• Tribology and Lubricants
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• 제34권6호
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• pp.226-234
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• 2018

Copper chemical mechanical planarization (CMP) has become a key process in integrated circuit (IC) technology. The results of copper CMP depend not only on the mechanical abrasion, but also on the slurry chemistry. The slurry used for Cu CMP is known to have greater chemical reactivity than mechanical material removal. The Cu CMP slurry is composed of abrasive particles, an oxidizing agent, a complexing agent, and a corrosion inhibitor. Citric acid can be used as the complexing agent in Cu CMP slurries, and is widely used for post-CMP cleaning. Although many studies have investigated the effect of citric acid on Cu CMP, no studies have yet been conducted on the interfacial friction characteristics and step height reduction in CMP patterns. In this study, the effect of citric acid on the friction characteristics and step height reduction in a copper wafer with varying pattern densities during CMP are investigated. The prepared slurry consists of citric acid ($C_6H_8O_7$), hydrogen peroxide ($H_2O_2$), and colloidal silica. The friction force is found to depend on the concentration of citric acid in the copper CMP slurry. The step heights of the patterns decrease rapidly with decreasing citric acid concentration in the copper CMP slurry. The step height of the copper pattern decreases more slowly in high-density regions than in low-density regions.

• 대한인간공학회지
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• 제11권2호
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• pp.57-67
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• 1992

This study is to investigate the fitness of tight skirt in moving lower limb. The fit- ness was tested by measuring the step length, stride length, maximum stair step height. One humdred and twenty female subjects participated in the experiment. It was shown that the tight skirt caused the most reduction in the maximum stair step height among the five lengths measured. It was also shown that the long tight skirt limited the maximum stair step height more than the mini tight skirt.

• 한국군사과학기술학회지
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• 제20권4호
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• pp.497-504
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• 2017

This paper proposes a method to measure the airburst height by utilizing a high speed camera. This method might be applied to the test of which flight target is alive after the burst. The proposed method consists of four main steps. The first step is to compute the impact point using the sea surface height. The second step is to compute the height of burst (HOB) by using the distance from the camera to the impact point. This could be different from the real explosion height. That is because the distance from the camera to the burst point is not the same as it from the camera to the impact point. Therefore, the third step is to calculate the approach angle of the flight target with respect to the installed camera. Then, the last step is to compensate the computed height by using the approach angle. The result of the proposed method is compared with it from the triangulation. In this paper, the HOB error is also analyzed regarding the approach angle difference. Based on this analysis, the camera position might be suggested for error reduction.

• Journal of Magnetics
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• 제2권3호
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• pp.67-71
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• 1997

A new hot-forming process has been studied to produce anisotropic Nd-Fe-B based magnets from melt-spun ribbons. The ribbon fragments were inserted in a Cu tube and hot-deformed together with one-stroke. At a height reduction ratio of 0.44, the melt-spun ribbons were densified into a magnet with a density of 7.14 g/cm3, and showed a (BH)max of 14.6 MGOe. With further deformation, the magnets were plastically deformed with Cu tubes in the lateral direction, and crystallographic anisotropy was introduced. The magnets with a height reduction ratio of 0.75 exhibited magnetic properties of (BH)max = 32.1 MGOe, Br = 11.7 kG, and iHc = 10.6 kOe. This process shows the possibility that the conventional hot-pressing and subsequent die-upsetting for anisotropic magnets can be simplified into a one-step process.

• 한국광학회지
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• 제22권3호
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• pp.129-133
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• 2011

2-파장 홀로그래피에서 수정된 화인 맵을 이용하여 2-파장 홀로그래피에서 발생하는 잡음 증폭현상을 줄이는 연구를 수행하였다. 일반 적인 화인 맵은 측정체의 단차가 2-파장 홀로그래피에 사용되는 광원의 파장보다 작은 경우에는 잡음을 잘 줄일 수 있으나, 단차가 파장 보다 큰 경우에는 측정 결과에 영향을 주어 잘못 된 측정 결과를 보인다. 이러한 오차를 줄이기 위하여 수정된 화인 맵을 이용하였으며, 그 결과 측정체의 단차가 파장 보다 큰 경우에도 측정에 영향을 주지 않고 잡음을 줄일 수 있음을 확인 하였다.

• 소성∙가공
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• 제8권2호
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• pp.135-142
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• 1999

Tube Process(TP) is one of the processes to produce permanent magnets. Advantage claimed for this process is that it can accmplish both densification and anisotropication in one step forming. This process is distinguished from other processes since it uses deformable tube for densification of powder magnets. TP has, however, difficulties in manufacturing permanent magnets from Nd-Fe-B green powder due to folding resulted from large height reduction and localized densification. Therefore, an adequate preform is necessary to reduce folding resulted from large height reduction and localized densification. Therefore, an adequate preform is necessary to reduce folding, lead magnets into almost desired final shape and get uniform densification. In this paper, preform design for TP is carried out without a deformable tube to investigate the behaviour of magnet sinter-forging. Preform design is accomplished to increase the effective magnet area with a near net shape and uniform densification.

• 대한화학회지
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• 제26권6호
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• pp.389-395
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• 1982

아세토니트릴용액 중에서 4-(2-pyridylazo)-resorcinol(PAR)의 폴라그래프법적 성질을 연구하였다. 아세토니트릴에서 PAR은 두 개의 환원파를 나타내었다. 각 환원파의 환원전류가 어떤 유형인가를 조사하기 위하여 수은기둥의 높이, 용액의 온도, PAR의 농도에 따른 한계전류의 변화를 측정하였다. 결과, 환원전류는 확산에 의한 것임을 알았다. 그리고 PAR의 직류폴라그램에 대한 양성자주게인 물과 페놀의 첨가에 따른 영향과 가역성 등을 조사하였다. 이상의 실험결과로부터 아세노니트릴용매 중에서 PAR의 환원은 1전자 2단계임을 알 수 있었다.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2001년도 춘계 학술대회논문집
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• pp.60-65
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• 2001

The projectile afterbodies for zero-lift drag reduction has been analyzed using the Navier-Stokes equations with the $\kappa-\epsilon$ turbulence model. The numerical method of a second order upwind scheme has been used on unstructured adaptive meshes. Base drag reduction methods that have been found effective on axisymmetric bodies include boattailing, base bleed, base comustion, locked vortex afterbodies and multistep afterbodies. In this paper, the charateristics of turbulence flow have been studied for geomeries of multistep afterbodies. The important geometrical and flow parameters relevant to the design of such afterbodies have been identified by number, length and height of step. The flow over multistep afterbodies has been analyzed including expansion waves, recompression waves, recirculating flow, shear flow and wake flow. The numerical results have been compared and analyzed with the experimental datum.

• 대기
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• 제25권3호
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• pp.473-482
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• 2015

In this study, street canyons with a higher downwind building (so called, step-up street canyons) are considered for understanding characteristics of flow and reactive pollutants' dispersion as a basic step to understand the characteristics in wider urban areas. This study used a CFD_NIMR_SNU coupled to a chemistry module just including simple $NO_X-O_3$ photochemical reactions. First, flow characteristics are analyzed in step-up street canyons with four aspect ratios (0.33, 0.47, 0.6, 0.73) defined as ratios of upwind building heights to downwind building height. The CFD_NIMR_SNU reproduced very well the main features (that is, vortices in the street canyons) which appeared in the wind-tunnel experiment. Wind speed within the street canyons became weak as the aspect ratio increased, because volume of flow incoming over the upwind building decreased. For each step-up street canyon, chemistry transport model was integrated up to 3600 s with the time step of 0.5 s. The distribution patterns of $NO_X$ and $O_3$ were largely dependent on the mean flow patterns, however, $NO_X$ and $O_3$ concentrations were partly affected by photochemical reactions. $O_3$ concentration near the upwind lower region of the street canyons was much lower than background concentration, because there was much reduction in $O_3$ concentration due to NO titration there. Total amount of $NO_X$ in the street canyons increased with the aspect ratio, resulting from the decrease of mean wind intensity.

• 자원리싸이클링
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• 제26권3호
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• pp.39-46
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• 2017

탄소환원질화법을 이용하여 질화알루미늄(Aluminum Nitride: AlN)을 제조하는 연구를 실험실 규모로 수행하였다. 고품위 알루미나 분말과 탄소(carbon black)를 배합하여 흑연 도가니에 장입하고, 노내 분위기를 진공으로 한 다음 질소 가스를 흘려주어 온도($1,600{\sim}1,700^{\circ}C$), 시간(0.5~6 hr), $N_2$유량($4.7{\times}10^{-6}{\sim}20{\times}10^{-6}m^3/sec$), 장입 시료층 높이(0.5~20 mm)를 변화시키면서 AlN을 합성하였다. 실험결과, 고순도 알루미나와 탄소 혼합물을 질소 분위기의 $1600{\sim}1700^{\circ}C$ 온도 범위에서 반응시킬 때 반응 온도가 높을수록 생성된 AlN의 1차 입자 크기가 커지고, 반응 활성화 에너지는 382 kJ/mol로 화학 반응이 율속 단계로 판단되었다. 시험 제조한 AlN들의 산소 함량은 0.71~0.96 wt%였고, 질소는 30.7~35.1 wt%로서 상용 제품과 근접한 결과를 나타내었다.