• 제목/요약/키워드: sublimation method

검색결과 159건 처리시간 0.026초

점착방지를 위한 승화건조기의 설계방법 (Design Method for Sublimation Drying System for Prevention of Stiction)

  • 김종팔;이상우;전국진;조동일
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1998년도 하계학술대회 논문집 G
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    • pp.2550-2552
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    • 1998
  • The stiction phenomena poses a design constraint in surface micromachining by reducing the releasable size of the microstructure. This problem occurs during the fabrication process of surface micromachined microstructures during the wet etch of sacrificial layers. For the prevention of the sticking problem, the microsctructure is released by sublimation after the substitution of the sacrificial layer etchant with a sublimation material heated above its melting temperature. In the sublimation drying method, the sublimation materials such as p-dichlorobenzene, t-butyl alcohol, and cyclohexane are used. In this paper, a method for designing a sublimation drying system is developed, and its performance is experimentally evaluated.

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Reduction of Vacuum Sublimation by Ion Beam Treatment for e-beam Deposited SiC Films

  • Kim, Jaeun;Hong, Sungdeok;Kim, Yongwan;Park, Jaewon
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.138.1-138.1
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    • 2013
  • We present the low temperature (${\leq}1,000^{\circ}C$) vacuum sublimation behavior of an e-beam evaporative deposited on a SiC film and a method to reduce the vacuum sublimation through an ion beam process. The density of the SiC film deposited using the e-beam evaporation method was ~60% of the density of the bulk source material. We found that the sublimation became appreciable above ${\sim}750^{\circ}C$ under $1.5{\times}10^{-5}$ torr pressure and the sublimation rate increased with an increase in temperature, reaching ~70 nm/h at $950^{\circ}C$ when the coated sample was heated for 5 h. When the film was irradiated with 70 keV N+ ions prior to heating, the sublimation rate decreased to ~23 nm/h at a fluence of $1{\times}10^{17}\;ions/cm^2$. However, a further increase in fluence beyond this value or an extended heating period did not change (decrease or increase) the sublimation rate any further.

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Torsion-Effusion 법에 의한 Bismuth Triiodide의 승화압과 표준 엔탈피 (Sublimation Pressure and Standard Enthalpy of Bismuth Triiodide by Torsion-Effusion Method)

  • 김준학
    • 한국세라믹학회지
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    • 제28권2호
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    • pp.109-118
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    • 1991
  • Steady-state sublimation vapour pressures of anhydrous bismuth triiodide have been measured by the torsion-effusion method from 488.8 to 570.5 K and equilibrium sublimation pressures were obtained from the steady-state data. The standard sublimation enthalpy changes derived by both second(modified sigma function) and third(average enthalpy method) law methods were 159.316${\pm}$0.055, 137.67${\pm}$1.43 kJ$.$mol-1 respectively. The standard sublmation entropy change derived by modified sigma function was 232.88${\pm}$0.10 J$.$K-1$.$mol-1. The reliable standard sublimation enthalpy change based on a correlation of {{{{ { TRIANGLE }`_{cr } ^{g } }} H{{{{ { 0} atop {m } }}(298.15K) and {{{{ { TRIANGLE }`_{cr } ^{g } }} S{{{{ { 0} atop {m } }}(298.15K), a recommended p(T) equation has been obtained for BiI3(cr) ; lg(p/Pa)=-(C$.$K/T)+5.071lg(T/K)-2.838${\times}$10-3(T/K)-7.758${\times}$103(K/T)2+1.4519 where C={{{{{ { TRIANGLE }`_{cr } ^{g } }} H{{{{ { 0} atop {m } }}(298.15K)/0.019146 kJ$.$mol-1}-456.27.

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$BiI_3$에 대한 승화압과 승화 표준 엔탈피 (The Sublimation Pressure and Standard Enthalpy of Sublimation of Bismuth Triiodide)

  • 김준학
    • 한국세라믹학회지
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    • 제27권7호
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    • pp.943-951
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    • 1990
  • Steady-state sublimation vapour pressures of anhydrous bismuth triiodide have been measured by the continuous gravimetric Kundsen-effusion method from 430.0 to 558.9 K and equilibrium sublimation pressures were obtained from the steady-state data. Condensation coefficients and their temperature dependence have been derived from the effusiion measurement. Condensation coefficients ranged from 0.159 to 0.048(475 to 500K), the activation enthalpy and entropy for condensation have been obtained as -93.38kTmol-1 and -212.70JK-1mol-1. The standard sublimation enthalpy changes derived by both second(modified sigma function) and third(average enthalpy method) law methods were 138.261$\pm$0.023, 138.74$\pm$0.002kJmol-1 respectively. The standard sublimation entropy change derived by modified sigma function was 191.98$\pm$0.047 JK-1mol-1. The reliable standard sublimation enthalpy change based on a correlation of ΔgcrHom(298.15K) and ΔgcrSom(298.15K), a recommended p(T) equation has been obtained for BiI3(cr) ; 1g(p/Pa)=-C/(T/K)+5.0711g(T/K)-2.838$\times$10-3(T/K)-7.758$\times$103(K/T)2+1.4519 where p is in Pa, T in Kelvin, ΔgcrHom(298.15K) in kJmol-1 and C=(ΔgcrHom(298.15K)-8.7358)/1.9146$\times$10-2.

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다환 방향족 탄화수소(PAH) 분해 미생물 탐색을 위한 승화법의 개발 (Application of a Modified Sublimation Method to Screen for PAH-Degrading Microorganisms)

  • 권태형;김준태;김종식
    • 미생물학회지
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    • 제46권1호
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    • pp.109-111
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    • 2010
  • 다환 방향족 탄화수소(PAH; polycyclic aromatic hydrocarbon)는 발암성, 돌연변이 유발성, 유전독성을 지니기 때문에 인체위해성이 큰 물질로 알려져 있다. 기존 PAH 분해 미생물 탐색 방법중 독성이 강한 유기용매에 PAH를 용해시켜 미생물에 직접 분무하는 분무법, 미생물과 직접 혼합하는 한천중층법은 미생물 생장에 영향을 줄 뿐만 아니라, 특히 많이 쓰이는 분무법의 경우 분무되는 PAH의 양을 조절하기가 어렵고 멸균상태를 유지하기가 힘들다는 단점이 있다. 그래서 본 논문에서는 이와 같은 단점을 보완한 방법으로 승화법(Alley, Jeremy F. and Lewis R. Brown. 2000. Use of sublimation to prepare solid microbial media with water-insoluble substrates. Appl. Environ. Microbiol. 66, 439-442)을 도입하여 적용하였다. 그 결과 상용휘발유 및 태안유류유출지 시료로부터 분리한 350분리균주 중에서 7균주가 단일 PAH 또는 복수의 PAH 분해에 관여했다. 특히 Corynebacterium sp. SK20, Rhodococcus sp. TA24, Streptomyces sp. TA27은 시험한 pyene, phenanthrene, naphthalene에, Gordonia sp. H37는 pyrene, naphthalene에, Arthrobacter sp. S49는, naphthalene, phenanthrene에 활성이 있었다.

한국 청소년의 공격성 순화 프로그램 개발 (Development of a Sublimation Program for Korean Adolescents′ Aggression)

  • 김현실
    • 대한간호학회지
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    • 제34권1호
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    • pp.81-92
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    • 2004
  • Purpose: The purpose of this study was to identify a path diagram for the influence of family, personality, sexual abuse, drug abuse, coping strategies, and aggressive impulsiveness on aggression, and to develop a sublimation program for Korean adolescent's aggression. Method: Data was collected by self-report questionnaires. Subjects consisted of 2,111 adolescents. A proportional stratified random sampling method was used. The major instrument was the Mental Health Questionnaire for Korean Adolescents, and the Cronbach's Alpha ranged from .54 to .95 for each subscale. Statistical methods were Chi-square, correlation analysis, and path analysis. Results: The strongest contributing variables on aggression were person-related aggressive impulsiveness, antisocial personality, self-injured aggressive impulsiveness, gender, sexual abuse, psychosomatic symptoms II, drug abuse, age, parent-child relationship, alcohol abuse and cognitive avoidance coping strategies in the order named. Also the author developed a multi-systemic sublimation program for Korean adolescents's aggression. The multi-systemic sublimation program involves four domains including adolescents, parents, peers and community, and has several therapeutic sub-programs for each domain. Conclusion: The ecology of human development is composed of multiple, integrated levels of organization, including biological, individual-psychological, social-interpersonal, cultural, and historical levels. Therefore, this multi-systemic sublimation program will prevent and decrease the rate of aggressive behavior among Korean adolescents.

고정격자를 이용한 동결건조 해석프로그램의 개발 (Development of Freeze Drying Analysis Program using Fixed Grid)

  • 남진현;송치성;김찬중
    • 설비공학논문집
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    • 제16권10호
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    • pp.923-931
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    • 2004
  • A multi-dimensional freeze drying analysis program, which took simultaneous heat and mass transfer, sublimation of ice and motion of sublimation front into full account, was developed using finite volume method with fixed grid. The effect due to the motion of sublimation interface was modeled by an enthalpy formulation streamlined for the freeze drying problems. The efficiency and accuracy of the program was validated by solving one- and two-dimensional freeze drying problems frequently encountered in industrial processes. Finally, the freeze drying processes of cylinder and slab objects with permeable side surfaces were simulated, which demonstrated the capability of the present analysis program in solving multi-dimensional freeze drying problems with complex sublimation interface configurations.

승화 건조모델에 대한 운전방법별 건조시간의 예측 (Prediction of the Drying Time under the Various Operational Conditions using a Sublimation Model)

  • 박노현;배신철
    • 대한기계학회논문집
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    • 제17권8호
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    • pp.2088-2098
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    • 1993
  • A mathematical model of freeze drying by sublimation was suggested and used to estimate the drying time. Under the various conditions, the drying time of pure water and carrot was numerically calculated for the suggested model. Optimal policies of freeze drying were investigated experimentally in a laboratory freeze dryer. It was found that the shortest drying times could be obtained when the chamber pressure and condenser temperature were kept at their lowest values and the best method of heat transfer for sublimation was the conduction involving radiation. The sublimation drying period was finished when the bottom temperature of material could be reached at near $0^{\circ}C$ from frozen temperature.

고정격자계에서 유한체적법을 이용한 진공동결건조 과정의 열 및 물질전달에 대한 연구 (A Fixed Grid Finite Volume Analysis of Multi-Dimensional Freeze Drying Process under Vacuum Condition)

  • Chi-Sung, Song
    • Journal of Advanced Marine Engineering and Technology
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    • 제28권6호
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    • pp.981-992
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    • 2004
  • Freeze drying under vacuum condition is a complex process that involves simultaneous heat and mass transfer, sublimation of ice, and motion of sublimation front. Proper treatment of the motion of sublimation interface is crucial for an accurate prediction of the freeze drying process. Based on the enthalpy formulation that has been successfully used in liquid/solid phase change problems. a fixed grid method. streamlined for the freeze drying analysis. was developed in this study. The accuracy of the fixed grid method was checked by solving a one-dimensional tray freeze drying and a two-dimensional vial freeze drying problem and then comparing the results with those by the moving grid method. Finally. the freeze drying characteristics of two-dimensional slab and axis-symmetric cylinder was investigated using the fixed grid method.

유기화합물의 승화열 예측을 위한 QSPR분석 (QSPR analysis for predicting heat of sublimation of organic compounds)

  • 박유선;이종혁;박한웅;이성광
    • 분석과학
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    • 제28권3호
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    • pp.187-195
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    • 2015
  • 승화열은 대기 유기 오염물질의 확산에 관련된 환경적인 문제를 해결하거나, 위험한 화학 물질의 위해성을 평가하는 데에 중요한 변수이다. 하지만 실험적으로 승화열을 측정하려면 많은 시간과 비용이 소모 되며, 그 실험자체도 복잡하고 위험하다. 따라서 본 연구에서는 유기화합물의 승화열을 간단하게 예측하는 모델을 개발하기 위하여 정량적 구조-물성 상관관계 연구를 이용하였다. 군기반 전진선택방법을 적용하여 다중선형회귀방법과 서포트 벡터 머신과 같은 학습방법에 적합한 분자표현자들을 선택하도록 하였다. 개별 모델과 복합모델들은 부스트래핑 방법과 y-임의추출법에 의해 내부검증이 되었다. 외부 테스트 데이터의 예측 성능은 적용범위를 고려하므로서 개선되었다. 다중선형회귀모델에 따르면, 승화열은 분자간의 분산력, 수소결합, 정전기적 상호작용, 쌍극자-쌍극자 상호작용과 관련이 있는 것을 나타낼 수 있었다.