• 제목/요약/키워드: spacing effect

검색결과 822건 처리시간 0.03초

Effect of slurries on the dishing of Shallow Trench Isolation structure during CMP process

  • Lee, Hoon;Lim, Dae-Soon;Lee, Sang-Ick
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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    • pp.443-444
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    • 2002
  • The uniformity of field oxide is critical to isolation property of device in STI, so the control of field oxide thickness in STI-CMP becomes enormously important. The loss of field oxide in shallow trench isolation comes mainly from dishing and erosion in STI-CMP. In this paper, the effect of slurries on the dishing was investigated with both blanket and patterned wafers were selected to measure the removal rate, selectivity and dishing amount. Dishing was a strong function of pattern spacing and types of slurries. Dishing was significantly decreased with decreasing pattern spacing for both slurries. Significantly lower dishing with ceria based slurry than with silica based slurry were achieved when narrow pattern spacing were used. Possible dishing mechanism with two different slurries were discussed based on the observed experimental results.

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반도체 외부 공진기 링 레이저의 종 모드 간격 변화를 이용한 고반사율을 갖는 Etalon Coating Reflectivity의 정밀 측정 (Effective measurement of high facet reflectivity using the variation longitudinal modes spacing of semiconductor external cavity ring lasers)

  • 엄진섭;안상호
    • 한국광학회지
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    • 제10권6호
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    • pp.524-526
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    • 1999
  • 본 논문에서는 외부 공진기 반도체 링 레이저 내부에 에탈론을 삽입함으로써 외부 공진기 링 레이저의 종모드 간격이 현저히 변화하는 사실을 관측하고 이에 대한 이론적 분석을 수행하였다. 외부공진기 링 레이저의 종 모드 간격은 에탈론의 단면 반사율에 의존하여 변화하였으며, 공진모드의 분석을 통해 이에 대한 정량적인 해석을 보였다. 또한 이러한 효과가 에탈론이나 FP 필터의 단면 반사율의 정밀한 측정에 응용될 수 있다는 것을 실험을 통해 증명하였다. 제안된 방법은 특히 높은 반사율에 대해서도 정밀한 측정결과를 얻을 수 있으며 측정이 쉽고 매우 빠르게 이루어진다.

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광폭 전기집진기의 집진특성에 판한 연구 - II. 펄스 하전 파형의 영향 - (A Study on the Collection Characteristics of a Wide Plate-Spacing Electrostatic Precipitator -II. Effect of Wave Form of Pulse Energization -)

  • 김용진;하병길;정상현;홍원석;하대홍;유주식
    • 설비공학논문집
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    • 제13권11호
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    • pp.1059-1064
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    • 2001
  • This study Investigates the effect of the wave form of pulse energization on the collection characteristics of a wide plate spacing electrostatic precipitator. For the semi-pulse energization, the peak current and voltage of the energization increases with increase of the pulse period, and the corona current increases, as pulse ratio decreases. For the micro-pulse energization, the corona current increases with increase of the pulse voltage. The collection efficiency of semi-pulse and micro-pulse energization is larger than that of DC charge.

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피복두께와 콘크리트 강도를 고려한 철근콘크리트 인장부재의 균열간격 (Crack Spacing in RC Tension Members Considering Cover Thickness and Concrete Compressive Strength)

  • 김우;이기열
    • 대한토목학회논문집
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    • 제38권2호
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    • pp.193-202
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    • 2018
  • 이 연구는 철근콘크리트 부재에서 사용한계상태 검증 및 내구성능 평가의 요소인 균열폭을 계산하는데 중요한 변수가 되는 균열간격 계산식을 제안한 것이다. 철근콘크리트 부재의 균열거동 해석을 위한 지배방정식이 되는 부착특성을 반영하여 평균균열간격 기본식을 유도하고, 피복두께와 콘크리트 강도의 영향을 고려할 수 있도록 여러 연구자들이 수행한 124개의 직접인장실험에서 측정된 균열간격을 분석하여 각각의 계수를 제안하였다. 그리고, 최대 및 평균 균열간격이 동시에 측정된 80개의 실험체 자료로부터 상관관계 분석을 실시하여 평균균열간격으로부터 최대 균열간격을 간편하게 예측할 수 있는 상관계수를 제안하였다. 제안된 평균균열간격 계산식 및 최대균열간격 상관식에 대해서 현행 설계기준의 규정과 비교를 실시하였다. 비교 결과, 평균균열간격 및 최대균열간격에 대한 제안식은 콘크리트구조기준 및 도로교설계기준(한계상태설계법)의 해당 규정과 비교하여 예측의 정확성 및 신뢰도가 개선됨을 확인하였다.

부재배치에 따른 묶음튜브 구조의 전단지연현상 (The Shear Lag Phenomenon in Bundled Tube Structure According to the Arrangement of Structural Members)

  • 김영찬;김현
    • 한국안전학회지
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    • 제21권3호
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    • pp.81-86
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    • 2006
  • The purpose of this study is to examine the effect of column spacing and beam size on the lateral displacement and shear lag phenomenon in bundled tube system. According to the parametric study in which the spacing of columns, the size of columns and girders in bundled tube were selected as a parameter, it is the most efficient to increase the size of the interior columns with the largest reduction of lateral drift if the steel tonnage of a frame can be increased. It was noticed that the shear lag was affected more by the exterior stiffness factor and ratio than by the interior ones when column spacing was changed, and when the size of column was changed, the reverse phenomenon was happened. And The change of column spacing affected shear lag, lateral drift, and tonnage more than that of column size or girder size.

고강도 콘크리트 기둥의 거동에 미치는 콘크리트 강도와 띠철근의 영향 (Influence of Concrete Strength and Lateral Ties on Behavior of High-Strength Concrete Columns)

  • 이영호;정헌수
    • 한국구조물진단유지관리공학회 논문집
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    • 제6권2호
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    • pp.245-253
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    • 2002
  • This study was focused on the effect of concrete strength and lateral ties of concrete columns using high-strength concrete. Thirty-six concrete columns with 20cm square cross-section were tested. Experimental parameters included the concrete strength, the distribution of longitudinal bars and the volumetric ratio, yield strength, spacing of lateral ties. From the experiments, we found that: 1) the increasing rate of the strength and ductility of concrete columns caused by confinement of lateral ties was decreasing, as the concrete strength increased. 2) The high volumetric ratio and the reduction of tie spacing had a tendency to enhance the strength and improve the ductility. 3) The high-strength concrete columns required high volumetric ratio of lateral ties to maintain the proper strength and ductility. It was observed that the current AIK design code to specify the maximum tie spacing of high-strength concrete columns led to the poor strength and ductility for seismic design.

석고주조(石膏鑄造)한 Al-8.6% Si-3.6% Cu 합금(合金)의 기계적(機械的) 성질(性質)에 관(關)한 연구(硏究) (A Study on the Mechanical Properties of Al-8.6% Si-3.6% Cu Alloy Cast in Plaster Mold)

  • 여인동;김동옥;강인찬
    • 한국주조공학회지
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    • 제4권4호
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    • pp.5-13
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    • 1984
  • This paper is presented for showing the effect of cooling rate on dendrite arm spacing, correlated with the chilling power of molding materials (conventional plaster, foamed plaster, silica sand) and section thickness, and also showing relationship between dendrite arm spacing and mechanical properties for an aluminum - 8.6 percent silicon - 3.6 percent copper alloy. Local solidification time $(t_f)$ and secondary dendrite arm spacing (d) could be varied widely in accordance with the molding materials and casting thickness, and the following relationship is obtained: $d=9.4t_f\;^{0.31}$ A good correlation between dendrite arm spacing and mechanical properties such as ultimate tensile strength, yield strength, hardness was found, that is, mechanical properties decreased in a linear manner with increase in log of secondary dendrite arm spacing. Ultimate tensile strength in conventional plaster mold casting decreased by 15 percent comparing with the sand casting, where as in foamed plaster mold casting, it decreased by 30 percent comparing with the sand casting. From those results, it has been verified that DAS might be the most representative parameter for predicting mechanical properties varing with the different cooling condition.

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The Effects of the Distribution Aspect of Precipitate on the Corrosion Behavior of As-Cast Magnesium Alloys

  • 이충도
    • 소성∙가공
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    • 제8권3호
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    • pp.295-295
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    • 1999
  • In the present study, the corrosion behavior of AZ91D as-cast alloy was investigated form the viewpoint of the distribution aspect of precipitate ($Mg_{17}Al_{12}$) and the variation of Al concentration in the Mg-rich matrix. The dendrite arm spacing (DAS) of an as-cast specimen was measured as a function of degree which describes the distribution aspect of the precipitate, and the salt spray test was conducted for various grain-sired specimens fur 20 days. The dendrite arm spacing increased as the grain size increased to about 150㎛, but a constant value is indicated when the grain size exceeds that range. Although the relationship between the corrosion rate and grain size is of a nonlinear type, the linear trend between the corrosion rate and the dendrite arm spacing is maintained for the overall range of dendrite arm spacing. Since the precipitate in the as-cast alloy is discontinuously distributed, this linear relationship means that the variation of Al-solute concentration in the Mg-rich matrix has a more potent effect than the protective action of the precipitate on the corrosion behavior of an as-cast alloy.

1열 원형 서브머지드 충돌수분류군에 의한 열전달의 실험적 연구 (Impingement Heat Transfer Within a Row of Submerged Circular Water Jets)

  • 엄기찬
    • 설비공학논문집
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    • 제22권8호
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    • pp.538-544
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    • 2010
  • An experimental investigation is presented to study the effect nozzle spacing, jet to plate spacing and Reynolds number on the local heat transfer to normally upward impinging submerged circular water jets on a flat heated surface. Nozzle arrays are a single jet(nozzle dia. = 8 mm), a row of 3 jets(nozzle dia. = 4.6 mm, nozzle spacing = 37.5 mm) and a row of 5 jets(nozzle dia. = 3.6 mm, nozzle spacing = 25 mm), and jet to plate spacing ranging from 16∼80 mm(H/D = 2∼10) is tested. Reynolds number based on single jet exit condition is varied 30000∼70000($V_o$ = 3∼7 m/s). Except for the condition of H/D = 10, the average Nusselt number of multi-jet is higher than that of single jet. For H/D = 2, average Nusselt number is increased by 50.3∼82.5% for a row of 3 jets and by 52.9∼65.2% on a row of 5 jets when compared to the average Nusselt number on the single jet.

Effect of Joint Spacing on the Earth Pressure Against the Support System in a Jointed Rock Mass

  • Son, Moorak;Adedokun, Solomon
    • 한국지반환경공학회 논문집
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    • 제17권1호
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    • pp.29-37
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    • 2016
  • This study examined the magnitude and distribution of earth pressure on the support system in a jointed rock mass due to the different joint spacing as well as varying the rock type and joint condition (joint shear strength and joint inclination angle). Based on a physical model test and its numerical simulation, a series of numerical parametric analyses were conducted using a discrete element method. The results showed that the magnitude and distribution of earth pressure were strongly affected by the different joint spacing as well as the rock type and joint condition. In addition, the study results were compared with Peck's earth pressure for soil ground, which indicated that the earth pressure in a jointed rock mass could be considerably different from that in soil ground. The study suggests that the joint spacing as well as the rock type and joint condition are important factors affecting the earth pressure in a jointed rock mass and they should be considered when designing a support system in a jointed rock mass.