Diamond Synthesis by Acetylen Flame

아세틸렌 불꽃에 의한 다이아몬드 합성

  • 이윤석 (서울대학교 무기재료공학과) ;
  • 박윤휘 (서울대학교 무기재료공학과) ;
  • 이태근 (서울대학교 무기재료공학과) ;
  • 정수진 (서울대학교 무기재료공학과)
  • Published : 1992.12.01

Abstract

Uniform diamond films in a few $\textrm{mm}^2$ size and locally isolated diamond single crystals in size of 60 $\mu\textrm{m}$ were synthesized on Si-wafer and Al2O3 substrate by the method of acetylene flame. The effects of substrate temperature and flow ratio of oxygen to acetylene on the morphology of deposited diamond were investigated. According to the observations of growth behavior of diamond on Si substrate with respect to substrate surface pretreatment and flow ratio, it was shown that well faceted diamonds could grow uniformly when flow ratio was above 0.9 and substrates were densely scratched. With increasing substrates temperature, the crystal morphology changes from octahedron bounded by only {111} plane below 850$^{\circ}C$ to cubo-octahedron with almost equal development of {111} and {100} plane in the temperature range of 850∼950$^{\circ}C$. Between 950∼1050$^{\circ}C$, the {111} faces become rough and concave. Above 1050$^{\circ}C$, new crystallites begin to grow on concave {111} surface and overall morphology looks like cubo-octahedron with degenerated {111} faces. These changes of morphology can be understood in terms of the different growth mode of each crystallographic plane with respect to the substrate temperature and supersaturation. And the observed phenomena on {111} planes can be related to the face instability and twin generation.

Keywords

References

  1. J. Am. Ceram. Soc. v.72 no.2 Diamond-Ceramic Coating of the Future K.E. Spear
  2. New Diamond v.4 no.3 Diamond Synthesis in Air Using a Flame Y, Hirose
  3. U.S. Pat. Diamond Growth in Combustion Flame K.A. Snail;J.E. Butler
  4. Phys. Rev. v.B38 no.6 Synthesis of Diamond by Microwave Plasma CVD K. Kobashi;K. Nishimuraq;Y. Kawata;T. Horiuchi
  5. J. Mat. Res. v.5 no.11 Mechanism of diamond grown by hot-filament CVD: carbon 13 Study C.J. Chu;M.P. D'Evclyn;J.L. Margrave
  6. J. Cryst. Growth v.52 Vapor Growth of Diamond and Other Surfaces Spitsyn, L.;L. Bouilov;B.V. Deryagin
  7. Mat. Res. Soc. Symp. Proc. v.162 Synthesis of Metastable Diamond T.R. Anthony
  8. Jap. J. Appl. Phys. v.28 no.9 Flame Structure and Diamond Growth Mechanism of Acetylene Torch Y. Hirose
  9. Mat. Lett. v.7 no.7;8 Diamond Synthesis in Oxygen-Acetylene Torch L.M. Hanssen;W.A. Carrington;J.E. Butler;K.A. Snail
  10. Mat. Res. Soc. Symp. Proc. v.162 Thermodynamics and the CVD of Diamond W. Yarbrough
  11. Advanced in X-ray Analysis v.31 Defect Structure of Synthetic diamond and Related Phases A.R. Badzian;Barret(et al.)(ed.)
  12. Jap. J. Appl. Phys. v.29 no.8 The Growth Mechanism of Diamond Crystal in Acetylene Flames Y. Matsui;H. Yabe;Y. Hirose
  13. Surf. Sci. v.4 Low-energy Electron Diffraction Study of the (111) Diamond Surface J.J. Lander;J. Morrison
  14. J. Mat. Res. v.3 no.1 Growth of Vapor Deposited Diamond M. Frenklach;K.E. Spear
  15. J. Phys. Chem. v.92 Energetics of acetylene Addition Mechanism of Diamond Growth D. Huang;M. Frenkklach;M. Maroncelli
  16. Appl. Phys. Lett. v.53 Measurement of Stable Species Present During Filament-Assisted Diamond Growth S.J. Harris;A.M. Weiner;T.A. Perry
  17. J. Appl. Phys. v.68 no.12 Numerical Modeling of the Filament Assisted Diamond Growth Environment D.G. Goodwin
  18. Morphology of Crystals Transition from Polyedral to Dendritic Morphology T. Kuroda;T.Irisawa;A. Ookawa;I. Sunagawa(ed.)
  19. Modern Crystallography III Mass and Heat Transport. Growth Shape and Their Stability A.A. Chernov
  20. J. Appl. Phys. v.67 no.7 The Morphology Change in Diamond Synthesized by Hot Filament Chemical Vapor Deposition J.S. Kim;M.H. Kim;S.S. Park;J.Y. Lee
  21. J. Appl. Phys. v.69 no.9 Microstructure and Orientation Effect in Diamond Thin Film J.F. DeNatale
  22. Jap. J. Appl. Phys. v.30 no.1A Assignment of New Facets Developing on the {111} Surface of Vapor-Deposited Diamond Crystal K. Hirabayashi;N.I. Kurihara