• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.508-508
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• 2012

CST microwave studio is used to simulate the plasma profile of the 450mm CCP source. Standing wave effect becomes important at the high frequency as the electrode radius increases. To solve plasma non-uniformity problem, we designed multi electrode chamber to decreasing standing wave effect. Simulation showed the ratio of input power of each electrode is related with electric field strength. The multi electrode was constructed and measured by 2D probe arrays using floating harmonic method. Uniformity of 450 mm CCP was changed by the ratio of input power of each electrode. We described this dependence with circuit model.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.502-502
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• 2012

반도체 공정 중 플라즈마를 이용하는 식각 공정의 경우, 실제 식각률이나 profile의 특성은 RF Bias power에 의해 기판에 당겨지는 이온 선속에 의해 큰 영향을 받는다. 때문에 플라즈마 발생장치 내에서 기판에서의 이온에너지 분석이 중요해지고 있다. 이온에너지 분석을 위해 다양한 형태의 이온에너지 분석기가 나와있으나 기판 위에 얹혀있는 양상이었다. 이에 본 발표에서는 실제 기판 안에 이온에너지 분석기를 설치함으로써 실제 기판에서 wafer가 받는 이온들의 양상에 더 가깝게 접근했다. 이렇게 제작 된 이온에너지 분석기를 이용해 대면적 M-ICP(Magnetized-Induced Coupled Plasma)에서 아르곤 가스를 이용한 플라즈마에서 기판 이온 에너지 분포를 확인해 보았다. 압력의 변화, ICP Source power의 변화, 일정한 Source power에서 기판에 가해지는 Bias power의 변화에 대해 측정함으로써 각각의 조건 변화에 따른 이온들의 변화양상에 대한 이해를 할 수 있었다.

• Journal of Electrical Engineering and information Science
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• v.2 no.4
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• pp.106-110
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• 1997

A new SOI NMOSFET with a 'LOCOS-like' shape self-aligned polysilicon gate formed on the recessed channel region has been fabricated by a mix-and-match technology. For the first time, a new scheme for implementing self-alignment in both source/drain and gate structure in recessed channel device fabrication was tried. Symmetric source/drain doping profile was obtained and highly symmetric electrical characteristics were observed. Drain current measured from 0.3${\mu}{\textrm}{m}$ SOI devices with V\ulcorner of 0.77V and Tox=7.6nm is 360$mutextrm{A}$/${\mu}{\textrm}{m}$ at V\ulcorner\ulcorner=3.5V and V\ulcorner=2.5V. Improved breakdown characteristics were obtained and the BV\ulcorner\ulcorner\ulcorner(the drain voltage for 1 nA/${\mu}{\textrm}{m}$ of I\ulcorner at V=\ulcorner\ulcorner=0V) of the device with L\ulcorner\ulcorner=0.3${\mu}{\textrm}{m}$ under the floating body condition was as high as 3.7 V. Problems for the new scheme are also addressed and more advanced device structure based on the proposed scheme is proposed to solve the problems.

• Journal of Korean Society for Atmospheric Environment
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• v.9 no.2
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• pp.132-139
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• 1993

TCM has been used for many environmental impact assessments and many case studies in Korea. TCM was applied to urbvan areas and rolling terrains. But original TCM was developed for rural area, and this model could not reflect the characteristcs of these study sites. This paper analyzed the characteristics of TCM, and modified the algorithm of area source, and modified the vertical wind speed profile exponents and diffusion parameter to make it applicable in urban area. In the process of modification, an important error in area source calculation of original TCM program was found. So that was corrected as follows. $$ Before modification $QC = 0.79788456^*(0.5^*GRID)^**BA/(U(IA, IRUN)^*AA^*BA TCM09310$ After modification $QC = 0.79788456^*(500^*GRID)^**BA/(U(IA, IRUN)^*AA*BA) modified$ $$ Then original TCM and modified TCM-urban mode were compared, and it was found that predicted mean value by original TCM was 7 times higher than observed mean value. But mean value by modified TCM-urban mode was very similar to observed value.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.2
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• pp.45-50
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• 2008

Molecular flows inside a guide block in the OLED(organic luminescent emitting device) deposition process have been simulated using DSMC(direct simulation Monte Carlo) method. Because the organic materials are evaporated under vacuum, molecules flow at a high Knudsen number of the free molecular regime, where the continuum mechanics is not valid. A guide block is designed as a part of the linear cell source to transport the evaporated materials to a deposition chamber, When solving the flows, the inlet boundary condition is proved to affect significantly the whole flow pattern. Thus, it is proposed that the pressure should be specified at the inlet. From the analysis of the density distributions at the nozzle exit of the guide block, it is shown that the longer nozzle can emit molecules more straightly. Finally, a nondimensionalized mass flow profile is obtained by numerical experiments, where various nozzle widths and inlet pressures are tested.

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3141-3143
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• 1999

Fuel cell systems offer high energy efficiencies for transportation application. In addition, they can use alcohols and alternative fuels as the fuel, while producing little or no noxious emissions. Fuel cell-powered energy source should be competitive in performance characteristics and in capital and maintenance costs with internal combustion engine systems. From computer simulation program, battery and fuel cell energy output and total power profile, motor power, battery energy output, fuel cell energy output. It simulates the performance of fuelcell/battery powered energy source operation over any user inputted transit route cycle, and provides performance criteria through user specifications for preliminary design consideration.

• Proceedings of the Korean Geotechical Society Conference
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• 2010.03a
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• pp.182-187
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• 2010

In the various fields of Civil Engineering, shear modulus is very important input parameters to design many constructions and to analyze ground behaviors. In general, a shear wave velocity profile is decided by various experiments before constructing a structure and, analysis and design are carried out by using decided shear wave velocity profile of the site. However, if civil structures are started to construct, the shear wave velocity will be increased more than before constructions because of confining pressure increase by the load of structure. The evaluation of the change in shear wave velocity profile is used very importantly when maintaining, managing, reinforcing and regenerating existing structures. In this study, a non-destructively geotechnical investigation method by using the HWAW method is applied to an evaluation of change in properties of the site according to construction. Generally, the space for experiments is narrow when underground of existing or on-going structures is evaluate, so a prompt non-destructive experiment is required. This prompt non-destructive experiment would be performed by various in-situ seismic methods. However, most of in-situ seismic methods need more space for experiments, so it is difficult to be applied. The HWAW method using the Harmonic wavelet transforms, which is based on time-frequency analysis, determines shear wave velocity profile. It consists of a source as well as short receiver spacing that is 1~3m, and is able to determine a shear wave velocity profile from surface to deep depth by one test on a space. As the HWAW method uses only the signal portion of the maximum local signal/noise ratio to determine a profile, it provides reliability shear modulus profile such as under construction or noisy situation by minimizing effects of noise from diverse vibration on a construction site or urban area. To estimate the applicability of the proposed method, field tests were performed in the change of geotechnical properties according to constructing a minimized modeling bent. Through this study, the change of geotechnical properties of the site was effectively evaluated according to construction of a structure.

• Korean Journal of Agricultural and Forest Meteorology
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• v.17 no.3
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• pp.227-235
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• 2015

Using eddy covariance method, net ecosystem exchange (NEE) of $CO_2$ ($F_{CO_2}$), $H_2O$ (LE), and sensible heat (H) can be approximated as the sum of eddy flux ($F_c$) and storage flux term ($F_s$). Depending on strength and distribution of sink/source of scalars and magnitude of vertical turbulence mixing, the rates of changes in scalars are different with height. In order to calculate $F_s$ accurately, the differences should be considered using scalar profile measurement. However, most of flux sites for agricultural lands in Asia do not operate profile system and estimate $F_s$ using single-level scalars from eddy covariance system under the assumption that the rates of changes in scalars are constant regardless of the height. In this study, we measured $F_c$ and $F_s$ of $CO_2$, $H_2O$, and air temperature ($T_a$) using eddy covariance and profile system (i.e., the multi-level measurement system in scalars from eddy covariance measurement height to the land surface) at the Chengmicheon farmland site in Korea (CFK) in order to quantify the differences between $F_s$ calculated by single-level measurements ($F_s_{-single}$ i.e., $F_s$ from scalars measured by profile system only at eddy covariance system measurement height) and $F_s$ calculated by profile measurements and verify the errors of NEE caused by $F_s_{-single}$. The rate of change in $CO_2$, $H_2O$, and Ta were varied with height depending on the magnitudes and distribution of sink and source and the stability in the atmospheric boundary layer. Thus, $F_s_{-single}$ underestimated or overestimated $F_s$ (especially 21% underestimation in $F_s$ of $CO_2$ around sunrise and sunset (0430-0800 h and 1630-2000 h)). For $F_{CO_2}$, the errors in $F_s_{-single}$ generated 3% and 2% underestimation of $F_{CO_2}$ during nighttime (2030-0400 h) and around sunrise and sunset, respectively. In the process of nighttime correction and partitioning of $F_{CO_2}$, these differences would cause an underestimation in carbon balance at the rice paddy. In contrast, there were little differences at the errors in LE and H caused by the error in $F_s_{-single}$, irrespective of time.

• Journal of Animal Science and Technology
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• v.57 no.9
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• pp.29.1-29.9
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• 2015

This review provides an overview of the published data on the canola meal and its suitability for duck as an alternative plant-origin protein source to soybean meal. Canola meal is a legume origin protein source containing comparable amino acid profile to soybean meal and rich in essential minerals and vitamins. Nonetheless, it is known to contain less in energy content than soybean meal. Factors like field conditions and processing methods creates compositional variations among canola meal. Presence of anti-nutritional factors such as phenolic substances, phytate and glucosinolates which are known to reduce growth performance in livestock animals, are the major drawbacks for canola meal to be a competitive plant-origin protein source in the feed industry. This review is focused to address i) nutritional characteristics and feeding value of canola meal for ducks and ii) impacts of feeding canola meal on performances of ducks.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.21 no.1
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• pp.68-78
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• 1997

A numerical study on the transient vapor flow and heat transfer is performed to investigate the ideal switching operation of heat source in a high temperature heat pipe. The cylindrical 2-dimensional compressible laminar vapor flow is assumed for the vapor space and the conjugate heat transfer for the heat pipe wall, wick and vapor space is calculated. The different boundary conditions such as constant heat flux, convective or radiative boundary at the outer wall are used respectively to compare the influence of boundary conditions on the transient operation. The transient temperature profile and the internal flow of the entire pipe for the switching operation are described as a result. The results show that the transient time is not significantly affected by the boundary conditions at the outer wall in present study. During the transition, two independent flows are observed temporarily on the right side and left side of the heat pipe. It is also found that the trend of temperature variation in the vapor region is different from the variation in the wick and wall region.