• 한국전기전자재료학회논문지
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• 제16권6호
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• pp.465-470
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• 2003

The chemical mechanical polishing (CMP) process has been widely used for the global planarization of multi-layer structures in semiconductor manufacturing. The CMP process can be optimized by several parameters such as equipment, consumables (pad, backing film and slurry), process variables and post-CMP cleaning. However, the COO(cost of ownership) is very high, because of high consumable cost. Especially, among the consumables, the slurry dominates more than 40 %. In this paper, we have studied the CMP characteristics of diluted silica slurry by adding of raw alumina abrasives and annealed alumina abrasives. As an experimental result, we obtained the comparable slurry characteristics compared with original silica slurry in the view-point of high removal rate and low non-uniformity. Therefore, we can reduce the cost of consumables(COC) of CMP process for ULSI applications.

• Bulletin of the Korean Chemical Society
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• 제22권12호
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• pp.1400-1402
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• 2001

• 한국지구과학회지
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• 제43권4호
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• pp.532-538
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• 2022

Under anoxic conditions, this study investigated removal of dissolved As(III) by Si and Al oxides including natural sand, chemically washed sand (silica), alumina, and activated alumina. Despite the similar surface area, natural sand showed greater extents of As(III) sorption than chemically washed sand. This was likely due to the high reactivity of Fe(oxyhydr)oxide impurities on the surface of natural sand. For both sands, As(III) sorption was the greatest at pH 7.1, in agreement with the weakly dissociating tendency of arsenous acid. Also, the least sorption was observed at pH 9.6. At basic pH, elevated silicate, which originated from the dissolution of silica in sands, would compete with As(III) for sorption. Due to the highest surface area, activated alumina was found to quantitatively immobilize the initially added As(III) (6.0×10^-7-2.0×10^-5 M). Alumina showed As(III) sorption compared to or greater than chemically washed sand, although the former had less than 6% of the surface of area the latter. The greater reactivity of alumina than chemically washed sand can be explained by using the shared charge of oxygen.

• 한국미생물·생명공학회지
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• 제42권2호
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• pp.114-120
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• 2014

본 연구에서는 주목 식물세포(Taxus chinensis) 배양 유래항암물질 paclitaxel을 정제하기 위하여, 반응액 부피당 표면적이 증가된 분별침전에서 표면적증가물질 실리카-알루미나의 제타전위가 분별침전 양상(순도, 수율, 침전시간, 침전물형태와 크기)에 미치는 영향을 조사하였다. 실리카-알루미나의 제타전위가 양(+)의 값으로 증가할수록 paclitaxel 수율은 증가하였으며 침전 시간은 감소하였다. 표면적증가물질로 제타전위가 가장 큰 알루미나(제타전위: +35.41 mV)를 이용한 경우 표면적증가물질을 이용하지 않은 경우에 비해 침전에 소요되는 시간을 12시간 정도 단축시킬 수 있었다. 반면 표면적증가물질 실리카-알루미나의 전타전위 변화에도 paclitaxel 순도는 거의 변화가 없었다. 또한 분별침전 과정에서 제타전위 절대값이 증가할수록 paclitaxel 침전물의 크기는 감소하여 제타전위 절대값에 반비례함을 알 수 있었다. 이러한 개선된 분별침전 공정은 바이오매스 유래 paclitaxel 정제 공정에 효과적으로 기여할 것으로 판단된다.

• 한국세라믹학회지
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• 제32권9호
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• pp.977-988
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• 1995

Several oxide (ZrO2, Al2TiO5, reactive Al2O3) and nonoxide (SiC, Si3N4, "ALON" (5AlN.9Al2O3)) additives were used as a microfiller for alumina based LCC (Low-Cement-Castable). High temperature prooperties (HMOR, softening under load) and the phase changes of developed LCC on various sintering temperatures were examined. In addition, thermal shock test and corrosion test were accomplished. Based on these data the effects of each microfiller on the properties of LCC were established comparing to those of the commercial LCC with amorphous silica as a microfiller. The castables, containing reactive alumina, ZrO2 and "ALON" (5AlN.9Al2O3) as a first portion, exhibited considerably higher HMOR-values over 100$0^{\circ}C$, better creep behavior, and thermal shock resistance than those of castables with amorphous silica. The LCC with 5% Al2TiO5 showed no corrosion against molten aluminum.nst molten aluminum.

• Bulletin of the Korean Chemical Society
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• 제16권6호
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• pp.507-511
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• 1995

Catalytic chlorination of chlorobenzene was studied in vapor phase using various solid-acid catalysts such as silica-alumina, alumina, zeolite and a modified clay prepared by impregnating bentonite with ferric chloride. The conversions of both chlorine gas and chlorobenzene showed high over silica-alumina, alumina and modified clay catalysts. However relatively large amounts of polychlorinated benzene derivatives were also observed. The active species of catalytic activity in chlorination of chlorobenzene in vapor phase were proved to be as Lewis acid sites by in-situ IR experiments. The strength of Lewis acid sites which were effective for the vapor-phase chlorination seemed to be having Hammett acidity Ho >-3.0. The selectivity to dichlorobenzenes was proved to be high over the zeolite catalyst due to their shape-selective properties. p-Dichlorobenzene or dichlorobenzene selectivities were improved more or less by changing the reaction conditions.

• 한국환경과학회지
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• 제8권2호
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• pp.263-269
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• 1999

For effective $CO_2$ separation using pore size controlled membrane, silica was deposited in the mesopores of a $\gamma$-alumina film by chemical vapor deposition of tetraethoxysilane (TEOS) and phenyl-substituted ethoxysilanes at 773-873K. The membranes prepared with phenyl-substituted ethoxysilanes were calcined to remove the phenyl group and control the pore size. The gas permaselectivity of prepared membranes was evaluated by using $H_2$, $CO_2$ $N_2$, $CH_2$ and $C_3H_8$ single component and a mixture of $CO_2$ and $N_2$. The membranes produced using TEOS contained micropores having permselectivity only to hydrogen, but the phenyl-subsitituted ethoxysilane derived membranes possessed micorpores which are recognizable molecules of $CO_2$, $N_2$ and $CH_4$. In the diphenyl-diethoxysilane-derived membrane, the $CO_2$ permeance and selectivity of $CO_2$/$CH_4$ were $10^{-6} m^3(STP) \cdot m^{-2} \cdot s^{-1} \cdot kPa^{-1}$ and 11, respectively. Therefore, the use of phenyl-substituted ethoxysilane was effective in controlling micropore size for $CO_2$ separation.

• Bulletin of the Korean Chemical Society
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• 제23권6호
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• pp.803-807
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• 2002

The conversion of dimethyl ether(DME) has been carried out over $\gamma-alumina$, silica-alumina, and modified $\gamma-aluminal$ catalysts. Especially, the water effect has been investigated on purpose to develop a suitable catalyst for one-step synthesis of DME from $CO_2$ hydrgenation, The $\gamma-Al_2O_3$ modified with 1 wt% silica is more active and less deactivated by water than unmodified one. $CO_2has$ no effect on catalytic dehydration of methanol to DME.

• 한국세라믹학회지
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• 제25권6호
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• pp.655-664
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• 1988

As a part of study to establish the industrial process for manufacturing high purity alumina powder which is largely used as fine ceramics, an adsorption method using a silica-containing material which can absorb to eliminate a major impurity, Na in aluminum hydroxide as a raw material has been studied. It is confirmed that the primary property of powder such as the particle size of raw material and that of silica-containing material plays a great important role in the purification process.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2006년도 추계학술대회
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• pp.336-339
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• 2006

With the steady depletion off fossil fuel reserves, hydrogen based energy sources become increasingly attractive. Therefore hydrogen production or separation technologies, such as Bas separation membrane based on adsorption technology, have received enormous attention in the industrial and academic fields. In this study, the transport mechanisms of the MTES (methyltriethoxysilane) templating silica/a-alumina composite membrane were evaluated by using unary, binary and quaternary hydrogen gas mixtures permeation experiments at unsteady- and steady-states. Since the permeation flux in the MTES membrane, through the experimental and theoretical study, was affected by molecular sieving effects as well as surface diffusion properties, the kinetic and equilibrium separation should be considered simultaneously in the membrane according to molecular properties. In order to depict the transient multi-component permeation on the templating silica membrane, the GMS (generalized Maxwell-Stefan) and DGM (dust Bas model) were adapted to unsteady-state material balance