• 마이크로전자및패키징학회지
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• 제12권4호통권37호
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• pp.301-306
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• 2005

새로 개발된 Sn-1.8Bi-0.7Cu-0.6In 솔더의 리플로우 후 고온시효 특성을 전당강도 및 미세구조 분석을 통하여 평가하였다. 범프 형성을 위하여 스텐실 프린트법을 사용하였다. Sn-1.8Bi-0.7Cu-0.6In 솔더의 전단강도가 초기 및 고온시효 후에도 가장 높았고, 생성된 계면 금속간화합물은 리플로우 초기뿐만 아니라 시효 후 동일 하게 $(Cu,\;Ni)_6Sn_5$가 형성되었다. 또한, 500시간 시효 이전에 솔더의 분리 현상이 관찰되었다.

• ETRI Journal
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• 제41권3호
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• pp.396-407
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• 2019

Laser-assisted bonding (LAB) is an advanced technology in which a homogenized laser beam is selectively applied to a chip. Previous researches have demonstrated the feasibility of using a single-tier LAB process for 3D through-silicon via (TSV) integration with nonconductive paste (NCP), where each TSV die is bonded one at a time. A collective LAB process, where several TSV dies can be stacked simultaneously, is developed to improve the productivity while maintaining the reliability of the solder joints. A single-tier LAB process for 3D TSV integration with NCP is introduced for two different values of laser power, namely 100 W and 150 W. For the 100 W case, a maximum of three dies can be collectively stacked, whereas for the 150 W case, a total of six tiers can be simultaneously bonded. For the 100 W case, the intermetallic compound microstructure is a typical Cu-Sn phase system, whereas for the 150 W case, it is asymmetrical owing to a thermogradient across the solder joint. The collective LAB process can be realized through proper design of the bonding parameters such as laser power, time, and number of stacked dies.