• Proceedings of the IEEK Conference
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• 1999.06a
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• pp.942-945
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• 1999

In this work, we proposed Proper etching algorithm for ultra-large scale integrated circuit device and simulated etching process using the proposed algorithm in the case of ICP (inductive coupled plasma) 〔1〕source. Until now, many algorithms for etching process simulation have been proposed such as Cell remove algorithm, String algorithm and Ray algorithm. These algorithms have several drawbacks due to analytic function; these algorithms are not appropriate for sub 0.1 ${\mu}{\textrm}{m}$ device technologies which should deal with each ion. These algorithms could not present exactly straggle and interaction between Projectile ions and could not consider reflection effects due to interactions among next projectile ions, reflected ions and sputtering ions, simultaneously In order to apply ULSI process simulation, algorithm considering above mentioned interactions at the same time is needed. Proposed algorithm calculates interactions both in plasma source region and in target material region, and uses BCA (binary collision approximation4〕method when ion impact on target material surface. Proposed algorithm considers the interaction between source ions in sheath region (from Quartz region to substrate region). After the collision between target and ion, reflected ion collides next projectile ion or sputtered atoms. In ICP etching, because the main mechanism is sputtering, both SiO$_2$ and Si can be etched. Therefore, to obtain etching profiles, mask thickness and mask composition must be considered. Since we consider both SiO$_2$ etching and Si etching, it is possible to predict the thickness of SiO$_2$ for etching of ULSI.

• The Bulletin of The Korean Astronomical Society
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• v.43 no.1
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• pp.52.1-52.1
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• 2018

We investigate initial Fe/O enhancements for 44 large gradual solar energetic particles events from 2010 to 2014 and examine the associations of the Fe/O enhancements with the structures of the heliospheric current sheet (HCS). For this study, we use STEREO SIT Fe and O data in 0.32-0.45 MeV channel as well as ACE ULEIS Fe and O data in 0.32-0.64 MeV channel. We determine 1) the magnetic polarities of the SEP source regions using the potential field source surface (PFSS) model of the coronal field and 2) the spacecraft magnetic footpoints with Parker spiral approximation of interplanetary magnetic field using the in-situ measurements of STEREO and ACE. We find that 29 out of 44 events have initial Fe/O enhanced more than 5 times of the typical gradual event values. In the 6 events, the enhancements are simultaneously observed by two spacecraft. There is a tendency that the high Fe/O enhancements are observed near SEP source regions. It is also noted that the Fe/O enhancements are associated with the polarity of the magnetic footpoints. The high Fe/O enhancements are usually observed where their footpoints lie in the same polarity regions of SEP sources rather than the opposite polarity regions. Although Fe/O enhancements could be due to a transport effect and/or a flare contribution, our result implies that the structure of HCS is likely to affect particle propagations in the interplanetary space.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1314-1319
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• 2008

Fatigue reliability problems are nowadays actively considered in the design of mechanical components. Recently, Dimension Reduction Method using Kriging approximation (KDRM) was proposed by the authors to efficiently calculate statistical moments of the response function. This method, which is more tractable for its sensitivity-free nature and providing the response PDF in a few number of analyses, is adopted in this study for the reliability analysis. Before applying this method to the practical fatigue problems, accuracies are studied in terms of parameters of the KDRM through a number of numerical examples, from which best set of parameters are suggested. In the fatigue reliability problems, good number of experimental data are necessary to get the statistical distribution of the S-N parameters. The information, however, are not always available due to the limited expense and time. In this case, a family of curves with prediction interval, called P-S-N curve, is constructed from regression analysis. Using the KDRM, once a set of responses are available at the sample points at the mean, all the reliability analyses for each P-S-N curve can be efficiently studied without additional response evaluations. The method is applied to a spring design problem as an illustration of practical applications, in which reliability-based design optimization (RBDO) is conducted by employing stochastic response surface method which includes probabilistic constraints in itself. Resulting information is of great practical value and will be very helpful for making trade-off decision during the fatigue design.

• International Journal of Fluid Machinery and Systems
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• v.10 no.3
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• pp.240-253
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• 2017

Latin hypercube sampling is widely used design-of-experiment technique to select design points for simulation which are then used to construct a surrogate model. The exploration/exploitation properties of surrogate models depend on the size and distribution of design points in the chosen design space. The present study aimed at evaluating the performance characteristics of various surrogate models depending on the Latin hypercube sampling (LHS) procedure (sample size and spatial distribution) for a diverse set of optimization problems. The analysis was carried out for two types of problems: (1) thermal-fluid design problems (optimizations of convergent-divergent micromixer coupled with pulsatile flow and boot-shaped ribs), and (2) analytical test functions (six-hump camel back, Branin-Hoo, Hartman 3, and Hartman 6 functions). The three surrogate models, namely, response surface approximation, Kriging, and radial basis neural networks were tested. The important findings are illustrated using Box-plots. The surrogate models were analyzed in terms of global exploration (accuracy over the domain space) and local exploitation (ease of finding the global optimum point). Radial basis neural networks showed the best overall performance in global exploration characteristics as well as tendency to find the approximate optimal solution for the majority of tested problems. To build a surrogate model, it is recommended to use an initial sample size equal to 15 times the number of design variables. The study will provide useful guidelines on the effect of initial sample size and distribution on surrogate construction and subsequent optimization using LHS sampling plan.

• Geophysics and Geophysical Exploration
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• v.12 no.1
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• pp.99-104
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• 2009

We propose a waveform inversion method for SH-wave data obtained in a shallow seismic refraction survey, to determine a 2D inhomogeneous S-wave profile of shallow soils. In this method, a 2.5D equation is used to simulate SH-wave propagation in 2D media. The equation is solved with the staggered grid finite-difference approximation to the 4th-order in space and 2nd-order in time, to compute a synthetic wave. The misfit, defined using differences between calculated and observed waveforms, is minimised with a hybrid heuristic search method. We parameterise a 2D subsurface structural model with blocks with different depth boundaries, and S-wave velocities in each block. Numerical experiments were conducted using synthetic SH-wave data with white noise for a model having a blind layer and irregular interfaces. We could reconstruct a structure including a blind layer with reasonable computation time from surface seismic refraction data.

• PNF and Movement
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• v.4 no.1
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• pp.9-18
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• 2006

Purpose: The purpose of this study was to investigate the effect of Proprioceptive Neuromuscular Facilitation (PNF) applied to the unilateral upper extremity on the muscle activation of contralateral lower extremity. Twenty-two healthy subjects (mean age of 23.7 years) participated in this study. Method : PNF patterns applied on the unilateral upper extremity in all subjects were the flexion/abduction/external rotation and lifting pattern. The hold and appoximation techniques for the irradiation were applied to end range of both patterns. Muscle activations in four patterns were measured in vastus medialis, tibialis anterior, rectus femoris, and gastrocnemius medial muscles of contralateral lower extremity using surface EMG system. Each EMG value in individual muscle was normalized for maximal voluntary contraction. The data were analyzed by one factor analysis of variance with repeated measure test. Result : There were significant differences in the between-subject effect (muscles) and within-subject effect (patterns) in comparison of muscle activation by application of PNF patterns (p<.05). The irradiation led to higher activation in the flexion/abduction/external rotation pattern than that of lifting pattern in all muscles (p<.05). The approximation techniques revealed more activations than these of hold technique in all muscles (p<.05). Conclusion : These results suggest that the application of PNF patterns to the unilateral upper extremity affect on the muscle activation of contralateral lower extremity and increase according to the intensity of resistance. This mechanism of contralateral effect might provide a help to the development of treatment method for the affected side and functional improvement for the patients who have damages of central nervous system or musculoskeletal problems by orthopedic injury.

• Journal of the Society of Naval Architects of Korea
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• v.38 no.4
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• pp.11-22
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• 2001

The interaction between forward mounted propeller and wing in ground effect, and its aerodynamic performance are analyzed by potential flow approximation. A Vortex Lattice Method(VLM) for the propeller analysis and a potential based panel method for the WIG are used together with an image method by assuming the free surface as a rigid wall. The interaction of propeller and wing in the proximity of the ground is taken into account by an iterative procedure where the boundary conditions are satisfied with the given convergence criteria. The program developed is first checked by comparing its numerical results with the experimental data and other numerical results for the propeller MP101-rudder MR21 system. Then, the propeller-WIG interaction and its performance versus ground clearance are investigated by changing parameters such as propeller position, diameter and speed of revolution. It is shown that the forward mounted propeller increases the lift forces of the wing and also enhances the height stability, depending on the design parameter. Therefore, the appropriate selection of the design parameter such as propeller diameter, revolution, the longitudinal and vertical position of propeller is necessary.

• JSTS:Journal of Semiconductor Technology and Science
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• v.16 no.3
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• pp.274-286
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• 2016

This paper presents a 4-channel multi-rate vertical-cavity surface-emitting laser (VCSEL) driver. In order to keep the output power constant with respect to the process, voltage, temperature (PVT) variations, this research proposes automatic power and magnitude. For the fast settling time, the high-speed 10-bit time-interleaved Flash-successive approximation analog to digital converter (Flash-SAR ADC) is proposed and shared for automatic power and magnitude calibration to reduce the die area and power consumption. This chip is fabricated using $0.13-{\mu}m$ CMOS technology and the die area is $4.2mm^2$. The power consumption is 117.84 mW per channel from a 3.3 V supply voltage at 10 Gbps. The measured resolution of bias /modulation current for APC/AMC is 0.015 mA.

• Journal of the Society of Naval Architects of Korea
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• v.50 no.4
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• pp.224-231
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• 2013

The concept of the natural frequency is useful for understanding the characters of oscillating systems. However, when a circular cylinder floating horizontally on the water surface is heaving, due to the hydrodynamic forces, the system is not governed by the equation like that of the harmonic one. In this paper, in order to shed some lights on the more correct use of the concept of the natural frequency, a problem of the heaving circular cylinder is analyzed in the time domain. The equation of motion, an integro-differential equation, was derived following the fashion of Cummins (1962), and its coefficients including the retardation function were obtained using the numerical solution of Lee (2012). The equation was solved numerically, and the experiment was also carried out in the CNU flume. Using our numerical and experimental results, the natural frequency was defined as its average value given by the motion data excluding those of the initial stage. Our results were then compared with those of the existing investigations such as Maskell and Ursell (1970), Ito (1977) and Yeung (1982) as well as the newly obtained results of Lee (2012). Comparison showed that the natural frequency obtained here agrees well with that of Lee (2012), which was found through the frequency domain analysis. It was also shown that the approximation of heaving motion by a damped harmonic oscillation, which was regarded as suitable by most previous investigators, is not physically suitable for the reason that can be clearly shown through comparing the shape of MCFRs(Modulus of Complex Frequency Response). Furthermore, we found that although the previous approximations yield the damping ratio significantly different from our result the magnitude of natural frequency is not much different from our result.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.26 no.5
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• pp.393-399
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• 2013

In this paper, a novel approach to estimate cohesive laws for the mode I fracture of the graphene is presented by combining molecular dynamic simulations and an inverse algorithm based on field projection method and finite element method. The determination of crack-tip cohesive laws of the graphene based on continuum mechanics is a non-trivial inverse problem of finding unknown tractions and separations from atomic simulations. The displacements of molecular dynamic simulations in a region far away from the crack tip are transferred to finite element nodes by using moving least square approximation. Inverse analyses for extracting unknown cohesive tractions and separation behind the crack tip can be carried out by using conservation nature of the interaction J- and M-integrals with numerical auxiliary fields which are generated by systematically imposing uniform surface tractions element-by-element along the crack surfaces in finite element models. The preset method can be a very successful approach to extract crack-tip cohesive laws from molecular dynamic simulations as a scale bridging method.