• International journal of advanced smart convergence
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• v.10 no.1
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• pp.159-165
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• 2021

Electronic devices used in the mobile environments fabricated under the plasma conditions in high vacuum system. Especially for the development of advanced electronic devices, high quality plasma as the process conditions are required. For this purpose, the variable conductance throttle valves for controllable plasma employed to the high vacuum system. In this study, we analyzed the effects of throttle valve applications on vacuum characteristics simulated to obtain the optimum design modelling for plasma conditions of high vacuum system. We used commercial simulator of vacuum system, VacSim(multi) on this study. Reliability of simulator verified by simulation of the commercially available models of high vacuum system. Simulated vacuum characteristics of the proposed modelling agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve schematized as the modelling of throttle valve for the constant process-pressure of below 10-3 torr. Simulation results plotted as pump down curve of chamber, variable valve conductance and conductance logic of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably in plasma process.

• Journal of Magnetics
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• v.19 no.4
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• pp.345-348
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• 2014

Magnetorheological suspensions (MRSs) are smart materials that have the potential to revolutionize several industrial sectors because of their special rheological behaviors. In this paper, MRS, based on carbonyl iron (CI) microparticles that were dispersed in silicone oil with oleic acid, were prepared. We showed that the electroconductibility of MRS was significantly influenced by the intensity of the external magnetic field that was applied. The resistance value can vary from infinite to below $300{\Omega}$ after applying an external magnetic field. The results indicated that this MRS had the property of magnetic-field-tuned insulator to conductor transition. This system has potential applications in controllable MRS electrical devices.

• Smart Structures and Systems
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• v.5 no.3
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• pp.241-260
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• 2009

Shape control of flexible structures using piezoelectric materials has attracted much attention due to its wide applications in controllable systems such as space and aeronautical engineering. The major work in the field is to find a best control voltage or an optimal placement of the piezoelectric actuators in order to actuate the structure shape as close as possible to the desired one. The current research focus on the investigation of static shape control of intelligent shells using spatially distributed piezoelectric curve beam actuators. The finite element formulation of the piezoelectric model is briefly described. The piezoelectric curve beam element is then integrated into a collocated host shell element by using nodal displacement constraint equations. The linear least square method (LLSM) is employed to get the optimum voltage distributions in the control system so that the desired structure shape can be well matched. Furthermore, to find the optimal placement of the piezoelectric curve beam actuators, a genetic algorithm (GA) is introduced in the computation model as well as the consideration of the different objective functions. Numerical results are given to demonstrate the validity of the theoretical model and numerical algorithm developed.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.21 no.6
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• pp.597-605
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• 2008

The feasibility study of a newly proposed smart base isolation system employing magneto-rheological elastomers(MREs) has been carried out. MREs belong to a class of smart materials whose elastic modulus or stiffness can be adjusted by varying the magnitude of the magnetic field. The base isolation systems are considered as one of the most effective devices for vibration mitigation of civil engineering structures such as bridges and buildings in the event of earthquakes. The proposed base isolation system strives to enhance the performance of the conventional base isolation system by improving the robustness of the system wide stiffness range controllable of MREs, which improves the adaptability and helps in better vibration control. To validate the effectiveness of the MRE-based isolation system, an extensive numerical simulation study has been performed using both single-story and five-story building structures employing base isolated devices under several historical earthquake excitations. The results show that the proposed system outperformed the conventional system in reducing the responses of the structure in all the seismic excitations considered in the study.