Effects of Substrate Temperature and Sputter Gas on the Physical Characteristics, Chemical Composition and Preferred Orientation of ZnO Thin Films (기판온도 및 스퍼터가스에 따른 ZnO 박막의 우선배향성, 화학조성, 물리적특성 변화)
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- Journal of the Korean Ceramic Society
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- v.34 no.12
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- pp.1227-1234
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- 1997