• Title/Summary/Keyword: substrate layers

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Effects of Hydration Treatments on the Phase Transition of Anodic Aluminum Oxide Layers (알루미늄 양극산화 피막의 상전이에 미치는 수화처리의 영향)

  • Joo, E.K.;Kim, S.S.;Oh, H.J.;Cho, S.H.;Chi, C.S.
    • Korean Journal of Materials Research
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    • v.12 no.7
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    • pp.540-544
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    • 2002
  • Hydration treatments were performed on the pure aluminum substrate at $100^{\circ}C$ followed by anodizing and heat treatments on the layers. The transformation behaviors of the oxide layers according to the hydration treatment were studied using TEM, XRD, RBS etc. Above $90^{\circ}C$ the hydrous oxide film could be formed, which were turned out to be hydrous oxides(AlOOH $nH_2$O). The anodization on the hydrous oxide film was more effective for the transition of amorphous anodic oxides to the crystalline $\Upsilon-Al_2$ $O_3$ comparing with the case for anodizing on the aluminum substrate without hydration treatment And additional heat treatments were also helpful for the acceleration of the transformation of the hydrous oxide to $\Upsilon-Al_2$ $O_3$. During the heat treatment the interface between $\Upsilon-Al_2$ $O_3$and the hydrous oxide layers migrated to the outer side of hydrous layer.

A Study on Properties of $MgF_2$ antireflection film for solar cell (태양전지용 $MgF_2$ 반사방지막 특성연구)

  • Park, Gye-Choon;Yang, Hyeon-Hun;Baek, Su-Ung;Na, Kil-Ju;So, Soon-Youl;Lee, Jin;Chung, Hae-Deok
    • 한국신재생에너지학회:학술대회논문집
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    • 2009.11a
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    • pp.378-380
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    • 2009
  • $MgF_2$ is a current material for the optical applications in the UV and deep UV range. Process variables for manufacturing the $MgF_2$ thin film were established in order to clarify optimum conditions for growth of the thin film depending upon process conditions, and then by changing a number of vapor deposition conditions and substrate temperature, Annealing conditions variously, structural and Optical characteristics were measured. Thereby, optimum process variables were derived. Nevertheless, modern applications still require improvement of the optical and structural quality of the deposited layers. In the present work, the composition and microstructure of $MgF_2$ single layers grown on slide glass substrate by Electro beam Evaporator(KV-660) processes, were analyzed and compared. The surface Substrate temperature having an effect on the quality of the thin film was changed from $200[^{\circ}C]$ to $350[^{\circ}C]$ at intervals of $50[^{\circ}C]$. and annealing temperature an effect on the thin film was changed from $200[^{\circ}C]$ to $400[^{\circ}C]$ at intervals of $50[^{\circ}C]$. Physical properties of the thin film were investigated at various fabrication conditions substrate temperature, annealing and temperature, annealing time by XRD, FE-SEM.

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A Study on the Properties of MgF2 Antireflection Film for Solar Cells

  • Yang, Hyeon-Hun;Park, Gye-Choon
    • Transactions on Electrical and Electronic Materials
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    • v.11 no.1
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    • pp.33-36
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    • 2010
  • $MgF_2$ is a current material used for optical applications in the ultraviolet and deep ultraviolet range. Process variables for manufacturing $MgF_2$ thin film were established in order to clarify the optimum conditions for the growth of the thin film, dependant upon the process conditions, and then by changing a number of the vapor deposition conditions, substrate temperatures, and heat treatment conditions, the structural and optical characteristics were measured. Then, optimum process variables were thus derived. Nevertheless, modern applications still require improvement in the optical and structural quality of the deposited layers. In the present work, in order to understand the composition and microstructure of $MgF_2$, single layers grown on a slide glass substrate using an Electron beam Evaporator (KV-660), were analyzed and compared. The surface substrate temperature, having an effect on the quality of the thin film, was changed from $200^{\circ}C$ to $350^{\circ}C$ at intervals of $50^{\circ}C$. The heat treatment temperature, which also has an effect on the thin film, was changed from $200^{\circ}C$ to $400^{\circ}C$ at intervals of $50^{\circ}C$. The physical properties of the thin film were investigated at various fabrication conditions, such as the substrate temperature, the heat treatment temperature, and the heat treatment time, by X-ray diffraction, and field emission-scanning electron microscopy.

Study of High Speed Steel AISI M4 Powder Deposition using Direct Energy Deposition Process (DED 기술을 이용한 고속도 공구강 M4 분말 적층에 관한 연구)

  • Lee, E.M.;Shin, G.W.;Lee, K.Y.;Yoon, H.S.;Shim, D.S.
    • Transactions of Materials Processing
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    • v.25 no.6
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    • pp.353-358
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    • 2016
  • Direct energy deposition (DED) is an additive manufacturing technique that involves the melting of metal powder with a high-powered laser beam and is used to build a variety of components. In recent year, it can be widely used in order to produce hard, wear resistant and/or corrosion resistant surface layers of metallic mechanical parts, such as dies and molds. For the purpose of the hardfacing to achieve high wear resistance and hardness, application of high speed steel (HSS) can be expected to improve the tool life. During the DED process using the high-carbon steel, however, defects (delamination or cracking) can be induced by rapid solidification of the molten powder. Thus, substrate preheating is generally adopted to reduce the deposition defect. While the substrate preheating ensures defect-free deposition, it is important to select the optimal preheating temperature since it also affects the microstructure evolution and mechanical properties. In this study, AISI M4 powder was deposited on the AISI 1045 substrate preheated at different temperatures (room temperature to $500^{\circ}C$). In addition, the micro-hardness distribution, cooling rates, and microstructures of the deposited layers were investigated in order to observe the influence of the substrate preheating on the mechanical and metallurgical properties.

Characterization of GaN on GaN LED by HVPE method

  • Jung, Se-Gyo;Jeon, Hunsoo;Lee, Gang Seok;Bae, Seon Min;Kim, Kyoung Hwa;Yi, Sam Nyung;Yang, Min;Ahn, Hyung Soo;Yu, Young Moon;Kim, Suck-Whan;Cheon, Seong Hak;Ha, Hong Ju;Sawaki, Nobuhiko
    • Journal of Ceramic Processing Research
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    • v.13 no.spc1
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    • pp.128-131
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    • 2012
  • The selective area growth light emitting diode on GaN substrate was grown using mixed-source HVPE method with multi-sliding boat system. The GaN substrate was grown using mixed-source HVPE system. Te-doped AlGaN/AlGaN/Mg-doped AlGaN/Mg-doped GaN multi-layers were grown on the GaN substrate. The appearance of epi-layers and the thickness of the DH was evaluated by SEM measurement. The DH metallization was performed by e-beam evaporator. n-type metal and p-type metal were evaporated Ti/Al and Ni/Au, respectively. At the I-V measurement, the turn-on voltage is 3 V and the differential resistance is 13 Ω. It was found that the SAG-LED grown on GaN substrate using mixed-source HVPE method with multi-sliding boat system could be applied for developing high quality LEDs.

Structure of epitaxial MgO layers on TiC(001) studied by time-of-flight impact-collision ion scattering spectroscopy (비행시간형 직충돌 이온산란 분광법을 사용한 TiC(001)면에 성장된 MgO막의 구조해석)

  • Hwang, Yeon;Souda, Ryutaro
    • Journal of the Korean Vacuum Society
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    • v.6 no.3
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    • pp.181-186
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    • 1997
  • Time-of-flight impact-collision ion scattering spectroscopy (TOF-ICISS) was applied to study the geometrical structure of epitaxially grown MgO layers on a TiC(001). The hetero-epitaxial MgO layer was able to be deposited by thermal evaporation of magnesium onto the TiC(001) surface and subsequent exposure of oxygen at room temperature. A slight heating of the substrate at around $300^{\circ}C$ was necessary to overcome a thermal barrier for the ordering. The well-ordered MgO structure was confirmed with the 1$\times$1 LEED pattern. TOF-ICISS was useful in studying interface structure between oxide and substrate. The results revealed that the MgO layer is formed at the on-top sites of the TiC(001) substrate and the lateral lattice constant of MgO layer is the same as that of the TiC substrate. The MgO was deposited within two layers on the most parts of the surface.

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Noble LCD with a Single Supporting Substrate

  • Wook, Jung-Jong;Kim, Jae-Hoon
    • Journal of Information Display
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    • v.3 no.4
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    • pp.4-7
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    • 2002
  • A recently developed phase separated composite film method has been employed to fabricate a liquid crystal (LC) based electro-optical device using a single glass substrate. The resulting device is made of adjacent parallel layers of LC and polymer maded by phase separation. The LC layer is confined between the solidified polymer layer on one side and the glass substrate on the other. The electro-optical properties of these devices demonstrate their technological potential in light weight and hand-held electronic products.

Noble LCD with a single supporting substrate

  • Kim, Il;Kim, Jae-Hoon;Agra-Kooijman, Dena M.;Kumar, Satyendra
    • 한국정보디스플레이학회:학술대회논문집
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    • 2002.08a
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    • pp.463-466
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    • 2002
  • A new type of LCD has been developed using recently developed phase separated composite film method with a single glass substrate. The resultant structures are made of adjacent parallel layers of liquid crystal and polymer. The LC layer is confined between the solidified polymer layer and glass substrate. The electra-optical properties of the display have been investigated. This technique has the potential to realize a lightweight display for hand-held portable electronic products.

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A study on the formation of cobalt silicide thin films in Co/Si systems with different capping layers (Co/Si 시스템에서 capping layer에 따른 코발트 실리사이드 박막의 형성에 관한 연구)

  • ;;;;;;;Kazuyuki Fujihara
    • Journal of the Korean Vacuum Society
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    • v.9 no.4
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    • pp.335-340
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    • 2000
  • We investigated the role of the capping layers in the formation of the cobalt silicide in Co/Si systems with TiN and Ti capping layers and without capping layers. The Co/Si interfacial reactions and the phase transformations by the rapid thermal annealing (RTA) processes were observed by sheet resistance measurements, XRD, SIMS and TEM analyses for the clean silicon substrate as well as for the chemically oxidized silicon substrate by $H_2SO_4$. We observed the retardation of the cobalt disilicide formation in the Co/Si system with Ti capping layers. In the case of Co/$SiO_2$/Si system, cobalt silicide was formed by the Co/Si reaction due to with the dissociation of the oxide layer by the Ti capping layers.

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Silicidation and Thermal Stability of the So/refreactory Metal Bilayer on the Doped Polycrystalline Si Substrate (Co/내열금속/다결정 Si 구조의 실리사이드화와 열적안정성)

  • 권영재;이종무
    • Journal of the Korean Ceramic Society
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    • v.36 no.6
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    • pp.604-610
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    • 1999
  • Silicide layer structures and morphology degradation of the surface and interface of the silicide layers for he Co/refractory metal bilayer sputter-deposited on the P-doped polycrystalline Si substrate and subjected to rapid thermal annealing were investigated and compared with those on the single Si substrate. The CoSi-CoSi2 phase transition temperature is lower an morphology degradation of the silcide layer occurs more severely for the Co/refractorymetal bilayer on the P-doped polycrystalline Si substrate than on the single Si substrate. Also the final layer structure and the morphology of the films after silicidation annealing was found to depend strongly upon the interlayer metal. The layer structure after silicidation annealing of Co/Hf/doped-poly Si is Co-Hf alloy/polycrystalline CoSi2/poly Si substrate while that of Co/Nb is polycrystalline CoSi2/NbSi2/polycrystalline CoSi2/poly Si.

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