• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.369-372
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• 2004

The characteristics of antimony implants are relatively well-known. Antimony has lower diffusion coefficient, shorter implantation range, and smaller scattering as compared with conventional dopants such as phosphorous and arsenic. It has been commonly used in the doping of buried layer in Bi-CMOS process. In this paper, characteristics and appropriate condition of monitoring in antimony implant beam tuning using $Sb_2O_3$ were investigated to get a reliable process. TW(Thema Wave) and Rs(Sheet Resistance) test were carried out to set up condition of monitoring for stable operation through the periodic inspection of instruction condition. The monitoring was progressed at the point that the slant of Rs varied significantly to investigate the variation of instruction accurately.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.58 no.10
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• pp.2011-2015
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• 2009

In an insulating dielectric liquid such as transformer oil, space charge injection and propagation were analyzed under the Fowler-Nordheim and Richardson-Dushman's thermal emission charge injection conditions for blade-plane electrodes stressed by a step voltage. The governing equations were composed of all five equations such as the Poisson's equation for electric fields, three continuity equations for electrons, negative, and positive ions, and energy balanced equation for temperature distributions. The governing equations for each carrier, the continuity equations, belong to the hyperbolic-type PDE of which the solution has a step change at the space charge front resulting in numerical instabilities. To decrease these instabilities, the governing equations were solved simultaneously by the Finite Element Method (FEM) employing the artificial diffusion scheme as a stabilization technique. Additionally, the terminal current was calculated by using the generalized energy method which is based on the Poynting's theorem, and represents more reliable and stable approach for evaluating discharge current. To verify the proposed method, the discharge phenomena were successfully applied to the blade~plane electrodes, where the radius of blade cap was $50{\mu}m$.

• Journal of Sensor Science and Technology
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• v.14 no.2
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• pp.131-135
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• 2005

This paper describes the ohmic contact formation of single crystalline 3C-SiC thin films heteroepitaxially grown on Si(001) wafers. In this work, a TiW (Titanium-tungsten) film as a contact matieral was deposited by RF magnetron sputter and annealed with the vacuum and RTA (rapid thermal anneal) process respectively. Contact resistivities between the TiW film and the n-type 3C-SiC substrate were measured by the C-TLM (circular transmission line model) method. The contact phases and interface the TiW/3C-SiC were evaulated with XRD (X-ray diffraction), SEM (scanning electron microscope) and AES (Auger electron spectroscopy) depth-profiles, respectively. The TiW film annealed at $1000^{\circ}C$ for 45 sec with the RTA play am important role in formation of ohmic contact with the 3C-SiC substrate and the contact resistance is less than $4.62{\times}10^{-4}{\Omega}{\cdot}cm^{2}$. Moreover, the inter-diffusion at TiW/3C-SiC interface was not generated during before and after annealing, and kept stable state. Therefore, the ohmic contact formation technology of single crystalline 3C-SiC using the TiW film is very suitable for high temperature MEMS applications.

• Journal of Powder Materials
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• v.7 no.3
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• pp.143-148
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• 2000

NiAl alloy powders were prepared by mechanical alloying method and bulk specimens were produced using hot isostatic pressing techniques. This study focused on the transformation behavior and properties of Ni-Al mechanically alloyed powders and bulk alloys. Transformation behavior was investigated by differential scanning calorimeter (DSC), XRD and TEM. Particle size distribution and microstructures of mechanically alloyed powders were studied by particle size analyzer and scanning electron microscope (SEM). After 10 hours milling, XRB peak broadening appeared at the alloyed powders with compositions of Ni-36at%Al to 40at%Al. The NiAl and $Ni_3Al$ intermetallic compounds were formed after water quenching of solution treated powders and bulk samples at $1200^{\circ}C$, but the martensite phase was observed after liquid nitrogen quenching of solution treated powders. However, the formation of $Ni_3Al$ intermetallic compounds were not restricted by fast quenching into liquid nitrogen. It is considered to be caused by fast diffusion of atoms for the formation of stable $\beta$(NiAl) phase and $Ni_3Al$ due to nano sized grains during quenching. Amounts of martensite phase increased as the composition of aluminium component decreased in the Ni-Al alloy, which resulted in the increasing damping properties.

• Journal of Pharmaceutical Investigation
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• v.28 no.1
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• pp.43-50
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• 1998

Niosomes are vesicles formed from synthetic non-ionic surfactants, offering an alternative to chemically unstable and expensive liposomes as a drug carrier. Non-ionic surfactant and cholesterol mixture film leads to the formation of vesicular system by hydration with sonication method. The formation of niosome was ascertained by negative staining of TEM. The entrapment efficiency of niosomal suspension was gradually increased with increasing the ratio of cholesterol to surfactant. It was found that the niosome with 6 : 4 (polyoxyethylene 2-cetyl ether: cholesterol) ratio was more stable than those with other ratios. The topical application of acyclovir(ACV) in the treatment of herpes simplex virus type 1(HSV-1) skin disease has a long history. There are an increasing number of reports, however, in which topical ACV therapy is not as effective as oral administration. Lack of efficacy with topical ACV has been hypothesized to reflect the inadequate delivery of drug to the skin. We investigated the permeation of niosome containing $[^{3}H]ACV$ in hairless mouse skin using Franz diffusion cell model. Permeation coefficient(P) of aqueous ACV was $6.7{\times}10^{-4}\;(cm/hr)$ and that of ACV in niosome was $23.4{\times}10^{-4}\;(cm/hr)$, suggesting about 3.5 times increase in the transdermal permeation.

• Journal of Environmental Impact Assessment
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• v.2 no.1
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• pp.57-63
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• 1993

An analysis for particle settling effects via of plume centerline tilted exponentially under the influence of panicle settling velocity is carried out for particle of $30{\mu}m$ diameter with $1g/cm^3$ density and 0.02m/s settling velocity corresponding to its particle characteristic according to various wind speeds, atmospheric stabilities. Characteristic analysis of surface concentration distribution simulated by Lagrangian model also are carried out under the influence of plume centerline tilted exponentially at 10m stack height emitted 200 particles per second. This study reveals that plume centerline at the nearby source is sharply tilted exponentially under the condition of stable, weakly wind speed, therefore the lower concentration at the nearby source, the higher concentration at the downwind distance far away from source than actual one is brought out, if not apply the effect of plume centerline tilted exponentially to diffusion Model.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.529-529
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• 2007

Ruthenium (Ru) is a white metal and belongs to platinum group which is very stable chemically and has a high work function. It has been widely studied to apply Ru as an electrode material in memory devices and a Cu diffusion barrier metal for Cu interconnection due to good electrical conductivity and adhesion property to Cu layer. To planarize deposited Ru layer, chemical mechanical planarization(CMP) was suggested. However, abrasive particle can induce particle contamination on the Ru layer surface during CMP process. In this study, zeta potentials of Ru and interaction force of alumina particles with Ru substrate were measured as a function of pH. The etch rate and oxidation behavior were measured as a function of chemical concentration of several organic acids and other acidic and alkaline chemicals. PRE (particle removal efficiency) was also evaluated in cleaning chemical.

• Korean Journal of Materials Research
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• v.30 no.5
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• pp.217-222
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• 2020

The design and fabrication of catalysts with low-cost and high electrocatalytic activity for the oxygen evolution reaction (OER) have remained challenging because of the sluggish kinetics of this reaction. The key to the pursuit of efficient electrocatalysts is to design them with high surface area and more active sites. In this work, we have successfully synthesized a highly stable and active NiCo₂S₄ nanowire array on a Ni-foam substrate (NiCo₂S₄ NW/NF) via a two-step hydrothermal synthesis approach. This NiCo₂S₄ NW/NF exhibits overpotential as low as 275 mV, delivering a current density of 20 mA cm^-2 (versus reversible hydrogen electrode) with a low Tafel slope of 89 mV dec^-1 and superior long-term stability for 20 h in 1 M KOH electrolyte. The outstanding performance is ascribed to the inherent activity of the binder-free deposited, vertically aligned nanowire structure, which provides a large number of electrochemically active surface sites, accelerating electron transfer, and simultaneously enhancing the diffusion of electrolyte.

• Transactions of the Korean Society of Mechanical Engineers
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• v.11 no.2
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• pp.271-278
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• 1987

The experimental study was carried out to investigate the pressure fluctuation, operating frequency, noise emission and combustion characteristics in an aero-valved pulsating combustor. Measurements of the pressure fluctuation, mean temperature and ion current inside the combustion chamber indicate that combustion phenomena are characteristically similar to those in the diffusion flame. The measured frequency schedue indicates that the acoustic theory of the quarter wave tube can be approximated to give the operating frequency, but correction factor must be involved to estimate the correct operating frequency. The spectral behavior of the noise emission exhibits that frequency bands with high noise intensity are narrowly restricted to the neighborhood of the operating frequency signalling the low-frequency combustion characteristics of the pulsating combustor. Measurements of the operating characteristics as variation of the fuel nozzle diameter and injection angle with 4 fuel nozzles have been made, and it was found that the system produced the stable operating conditions up to the turn down ratio of 3 when the fuel nozzle diameter is 1.2mm, and the optimum fuel injection angle is thought to be in the neighborhood of 30.deg. radially.

• Journal of the Korean institute of surface engineering
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• v.25 no.3
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• pp.107-116
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• 1992

The optimum thickness of Pd-Ni plated layers used as an electrical contact film was investigated by evaluating mechanical, thermal and environmental characteristics. The variations of morphologies and chemical compositions were studied by using SEM, EDS and ESCA. As a result of wear test, the wear resistance behavior of the gold plated layers was not changed with the sliding velocity changes. The palladium-nickel plated layer showed better wear resistance than the gold plated layer at low sliding velocity, but it showed poor wear resistance at high sliding velocity. Under the thermal condition of $400^{\circ}C$ in air, the gold thickness of $2\mu\textrm{m}$ without underplate on phosphorous bronze formed copper oxide on the surface layer by rapid diffusion of copper whereas the gold thickness of $0.8\mu\textrm{m}$ deposited on nickel and palladium-nickel underplate was stable at $400^{\circ}C$. Under the sulfur dioxide environments, the gold thickness of $0.3\mu\textrm{m}$ deposited on the nickel thickness of$ 3\mu\textrm{m}$ and the palladium-nickel thickness of $2\mu\textrm{m}$ underplate was more corrosion-resistant than the gold thickness of $2\mu\textrm{m}$ without underplate on phosphorous bronze. Under the nitric acid vapor environment, corrosion resistance of the gold film was superior to an equivalent thickness of the palladium-nickel film.