Browse > Article

Design of a Model-based Controller for a 6-DOF Precision Positioning Stage using $H_{\infty}$ norm  

Moon, Jun-Hee (Dept of Mechatronics, Daelim University College)
Lee, Bong-Gu (Dept of Mechanical Engineering, Daelim University College)
Publication Information
Journal of the Korean Society for Precision Engineering / v.27, no.12, 2010 , pp. 59-66 More about this Journal
Abstract
We developed a model-based controller for 6-DOF micropositioning of a precision stage using $H_{\infty}$ norm, For the design, a state-space system of the mathematical model of the stage is derived In developing the controller, weighting functions are effectively designed in consideration of upper bounds of the sensitivity of the control loop and control input. Step responses in open and closed loop control are provided to verify the micropositioning performance of the stage. By applying the developed controller we prove that the inverse of the weighting function forms the upper bound of the control loop. It is also found that the controller makes the same sensitivity shape with all the DOFs due to the use of $H_{\infty}$ norm. The developed controller is expected to be applied successfully for industrial use.
Keywords
Precision Stage; Micropositioning; 6-DOF; $H_{\infty}$ norm; Weighting Functions; Model-based Controller;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 Chen, S.-C. and Culpepper, M. L., "Design of a six-axis micro-scale nanopositioner - $\{\mu}HexFlex$," Precision Engineering, Vol. 30, No. 3, pp. 314-324, 2006.   DOI   ScienceOn
2 Portman, V. T., Sandler, B.-Z. and Xahavi, E., "Rigid 6-DOF parallel platform for precision 3-D micromanipulation," Int. Journal of Machine Tools and Manufacture, Vol. 41, No. 9, pp. 1229-1250, 2001.   DOI   ScienceOn
3 Kim, H. S., Cho, Y. M. and Moon, J. H. "Active vibration control using a novel three-DOF precision micro-stage," Smart Structures and Materials, Vol. 19, No. 5, Paper No. 055001, 2010.   DOI   ScienceOn
4 Yao, Q., Dong, J. and Ferreira, P. M., "Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage," Int. J. of Machine Tools Manufacture, Vol. 47, No. 6, pp. 946-961, 2007.   DOI   ScienceOn
5 Moon, J. H., Park, J. H. and Pahk, H. J., "Design and Modeling of a 6-DOF Stage for Ultra-Precision Positioning," Journal of the Korean Society for Precision Engineering, Vol. 26, No. 6, pp. 106-113, 2009.   과학기술학회마을
6 Gordon, C. G.., "Generic Criteria for Vibration-Sensitive Equipment," Proc. of International Society for Optical Engineering(SPIE), Vol. 1619, pp. 71-85, 1991.
7 Sugihara, K.; Mori, I., Tojo, T., Ito, C., Tabata, M. and Shinozaki, T., "Piezoelectrically driven XY $\{theta}$ table for submicron lithography systems," Rev. of Scientific Instruments, Vol. 60, No. 9, pp. 3024-3029, 1989.   DOI
8 Smith, A. R., Gwo, S. and Shih, C. K, "A new high-resolution two-dimensional micropositioning device for scanning probe microscopy applications," Rev. of Scientific Instruments, Vol. 65, No. 10, pp. 3216-3219, 1994.   DOI   ScienceOn
9 Muthuswamy, J., Salas, D. and Okandan, M., "A chronic micropositioning system for neurophysiology," Proc. the Second Joint EMBS/BMES Conference, pp. 2115-2116, 2002.
10 Physik Instrumente GmbH & Co, Products webpage, http://www.physikinstrumente.com
11 Kuo, S.-K. and Meng, C.-H., "Modeling and control of a six-axis precision motion control stage," IEEE/ASME Transactions on Mechatronics, Vol. 10, No. 1, pp. 50-59, 2005.   DOI   ScienceOn
12 Dejima, S., Gao, W., Shimizu, H., Kiyono, S. and Tomita, Y., "Precision positioning of a five degree-of-freedom planar motion stage," Mechatronics, Vol. 15, No. 8, pp. 969-987, 2005.   DOI   ScienceOn
13 Gao, P. and Swei, S.-M., "A six-degree-of-freedom micro-manipulator based on piezoelectric translators," Nanotechnology, Vol. 10, No. 4, pp. 447-452, 1999.   DOI   ScienceOn
14 Shan, X., Kuo, S., Zhang, J. and Menq, C., "Ultra precision motion control of a multiple degrees of freedom magnetic suspension stage," IEEE/ASME Transactions on Mechatronics, Vol. 7, No. 1, pp. 67-78, 2002.   DOI   ScienceOn
15 Ogata, K., "Modem control engineering, 4th ed.," Prentice Hall, 2002.