• International Journal of Control, Automation, and Systems
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• 제4권1호
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• pp.1-9
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• 2006

This paper presents the modeling and multivariable feedback control of a novel high-precision multi-dimensional positioning stage. This integrated 6-degree-of-freedom. (DOF) motion stage is levitated by three aerostatic bearings and actuated by 3 three-phase synchronous permanent-magnet planar motors (SPMPMs). It can generate all 6-DOF motions with only a single moving part. With the DQ decomposition theory, this positioning stage is modeled as a multi-input multi-output (MIMO) electromechanical system with six inputs (currents) and six outputs (displacements). To achieve high-precision positioning capability, discrete-time integrator-augmented linear-quadratic-regulator (LQR) and reduced-order linearquadratic-Gaussian (LQG) control methodologies are applied. Digital multivariable controllers are designed and implemented on the positioning system, and experimental results are also presented in this paper to demonstrate the stage's dynamic performance.

• 한국정밀공학회지
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• 제23권1호
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• pp.129-135
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• 2006

In this study, a two-axis ultra-precision stage driven by piezoelectric elements is presented. The stage has a flexure-type parallel linear guide mechanism consisting of quad-symmetric simple parallel linear springs and quad-symmetric double compound linear springs. While the simple parallel linear springs guide the linear motion of a moving plate in the stage, the double compound linear springs follow the motion of the simple parallel linear spring as well as compensate the parasitic motions caused by the simple parallel linear springs. The linear springs are designed by rectangular beam type flexures that are deformed by bending deflection rather than axial extension, because the axial extension is smaller than the bending deflection at the same force. The designed guide mechanism is analyzed by finite element method(FEM). Then two-axis parallel linear stage is implemented by the linear guide mechanism combined with piezoelectric elements and capacitance type displacement sensors. It is shown that the manufactured ultra-precision stage achieves 3 nm of resolution in x- and y-axis within 30 ${\mu}m$ of operating range.

• 한국정밀공학회지
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• 제32권1호
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• pp.107-111
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• 2015

This paper proposes an optimal design for a precision motion stage employing a parallelogram flexure hinge. The voltage applied to the piezo element produces motion that is amplified through a 3-stage amplification structure. Especially, instead of the generally used conic section flexure hinge a parallelogram shaped flexure hinge is used that improves the flexibility of the lever. An Finite Element Analysis is performed on each motion stage lever where optimal design was achieved using Response Surface Methodology(RSM).

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.455-458
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• 2002

In recent years, precision positioning stage is demanded fur some industrial fields such as semi conductor lithography, ultra precision machining and fabricating of nano structure. In this research, precision multi-axis positioning stage, which consists of pzt actuator, flexure, and capacitance gauge, is designed and developed. The performance of it such as 3-axis positioning, characteristic of motion and resolution is verified.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 추계학술대회 논문집
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• pp.671-672
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• 2006

• 한국기계가공학회지
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• 제11권2호
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• pp.112-117
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• 2012

This paper presents a new stopper mechanism for precision stage by using the Piezoelectric element actuator. The new stage including a new stopper mechanism has the precision positioning mechanism that was been developed for generation displacements with nanometer accuracy and a millimeter dynamic range simulataneouly. The stage is composed not of the mechanical two stopper but of only one Piezoelectric element actuator. The characteristics for the new stage and the stopper have been evaluated experimentally. As the results, we can know that the linearity error characteristics of stage is 30nm in the $20{\mu}m$ measurement range. In addition, the experimental results are confirmed the possibility of the movement in millimeter range.

• 한국정밀공학회지
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• 제32권3호
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• pp.263-268
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• 2015

This paper describes lost motion analysis for a novel 6-DOF ultra-precision positioning stage. In the case of flexure hinge based precision positioning stage, lost motion is generated when the displacement of actuator is not delivered completely to the end-effector because of the elasticity of flexure hinge. Consequently, it is need to compute amount of lost motion to compensate the motion or to decide appropriate control method for precision positioning. Lost motion analysis for the vertical actuation unit is presented. The analysis results are presented in two ways: analytic and numerical analyses. It is found that they closely coincide with each other by 1% error. In finite element analysis result, the amount of lost motion is turned out to be about 3%. Although, the amount is not so large, it is necessary procedure to check the lost motion to establish the control method.

• 한국정밀공학회지
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• 제27권12호
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• pp.59-66
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• 2010

We developed a model-based controller for 6-DOF micropositioning of a precision stage using $H_{\infty}$ norm, For the design, a state-space system of the mathematical model of the stage is derived In developing the controller, weighting functions are effectively designed in consideration of upper bounds of the sensitivity of the control loop and control input. Step responses in open and closed loop control are provided to verify the micropositioning performance of the stage. By applying the developed controller we prove that the inverse of the weighting function forms the upper bound of the control loop. It is also found that the controller makes the same sensitivity shape with all the DOFs due to the use of $H_{\infty}$ norm. The developed controller is expected to be applied successfully for industrial use.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 추계학술대회 논문집
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• pp.537-538
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• 2006

• 한국정밀공학회지
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• 제31권5호
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• pp.423-430
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• 2014

In this study, the five-DOF motion at ultra-precision linear stage under static and dynamic conditions are evaluated through the extending application of ISO 230-2. As the performance factors, the bi-directional accuracy and repeatability of the five-DOF motion are quantitatively evaluated with the measurement uncertainties which are determined using the standard uncertainty of equipment used in experiment. The motion under static condition are analyzed using geometric errors. The five geometric errors except the linear displacement error are measured using optimal measurement system which is designed to enhance the standard uncertainty of geometric errors. In addition, the motion under dynamic conditions are analyzed with respect to the conditions with different feed rate of the stage. The experimental results shows that the feed rate of stage has a significant effect on straightness motions.