• 제목/요약/키워드: substrate leading rate

검색결과 22건 처리시간 0.025초

A Study on Pressure Distribution for Uniform Polishing of Sapphire Substrate

  • Park, Chul jin;Jeong, Haedo;Lee, Sangjik;Kim, Doyeon;Kim, Hyoungjae
    • Tribology and Lubricants
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    • 제32권2호
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    • pp.61-66
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    • 2016
  • Total thickness variation (TTV), BOW, and surface roughness are essential characteristics for high quality sapphire substrates. Many researchers have attempted to increase removal rate by controlling the key process parameters like pressure and velocity owing to the high cost of consumables in sapphire chemical mechanical polishing (CMP). In case of the pressure approach, increased pressure owing to higher deviation of pressure over the wafer leads to significant degradation of the TTV. In this study, the authors focused on reducing TTV under the high-pressure conditions. When the production equipment polishes multiple wafers attached on a carrier, higher loads seem to be concentrated around the leading edge of the head; this occurs because of frictional force generated by the combination of table rotation and the height of the gimbal of the polishing head. We believe the skewed pressure distribution during polishing to be the main reason of within-wafer non-uniformity (WIWNU). The insertion of a hub ring between the polishing head and substrate carrier helped reduce the pressure deviation. Adjusting the location of the hub ring enables tuning of the pressure distribution. The results indicated that the position of the hub ring strongly affected the removal profile, which confirmed that the position of the hub ring changes the pressure distribution. Furthermore, we analyzed the deformation of the head via finite element method (FEM) to verify the pressure non-uniformity over the contact area Based on experiment and FEM results, we determined the optimal position of hub ring for achieving uniform polishing of the substrate.

판지공장 폐수 중 난분해성 유기물질이 동력학적 계수 및 생분해에 미치는 영향 (Effect of Recalcitrant Organics on Bio-kinetic Coeffcient and Biodegradable in Box-mill Wastewater)

  • 조용덕;이상화
    • 상하수도학회지
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    • 제20권3호
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    • pp.329-338
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    • 2006
  • The research aims to provide the basic data for practical applications by correlating the bio-kinetic coefficients with the load of recalcitrant organic matter in box-mill wastewater. The activated sludge process was employed to a Wastewater disposal plant in an industrial setting, increase of consequently leading to the organic load. The parameter values derived by Monod-kinetic analysis were as follows:specific substrate removal rate $K_{max}=0.17day^{-1}$, half saturation constants $K_s=60.37mg/l$, decay coefficient $K_d=0.142day^{-1}$, microbial yield coefficient y = 0.388mg/mg, and max specific growth rate ${\mu}_{max}=0.006day^{-1}$. In view of biodegradability, the $TCOD_{Mn}/TBOD_5$ ratios of inflow and outflow were 1.07 and 1.41, and the $SCOD_{Mn}/SBOD_5$ ratios of inflow and outflow were 1.10 and 1.50, respectively. The higher $TCOD_{Mn}/TBOD_5$ ratio of outflow indicated that metabolites of a microorganism have accumulated in the cells.

연속 회분식 혐기성 공정을 이용한 하수슬러지와 음식물쓰레기의 혼합소화 거동 특성 (EPerformance of high-rate anaerobic sequencing batch reactor treating sewage sludge and food waste)

  • 김현우;한선기;신항식
    • 유기물자원화
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    • 제12권1호
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    • pp.75-83
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    • 2004
  • 혐기성 소화효율의 극대화를 위해 온도상분리 공정과 혐기성 회분식 공정을 음식물 쓰레기와 하수슬러지의 혼합기질에 적용한 온도상분리 혐기성 회분식 소화공정(TPAD-ASBR)의 거동 특성을 유기물부하의 변화에 따라 평가하여 다음과 같은 결론을 얻었다. TPAD-ASBR 과 대조구의 첫 단에서 대부분의 메탄생성과 유기물 제거가 이루어졌으며, 단위부피당 메탄발생량은 유기물부하 2.7 g VS/L/d에서 각각 0.79와 0.59L $CH_4/L/d$ 였다. 동일 부하에서 TPAD-ASBR의 유기물 제거효율은 61%이었으며 40%의 효율을 보인 대조구에 비해 고온조를 도입한 본 공정의 우수성을 확인하였다. 국내 하수슬러지는 상대적으로 낮은 VS 농도(1.5%, w/w)와 낮은 생분해 효율을 보이는데, 이러한 부정적 특성을 보완하기 위하여 투입된 음식물쓰레기에 의한 기질 특성의 효과적인 개선으로 인해 높은 유기물 감량과 메탄회수가 가능하였다. 또한, track study를 통해 연속회분식 운전방식에 의한 settling 단계의 도입으로 SRT를 HRT보다 길게 유지하여 미처리 입자와 active biomass의 효율적이고 지속적인 접촉을 도모하여 보다 높은 안정화효율 획득이 가능한 것으로 사료된다. 따라서, 혐기성소화공정에 TPAD-ASBR공정과 함께 음식물쓰레기와의 혼합소화를 도입하는 것은 처분이 까다로운 두 가지의 폐기물을 고효율로 처리함과 동시에 효율적인 에너지회수가 가능하여 경제적 운전이 가능하였다.

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Optimization of Herbicidin A Production in Submerged Culture of Streptomyces scopuliridis M40

  • Ha, Sanghyun;Lee, Keon Jin;Lee, Sang Il;Gwak, Hyun Jung;Lee, Jong-Hee;Kim, Tae-Woon;Choi, Hak-Jong;Jang, Ja-Young;Choi, Jung-Sub;Kim, Chang-Jin;Kim, Jin-Cheol;Kim, Hyeong Hwan;Park, Hae Woong
    • Journal of Microbiology and Biotechnology
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    • 제27권5호
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    • pp.947-955
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    • 2017
  • Herbicidin A is a potent herbicide against dicotyledonous plants as well as an antibiotic against phytopathogens. In this study, fermentation parameters for herbicidin A production in submerged culture of Streptomyces scopuliridis M40 were investigated. The herbicidin A concentration varied with the C/N ratio. High C/N ratios (>4) resulted in a herbicidin A production of more than 900 mg/l, whereas maximally 600 mg/l was obtained at ratios between 1 and 3.5. In 5-L batch fermentation, there was a positive correlation between the oxygen uptake rate (OUR) and herbicidin A production. Once the OUR increased, the substrate consumption rate increased, leading to an increase in volumetric productivity. Mechanical shear force affected the hyphal morphology and OUR. When the medium value of hyphal size ranged from 150 to $180{\mu}m$, high volumetric production of herbicidin A was obtained with OUR values >137mg $O_2/l{\cdot}h$. The highest herbicidin A concentration of 956.6 mg/l was obtained at 500 rpm, and coincided with the highest relative abundance of hyphae of $100-200{\mu}m$ length and the highest OUR during cultivation. Based on a constant impeller tip speed, which affects hyphal morphology, herbicidin A production was successfully scaled up from a 5-L jar to a 500-L pilot vessel.

에폭시 프라이머 도료의 에어리스 스프레이 분사 시간에 따른 팁 노즐 침식마모경향과 분사특성 연구 (A study on the erosive wear of spray tip nozzle by epoxy primer paint impingement and the spraying characteristics)

  • 김진억;조연호;천제일;한명수
    • Corrosion Science and Technology
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    • 제14권2호
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    • pp.59-63
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    • 2015
  • Airless spray which is widely used for painting to ship blocks and hull sides is the coating method for attaching atomized paint material to the substrate using spray tip nozzle with compressed air. When the paint material which has high solid contents such as epoxy primer paint is atomized by passing through spray tip nozzle with high pressure, the nozzle composed of tungsten carbide(WC) undergoes the erosive wear, leading to widening of nozzle hole. The deformation of nozzle hole induces improper spray pattern and coating failures such as finger pattern and sagging because the conditions of spray pump pressure and paint flow rate for developing full spray pattern are changed. In this study, an appropriate replacement cycle of spray tip was predicted by measuring the erosive wear tendency as increasing the spraying time of epoxy primer paint.

Erosion Behavior of SiC Coated C/C Composites with Condition of Combustion Test

  • Joo, Hyeok-Jong;Min, Kyung-Dae;Lee, Jae-Won
    • Carbon letters
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    • 제4권3호
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    • pp.133-139
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    • 2003
  • Carbon/carbon composites are ideal candidates for a number of aerospace applications including structural materials for advanced vehicles, leading edges, structures of re-entry and hypersonic vehicles and propulsion systems. One serious defect for such application of the carbon/carbon composites is their poor oxidation resistance in high temperature oxidizing environments. SiC coating was employed to protect the composites from oxidation. It is mechanically and chemically stable under extreme thermal and oxidative environments, provides good adhesion to the substrate, and offers good thermal shock resistance. The SiC layer on the nozzle machined from the carbon/carbon composites was formed by pack-cementation method. Then, erosion characteristic of SiC coated carbon/carbon nozzle was examined by combustion test using a liquid rocket motor. The erosion rates were measured as function of combustion pressure, ratio of oxygen to fuel, combustion time, density of the composites and geometry of reinforced carbon fibre in the composites. The morphology change of the composites after combustion test was investigated using SEM and erosion mechanism also was discussed.

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Selection of Suitable Micellar Catalyst for 1,10-Phenanthroline Promoted Chromic Acid Oxidation of Formic Acid in Aqueous Media at Room Temperature

  • Ghosh, Aniruddha;Saha, Rumpa;Ghosh, Sumanta K.;Mukherjee, Kakali;Saha, Bidyut
    • 대한화학회지
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    • 제57권6호
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    • pp.703-711
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    • 2013
  • In the present investigation, kinetic studies of oxidation of formic acid with and without catalyst and promoter in aqueous acid media were studied under the pseudo-first order conditions [formic acid]T ${\gg}[Cr(VI)]_T$ at room temperature. In the 1,10-phenanthroline (phen) promoted path, the cationic Cr(VI) phen complex is the main active oxidant species undergoes a nucleophilic attack by the substrate to form a ternary complex which subsequently experiences a redox decomposition through several steps leading to the products $CO_2$ and $H_2$ along with the Cr(III) phen complex. The anionic surfactant (i.e., sodium dodecyl sulfate, SDS) and neutral surfactant (i.e., Triton X-100, TX-100) act as catalyst and the reaction undergo simultaneously in both aqueous and micellar phase with an enhanced rate of oxidation in the micellar phase. Whereas the cationic surfactant (i.e., N-cetyl pyridinium chloride, CPC) acts as an inhibitor restricts the reaction to aqueous phase. The observed net enhancement of rate effects has been explained by considering the hydrophobic and electrostatic interaction between the surfactants and reactants. The neutral surfactant TX-100 has been observed as the suitable micellar catalyst for the phen promoted chromic acid oxidation of formic acid.

세라믹튜브 및 패킹형플라스틱 여재충전 상향류식 혐기성여상에 의한 유가공 폐수처리 (Performances of Ceramic-tube and Pall-ring Upflow Anaerobic Filters Treating a Dairy Waste)

  • 허준무;장덕;배형석;김수영
    • 상하수도학회지
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    • 제14권1호
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    • pp.37-44
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    • 2000
  • Laboratory experiments were conducted to investigate the performances of anaerobic filters packed with ceramic tube and pall-ring media treating a dairy waste. The media packing volume was 65% of effective volume of anaerobic filter. Organics removals of anaerobic filters were maintained above 80% even at an organics loading rate of $10kgCOD/m^3/d$, and this was comparable to aerobic treatment of organic wastes. Organics removals of the ceramic tube anaerobic filters were always lower than those of the pall-ring anaerobic filters due to intrinsic physical property of ceramic tube, especially lower void space which caused to clogging and entrapment of biogas, substrate transfer limitation, and irregular evolution of biogas leading to loss of solids and biomass. This was clearly observed in higher concentration of TSS in the effluent from the ceramic tube anaerobic filter despite of higher retention capacity of TSS compared with pall-ring media. Vertical distribution of organics and solids in the filters showed above 90% of organics and solids in influent were removed below 20% of reactor height, and 50% of remaining organics and solids were removed though media packing zone. Effluent quality from the anaerobic filter was heavily depended on media itself as well as suspended biomass formed below media. It is therefore concluded that the type of media played an important role in biomass accumulation arid gas-liquid-solid separation efficiency. Type of media did not affect the start-up behaviors of the anaerobic filter, and supernatant from anaerobic digested sludge showed a good performance as a seeding materials.

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WC-10Co4Cr으로 초고속 화염용사 코팅된 Cu 합금의 해수내 캐비테이션 손상 거동 (Behaviors of Cavitation Damage in Seawater for HVOF Spray Coated Layer with WC-10Co4Cr on Cu Alloy)

  • 한민수;김민성;장석기;김성종
    • 한국표면공학회지
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    • 제45권6호
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    • pp.264-271
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    • 2012
  • Due to the good corrosion resistance and machinability, copper alloy is commonly employed for shipbuilding, hydroelectric power and tidal power industries. The Cu alloy, however, has poor durability, and the seawater application at fast flow condition becomes vulnerable to cavitation damage leading to economic loss and risking safety. The HVOF(High Velocity Oxygen Fuel) thermal spray coating with WC-10Co4Cr were therefore introduced as a replacement for chromium or ceramic to minimize the cavitation damage and secure durablility under high-velocity and high-pressure fluid flow. Cavitation test was conducted in seawater at $15^{\circ}C$ and $25^{\circ}C$ with an amplitude of $30{\mu}m$ on HVOF WC-10Co4Cr coatings produced by thermal spray. The cavitation at $15^{\circ}C$ and $25^{\circ}C$ exposed the substrate in 12.5 hours and in 10 hours, respectively. Starting from 5 hours of cavitation, the coating layer continued to show damage by higher than 160% over time when the temperature of seawater was elevated from $15^{\circ}C$ to $25^{\circ}C$. Under cavitation environment, although WC-10Co4Cr has good wear resistance and durability, increase in temperature may accelerate the damage rate of the coating layer mainly due to cavitation damage.

플라즈마 공정 변수가 $TiO_{2\pm}{\delta}$ 박막 형성에 미치는 영향 (Dependence of the Formation of $TiO_{2\pm}{\delta}$ Films on Plasma Process Variables)

  • 박상기;강봉주;이원희;이재갑
    • 한국재료학회지
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    • 제10권11호
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    • pp.732-737
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    • 2000
  • $TEMAT/H_2$플라즈마를 이용하여 $TiO_{2\pm}{\delta}$를 증착하였다. Power를 300W에서 500W로 증가시켜 고 밀도 플라즈마를 형성시킨 경우에는 Ti 함유량이 크게 증가하였고, 무시할 정도의 C, N이 함유되었다. 기판에 bias를 가한 경우에도 Ti 양이 증가되면서, 증착률이 크게 증가되었다. 또한 매우 적은 양의 $H_2O(~10^{-4}Torr)$는 TEAMT[tetrakis (ethylmethylamido) titanium] 분해를 효율적으로 이루어 주어 C, N의 양을 크게 감소시키면서 $TiO_2$에 요구되는 충분한 O을 제공하였다. 결과적으로 플라즈마 반응에 의하여 생성된 Ti 양이온이 TiOx 박막형성에 주요한 기여를 하고 있으며, 고 밀도 플라즈마의 사용은 Ti 양이온 생성을 크게 증가시켜 주고, 분위기 중에 존재하는 미량의 수분이 TEMAT 분해 효율성을 크게 하여 $TiO_2$박막증착을 이루고 있다.

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