• 한국재료학회지
• /
• 제8권7호
• /
• pp.634-640
• /
• 1998

HBr을 이용한 트렌치 식각시 식각 방지막의 형성과 이들이 결함 생성 및 분포에 미치는 영향을 고분해능 투과전자현미경을 이용하여 연구하였다. $O_2$ 및 다른 첨가 가스로 $SiO_xF_y$, $SiO_xBr_y$ 등의 식각 방지막을 표면에 형성시켜 벽면 undercut을 방지하고 표면의 거칠기를 감소할 수 있었으며, 이후의 트렌치 채움 공정에서 void 가 없는 잘 채원진 구조를 얻을 수 있었다. 형성된 식각 방지막은 격자 결함의 생성 및 이들의 분포에 영향을 미쳤다. 대부분의 식각 유도 결함들은 트렌치 바닥의 가장자리에서 $10\AA$ 이내의 깊이로 분포하였으며, 잔류막의 두께에 의존하였다. 두꺼운 잔류막층 아래로는 결함들이 거의 사라졌으며, 결함층의 깊이와 잔류막 두께는 대체로 반비례하는 것을 나타났다. 기판 내에 존재하는 결정학적인 결함들은 식각종의 입사각이나 에너지에 의존하는 반면에,식각된 표면에서 관찰되는 결함들은 트렌치 식각동안 형성되는 이러한 잔류막의 두께에 크게 의존하는 것으로 나타났다.

• Korean Chemical Engineering Research
• /
• 제43권4호
• /
• pp.531-536
• /
• 2005

포토리지스트 마스크로 패턴된 CoTb 및 CoZrNb 자성 박막에 대한 유도 결합 플라즈마 반응성 이온 식각이 $Cl_2/Ar$와 $C_2F_6/Ar$ 가스를 이용하여 진행되었고 식각 속도와 식각 프로파일 측면에서 조사되었다. $Cl_2$와 $C_2F_6$ 가스의 농도가 증가함에 따라서 자성 박막들의 식각 속도는 감소하였고 식각 경사는 낮아졌다. 자성 박막들의 식각 가스로서 $Cl_2/Ar$이 빠른 식각 속도와 가파른 식각 경사를 얻는데 있어서 $C_2F_6/Ar$ 보다 더 효과적이었다. Coil rf power의 증가는 플라즈마 내의 Ar 이온과 라디칼의 밀도를 증가시키고 dc bias voltage의 증가는 기판으로 스퍼터되는 Ar 이온의 에너지를 증가시키기 때문에 coil rf power와 dc bias voltage가 증가할수록 식각 속도와 식각 경사는 증가하였지만 패턴의 측면에서 재증착이 일어났다. 자성 박막들의 적층으로 형성된 magnetic tunnel junction stack에 고밀도 플라즈마 반응성 이온 식각을 적용하여, 높은 식각 경사와 재증착이 없는 깨끗한 식각 프로파일을 얻었다.

• 대한두개안면성형외과학회지
• /
• 제17권4호
• /
• pp.190-197
• /
• 2016

Background: The cheek rotation flap has sufficient blood flow and large flap size and it is also flexible and easy to manipulate. It has been used for reconstruction of defects on cheek, lower eyelid, or medial and lateral canthus. For the large defects on central nose, paramedian forehead flap has been used, but patients were reluctant despite the remaining same skin tone on damaged area because of remaining scars on forehead. However, the cheek flap is cosmetically superior as it uses the adjacent large flap. Thus, the study aims to demonstrate its versatility with clinical practices. Methods: This is retrospective case study on 38 patients who removed facial masses and reconstructed by the cheek rotation flap from 2008 to 2015. It consists of defects on cheek (16), lower eyelid (12), nose (3), medial canthus (3), lateral canthus (2), and preauricle (2). Buccal mucosa was used for the reconstruction of eyelid conjunctiva, and skin graft was processed for nasal mucosa reconstruction. Results: The average defect size was $6.4cm^2$, and the average flap size was $47.3cm^2$. Every flap recovered without complications such as abnormal slant, entropion or ectropion in lower eyelid, but revision surgery required in three cases of nasal side wall reconstruction due to the occurrence of dog ear on nasolabial sulcus. Conclusion: The cheek rotation flap can be applicable instead of paramedian forehead flap for the large nasal sidewall defect reconstruction as well as former medial and lateral canthal defect reconstruction.

• 한국광학회지
• /
• 제21권1호
• /
• pp.26-32
• /
• 2010

플라스틱 광섬유의 주기적인 bending을 이용한 누설광섬유에 기반을 둔 라인램프를 제안하고, 그 핵심요소로서 높은 광결합효율을 갖는 LED-광섬유 결합기를 설계 및 해석하였다. Monte Carlo photon simulation 기법을 이용하여 해석한 결과, 결합기의 광결합효율은 반사컵 옆면의 기울기각 $\theta_w$와 반사컵의 반사도 $\rho_{ref}$에 대해 상대적으로 민감하게 영향을 받는 사실을 확인할 수 있었다. 광결합효율은 $\theta_w=60^{\circ}C$ 근처에서 최대가 되었는데, 이 값은 일반적인 LED 램프에서 흔히 사용하는 반사컵 옆면의 기울기각 $\theta_w=45^{\circ}$보다 상당히 큰 값이다. 그리고 반사컵의 반사도 $\rho_{ref}$가 0.8정도 이상이 되면, 광결합효율은 보통의 LD-광섬유 결합기에서 얻을 수 있는 광결합효율인 80% 정도를 뛰어 넘었다.

• Ecology and Resilient Infrastructure
• /
• 제7권4호
• /
• pp.308-319
• /
• 2020

본 논문은 경북 영천시 서문보에 최근 건설된 다기능 어도의 현장 적용성을 검토하기 위해 해석 변수를 R/C Slab (S1), R/C+S/C Slab (S2) 및 지하이동통로 규격 (가로 × 세로)을 1.4 × 0.2 m, 1.4 × 0.3 m, 1.4 × 0.6 m와 유속 0.8 m/s, 1.2 m/s, 1.6 m/s 으로 구분하여 해석한 결과 서문보 설계식 안전성을 평가하였다. 서문보의 설계식 보다 R/C+S/C Slab타입이 지하이동통로 출구부는 휨모멘트와 최대응력은 각각 16 - 33%, 24 - 32%, 측벽은 각각 17 - 33%, 20 - 36%, 상부슬래브인 경우도 19 - 33%, 9 - 28% 적게 나타났다. 따라서 최대응력과 휨모멘트가 R/C+S/C Slab 타입이 구조 안전성이 확보되는 것으로 나타났다. 따라서 지하통로는 휨모멘트와 최대 응력이 각각 14%, 18%, 측벽은 17%, 15% 상부슬래브는 16%, 11%의 보완이 요구되는 것으로 판단된다. 이러한 결과는 지하이동통로 규격이 서문보 규격과 동일한 1.4 × 0.3 m 일 때가 1.4 × 0.2 m, 1.4 × 0.6 m보다 안전성이 가장 유리한 것으로 확인되었다. 또한 해석 및 분석 결과를 근거로 서문보 규모의 다기능 어도 적용 시 기본 자료로 활용이 기대된다.

• ETRI Journal
• /
• 제36권5호
• /
• pp.841-846
• /
• 2014

This study proposes a novel optical sensor structure based on a refractometer combining a bend waveguide with an air trench. The optical sensor is a $1{\times}2$ splitter structure with a reference channel and a sensing channel. The reference channel has a straight waveguide. The sensing channel consists of a U-bend waveguide connecting four C-bends, and a trench structure to partially expose the core layer. The U-bend waveguide consists of one C-bend with the maximum optical loss and three C-bends with minimum losses. A trench provides a quantitative measurement environment and is aligned with the sidewall of the C-bend having the maximum loss. The intensity of the output power depends on the change in the refractive index of the measured material. The insertion loss of the proposed optical sensor changes from 3.7 dB to 59.1 dB when the refractive index changes from 1.3852 to 1.4452.

• 한국결정성장학회지
• /
• 제14권6호
• /
• pp.281-289
• /
• 2004

The temperature hump is found to be most efficient in suppressing parasitic nucleation. With the temperature humps, there are found to be observed in undersaturations along the transport path for convective-diffusive processes ranging from $D_{AB}$ = 0.0584 $\textrm{cm}^2$/s to 0.584 $\textrm{cm}^2$/s, axial positions from 0 to 7.5 cm. With decreasing Ar = 5 to 3.5, the temperature difference is increased because of the imposed nonlinear temperature profile but the rate is decreased. For 2 $\leq$ Ar $\leq$ 3.5, the rate is increased with the aspect ratio as well as the temperature difference. Such an occurrence of a critical aspect ratio is likely to be due to the effect of sidewall and much small temperature difference. The rate is decreased exponentially with the aspect ratio for 2 $\leq$ Ar $\leq$ 10. Also, the rate is exponentially decreased with partial pressure of component B, P for 1 $\leq$ P $\leq$ 100 Torr.$ B/ $\leq$ 100 Torr.

• 한국항해항만학회지
• /
• 제38권1호
• /
• pp.11-18
• /
• 2014

To confirm whether the square tank at Changwon National University (CWNU) can be used for estimation of maneuverability, planar motion mechanism (PMM) test and circular motion (CM) test were performed for various conditions. PMM test can be implemented using an XY carriage and a yaw table in the square tank. However, sometimes test section is insufficient for PMM test owing to low length-breadth ratio of the tank. In addition, the speed of a towing carriage is also quite limited. Therefore, it would be useful if PMM test could be effectively performed diagonally, by establishing coupled control logic to drive three servomotors. In addition, Froude number dependency on the estimated hydrodynamic coefficients was checked. Furthermore, CM tests, which cannot be completed in a conventional linear towing tank, were performed, and its results were compared with the results of PMM test. The results of the PMM tests in the diagonal direction were consistent with the results of the test performed in the direction parallel to the sidewall. However, the results of the CM test were greater than those of the PMM test. This tendency was also observed in the results published at Ulsan University.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
• /
• pp.288-288
• /
• 2012

The oxidation characteristics of tungsten line pattern during the carbon-based mask layer removal process using oxygen plasmas and the reduction characteristics of the WOx layer formed on the tungsten line surface using hydrogen plasmas have been investigated for sub-50 nm patterning processes. The surface oxidation of tungsten line during the mask layer removal process could be minimized by using a low temperature ($300^{\circ}K$) plasma processing instead of a high temperature plasma processing for the removal of the carbon-based material. Using this technique, the thickness of WOx on the tungsten line could be decreased to 25% of WOx formed by the high temperature processing. The WOx layer could be also completely removed at the low temperature of $300^{\circ}K$ using a hydrogen plasma by supplying bias power to the tungsten substrate to provide an activation energy for the reduction. When this oxidation and reduction technique was applied to actual 40 nm-CD device processing, the complete removal of WOx formed on the sidewall of tungsten line could be observed.

• 대한전자공학회:학술대회논문집
• /
• 대한전자공학회 2001년도 하계종합학술대회 논문집(4)
• /
• pp.93-96
• /
• 2001

In this paper, we present a vision algorithm and method for input image improvement and preprocessing of dented and raised characters on the sidewall of tires. we define optical condition between reflect coefficient and reflectance by the physical vector calculate. On the contrary this work will recognize the engraved characters using the computer vision technique. Tire input images have all most same grey levels between the characters and backgrounds. The reflectance is little from a tire surface. therefore, it's very difficult segment the characters from the background. Moreover, one side of the character string is raised and the other is dented. So, the captured images are varied with the angle of camera and illumination. For optimum input images, the angle between camera and illumination was found out to be with in 90。 .In addition, We used complex filtering with low-pass and high-pass band filters to improve input images, for clear input images. Finally we define equation reflect coefficient and reflectance. By doing this, we obtained good images of tires for pattern recognition.