• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1885-1890
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• 2008

3-D heterogeneous nucleation was simulated by classical molecular dynamics (MD), where the Lennard-Jones (LJ) gas and solid cluster-seed molecules have argon and aluminum properties, respectively. There are three shapes of cluster-seeds, cube, rod, and sphere, and three classes of masses and the simulation took place under nine supersaturation ratios, making a total of 81 calculations. Results show that the dimension of the cluster-seed highly affects the rates of cluster development. In order to analyze heterogeneous nucleation above and below the critical supersaturation ratio, growth rate and liquefaction rate were separately defined to supplement the investigation. Design of experiments (DOE) was used for analysis which displayed that the shape and mass of the cluster-seed are prominent for the growth rate, while the supersaturation ratio is most significant followed by the mass for liquefaction rate. The significance of the supersaturation ratio for overall liquefaction suggests that thermal diffusion is more dominant than mass interactions for this system.

• 산업기술연구
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• 제6권
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• pp.13-17
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• 1986

The effect of supersaturation on morphology of silicon carbide by chemical vapor deposition using $CH_3SiCl_3-H_2$ gas mixture system was investigated. The experimental results show that the final structure of silicon carbide deposits is coarser as total pressure increases or ${\alpha}$-ratio decreases. It is believed because supersataration of Si-source decreases as total pressure increases or ${\alpha}$-ratio decreases.

• 한국재료학회지
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• 제13권5호
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• pp.328-332
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• 2003

Characteristics of $TiO_2$nanoparticles controlled by precursor flow rate and reaction temperature in chemical vapor condensation process were interpreted in the view of decisive reaction factors, i.e. supersaturation ratio, concentration of vapor molecule, collision frequency and rate, and residence time, which directly affect the particle size and size distribution in CVC reactor. As results, the increases of precursor flow rate and reaction temperature induced the increase in the average sizes of $TiO_2$ nanoparticles in CVC reactor by acceleration of coagulation growth due to the increase of collision between $TiO_2$vapor molecules and particles. The effects of reaction factors on the characteristics of$TiO_2$nanoparticles were discussed with considering particle formation process in CVC reactor under given process parameters.

• 한국세라믹학회지
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• 제29권12호
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• pp.926-934
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• 1992

Uniform diamond films in a few $\textrm{mm}^2$ size and locally isolated diamond single crystals in size of 60 $\mu\textrm{m}$ were synthesized on Si-wafer and Al2O3 substrate by the method of acetylene flame. The effects of substrate temperature and flow ratio of oxygen to acetylene on the morphology of deposited diamond were investigated. According to the observations of growth behavior of diamond on Si substrate with respect to substrate surface pretreatment and flow ratio, it was shown that well faceted diamonds could grow uniformly when flow ratio was above 0.9 and substrates were densely scratched. With increasing substrates temperature, the crystal morphology changes from octahedron bounded by only {111} plane below 850$^{\circ}C$ to cubo-octahedron with almost equal development of {111} and {100} plane in the temperature range of 850∼950$^{\circ}C$. Between 950∼1050$^{\circ}C$, the {111} faces become rough and concave. Above 1050$^{\circ}C$, new crystallites begin to grow on concave {111} surface and overall morphology looks like cubo-octahedron with degenerated {111} faces. These changes of morphology can be understood in terms of the different growth mode of each crystallographic plane with respect to the substrate temperature and supersaturation. And the observed phenomena on {111} planes can be related to the face instability and twin generation.

• ETRI Journal
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• 제25권6호
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• pp.503-509
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• 2003

Selective epitaxial growth (SEG) of silicon has attracted considerable attention for its good electrical properties and advantages in building microstructures in high-density devices. However, SEG problems, such as an unclear process window, selectivity loss, and nonuniformity have often made application difficult. In our study, we derived processing diagrams for SEG from thermodynamics on gas-phase reactions so that we could predict the SEG process zone for low pressure chemical vapor deposition. In addition, with the help of both the concept of the effective supersaturation ratio and three kinds of E-beam patterns, we evaluated and controlled selectivity loss and non-uniformity in SEG, which is affected by the loading effect. To optimize the SEG process, we propose two practical methods: One deals with cleaning the wafer, and the other involves inserting dummy active patterns into the wide insulator to prevent the silicon from nucleating.

• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 1998년도 PROCEEDINGS OF THE 15TH KACG TECHNICAL MEETING-PACIFIC RIM 3 SATELLITE SYMPOSIUM SESSION 4, HOTEL HYUNDAI, KYONGJU, SEPTEMBER 20-23, 1998
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• pp.1-20
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• 1998

Processing of thin films by chemical vapor deposition (CVD) is accompanied by chemical reactions, in which the rigorous kinetic analysis is difficult to achieve. In these conditions, thermodynamic calculation leads to better understanding of the CVD process and helps to optimise the experimental parameters to obtain a desired product. A CVD phase diagram has been used as guide lines for the process. By determining the effect of each process variable on the driving force for deposition, the thermodynamic limit for the substrate temperature that diamond can deposit is calculated in the C-H system by assuming that the limit is defined by the CVD diamond phase diagram. The addition of iso-supersaturation ratio lines to the CVD phase diagram in the Si-Cl-H system provides additional information about the effects of CVD process variables.

• 대한기계학회논문집
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• 제19권11호
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• pp.3022-3030
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• 1995

The irreversibility of condensation process in the supersonic flow of steam turbine cascade causes the entropy to increase and the total pressure loss to be generated. In the present study, in order to investigate the moist air flow in two dimensional steam turbine cascade made as the configuration of the last stage tip section of the actual steam turbine moving blade, the static and total pressures along suction side of the blade are measured by pressure taps and Pitot tube. The flow field is visualized by a Schlieren system. The effects of stagnation temperature and the degree of supersaturation on energy loss and entropy change in the flow are clearly identified.

• 한국결정성장학회지
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• 제9권1호
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• pp.80-83
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• 1999

화학증착에 의한 박막 제조에서는 화학반응을 수반되어 엄밀한 속도론적 분석이 어렵다. 이러한 경우는 열역 학적인 분석이 화학증착공정을 이해하는데 더 유용하고 원하는 박막을 제조하기 위한 최적공정조건을 결정함에 있어서 도 도움이 된다. 이러한 이유로 화학증착 상태도가 사용되어 왔다. 본 연구에서는 C-H 계와 Si-Cl-H 계의 열역학적 분 석을 통하여 열역학이 어떻게 화학증착 공정에 응용될 수 있는가를 보여주려고 하였다. 각 공정변수가 증착 구동력에 미 치는 효과를 결정함으로서, C-H 계에서 다이아몬드가 증착될 수 있는 열역학적인 한계를 계산하였다. Si-Cl-H 계에서는 동 과포화도 곡선을 계산함으로써 화학증착 공정변수의 효과에 대한 부가적인 정보를 얻을 수 있었다.

• 대기
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• 제22권1호
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• pp.87-96
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• 2012

Aerosol number concentration ($N_{CN}$), size distribution and cloud condensation nuclei (CCN) concentration ($N_{CCN}$) were measured during 16-21 August 2008 at Daegwallyeong (DG) located in the eastern rural region of the Korean Peninsula. In the very next week (22-29 August 2008) the same aerosol properties were measured at Yeongjong Island (YJ) in the Yellow Sea. $N_{CN}$ for all 3 size cuts (above 3, 6 and 10 nm) was significantly higher at DG than YJ, but $N_{CCN}$ was significantly lower at the former and resulted in the $N_{CCN}/N_{CN}$ ratio more than twice higher at YJ ($0.94{\pm}0.09$ vs. $0.35{\pm}0.15$ at 0.53% supersaturation). The geometric mean diameter at DG, $53{\pm}15nm$, was much smaller than that at YJ, $91{\pm}6nm$, due to the particle formation events that were likely to have occurred continuously at DG. For given mean diameter, aerosols were more likely to act as CCN at YG compared to those at DG.

• 한국대기환경학회지
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• 제26권4호
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• pp.380-391
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• 2010

Airborne in-situ measurements of aerosol/cloud number concentrations were analyzed to investigate the effects of aerosols on warm cloud formation in the Pacific Dust Experiment (PACDEX) during April and May 2007. In the air masses originating from the Asian continent, high concentrations of fine particles including black carbon (BC) were observed when compared to other regions. A strong correlation (r=0.88) between condensation nuclei (CN) having sizes ranging from 0.1 to 1.0 mm ($CN_{0.1-1.0}$) and cloud condensation nuclei (CCN) at 0.4% supersaturation ($CCN_{0.4%}$) suggests that most of the $CN_{0.1-1.0}$ can contribute to cloud formation. The possibility of a cloud droplet formation by BC particles was expected at the high water vapor mixing ratio (WVMR) and the abundance of water-soluble components at the low altitude less than 3 km.