• Title/Summary/Keyword: sidewall

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Formation of Passivation Layer and Its Effect on the Defect Generation during Trench Etching (트렌티 식각시 식각 방지막의 형성과 이들이 결함 생성에 미치는 영향)

  • Lee, Ju-Wook;Kim, Sang-Gi;Kim, Jong-Dae;Koo, Jin-Gon;Lee, Jeong-Yong;Nam, Kee-Soo
    • Korean Journal of Materials Research
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    • v.8 no.7
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    • pp.634-640
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    • 1998
  • A well- shaped trench was investigated in view of the defect distribution along trench sidewall and bottom using high resolution transmission electron microscopy. The trench was formed by HBr plasma and additive gases in magnetically enhanced reactive ion etching system. Adding $0_2$ and other additive gases into HBr plasma makes it possible to eliminate sidewall undercut and lower surface roughness by forming the passivation layer of lateral etching, resulted in the well filled trench with oxide and polysilicon by subsequent deposition. The passivation layer of lateral etching was mainly composed of $SiO_xF_y$ $SiO_xBr_y$ confirmed by chemical analysis. It also affects the generation and distribution of lattice defects. Most of etch induced defects were found in the edge region of the trench bottom within the depth of 10$\AA$. They are generally decreased with the thickness of residue layer and almost disappeared below the uni¬formly thick residue layer. While the formation of crystalline defects in silicon substrate mainly depends on the incident angle and energy of etch species, the region of surface defects on the thickness of residue layer formed during trench etching.

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Etch Characteristics of CoTb and CoZrNb Thin Films by High Density Plasma Etching (고밀도 플라즈마 식각에 의한 CoTb과 CoZrNb 박막의 식각 특성)

  • Shin, Byul;Park, Ik Hyun;Chung, Chee Won
    • Korean Chemical Engineering Research
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    • v.43 no.4
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    • pp.531-536
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    • 2005
  • Inductively coupled plasma reactive ion etching of CoTb and CoZrNb magnetic materials with the photoresist mask was performed using $Cl_2/Ar$ and $C_2F_6/Ar$ gas mixtures and characterized in terms of etch rate and etch profile. As the concentrations of $Cl_2$ and $C_2F_6$ gases increased, the etch rates of magnetic films decreased and the etch slopes became slanted. The $Cl_2/Ar$ gas was more effective in obtaining fast etch rate and steep sidewall slope than the $C_2F_6/Ar$ gas. As the coil rf power and dc bias increased, fast etch rate and steep etch slope were obtained but the redeposition on the sidewall was observed. This is due to the increase of ion and radical densities in plasma with increasing the coil rf power and the increase of incident ion energy to the substrate with increasing the dc bias voltage. By applying high density reactive ion etching to magnetic tunnel junction stack containing various magnetic films and metal oxide, steep etch slope and clean etch profile without redeposition were obtained.

The Versatility of Cheek Rotation Flaps

  • Kim, Kyung Pil;Sim, Ho Seup;Choi, Jun Ho;Lee, Sam Yong;Lee, Do Hun;Kim, Seong Hwan;Kim, Hong Min;Hwang, Jae Ha;Kim, Kwang Seog
    • Archives of Craniofacial Surgery
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    • v.17 no.4
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    • pp.190-197
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    • 2016
  • Background: The cheek rotation flap has sufficient blood flow and large flap size and it is also flexible and easy to manipulate. It has been used for reconstruction of defects on cheek, lower eyelid, or medial and lateral canthus. For the large defects on central nose, paramedian forehead flap has been used, but patients were reluctant despite the remaining same skin tone on damaged area because of remaining scars on forehead. However, the cheek flap is cosmetically superior as it uses the adjacent large flap. Thus, the study aims to demonstrate its versatility with clinical practices. Methods: This is retrospective case study on 38 patients who removed facial masses and reconstructed by the cheek rotation flap from 2008 to 2015. It consists of defects on cheek (16), lower eyelid (12), nose (3), medial canthus (3), lateral canthus (2), and preauricle (2). Buccal mucosa was used for the reconstruction of eyelid conjunctiva, and skin graft was processed for nasal mucosa reconstruction. Results: The average defect size was $6.4cm^2$, and the average flap size was $47.3cm^2$. Every flap recovered without complications such as abnormal slant, entropion or ectropion in lower eyelid, but revision surgery required in three cases of nasal side wall reconstruction due to the occurrence of dog ear on nasolabial sulcus. Conclusion: The cheek rotation flap can be applicable instead of paramedian forehead flap for the large nasal sidewall defect reconstruction as well as former medial and lateral canthal defect reconstruction.

Design and Analysis of LED.Optical Fiber Coupler for Efficient Line Lamps (효율적인 라인램프를 위한 발광다이오드-광섬유 결합기의 설계 및 해석)

  • Hong, Dae-Woon;Yoon, Myeong-Jung;Kim, Kyung-Ho;Yoo, Jae-Keun;Lee, Song-Jae
    • Korean Journal of Optics and Photonics
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    • v.21 no.1
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    • pp.26-32
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    • 2010
  • Line lamps, which utilize leaky optical fibers based on periodic bending of plastic optical fibers, are proposed. The LED-optical fiber coupler, the key component of the line lamp, is designed and analyzed. The analysis by the Monte Carlo photon simulation method has shown that the optical coupling efficiency is affected rather sensitively by $\theta_w$, the slanting angle of the reflecting cup sidewall and $\rho_{ref}$, the reflectivity of the reflecting cup. The optical coupling efficiency of the coupler reaches the maximum when $\theta_w$ is about $60^{\circ}$, which is significantly larger than $\theta_w=45^{\circ}$, the typical sidewall slanting angle of the reflecting cup adopted in most LED lamps. When the reflectivity of the reflecting cup is above 0.8, the optical coupling efficiency is larger than 80%, which is the typical efficiency to be achieved in LD-optical fiber coupler.

Structural Analysis of Multi-Functional Fishway in Seomoon Weir (서문보의 다기능 어도의 구조해석)

  • Lee, Young Jae;Lee, Jung Shin;Jang, Hyung Kyu
    • Ecology and Resilient Infrastructure
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    • v.7 no.4
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    • pp.308-319
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    • 2020
  • In this study, the field applicability of the recently constructed multifunctional fishway in Seomunbo, Yeongcheon-si, and Gyeongsangbuk-do were examined. The analysis variables were R/C slab (S1) and R/C+S/C slab (S2), the underground passage standard areas (width × length) were 1.4 m × 0.2 m, 1.4 m × 0.3 m, and 1.4 m × 0.6 m, and the flow velocities were 0.8, 1.2, and 1.6 m/s. As a result of the analysis, the safety of the design of Seomunbo was evaluated. The analysis showed compared to the Seomoon Weir fishway, the maximum stress of S2 decreased by 24 - 32%, the bending moment of the underground passage decreased by 16 - 33%, the maximum stress of the sidewall decreased by 20 - 36%. In addition, the bending moment of the upper slab decreased by 17 - 33%, the maximum stress of the upper slab decreased by 9 - 28%, and the bending moment decreased by 19 - 33%. Complementation was required in the following percentages: 18% and 14% for the maximum stress and bending moment of the underground passage, respectively, 15% and 17% for the maximum sidewall stress and bending moment, respectively, and 11% and 16% for the upper slab maximum stress and bending moment, respectively. The results showed that S2 was superior to that of the Seomoon Weir fishway, and the underground passage size of 1.4 m × 0.3 m was superior to those of 1.4 m × 0.2 m and 1.4 m × 0.6 m, and R/C+S/C slab was superior to that of R/C slab. The findings are expected to be useful for constructing and designing the multifunctional fishway.

Design and Analysis of Refractometer Based on Bend Waveguide Structure with Air Trench for Optical Sensor Applications

  • Ryu, Jin Hwa;Lee, Woo-Jin;Lee, Bong Kuk;Do, Lee-Mi;Lee, Kang Bok;Um, Namkyoung;Baek, Kyu-Ha
    • ETRI Journal
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    • v.36 no.5
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    • pp.841-846
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    • 2014
  • This study proposes a novel optical sensor structure based on a refractometer combining a bend waveguide with an air trench. The optical sensor is a $1{\times}2$ splitter structure with a reference channel and a sensing channel. The reference channel has a straight waveguide. The sensing channel consists of a U-bend waveguide connecting four C-bends, and a trench structure to partially expose the core layer. The U-bend waveguide consists of one C-bend with the maximum optical loss and three C-bends with minimum losses. A trench provides a quantitative measurement environment and is aligned with the sidewall of the C-bend having the maximum loss. The intensity of the output power depends on the change in the refractive index of the measured material. The insertion loss of the proposed optical sensor changes from 3.7 dB to 59.1 dB when the refractive index changes from 1.3852 to 1.4452.

Parametric studies on convection during the physical vapor transport of mercurous chloride ($Hg_2Cl_2$)

  • Kim, Geug-Tae;Lee, Kyong-Hwan
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.14 no.6
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    • pp.281-289
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    • 2004
  • The temperature hump is found to be most efficient in suppressing parasitic nucleation. With the temperature humps, there are found to be observed in undersaturations along the transport path for convective-diffusive processes ranging from $D_{AB}$ = 0.0584 $\textrm{cm}^2$/s to 0.584 $\textrm{cm}^2$/s, axial positions from 0 to 7.5 cm. With decreasing Ar = 5 to 3.5, the temperature difference is increased because of the imposed nonlinear temperature profile but the rate is decreased. For 2 $\leq$ Ar $\leq$ 3.5, the rate is increased with the aspect ratio as well as the temperature difference. Such an occurrence of a critical aspect ratio is likely to be due to the effect of sidewall and much small temperature difference. The rate is decreased exponentially with the aspect ratio for 2 $\leq$ Ar $\leq$ 10. Also, the rate is exponentially decreased with partial pressure of component B, P for 1 $\leq$ P $\leq$ 100 Torr.$ B/ $\leq$ 100 Torr.

Comparison of Hydrodynamic Coefficients obtained through Implementation of Diverse Methods in Square Tank

  • Kang, Seunghyun;Yoon, Hyeon Kyu
    • Journal of Navigation and Port Research
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    • v.38 no.1
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    • pp.11-18
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    • 2014
  • To confirm whether the square tank at Changwon National University (CWNU) can be used for estimation of maneuverability, planar motion mechanism (PMM) test and circular motion (CM) test were performed for various conditions. PMM test can be implemented using an XY carriage and a yaw table in the square tank. However, sometimes test section is insufficient for PMM test owing to low length-breadth ratio of the tank. In addition, the speed of a towing carriage is also quite limited. Therefore, it would be useful if PMM test could be effectively performed diagonally, by establishing coupled control logic to drive three servomotors. In addition, Froude number dependency on the estimated hydrodynamic coefficients was checked. Furthermore, CM tests, which cannot be completed in a conventional linear towing tank, were performed, and its results were compared with the results of PMM test. The results of the PMM tests in the diagonal direction were consistent with the results of the test performed in the direction parallel to the sidewall. However, the results of the CM test were greater than those of the PMM test. This tendency was also observed in the results published at Ulsan University.

Hydrogen Plasma와 Oxygen Plasma를 이용한 50 nm 텅스텐 패턴의 Oxidation 및 Reduction에 관한 연구

  • Kim, Jong-Gyu;Jo, Seong-Il;Nam, Seok-U;Min, Gyeong-Seok;Kim, Chan-Gyu;Yeom, Geun-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.288-288
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    • 2012
  • The oxidation characteristics of tungsten line pattern during the carbon-based mask layer removal process using oxygen plasmas and the reduction characteristics of the WOx layer formed on the tungsten line surface using hydrogen plasmas have been investigated for sub-50 nm patterning processes. The surface oxidation of tungsten line during the mask layer removal process could be minimized by using a low temperature ($300^{\circ}K$) plasma processing instead of a high temperature plasma processing for the removal of the carbon-based material. Using this technique, the thickness of WOx on the tungsten line could be decreased to 25% of WOx formed by the high temperature processing. The WOx layer could be also completely removed at the low temperature of $300^{\circ}K$ using a hydrogen plasma by supplying bias power to the tungsten substrate to provide an activation energy for the reduction. When this oxidation and reduction technique was applied to actual 40 nm-CD device processing, the complete removal of WOx formed on the sidewall of tungsten line could be observed.

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A Study on Optical Condition and preprocessing for Input Image Improvement of Dented and Raised Characters of Tires (타이어 음,양각 문자의 입력영상 개선을 위한 전처리와 광학조건에 관한 연구)

  • 류한성;최중경;구본민;박무열;윤경섭
    • Proceedings of the IEEK Conference
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    • 2001.06d
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    • pp.93-96
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    • 2001
  • In this paper, we present a vision algorithm and method for input image improvement and preprocessing of dented and raised characters on the sidewall of tires. we define optical condition between reflect coefficient and reflectance by the physical vector calculate. On the contrary this work will recognize the engraved characters using the computer vision technique. Tire input images have all most same grey levels between the characters and backgrounds. The reflectance is little from a tire surface. therefore, it's very difficult segment the characters from the background. Moreover, one side of the character string is raised and the other is dented. So, the captured images are varied with the angle of camera and illumination. For optimum input images, the angle between camera and illumination was found out to be with in 90。 .In addition, We used complex filtering with low-pass and high-pass band filters to improve input images, for clear input images. Finally we define equation reflect coefficient and reflectance. By doing this, we obtained good images of tires for pattern recognition.

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