• 태양에너지
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• 제20권1호
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• pp.55-62
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• 2000

An experimental study on the stratified fluids with water and silicon oil of same volume in the cavity with upper cooling surface was carried out to investigate the flow characteristics, heat transfer through the interface of fluids, and the applications of thermal behaviors in a square cavity. The experiments were performed with variation of initial temperature and cooling surface temperature. The temperature drop of oil was faster than that of water and freezing was initiated from the interface of oil and water and propagated downward. For the water above $4^{\circ}C$, the cooling rate was faster than that below $4^{\circ}C$ and showed almost same temperature distribution but for the water that of below $4^{\circ}C$, it showed the stable stratified temperature distribution. The lower the initial temperature and the higher the cooling surface temperature was, the longer the supercooling duration.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1993년도 정기총회 및 추계학술대회 논문집 학회본부
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• pp.210-212
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• 1993

In this paper, a silicon microvalve has been fabricated using micromachining technology. The valve consists of the several thin silicon diaphragms which are designed to open and close depending on the pressure difference. It is supposed to pass fluids in only one direction. The thin diaphragms are fabricated by boron etch stop using an anisotropic etchant, EPW. The fabricated valve has been tested for various pneumatic pressure. According to the experimental results, the slit width of the valve increases as the pneumatic pressure increases.

• 한국정밀공학회지
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• 제20권6호
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• pp.27-36
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• 2003

The Electro-Rheological (ER) fluid has been used to the ultraprecision polishing of single crystal silicon as new polishing slurry whose properties such as yield stress and particle structure changed with the application of an electric field. In this work, it is aimed to find the effective parameters in the ER fluid on material removal in the polishing system whose structure is similar to that of the simple hydrodynamic bearing. The generated pressure in the gap between a moving wall and a workpiece, as well as the electric field-induced stress of the mixture of ER fluid-abrasives, is evaluated experimentally, and their influence on the polishing of single crystal silicon is analyzed. Moreover, the behavior of abrasive and ER particles is described.

• 한국공작기계학회논문집
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• 제14권5호
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• pp.49-54
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• 2005

An experimental Investigation was performed to study the characteristics of Electro-Rheological fluid flow in a horizontal rectangular tube with or without D.C electric field control. First, the microscopic behavior of the ER suspension structure between rectangular tube brass electrodes for the stationary ER nut(i and flow of the ER fluid was investigated by flow visualization. The flow of the ER fluid between fluid rectangular tube was solved experimental using the constitutive equation for a Bingham fluid. ER fluid is made silicon oil mixed with $0.2wt\%$ starch having hydrous particles. Velocity distributions of the ER fluids were obtained by particle image velocimetry measuring those of the clusters using an image processing technique.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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• pp.673-675
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• 2005

Ink jet printheads are now widely used in manufacturing processes that require precise dispensing of materials. Today, Dimatix manufactures a variety of drop-on-demand ink jet printheads for the industrial printing market, but emerging opportunities present fresh challenges to our technology. In response to requirements for digitally printing on flexible substrates and dispensing novel electronic fluids, we are developing next generation jetting technology based on our three-dimensional silicon MEMS technology with a piezo-driven pumping chamber integrated into the chip structure. This presentation will address the functional and physical design features and properties of Dimatix's MEMS process, its characteristics, reliability and usability. Examples of opportunities and applications for digitally printing electronic fluids on flexible substrates with MEMS-based ink jet technology will be presented.

• Asian Pacific Journal of Cancer Prevention
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• 제17권3호
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• pp.879-894
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• 2016

In micro-fluid systems, fluids are injected into extremely narrow polymer channels in small amounts such as micro-, nano-, or pico-liter scales. These channels themselves are embedded on tiny chips. Various specialized structures in the chips including pumps, valves, and channels allow the chips to accept different types of fluids to be entered the channel and along with flowing through the channels, exert their effects in the framework of different reactions. The chips are generally crystal, silicon, or elastomer in texture. These highly organized structures are equipped with discharging channels through which products as well as wastes of the reactions are secreted out. A particular advantage regarding the use of fluids in micro-scales over macro-scales lies in the fact that these fluids are much better processed in the chips when they applied as micro-scales. When the laboratory is miniaturized as a microchip and solutions are injected on a micro-scale, this combination makes a specialized construction referred to as "lab-on-chip". Taken together, micro-fluids are among the novel technologies which further than declining the costs; enhancing the test repeatability, sensitivity, accuracy, and speed; are emerged as widespread technology in laboratory diagnosis. They can be utilized for monitoring a wide spectrum of biological disorders including different types of cancers. When these microchips are used for cancer monitoring, circulatory tumor cells play a fundamental role.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1873-1876
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• 2003

Magneto-rheological polishing is a new technology used in precision polishing. It utilizes magneto-rheological fluid. nonmagnetic polishing abrasive, aqueous carrier fluids in magnetic field to remove material from a part surface. Silicon micro channel as work piece is fixed in the slurry which is made of MR fluid and CeO$_2$(10 vol%) abrasive particles. And permanent magnet rotate in the slurry to transfers magnetic force to abrasive particles by increasing yield strength of MR fluid. so, the obtained bottom surface roughness of micro channel by experiment reduced to Ra 0.010 $\mu\textrm{m}$ Rmax 0.103 $\mu\textrm{m}$ and finwall surface roughness of micro channel reduced to Ra 0.018 $\mu\textrm{m}$ Rmax 0.468 $\mu\textrm{m}$. At optimum conditions of variables, the workpiece as silicon micro channel have about 24 times smaller surface roughness than before polishing.

• 전기학회논문지
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• 제56권2호
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• pp.334-337
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• 2007

After the advent of micro-Total Analysis Systems(${\mu}-TAS$) based on silicon various polymer for microfluidic chip has been studied. Polymer materials for microfluidic compared with silicon and glass which were traditional materials of a microfluidic chip, have the advantages of economical efficiency simple manufacturing process and wide materials selectivity corresponding to fluids. Surface energy of polymers we, however lower than silicon or glass. To overcome this problem, various surface modification methods have been investigated. The surface modification using laser has the advantage of the simple experiment that only directly irradiated laser beam on the material surface in the air. This work discuss the surface modification of polymethly methacrylate(PMMA) by 4th harmonic Nd:YAG laser (${\lambda}266nm$, pulse) treatment. After the laser treatment, the PMMA surface was investigated using a contact angle measuring instrument. The contact angle was decreased with a increase of the surface oxygen content. This result means the surface energy of PMMA was increased by the laser treatment without changing of its bulk characteristics.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2010년도 춘계학술발표대회
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• pp.20.2-20.2
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• 2010

Recently inkjet printing technology has been developed in the areas of low cost fabrication in environmentally friendly manufacturing processes. Although inkjet printing requires the interdisciplinary researches including development of materials, manufacturing processes and printing equipment and peripherals, manufacturing a printhead is still core of inkjet technology. In this study, a piezoelectric driven DOD (drop on demand) inkjet printhead has been fabricated on three layers of the silicon wafer in MEMS Technology because of its chemical resistance to industrial inks, strong mechanical properties and dimensional accuracy to meet the drop volume uniformity in printed electronics and display industries. The flow passage, filter and nozzles are precisely etched on the layers of the silicon wafers and assembled through silicon fusion bonding without additional adhesives. The piezoelectric is screen-printed on the top the pressure chamber and the nozzle plate surface is treated with non-wetting coating for jetting fluids. Printheads with nozzle number of 16 to 256 have been developed to get the drop volume range from 5 pL to 80 pL in various industrial applications. Currently our printheads are successfully utilized to fabricating color-filters and PI alignment layers in LCD Flat Panel Display and legend marking for PCB in Samsung Electronics.

• 유기물자원화
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• 제31권3호
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• pp.15-25
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• 2023

본 연구에서는 반도체 패키지 다이싱 공정에서 발생하는 실리콘 슬러지를 재활용하여 실리카 나노입자를 제조하였으며 이를 전기감응형 스마트유체의 분산 물질로 적용하였다. 상세히는, 실리콘 슬러지에 산처리를 통해 금속불순물을 제거한 고순도의 실리콘 분말을 얻고, 수열합성법을 통해 실리카 나노입자를 합성하였다. 실리카 나노입자의 크기를 조절하기 위해 수열합성법의 반응시간을 8, 15, 20, 30시간으로 진행하였으며, 반응시간이 증가할수록 실리카 나노입자의 크기가 증가하였다. 수열합성의 반응시간이 길어질수록 실리콘의 가수화 및 탈수 반응이 증가하며 입자의 크기를 증가시킨다. 실리콘 슬러지에서 제조한 실리카 나노입자를 실리콘 오일에 분산하여 전기감응형 스마트유체로 응용하였다. 그 결과, 30시간의 수열합성으로 제조된 실리카 나노입자가 동일한 전기장 하에서 21.4Pa의 가장 높은 전단응력을 나타내었다. 이는 큰 실리카 나노입자의 사이에 작은 입자들이 배치되는 보강효과 효과를 통해 단단한 사슬구조의 형성 때문이다. 본 연구를 통해 반도체 다이싱 공정에서 발생하는 실리콘 슬러지를 성공적으로 재활용하여 실리카 나노입자를 제조하였고, 이를 전기감응형 스마트유체에 적용함으로써 산업현장에서 친환경성을 강조하는 ESG 경영의 일환으로 적용될 수 있음을 확인하였다.