• 한국표면공학회지
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• 제33권4호
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• pp.266-272
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• 2000

Sputtered $MoS_2$ thin films provide lubrication and wear improvements for vacuum and space applications. In this study, deposition of $MoS_2$ thin films by R.F. magnetron sputtering was studied with regard to the micro-structural change of $MoS_2$ film and mechanical properties. The coating parameters such as the working pressure, the RF power, the substrate temperature, the etching time were varied to determine how these parameters affected the film morphology and mechanical properties of deposited films. The best wear properties and critical load were observed with the film deposited at $70^{\circ}C$, 1.0$\times$$10^{ -3}$ Torr, 170W and 1 hour deposition time. The critical load increased with the increase of sputter etching time.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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• pp.526-530
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• 2004

We report the space charge and the surface potential of the interface between metal and CuPc according to isotropic property and different metal by measuring the microwave reflection coefficients $S_{11}$ of copper(II)-phthalocyanine(CuPc) thin films by using a near-field microwave microscope(NSMM) in order to understand. CuPc thin films were prepared on gold and aluminium substrates using a thermal evaporation method. Two kinds of CuPc thin films were prepared. One was deposited on preheated substrate at $150^{\circ}C$ and the other was annealed after deposition by using thermal evaporation methods. The microwave reflection coefficients $S_{11}$ of CuPc thin films were changed by the dependence on the heat treatment conditions. By comparing reflection coefficient $S_{11}$ we measured electrical conductivity of CuPc thin films and studied this results with respect to the surface potential and space charge of the interface between metal and CuPc thin films.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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• pp.276-279
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• 2004

Plasma enhanced chemical vapor deposition (PECVD) of silicon nitride (SiN) is a proven technique for obtaining layers that meet the needs of surface passivation and anti-reflection coating. In addition, the deposition process appears to provoke bulk passivation as well due to diffusion of atomic hydrogen. This bulk passivation is an important advantage of PECVD deposition when compared to the conventional CVD techniques. A further advantage of PECVD is that the process takes place at a relatively low temperature of 300t, keeping the total thermal budget of the cell processing to a minimum. In this work SiN deposition was performed using a horizontal PECVD reactor system consisting of a long horizontal quartz tube that was radiantly heated. Special and long rectangular graphite plates served as both the electrodes to establish the plasma and holders of the wafers. The electrode configuration was designed to provide a uniform plasma environment for each wafer and to ensure the film uniformity. These horizontally oriented graphite electrodes were stacked parallel to one another, side by side, with alternating plates serving as power and ground electrodes for the RF power supply. The plasma was formed in the space between each pair of plates. Also this paper deals with the fabrication of multicrystalline silicon solar cells with PECVD SiN layers combined with high-throughput screen printing and RTP firing. Using this sequence we were able to obtain solar cells with an efficiency of 14% for polished multi crystalline Si wafers of size 125 m square.

• 한국기계가공학회지
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• 제20권9호
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• pp.1-10
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• 2021

Recently, the repair and recycling of damaged mechanical parts via metal additive manufacturing processes have been industrial points of interest. This is because the repair and recycling of damaged mechanical parts can reduce energy and resource consumption. The directed energy deposition(DED) process has various advantages such as the possibility of selective deposition, large building space, and a small heat-affected zone. Hence, it is a suitable process for repairing damaged mechanical parts. The shaft is a core component of various mechanical systems. Although there is a high demand for the repair of the shaft, it is difficult to repair with traditional welding processes because of the thermal deformation problem. The objective of this study is to propose a repair procedure for a damaged shaft using the DED process and discuss its applications. Three types of cases, including a small shaft with a damaged surface, a medium-size shaft with a worn bearing joint, and a large shaft with serious damage, were repaired using the proposed procedure. The microstructure and hardness were examined to discuss the characteristics of the repaired component. The efficiency of the repair of the damaged shaft is also discussed.

• International Journal of Aeronautical and Space Sciences
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• 제4권2호
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• pp.51-60
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• 2003

An experimental research program is being undertaken to develop a regeneratively-cooled experimental thrust chamber of liquid rocket engine using liquefied natural gas and liquid oxygen as propellants. Prior to firing test using a regenerative cooling with liquefied natural gas in this program, several firing tests were conducted with water as a coolant. Experimental thrust chambers with a thrust of about 10tf were developed and their firing test facility was built up. Injector used in the thrust chamber was of shear-coaxial type appropriate for propellants of gas and liquid phase and cooling channels are of milled rectangular configuration. Periodical variation of the soot deposition and discoloration was observed through an eyes' inspection on the inner wall of a combustion chamber and a nozzle after each firing test, and an intuitive concept of the periodical variation of mixture ratio near the inner wall of a combustion chamber and a nozzle at once was brought about and analyzed quantitatively. Thermal heat flux to the coolant was calculated and modified with the periodical variation model of mixture ratio, and the increment of coolant temperature at cooling channels was compared with measured one.

• Bulletin of the Korean Chemical Society
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• 제31권8호
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• pp.2293-2298
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• 2010

Focused electrospray (FES) deposition method is presented for matrix-assisted laser desorption/ionization (MALDI) mass spectrometry. FES ion optics consists of two cylindrical focusing electrodes capped with a truncated conical electrode through which an electrospray emitter passes along the cylindrical axis. A spray of charged droplets is focused onto a sample well on a MALDI target plate under atmospheric pressure. The shape and size distributions of matrix crystals are visualized by scanning electron microscope and the mass spectra are obtained by time-of-flight mass spectrometry. Angiotensin II, bradykinin, and substance P are used as test samples, while $\alpha$-cyano-4-hydroxycinnamic acid and dihydroxybenzoic acid are employed as matrices. FES of a sample/matrix mixture produces fine crystal grains on a 1-3 mm spot and reproducibly yields the mass spectra with little shot-to-shot and spot-to-spot variations. Although FES greatly stabilizes the signals, the space charge due to matrix ions limits the detection sensitivity of peptides. To avoid the space charge problem, we adopted a dual FES/FES mode, which separately deposits matrix and sample by FES in sequence. The dual FES/FES mode reaches the detection sensitivity of 0.88 amol, enabling ultrasensitive of peptides by homogeneously depositing matrix and sample under atmospheric pressure.

• 터널과지하공간
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• 제13권2호
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• pp.153-168
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• 2003

본 연구의 목적은 지하 고준위 방사성폐기물 처분공동 주변에서의 절리 위치 변화 및 처분공동의 지하심도 변화에 따른 처분공동 및 주변 절리에서의 장기간(500년)에l 걸친 열수리역학적 연성거동 변화를 분석하고, 앞으로 처분 개념 설정에 활용 하고자 하는 것이다. 해석모델은 포화된 불연속 화강 암반, 처분공내 압축 벤토나 이트로 둘러쌓인 PWR 사용후 핵연료 및 처분용기, 그리고 처분동굴 내에 채워진 혼합 벤토나이트를 포함한다. 해석모델 내에는 2개의 절리 세트가 존재하는 것으로 가정하였다: 절리세트 1은 20m 간격의 56도 경사의 절리들로 구성되었고, 절리세트 2는 절리세트 1에 수직방향으로 20m 간격의 34도 경사의 절리들로 구성되었다. 절리위치 변화의 영향을 파악하기 위하여 500m 깊이의 모델5개, 지하 심도 영향파악을 위하여 추가로 3개의 1000m 깊이의 모델을 해석하였다.

• JSTS:Journal of Semiconductor Technology and Science
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• 제5권1호
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• pp.30-37
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• 2005

We present an air bridge type electrode system with tunable electrode distance for detecting electroactive biomolecules. It is known that the narrower gap between electrode fingers, the higher sensitivity in IDA (interdigitated array) electrode. In previous researches on IDA electrode, narrower patterning required much precise and expensive equipment as the gap goes down to nanometer scale. In this paper, an improved method is suggested to replace nano gap pattering with downsizing electrode distance and showed that the patterning can be replaced by thickness control using metal deposition methods, such as electroplating or metal sputtering. The air bridge type electrode was completed by the following procedures: gold patterning for lower electrode, copper electroplating, gold deposition for upper electrode, photoresist patterning for gold film support, and copper etching for space formation. The thickness of copper electroplating is the distance between upper and lower electrodes. Because the growth rate of electroplating is $0.5{\mu}m\;min^{-1}$, the distance is tunable up to hundreds of nanometers. Completed electrodes on the same wafer had $5{\mu}m$ electrode distance. The gaps between fingers are 10, 20, 30, and $40{\mu}m$ and the widths of fingers are 10, 20, 30, 40, and $50{\mu}m$. The air bridge type electrode system showed better sensitivity than planar electrode.

• 터널과지하공간
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• 제14권6호
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• pp.429-439
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• 2004

국내 원전에서 발생되는 36,000톤의 사용후핵연료를 처분하기 위해서는 약 $4km^2$의 지하 처분장이 필요하다. 본 연구에서는 굴착량과 처분장 면적을 최소화하기 위한 지하 심부 처분장 배치의 최적화를 실시하였다. 열 해석 결과를 토대로 처분 터널과 처분공 간격이 처분장 배치에 미치는 영향을 고려한 결과, 처분장 면적과 굴착량은 처분 터널의 길이가 길어짐에 따라 감소하였다. 주어진 열적 기준을 만족하면서 처분장 면적을 줄이기 위해서는 처분 터널의 간격을 줄이고 처분공 간격을 늘리는 것이 유리하였으며, 반면에 굴착량을 최소화하는 경우 처분공 간격을 줄이고 처분 터널 간격을 늘려주는 것이 효과적인 것으로 나타났다.

• Asian Journal of Atmospheric Environment
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• 제12권3호
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• pp.215-231
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• 2018

In order to understand the variation of air quality and the concentration of atmospheric particulates in Chengdu Second Ring Road renovation project, this paper starts to investigate the surrounding residents' opinions on the influenced environment and their daily lives via questionnaires. Then the study numerically simulates the change rule of atmospheric particulates in terms of time and space by using the Gaussian dispersion-deposition model and the compartment model. The optimized scientific scheme is selected by the improved fuzzy analytical hierarchy process(FAHP) to help decision making for the future urban reconstructions. Finally, the reduced emissions of atmospheric particulates are measured when the improvement scheme is provided. According to the study, it can be concluded that the concentration of atmospheric particulates increases rapidly in central Chengdu city during the renovation project, which results in worsening air quality in Chengdu during March 2012 to March 2013. Taking related measures on energy saving and emission reduction can effectively reduce the concentration of atmospheric particulates and promote economic, environmental and social coordination.