• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.9
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• pp.701-709
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• 2011

In semiconductor wafer fabrication, etching is one of the most critical processes, by which a material layer is selectively removed. Because of difficulty to correct a mistake caused by over etching, it is critical that etch should be performed correctly. This paper proposes a new approach for etch endpoint detection of small open area wafers. The traditional endpoint detection technique uses a few manually selected wavelengths, which are adequate for large open areas. As the integrated circuit devices continue to shrink in geometry and increase in device density, detecting the endpoint for small open areas presents a serious challenge to process engineers. In this work, a high-resolution optical emission spectroscopy (OES) sensor is used to provide the necessary sensitivity for detecting subtle endpoint signal. Partial Least Squares (PLS) method is used to analyze the OES data which reduces dimension of the data and increases gap between classes. Support Vector Machine (SVM) is employed to detect endpoint using the data after PLS. SVM classifies normal etching state and after endpoint state. Two data sets from OES are used in training PLS and SVM. The other data sets are used to test the performance of the model. The results show that the trained PLS and SVM hybrid algorithm model detects endpoint accurately.

• Proceedings of the Korea Water Resources Association Conference
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• 2018.05a
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• pp.167-167
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• 2018

토양수분은 토양에 포함된 평균 수분량을 나타내며 수문 순환 관점에서 매우 중요한 수문변량 중 하나이다. 본 연구에서는 대표적인 기계학습 방법인 Support Vector Machine (SVM)을 이용한 토양 함수 예측 기법을 개발하고자 하며, 예측인자로서 원격 탐측 기반의 토양함수자료, 강수량, 온도 등을 활용하고자 한다. SVM은 Kernel 함수를 이용하여 복잡한 비선형 관계를 선형 가정을 통해서 해석하는 기계학습 방법으로서 전역모델(global model)로서 다양한 수문기상분야에 적용이 이루어지고 있다. SVM의 장점은 일정 부분의 오차를 허용함으로서 모형의 일반화 측면에서 기존 인공신경망(artificial neural network, ANN)에 비해 우수한 성능을 나타내며, 특히 예측모형으로서 적용성이 매우 크다. 본 연구에서는 과거 토양 함수 자료와 강수, 온도, 위성 관측 기반 정보 등을 이용하여 모형을 적합시키고 이를 미계측 유역으로 확장하는데 연구의 목적이 있으며, 본 연구를 통해 제안된 모형은 용담댐 시험유역을 대상으로 적용되며 기존 ANN 모형 및 다중회귀분석 결과와 비교를 통해 모형의 적합성을 평가하고자한다.

• International Journal of Computer Science & Network Security
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• v.22 no.1
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• pp.93-96
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• 2022

Natural language processing (NLP) is utilized to understand a natural text. Text analysis systems use natural language algorithms to find the meaning of large amounts of text. Text classification represents a basic task of NLP with a wide range of applications such as topic labeling, sentiment analysis, spam detection, and intent detection. The algorithm can transform user's unstructured thoughts into more structured data. In this work, a text classifier has been developed that uses academic admission and registration texts as input, analyzes its content, and then automatically assigns relevant tags such as admission, graduate school, and registration. In this work, the well-known algorithms support vector machine SVM and K-nearest neighbor (kNN) algorithms are used to develop the above-mentioned classifier. The obtained results showed that the SVM classifier outperformed the kNN classifier with an overall accuracy of 98.9%. in addition, the mean absolute error of SVM was 0.0064 while it was 0.0098 for kNN classifier. Based on the obtained results, the SVM is used to implement the academic text classification in this work.

• International Journal of Computer Science & Network Security
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• v.23 no.8
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• pp.40-48
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• 2023

Speech Emotions recognition has become the active research theme in speech processing and in applications based on human-machine interaction. In this work, our system is a two-stage approach, namely feature extraction and classification engine. Firstly, two sets of feature are investigated which are: the first one is extracting only 13 Mel-frequency Cepstral Coefficient (MFCC) from emotional speech samples and the second one is applying features fusions between the three features: Zero Crossing Rate (ZCR), Teager Energy Operator (TEO), and Harmonic to Noise Rate (HNR) and MFCC features. Secondly, we use two types of classification techniques which are: the Support Vector Machines (SVM) and the k-Nearest Neighbor (k-NN) to show the performance between them. Besides that, we investigate the importance of the recent advances in machine learning including the deep kernel learning. A large set of experiments are conducted on Surrey Audio-Visual Expressed Emotion (SAVEE) dataset for seven emotions. The results of our experiments showed given good accuracy compared with the previous studies.

• Journal of radiological science and technology
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• v.45 no.2
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• pp.111-116
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• 2022

In this study, the applicability of machine learning for the development of a simulator for general X-ray examination education is evaluated. To this end, k-nearest neighbor(kNN), support vector machine(SVM) and neural network(NN) classification models are analyzed to present the most suitable model by analyzing the results. Image data was obtained by taking 100 photos each corresponding to Posterior anterior(PA), Posterior anterior oblique(Obl), Lateral(Lat), Fan lateral(Fan lat). 70% of the acquired 400 image data were used as training sets for learning machine learning models and 30% were used as test sets for evaluation. and prediction model was constructed for right-handed PA, Obl, Lat, Fan lat image classification. Based on the data set, after constructing the classification model using the kNN, SVM, and NN models, each model was compared through an error matrix. As a result of the evaluation, the accuracy of kNN was 0.967 area under curve(AUC) was 0.993, and the accuracy of SVM was 0.992 AUC was 1.000. The accuracy of NN was 0.992 and AUC was 0.999, which was slightly lower in kNN, but all three models recorded high accuracy and AUC. In this study, right-handed PA, Obl, Lat, Fan lat images were classified and predicted using the machine learning classification models, kNN, SVM, and NN models. The prediction showed that SVM and NN were the same at 0.992, and AUC was similar at 1.000 and 0.999, indicating that both models showed high predictive power and were applicable to educational simulators.

• Journal of Korean Society for Quality Management
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• v.47 no.4
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• pp.783-793
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• 2019

Purpose: The purpose of this study is to apply the machine and deep learning methodology on error terms which are continuously auto-generated on the sensors with specific time period and prove the improvement effects of power generator prediction diagnosis system by comparing detection ability. Methods: The SVM(Support Vector Machine) and MLP(Multi Layer Perception) learning procedures were applied for predicting the target values and sequentially producing the error terms for confirming the detection improvement effects of suggested application. For checking the effectiveness of suggested procedures, several detection methodologies such as Cusum and EWMA were used for the comparison. Results: The statistical analysis result shows that without noticing the sequential trivial changes on current diagnosis system, suggested approach based on the error term diagnosis is sensing the changes in the very early stages. Conclusion: Using pattern of error terms as a diagnosis tool for the safety control process with SVM and MLP learning procedure, unusual symptoms could be detected earlier than current prediction system. By combining the suggested error term management methodology with current process seems to be meaningful for sustainable safety condition by early detecting the symptoms.

• International Journal of Computer Science & Network Security
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• v.21 no.6
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• pp.89-100
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• 2021

Smart Grid Network (SGN) is a next generation electrical power network which digitizes the power distribution grid and achieves smart, efficient, safe and secure operations of the electricity. The backbone of the SGN is information communication technology that enables the SGN to get full control of network station monitoring and analysis. In any network where communication is involved security is essential. It has been observed from several recent incidents that an adversary causes an interruption to the operation of the networks which lead to the electricity theft. In order to reduce the number of electricity theft cases, companies need to develop preventive and protective methods to minimize the losses from this issue. In this paper, we have introduced a machine learning based SVM method that detects malicious nodes in a smart grid network. The algorithm collects data (electricity consumption/electric bill) from the nodes and compares it with previously obtained data. Support Vector Machine (SVM) classifies nodes into Normal or malicious nodes giving the statues of 1 for normal nodes and status of -1 for malicious -abnormal-nodes. Once the malicious nodes have been detected, we have done a trust evaluation based on the nodes history and recorded data. In the simulation, we have observed that our detection rate is almost 98% where the false alarm rate is only 2%. Moreover, a Trust value of 50 was achieved. As a future work, countermeasures based on the trust value will be developed to solve the problem remotely.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.16 no.4
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• pp.1128-1145
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• 2022

Owing to the rapid development of information science, data analysis based on machine learning has become an interdisciplinary and strategic area. Marine predators algorithm (MPA) is a novel metaheuristic algorithm inspired by the foraging strategies of marine organisms. Considering the randomness of these strategies, an improved algorithm called co-evolutionary cultural mechanism-based marine predators algorithm (CECMPA) is proposed. Through this mechanism, search agents in different spaces can share knowledge and experience to improve the performance of the native algorithm. More specifically, CECMPA has a higher probability of avoiding local optimum and can search the global optimum quickly. In this paper, it is the first to use CECMPA to perform feature subset selection and optimize hyperparameters in support vector machine (SVM) simultaneously. For performance evaluation the proposed method, it is tested on twelve datasets from the university of California Irvine (UCI) repository. Moreover, the coronavirus disease 2019 (COVID-19) can be a real-world application and is spreading in many countries. CECMPA is also applied to a COVID-19 dataset. The experimental results and statistical analysis demonstrate that CECMPA is superior to other compared methods in the literature in terms of several evaluation metrics. The proposed method has strong competitive abilities and promising prospects.

• The Journal of the Korea institute of electronic communication sciences
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• v.18 no.5
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• pp.785-796
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• 2023

In this study, a methodology for real-time classification and prediction of defects that may appear in PVDF(Polyvinylidene fluoride) sensors, which are widely used for structural integrity monitoring, is proposed. The types of sensor defects appearing according to the sensor attachment environment were classified, and an impact test using an impact hammer was performed to obtain an output signal according to the defect type. In order to cleary identify the difference between the output signal according to the defect types, the time domain statistical features were extracted and a data set was constructed. Among the machine learning based classification algorithms, the learning of the acquired data set and the result were analyzed to select the most suitable algorithm for detecting sensor defect types, and among them, it was confirmed that the highest optimization was performed to show SVM(Support Vector Machine). As a result, sensor defect types were classified with an accuracy of 92.5%, which was up to 13.95% higher than other classification algorithms. It is believed that the sensor defect prediction technique proposed in this study can be used as a base technology to secure the reliability of not only PVDF sensors but also various sensors for real time structural health monitoring.

• The Journal of the Acoustical Society of Korea
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• v.33 no.4
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• pp.248-254
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• 2014

Among acoustic signal analysis tasks, acoustic context awareness is one of the most formidable tasks in terms of complexity since it requires sophisticated understanding of individual acoustic events. In conventional context awareness methods, individual acoustic event detection or recognition is employed to generate a relevant decision on the impending context. However this approach may produce poorly performing decision results in practical situations due to the possibility of events occurring simultaneously or the acoustically similar events that are difficult to distinguish with each other. Particularly, the babble noise acoustic event occurring at a bus or subway environment may create confusion to context awareness task since babbling is similar in any environment. Therefore in this paper, a frequency-cepstral feature vector is proposed to mitigate the confusion problem during the situation awareness task of binary decisions: bus or metro. By employing the Support Vector Machine (SVM) as the classifier, the proposed feature vector scheme is shown to produce better performance than the conventional scheme.