• 한국전기전자재료학회논문지
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• 제14권9호
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• pp.707-713
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• 2001

As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was requirdfo the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gest thinner, micro-scratches are becoming as major defects. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}{\textrm}{m}$ point of use (POU) filter, which is depth-type filter and has 80% filtering efficiency for the 1.0${\mu}{\textrm}{m}$ size particle. In this paper, we studied the relationship between defect generation and polished wafer counts to understand the exact efficiency fo the slurry filteration, and to find out the appropriate pad usage. Our experimental results showed that it sis impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the slurry flow rate, and to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of depth type filter.

• 한국전기전자재료학회논문지
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• 제27권11호
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• pp.740-745
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• 2014

ZnO nanowires were grown by hydrothermal synthesis process and piezoelectric poly vinylidene fluoride (PVDF) was then coated on top of the ZnO-nanowires by spray-coating technique. The composite layer of ZnO-nanowires/PVDF was applied to an energy harvesting device based on piezoelectric-conversion mechanism. A defined mechanical force was given to the nanogenerator device to evaluate their electric power generation characteristics, where output current density and voltage were examined. Electric power generation property of the ZnO-nanowires/PVDF based nanogenerator device was compared to that of the nanogenerator device with ZnO-nanowires as single active layer. Effect of the ZnO-nanowires on improvement of power generation was discussed to examine its feasibility for the nanogenerator device.

• 한국진공학회지
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• 제5권4호
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• pp.341-347
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• 1996

Spray pyrolysis 방법으로 넓은 면적의 $Cu_2S$/CdS 태양전지를 제작하였다. 제작과정에서 전극형성, CdS spray 온도조건, $Cu_2S$층의 접합 조건등 태양전지의 효율에 영향을 주는 요인을 조사하였다. CdS 박막의 조건은 주사 전자현미경, X-선 회절기, 온도변화에 따른 광흡수 및 관전도 특성등을 통해 결정하였다. 1$\textrm{cm}^2$의 면적의 전지에 air mass 2(AM2)인 75mW/$\textrm{cm}^2$로 빛을 조사했을 때 3.15%의 효율을 얻었다.

• 한국해양공학회지
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• 제15권4호
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• pp.60-65
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• 2001

Thermal spray coating is formed by a process in which melted particles flying with high speed towards substrate, then crash and spread on the substrate surface cooled and solidified in a very short time, Stacking of the particles makes coating. In this study, the exfoliation of $Al_2$O$_3$ and Ni-4.5wt.%Al thermally sprayed coating which were deposited by an atmospheric plasma spray apparatus are investigated using an AE method. A tensile test is conducted on notch specimens in a stress range below the elastic limit of substrate. The wave forms of AE generated from the three coating specimens can be classified by FFT analysis into two types which low frequency(type I waveform is considered to corresponds exfoliation of coating layers and type II waveform corresponds the plastic deformation of notch tip or the resultant fracture of coating. The fracture of the coating layers can estimate by AE event and amplitude, because AE features increase when the deformation generates.

• 한국분말재료학회지
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• 제21권5호
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• pp.349-354
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• 2014

This study is a basic research for repair material production which manufactured a Cu repair coating layer on the base material of a Cu plate using kinetic spray process. Furthermore, the manufactured material underwent an annealing heat treatment, and the changes of microstructure and macroscopic properties in the Cu repair coating layer and base material were examined. The powder feedstocks were sphere-shaped pure Cu powders with an average size of $27.7{\mu}m$. The produced repair coating material featured $600{\mu}m$ thickness and 0.8% porosity, and it had an identical ${\alpha}$-Cu single phase as the early powder. The produced Cu repair coating material and base material displayed extremely high adhesion characteristics that produced a boundary difficult to identify. Composition analysis confirmed that the impurities in the base material and repair coating material had no significant differences. Microstructure observation after a $500^{\circ}C/1hr$. heat treatment (vacuum condition) identified recovery, recrystallization and grain growth in the repair coating material and featured a more homogeneous microstructure. The hardness difference (${\Delta}H_v$) between the repair coating material and base material significantly reduced from 87 to 34 after undergoing heat treatment.

• 한국세라믹학회지
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• 제40권5호
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• pp.460-467
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• 2003

기계적 합금화법에 의해 준비된 복합분말을 이용하여 용사공정에 의해 알루미늄 모재에 Al-SiC$_{p}$ 복합재료 코팅층을 형성하였다. 24h milling 후 복합화된 분말을 제조할 수 있었으며, 이 분말을 용사하여 복합재료 코팅층을 형성할 수 있었다. 코팅층의 두께 및 기공율과 공정변수와 관계를 분석하였으며, 경도의 증가를 확인하였다. 또한 TEM분석에 의해 Al-Si-C-O 화합물의 존재를 확인하였다.

• 한국정밀공학회지
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• 제23권7호
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• pp.101-107
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• 2006

Cold gas dynamic spray or cold spray is a novel manufacturing method for coatings. Cold spray is a high rate and direct material deposition process that utilizes the kinetic energy of particles sprayed at high velocity (300-1,200m/s). In this research, a technique to repair the damaged mold by cold spray deposition and mechanical machining was proposed. An aluminum 6061 mold with three-dimensional surface was fabricated, intentionally damaged and material-added by cold spray, and its original geometry was re-obtained successfully by Computer Numerical Control (CNC) machining. To investigate deformation of material caused by cold spray, deposition was conducted on thin aluminum plates ($100mm{\times}100mm{\times}3mm$). The average deformation of the plates was $205{\sim}290{\mu}m$ by Coordinate Measurement Machine (CMM). In addition, the cross section of deposited layer was analyzed by scanning electron microscopy (SEM). To compare variation of hardness, Vickers hardness was measured by micro-hardness tester.

• Journal of Welding and Joining
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• 제25권3호
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• pp.28-36
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• 2007

A bulk amorphous NiTiZrSiSn powder produced using an inert gas atomization was sprayed by kinetic spraying process that is basically a solid-state deposition process onto a mild steel substrate. They were successfully overlaid onto the mild steel substrate. In order to evaluate the tribological behavior of the kinetic sprayed NiTiZrSiSn BMG (Bulk Metallic Glass) coatings, a partially crystallized coating and a fully crystallized coating were prepared by the isothermal heat treatments. Tribological behaviors were investigated in view of friction coefficient, hardness and amorphous phase fraction of coating layer. Surface morphologies and depth in the wear tracks were observed and measured by scanning electron microscope and alpha-step. From the examination of the scratch wear track microstructure, transition from the ductile like deformation (micro cutting) to the brittle deformation (micro fracturing) in the scratch groove was observed with the increase of the crystallinity.

• 한국세라믹학회지
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• 제45권9호
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• pp.549-555
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• 2008

The thermal barrier coating must withstand erosion when subjected to flowing gas and should also maintain good stability and mechanical properties while it must also protect the turbine component from high temperature, hot corrosion, creep, and oxidation during operation. In this study we investigated the influence of subsurface layer, $Al_2O_3$ or NiCrCoAIY bond coat layer, on the indentation damage behavior of YSZ thermal barrier coating layers deposited by electron beam physical vapor deposition (EB-PVD). The bond coat is deposited using different process such as air plasma spray (APS) or spray of high velocity oxygen fuel (HVOF) and the thickness is varied. Hertzian indentation technique is used to induce micro damages on the coated layer. The stress-strain behaviors are characterized by results of the indentation tests.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.432-433
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• 2012

Polymer solar cells are fabricated using electrospray (e-spray) deposition process. It shows comparable performance with reference devices, and has different characteristics according to the thickness of the active layer: In the case of the devices with higher fill factor, it shows relatively lower current density, and vice versa. These films are characterized by atomic force microscopy measurement. The results indicate that the comparable power conversion efficiency made by e-spray results from the 'solvent annealing effect' by process conditions and the different thin film property is caused by the degree of self-organization of the polymer.