• 제목/요약/키워드: spark plasma sintering (SPS)

검색결과 196건 처리시간 0.024초

SPS/용침 공정에 의한 W-Cu연속경사기능재료의 제초와 특성 (Fabrication and Characteristics of Continuous W-Cu FGM by SPS/Infiltration Process)

  • 신철균;석명진;오승탁;김지순;권영순
    • 한국분말재료학회지
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    • 제11권2호
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    • pp.158-164
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    • 2004
  • W-Cu composite has been used for the applications requiring both high strength, good thermal and electrical conductivity. A graded combination of W and Cu will reduce thermal stress concerned with heat conduction, maintaining good thermal conductivity and high mechanical strength. In the present work, an attempt was made to fabricate continuous W-Cu FGM by preparing the graded porous structure of W skeleton using spark plasma sintering (SPS) process followed by infiltrating Cu. The graded porous structure was prepared at 150$0^{\circ}C$ for 60s under pressure of 15MPa by SPS process using a graphite mold with varying crr)ss section in the longitudinal direction. Infiltration of Cu was performed at 115$0^{\circ}C$ for 1 hour under $H_2$. W-Cu composite with graded Cu composition of 14 to 27 wt% was finally prepared. In this process the gradient of composition could be conveniently controlled by varying the gradient of cross sectional area of graphite mold, temperature and pressure.

방전플라즈마 소결법에 의해 제조된 Cu 타겟과 스퍼터링 박막의 특성평가 (Evaluation of the Cu Target Fabricated by the SPS Technique and its Sputtered Film)

  • 현혜영;김민정;유정호;양준모;오익현;이승민;오용준
    • 대한금속재료학회지
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    • 제49권3호
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    • pp.250-255
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    • 2011
  • The basic properties and electrical characteristics of sputtering films deposited with a commercial cast target and Spark Plasma Sintering (SPS) were compared and analyzed. From the results, the Cu film prepared heating $60^{\circ}C/min$ (SPS process) showed a similar specific resistance compared to the commercial cast Cu film. Also, auording to the results of XRD, SIMS, and TEM. There was not much difference in the crystal structure and impurities between the two films. Consequently, the SPS Cu target was found to have quite similar properties with the commercial one and it is expected to be applied in futare research to the metal wiring material for semiconductor/display devices.

An Investigation of the Stability of Y2O3 and Sintering Behavior of Fe-Based ODS Particles Prepared by High Energy Ball Milling

  • Park, Eun-Kwang;Hong, Sung-Mo;Park, Jin-Ju;Lee, Min-Ku;Rhee, Chang-Kyu;Seol, Kyeong-Won
    • 한국분말재료학회지
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    • 제20권4호
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    • pp.275-279
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    • 2013
  • Fe-based oxide dispersion strengthened (ODS) powders were produced by high energy ball milling, followed by spark plasma sintering (SPS) for consolidation. The mixed powders of 84Fe-14Cr-$2Y_2O_3$ (wt%) were mechanically milled for 10 and 90 mins, and then consolidated at different temperatures ($900{\sim}1100^{\circ}C$). Mechanically-Alloyed (MAed) particles were examined by means of cross-sectional images using scanning electron microscopy (SEM). Both mechanical alloying and sintering behavior was investigated by X-ray diffraction (XRD) and high resolution transmission electron microscopy (HR-TEM). To confirm the thermal behavior of $Y_2O_3$, a replica method was applied after the SPS process. From the SEM observation, MAed powders milled for 10 min showed a lamella structure consisting of rich regions of Fe and Cr, while both regions were fully alloyed after 90 min. The results of sintering behavior clearly indicate that as the SPS temperature increased, micro-sized defects decreased and the density of consolidated ODS alloys increased. TEM images revealed that precipitates smaller than 50 nm consisted of $YCrO_3$.

Enhanced thermal conductivity of spark plasma-sintered thorium dioxide-silicon carbide composite fuel pellets

  • Linu Malakkal;Anil Prasad;Jayangani Ranasinghe;Ericmoore Jossou;Lukas Bichler;Jerzy Szpunar
    • Nuclear Engineering and Technology
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    • 제55권10호
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    • pp.3725-3731
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    • 2023
  • Thorium dioxide (ThO2)-silicon carbide (SiC) composite fuel pellets were fabricated via the spark plasma-sintering (SPS) method to investigate the role of the addition of SiC in enhancing the thermal conductivity of ThO2 fuel. SiC particles with an average size of 1㎛ in 10 and 15 vol% were used to manufacture the composite pellets. The changes in the composites' densification, microstructure and thermal conductivity were explored by comparing them with pure ThO2 pellets. The structural and microstructural characterization of the composite pellets has revealed that SPS could manufacture high-quality composite pellets without having any reaction products or intermetallic. The density measurement by the Archimedes principles and the grain size from the electron back-scattered diffraction (EBSD) analysis has indicated that the composites have higher densities and smaller grain sizes than the pellets without SiC addition. Finally, thermal conductivity as a function of temperature has revealed that sintered ThO2-SiC composites showed an increase of up to 56% in thermal conductivity compared to pristine ThO2 pellets.

MA/SPS 공정에 의한 β-FeSi2 열전재료의 제조(I) -β-FeSi2상의 형성- (Preparation of β-FeSi2 Thermoelectric Materials by MA/SPS Process -Formation ofβ-FeSi2Phase-)

  • 김환태;권영순;이충효
    • 한국재료학회지
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    • 제12권3호
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    • pp.176-181
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    • 2002
  • Fabrication of ${\beta}-FeSi_2$ was attempted by making use of the combined process of mechanical alloying (MA) and spark plasma sintering (SPS). MA was performed under the Ar gas atmosphere using mixed powders of pure iron and silicon having the mole fraction of 1:2. SPS process was performed at 800-85$0^{\circ}C$ with the applied pressure of 50MPa and the holding time was ranging from 0 to 30min. The mechanically alloyed powder by cyclic operation of rotor for 15hrs consisted of $\varepsilon$-FeSi and Si phases. When this mechanically alloyed powder was sintered by SPS process above 85$0^{\circ}C$, $\varepsilon$-FeSi and ${\alpha}-Fe_2Si_5$ phase were formed. Bulk product sintered at 82$0^{\circ}C$ for 30min consisted of ${beta}-FeSi_2$ phase with a small fraction of $\varepsilon$-FeSi and the density of sintered specimen was 75.3% theoretical density. It was considered that the MA/SPS combined process was effective for the preparation of ${\beta}-FeSi_2$ without heat treatment process after sintering.

방전플라즈마 소결 공정을 이용한 스퍼터링 타겟용 타이타늄 소결체 제조 및 특성 평가 (Fabrication and Evaluation Properties of Titanium Sintered-body for a Sputtering Target by Spark Plasma Sintering Process)

  • 이승민;박현국;윤희준;양준모;우기도;오익현
    • 대한금속재료학회지
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    • 제49권11호
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    • pp.845-852
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    • 2011
  • The Spark Plasma Sintering(SPS) method offers a means of fabricating a sintered-body having high density without grain growth through short sintering time and a one-step process. A titanium compact having high density and purity was fabricated by the SPS process. It can be used to fabricate a Ti sputtering target with controlled parameters such as sintering temperature, heating rate, and pressure to establish the optimized processing conditions. The compact/target(?) has a diameter of ${\Phi}150{\times}6.35mm$. The density, purity, phase transformation, and microstructure of the Ti compact were analyzed by Archimedes, ICP, XRD and FE-SEM. A Ti thin-film fabricated on a $Si/SiO_2$ substrate by a sputtering device (SRN-100) was analyzed by XRD, TEM, and SIMS. Density and grain size were up to 99% and below $40{\mu}m$, respectively. The specific resistivity of the optimized Ti target was $8.63{\times}10^{-6}{\Omega}{\cdot}cm$.

스퍼터링 타겟재의 응용을 목적으로 하는 탄탈륨 소결체의 제작 및 평가 (Fabrication and Evaluation of Tantalum Compacts for Sputtering Target Application)

  • 장세훈;최정철;최세원;오익현
    • 한국재료학회지
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    • 제18권4호
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    • pp.181-186
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    • 2008
  • In this study, tantalum (Ta) compacts were fabricated in a spark plasma sintering (SPS) process and their microstructure and mechanical properties were investigated. Ta compacts with a density of 99% were successfully fabricated by controlling the sintering conditions of the current and the temperature. The density and hardness were increased as the sintering temperature increased. The $Ta_2C$ compound was observed at the surface of the compacts due to the contact between the Ta powder and graphite mold during the sintering process. The main fracture mode showed a mixed type with intergranular and transgranular modes having some roughness.