• Title/Summary/Keyword: stable film

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Stuructural and Electrical Characteristics of Ion Beam Deposited Tungsten/GaAs by High Temperature Rapid Thermal Annealing (고온 급속열처리에 의한 이온빔 증착 W/GaAs의 구조 및 전기적 특성)

  • 편광의;박형무;김봉렬
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.27 no.1
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    • pp.81-90
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    • 1990
  • In this study, ion beam deposited tungsten thin film for gate material of GaAs SAGFET(Self Aligned Gate FET) was annealed from 800\ulcorner to 900\ulcorner using RTA and detailed investigations of structural and electrical characteristics of this film were carried out using four-point probe, XRD, SEM, AES and current-voltage measurement. Investigated results showed phase of as deposited tungsten film was fine grain \ulcornerphase and phase tdransformation of this film into \ulcornerphase occured at annealing condition of 900\ulcorner, 6sec. But regardless of phase transformation, electrical characteristics of tungsten film were very stable to 900\ulcorner and in case of 900\ulcorner, 4sec annealing condition Schottky barrier height obtained from 10 diodes measurements was 0.66 + 0.003 eV.

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Experiment Onmodal Balancing of a Flexible Rotor Supported on Fluid Film Bearings (유막 베어링에 지지된 탄성회전체의 모드 밸런싱 실험)

  • 정시영;이동환;김영철;제양규
    • Journal of KSNVE
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    • v.5 no.2
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    • pp.235-246
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    • 1995
  • Experiment on the modal balancing of a flexible rotor supported on two kinds of fluid film bearings is performed to verify the modal balancing theory. The fluid film bearings are a tilting pad bearing and a two axial grooved journal bearing. One is inherently stable, but the other is not. The experimental result shows that the modal balancing method is effective for balancing of a high speed flexible rotor system. Besides, the critical speeds and mode shapes measured experimentally are in good coincidence with the results of rotordynamic analysis. Oil whip, which is the instability phenomenon due to fluid film force, is also observed during the experiment.

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Vertical Alignment of Nematic Liquid Crystal on the SiC Thin Film Layer with Ion-beam Irradiation

  • Oh, Yong-Cheul;Lee, Dong-Gyu
    • Transactions on Electrical and Electronic Materials
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    • v.7 no.6
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    • pp.301-304
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    • 2006
  • We studied the nematic liquid crystal (NLC) aligning capabilities using the new alignment material of the SiC (Silicon Carbide) thin film. The SiC thin film exhibits good chemical and thermal stability. The good thermal and chemical stability make SiC an attractive candidate for electronic applications. A vertical alignment of nematic liquid crystal by atomic beam exposure on the SiC thin film surface was achieved. The about $87^{\circ}$ of stable pretilt angle was achieved at the range from $30^{\circ}\;to\;45^{\circ}$ of incident angle. Consequently, the vertical alignment effect of liquid crystal electro-optical characteristic by the atomic beam alignment method on the SiC thin film layer can be achieved.

Flow-Accelerated Corrosion Behavior of SA106 Gr.C Steel in Alkaline Solution Characterized by Rotating Cylinder Electrode

  • Kim, Jun-Hwan;Kim, In-Sup
    • Nuclear Engineering and Technology
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    • v.32 no.6
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    • pp.595-604
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    • 2000
  • Flow-Accelerated Corrosion Behavior of SA106 Gr.C steel in room temperature alkaline solution simulating the CANDU primary water condition was studied using Rotating Cylinder Electrode. Systems of RCE were set up and electrochemical parameters were applied at various rotating speeds. Corrosion current density decreased up to pH 10.4 then it increased rapidly at higher pH. This is due to the increasing tendency of cathodic and anodic exchange half-cell current. Corrosion potential shifted slightly upward with rotating velocity. Passive film was formed from pH 9.8 by the mechanism of step oxidation and the subsequent precipitation of ferrous species into hydroxyl compound. Above pH 10.4, the film formation process was active and the film became stable. Corrosion current density showed increment in pH 6.98 with the rotating velocity, while it soon saturated from 1000 rpm above pH 9.8. This seems that activation process which represents formation of passive film on the bare metal surface controls the entire corrosion process

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Flow Characteristics of the BPSG Film (BPSG막의 Flow 특성)

  • 홍성현;이종무;송성해
    • Journal of the Korean Ceramic Society
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    • v.26 no.3
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    • pp.381-389
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    • 1989
  • Effects of annealing temperature, time, and atmospehre on the flow characteristics of Atmospheric Pressure Chemical Vapor Deposition-borophosphosilicate glass were investigated. Stable step coverage can be obtained by annealing the BPSG film at 90$0^{\circ}C$ for 30 minutes in N2 atmosphere, but further heat treatment isnot effective. Flow characteristics of the BPSG film was better in steam atmosphere than in N2 atmosphere, and the factors which cause it were analyzed. The concentration of boron in the BPSG film was measured pretty accurately by FTIR spectrum. Boron content in the BPSG film was reduced by annealing treatment. The decrement of boron was greater in steam atmosphere than in the N2 atmosphere. Also it was found from the FTIR spectroscopic analysis that PH3 inhibited the oxidation of B2H6.

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A Study on Characteristics of Borophosphosilicate Gloss deposited by At.ospheri, Pressure Chemical Vapor Deposition (APCVD에 의란 BPSG 막질특성에 관란 연구)

  • Kim, Eui-Song;Lee, Chul-Jin;Rhieu, Ji-Hyo;Song, Sung-Hae
    • Proceedings of the KIEE Conference
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    • 1987.07a
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    • pp.561-564
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    • 1987
  • The deposition and reflow properties or BPSG film deposited by APCVD was characterized by variation of each process parameter. As deposition temperature is increased higher, deposition rate is decreased. Maximum deposition rate of BPSG film is obtained in higher 02/Hyride ratio than CVD Oxide or PSG. BPSG film shows stable dielectric properties and we obtained good planarization effect at lower reflow temperature in case of BPSG film than PSG film.

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Response Time Characteristics according to The Variation of Plastic LCD cell gap (Flexible 액정디스플레이의 셀갭 변화에 따른 응답 특성)

  • Kim, Kang-Woo;Kim, Jong-Hwan;Hwang, Jeoung-Yeon;Nam, Ki-Hyung;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.477-480
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    • 2003
  • We investigated the electro-optical (EO) performances of the super twisted nematic liquid crystal display (STN-LCD) on the polyimide (PI) surface using polymer film. Monodomain alignment of the plastic STN-LCD can be observed. A stable voltage-transmittance (V-T) curve of the plastic STN-LCD was observed on the polyimide (PI) surfaces using polymer film. Also, a faster response time for the plastic STN-LCD on the polyimide (PI) surfaces using polymer film can be achieved. However, the transmittance of the plastic STN-LCD on the polyimide (PI) surfaces using polymer film decreased greatly as cell gap decreases.

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EFFECT OF LOAD ANGLE ON THE OPERATION OF TILTING 12-PADS proceeding BEARING

  • Strzelecki, S.;Someya, T.
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.113-114
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    • 2002
  • Radial, tilting 12-pad proceeding bearings are applied as the radial bearings of vertical rotors of water turbines. The mean loads are stable at the peripheral speeds of proceeding reaching 50 m/s. The operation of tilting 12-pads proceeding bearing has been introduced at the assumption of adiabatic oil film. The oil film pressure, temperature and viscosity distributions have been obtained by iterative solution of the Reynolds', energy and viscosity equations. The resulting oil film force, minimum oil film thickness, power loss, oil flow, maximum oil film pressure, maximum temperature have been computed for different load angle of bearing.

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The Air/water Interface Characteristics of Maleate Copolymer LB Films (말레에이트계 공중합체 I-l3막의 공기/물에서의 계면 특성)

  • 신훈규;권영수;이범종;장정수;배진호
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1995.05a
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    • pp.220-223
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    • 1995
  • Stable polyion-complexed polymeric monolayrers were prepared by spreading perfluoroalkyl monomaleatd copolymers. C$_2$F$\_$8/MA-VE$_2$ and C$_2$F$\_$8/Mv-VE$_3$ on aqueous poly(allylamine) subphase. The monolayer properties have been studied by the surface pressure-area($\pi$-A) isotherms. The C$_2$F$\_$8/MA-VE$_3$containing longer oligoethyleneglycol pendant showed more expaned monolayer phase than the C$_2$F$\_$8/MA-VE$_2$ The polyion-complexed monolayers were transferable on various substrates, and the resulting Langmuir-Blodgett(LB) films were characterized b ET-IR spectroscopy and scanning electron microscopy(SEM) Two-dimensional crosslinking to from a polymer network was achieved by amide formation through heat treatment under vacuum with concurrent removel of perfluoroalkyl tails. SEM observation of this film ona porous membrane filter showed that the four layer film was sufficiently stable to cover the filter pore size of 0.1$\mu\textrm{m}$. The C$_2$F$\_$8/MA-VE$_3$revealed better covering capability than the C$_2$F$\_$8/MA-VE$_2$Immersion of this film in water or in benzend did not cause any change in its appearance and in FT-IR spectra.

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A Syudy on the Deposition Film Properties of Arachidic acid and Stearic acid (Arachidic acid와 Stearic acid의 누적막 특성에 관한 연구)

  • Choi, Young-Il;Kang, Young-Chul;Song, Jin-Won;Lee, Kyung-Sup;Oh, Jea-Han;Cho, Su-Young;Kim, Younq-Geun
    • Proceedings of the KIEE Conference
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    • 2001.07c
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    • pp.1527-1529
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    • 2001
  • The physicochemical properties of the LB films were by AFM. We give pressure stimulation into organic thin films and then manufacture a device under the accumulation condition that the state surface pressure is 2, 10, 30[mN/m]. The stable images are probably due to a s interaction between the monolayer film and substrate. We are unable to obtain molecule res in images of the films but did see a marked co between images of the bare substrate and those the network structure film deposited ont Formation that prevent when gas phase stat liquid phase state measure but Could know o matter that molecules form equal and stable when molecules were not distributed evenly, accumulated in solid state only.

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