• 한국자기학회지
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• 제5권5호
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• pp.874-879
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• 1995

고 포화자속밀도를 갖는 Fe미세결정 박막의 자기특성 및 미세구조에 미치는 첨가원소의 영향을 조사하였다. Mo 첨가 박막의 경우, $Fe_{2}Mo$, $Fe_{4}N$, $Fe_{3-2}N$상의 생성으로 연자기 특성이 발현되지 않았다. Ta첨가 박막의 경우, 미세한 TaN, TaC 상이 석출하여 $\alpha$-Fe 결정립을 효과적으로 미세화 시켰으며 Fe 질화물의 생성도 억제되었다. 이에 따라 우수한 연자기 특성이 발현되었으며 FeTaN계 박막은 4000, FeTaC 박막은 2700의 높은 투자율을 나타내었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.448-448
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• 2010

Magnetic random access memory (MRAM) has made a prominent progress in memory performance and has brought a bright prospect for the next generation nonvolatile memory technologies due to its excellent advantages. Dry etching process of magnetic thin films is one of the important issues for the magnetic devices such as magnetic tunneling junctions (MTJs) based MRAM. CoFeB is a well-known soft ferromagnetic material, of particular interest for magnetic tunnel junctions (MTJs) and other devices based on tunneling magneto-resistance (TMR), such as spin-transfer-torque MRAM. One particular example is the CoFeB - MgO - CoFeB system, which has already been integrated in MRAM. In all of these applications, knowledge of control over the etching properties of CoFeB is crucial. Recently, transferring the pattern by using milling is a commonly used, although the redeposition of back-sputtered etch products on the sidewalls and the low etch rate of this method are main disadvantages. So the other method which has reported about much higher etch rates of >$50{\AA}/s$ for magnetic multi-layer structures using $Cl_2$/Ar plasmas is proposed. However, the chlorinated etch residues on the sidewalls of the etched features tend to severely corrode the magnetic material. Besides avoiding corrosion, during etching facets format the sidewalls of the mask due to physical sputtering of the mask material. Therefore, in this work, magnetic material such as CoFeB was etched in an ICP etching system using the gases which can be expected to form volatile metallo-organic compounds. As the gases, carbon monoxide (CO) and ammonia ($NH_3$) were used as etching gases to form carbonyl volatiles, and the etched features of CoFeB thin films under by Ta masking material were observed with electron microscopy to confirm etched resolution. And the etch conditions such as bias power, gas combination flow, process pressure, and source power were varied to find out and control the properties of magnetic layer during the process.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 B
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• pp.1043-1045
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• 2004

This paper deals with the core loss calculation of a BLDC motor made of Soft Magnetic Composite material. Since the teeth of motor partially have overhang in axial direction, 3 - dimensional equivalent magnetic circuit network (3D-EMCN) is used as an analytical method to get flux density of each element. The total core loss is calculated with the magnetic flux density and core loss curves of the SMC material. The calculated result is compared with core loss of the motor without overhang in stator teeth.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2007년도 The 1st International Symposium on Advanced Magnetic Materials
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• pp.289.2-289.2
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• 2007

• 전기학회논문지
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• 제58권2호
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• pp.278-284
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• 2009

The global force and interaction body force density were evaluated in permanent magnets by using the virtual air-gap scheme incorporating the finite-element method. Until now, the virtual air-gap concept has been successfully applied to calculate a contact force and a body force density in soft magnetic materials. These force calculating methods have been called as generalized methods such as the generalized magnetic charge force density method, the generalized magnetizing current force density method, and the generalized Kelvin force density method. For permanent magnets, however, there have been few research works on a contact force and a force density field. Unlike the conventional force calculating methods resulting in surface force densities, the generalized methods are novel methods of evaluating body force density. These generalized methods yield the actual total force, but their distributions have an irregularity, which seems to be random distributions of body force density. Inside permanent magnets, however, a smooth pattern was obtained in the interaction body force density, which represents the interacting force field among magnetic materials. To evaluate the interaction body force density, the intrinsic force density should be withdrawn from the total force density. Several analysis models with permanent magnets were tested to verify the proposed methods evaluating the interaction body force density and the contact force, in which the permanent magnet contacts with a soft magnetic material.

• 한국전기전자재료학회논문지
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• 제17권1호
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• pp.52-58
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• 2004

Magneto-Impedance(MI) sensor is a highly sensitive sensor, which was able to detect a weak geomagnetic field. It also has a merit to be able to build in the low power system. In this study, their magnetic permeability and anisotropy field(H$\sub$k/) as a function of some different thickness of sputtered amorphous CoZrNb films with zero-magnetostriction and soft magnetic property are investigated. In order to make a uniaxial anisotropy, film was subjected to the post annealing in a static magnetic field with 1KOe intensity at 250, 300, and 320$^{\circ}C$ respectively for 2 hours. Magnetic properties of films are measured by using a M-H loop tracer. Magnetic permeability of a film is measured over the frequency range from 1 ㎒ to 750㎒. By thickening a CoZrNb film relatively, magnetic permeability and impedance are examine to design the. MI sensor which drives at 50㎒, and thereof fabricated the MI sensor which drives at the 50㎒.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.443-446
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• 2001

MI(Magneto-Impedance) sensor which is made by thin films has significantly high detecting sensitivity in weak magnetic field. It also has a merit to be able to build in low power system. Its structure is simple, which makes it easier to prepare a miniature. In this study, its magnetic permeability and anisotropy field(H$\sub$k/) as a function of a thickness of sputtered amorphous CoZrNb thin film with high saturation magnetostriction and excellent soft magnetic property are investigated. In order to make a uniaxial anisotropy, thin film was subjected to post annealing with a static magnetic field with 1KOe intensity at 250, 300, and 320$^{\circ}C$ for 2 hour. Anisotropy field(H$\sub$k/)of thin film is measured by using MH loop tracer. Its magnetic permeability of thin film is measured over the frequency range from 1 MHz to 750MHz. It has shown that the magnetic permeability of amorphous CoZrNb thin film is decreased due to the skin effect with increasing a thickness of CoZrNb thin film, and hence its driving frequency is lowered.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.778-781
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• 2002

MI(Magneto-Impedance) sensor which is made by thin films has significantly high detecting sensitivity in weak magnetic field. It also has a merit to be able to build in the low power system. Its structure is simple, which makes it easier to prepare a miniature. In this study, its magnetic permeability and anisotropy field$(H_k)$ as a function of a thickness of sputtered amorphous CoZrNb films with zero-magnetostriction and excellent soft magnetic property are investigated. In order to make a uniaxial anisotropy, film was subjected to the post annealing in a static magnetic field with 1KOe intensity at 250, 300, and $320^{\circ}C}$ respectively for 2 hours. Anisotropy field$(H_k)$ of film is measured by using a MH loop tracer. Its magnetic permeability of a film is measured over the frequency range from 1 MHz to 750MHz. It has shown that the magnetic permeability of amorphous CoZrNb film is decreased due to the skin effect with increasing a thickness of the CoZrNb film, and hence its driving frequency is lowered. And, it was examined on the permeability and impedance to fabricate the MI sensor which acts at a low frequency by thickening a CoZrNb film relatively.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.132-135
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• 2002

MI(Magneto-Impedance) sensor which is made by thin films has significantly high detecting sensitivity in weak magnetic field. It also has a merit to be able to build in the low power system. Its structure is simple, which makes it easier to prepare a miniature. In this study, its magnetic permeability and anisotropy field($H_{k}$) as a function of a thickness of sputtered amorphous CoZrNb films with zero-magnetostriction and soft magnetic property are investigated. In order to make a uniaxial anisotropy, film was subjected to the post annealing in a static magnetic field with 1KOe intensity at 250, 300, and $320^{\circ}C$ respectively for 2 hours. Magnetic properties of film are measured by using a MH loop tracer. Its magnetic permeability of a film is measured over the frequency range 1 MHz to 750MHz. And, it was examined on the permeability and impedance to design the MI sensor which acts at 50MHz by thickening a CoZrNb film relatively, and fabricated the MI sensor which acts at the 50MHz.

• 한국자기학회지
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• 제15권4호
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• pp.241-245
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• 2005

CoFeNi 합금은 HDD, MEMS 분야에서 head core 재료로 쓰이는 permalloy(FeNi)합금보다 뛰어난 우수한 자기적 특성을 가진 재료로써 최근 많이 연구되어지고 있다. CoFeNi 합금의 조성과 전기도금 시 전류조건에 따른 미세구조와 결정학적 특성이 자기 특성에 미치는 영향을 조사하였으며, 높은 포화자화와 낮은 보자력을 갖는 CoFeNi 삼원계 합금을 전기도금 방식으로 제조하는데 성공하였다. 포화자화 1.9 T, 보자력 0.16 A/m를 갖는 대표적인 CoFeNi film의 조성은 $Co_{30}\;Fe_{34}\;Ni_{36}(at\%)$이며, 미세결정립과 ffc-bcc 상의 혼재가 낮은 보자력을 갖는 요인임을 XRD, TEM의 결과로부터 확인 하였다.