회논문집
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    • 제38권4호
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    • pp.11-22
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    • 2001
  • 프로펠러-WIG(Wing in Ground Effect)선의 상호작용 및 성능을 포텐셜 유동에 의해 해석하였다. 프로펠러는 보오텍스 격자법(VLM)을 사용하였고 WIG선은 포텐셜 기저 패널법을 사용하여 각 경계조건을 만족시키면서 반복계산을 통하여 상호작용 및 성능을 해석하였다. 자유수면은 강체로 가정하여 경상법을 사용하였다. 프로펠러-WIG의 상호작용 및 성능을 해석하기에 앞서 발표된 실험결과와 계산결과가 있는 MP101 프로펠러와 MR-21 타의 상호작용 및 성능해석을 수행하여 개발된 프로그램의 정도를 검증하였다. 프로펠러-WIG선의 상호작용해석은 프로펠러의 부착위치, 직경 및 회전수의 변화에 따른 비행고도 높이 변화에 대한 양력 및 피치모멘트를 계산하여 비교하였다. 날개 앞에 부착된 프로펠러는 WIG선의 양력을 급격히 향상시키며 정적안정성을 향상시킴을 알았다. 따라서 적절한 프로펠러의 크기, 부착위치 및 회전수의 선택이 PARWIG선의 성능향상을 위해 필수적임을 알았다.

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A 4-Channel Multi-Rate VCSEL Driver with Automatic Power, Magnitude Calibration using High-Speed Time-Interleaved Flash-SAR ADC in 0.13 ㎛ CMOS

  • Cho, Sunghun;Lee, DongSoo;Lee, Juri;Park, Hyung-Gu;Pu, YoungGun;Yoo, Sang-Sun;Hwang, Keum Cheol;Yang, Youngoo;Park, Cheon-Seok;Lee, Kang-Yoon
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제16권3호
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    • pp.274-286
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    • 2016
  • This paper presents a 4-channel multi-rate vertical-cavity surface-emitting laser (VCSEL) driver. In order to keep the output power constant with respect to the process, voltage, temperature (PVT) variations, this research proposes automatic power and magnitude. For the fast settling time, the high-speed 10-bit time-interleaved Flash-successive approximation analog to digital converter (Flash-SAR ADC) is proposed and shared for automatic power and magnitude calibration to reduce the die area and power consumption. This chip is fabricated using $0.13-{\mu}m$ CMOS technology and the die area is $4.2mm^2$. The power consumption is 117.84 mW per channel from a 3.3 V supply voltage at 10 Gbps. The measured resolution of bias /modulation current for APC/AMC is 0.015 mA.

상하동요하는 2차원 원주의 고유진동수: 시간 영역 해석 (Natural Frequency of 2-Dimensional Heaving Circular Cylinder: Time-Domain Analysis)

  • 김기범;이승준
    • 대한조선학회논문집
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    • 제50권4호
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    • pp.224-231
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    • 2013
  • The concept of the natural frequency is useful for understanding the characters of oscillating systems. However, when a circular cylinder floating horizontally on the water surface is heaving, due to the hydrodynamic forces, the system is not governed by the equation like that of the harmonic one. In this paper, in order to shed some lights on the more correct use of the concept of the natural frequency, a problem of the heaving circular cylinder is analyzed in the time domain. The equation of motion, an integro-differential equation, was derived following the fashion of Cummins (1962), and its coefficients including the retardation function were obtained using the numerical solution of Lee (2012). The equation was solved numerically, and the experiment was also carried out in the CNU flume. Using our numerical and experimental results, the natural frequency was defined as its average value given by the motion data excluding those of the initial stage. Our results were then compared with those of the existing investigations such as Maskell and Ursell (1970), Ito (1977) and Yeung (1982) as well as the newly obtained results of Lee (2012). Comparison showed that the natural frequency obtained here agrees well with that of Lee (2012), which was found through the frequency domain analysis. It was also shown that the approximation of heaving motion by a damped harmonic oscillation, which was regarded as suitable by most previous investigators, is not physically suitable for the reason that can be clearly shown through comparing the shape of MCFRs(Modulus of Complex Frequency Response). Furthermore, we found that although the previous approximations yield the damping ratio significantly different from our result the magnitude of natural frequency is not much different from our result.

그래핀의 모드 I 균열에 대한 분자동역학 해석으로부터 균열 선단 응집 법칙의 평가 (Evaluation of Crack-tip Cohesive Laws for the Mode I Fracture of the Graphene from Molecular Dynamics Simulations)

  • 김현규
    • 한국전산구조공학회논문집
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    • 제26권5호
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    • pp.393-399
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    • 2013
  • 본 논문은 그래핀의 모드 I 균열 진전에 대한 분자동역학 해석과 수치보조장을 사용하는 영역 투영 방법의 역문제 해석 방법을 결합하여 균열 선단 응집 법칙을 평가하는 효율적인 방법을 제시하고 있다. 그래핀의 균열 선단 응집 법칙을 결정하는 것은 균열 선단에서 멀리 떨어진 영역의 변위를 사용하여 균열 면에서 미지의 응집 트랙션과 열림 변위를 구하는 역문제를 해석해야 하는데 상호 J-적분과 M-적분의 경로 보존성과 효율적인 수치보조장을 사용하는 방법을 적용하였다. 분자동역학 해석에서 원자 변위를 유한요소 절점 변위로 이동최소자승법을 사용하여 근사하였으며 안정적인 역문제 해석을 통하여 원자 단위의 거동을 연속체 해석으로 연결시킬 수 있는 새로운 방법을 보여주었다.