• 제목/요약/키워드: servo system

검색결과 1,611건 처리시간 0.037초

실리콘 웨이퍼 연마장비용 왁스 스핀코팅장치의 내부기류 제어에 관한 전산유동해석 (CFD Analysis on the Internal Air Flow Control in a Wax Spin Coater of Silicon Wafer Polishing Station)

  • 김경진;김동주;박중윤
    • 반도체디스플레이기술학회지
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    • 제10권1호
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    • pp.1-6
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    • 2011
  • In this paper, the air flow induced by the rotating flat disk is numerically investigated in a hope to better understand the air flow structures inside the wax spin coater for a silicon wafer polishing station. Due to the complex inner geometry of actual spin coater such as the casing around the rotating ceramic block and servo motor, recirculation of air flow is inevitably found on the coating target if the internal space of spin coater is closed at the bottom and it could be the possible source of contamination on the wax coating. By numerical flow simulation, we found that it is necessary to install the air vent at the bottom and to apply the sufficient air suction in order to control the path of air flow and to eliminate the air recirculation zone above the spinning surface of coating target.

마이크로포지셔닝 병렬평행기구의 개발 및 실험 (Development and Experiment of a Micropositioning Parallel Manipulator)

  • 차영엽;윤권하
    • 제어로봇시스템학회논문지
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    • 제15권5호
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    • pp.543-547
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    • 2009
  • This paper describes the design, simulation, development, and experiment of a six degree-of-freedom micropositioning parallel manipulator. A movable stage was supported with six links, each of which extends with a dc-servo micropositioning actuator. In case of parallel manipulator, while the solution of the inverse kinematics is easily found by the vectors of the links which are composed of the joint coordinates in base and platform, but forward kinematic is not easily solved because of the nonlinearity and complexity of the parallel manipulator's kinematic output equation with the multi-solutions. The movable range of the prototype was ${\pm}25mm$ in the x- and y-directions and ${\pm}12.5mm$ in the z-direction. The minimum incremental motion of the prototype was $1{\mu}m$ in the x- and y-directions and $0.5{\mu}m$ in the z-direction. The repeatability of the prototype was ${\pm}2{\mu}m$ in the x- and y-directions and ${\pm}1{\mu}m$ in the z-direction. The motion performance was also evaluated by not only the computer simulation of CAD model but also the experiment using a capacitive sensor system.

로젯 주사 적외선 탐색기의 순시 시계 설계에 관한 연구 (A study on design of instantaneous field of view of rosette scanning infrared seeker)

  • 장성갑;홍현기;한성현;최종수
    • 전자공학회논문지S
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    • 제35S권7호
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    • pp.86-94
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    • 1998
  • The rosette-scan seeker is a device mounted on the infrared guided missile. It offers the positions and iamges of target to missiles servo system by scanning a space about target in rosette pattern with a single detector. An instantaneous field of view (IFOV), which is a diameter of a detector moving along the path of the rosette pattern, has the property that its smaller size provide the less interference of background signals and detector noise. If its size is too small to voer the total field of view (TFOV), however, it produces the invisible regions in the TFOV. In this case, the invisible regions cause the performance of the seeker to deteriorate. For full scan-coverage, it is necessary to design the small IFOV without the invisible regions in the TFOV, as possible. In this paper, we propose the new method of designing the smaller IFOV than the conventional method and verify full coverage of the scanned region. By comparing the nose equivalent flux density (NEFD) of the proposed method with the that of the conventional one, we confirm that the former is better than the latter in terms of performance.

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High Efficiency Drive of Dual Inverter Driven SPMSM with Parallel Split Stator

  • Lee, Yongjae;Ha, Jung-Ik
    • Journal of international Conference on Electrical Machines and Systems
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    • 제2권2호
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    • pp.216-224
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    • 2013
  • This paper describes dual inverter drive for a fractional-slot concentrated winding permanent magnet synchronous machine (PMSM). PMSMs are widely used in many applications from small servo motors to few megawatts generators thanks to its high efficiency and torque density. Especially, fractional-slot concentrated winding PMSM is very popular in the applications where wide operation range is required because it shows very wide constant power speed ratios. High speed operation, however, requires lots of negative daxis current for reducing back-EMF regardless of output torque. Field weakening current does not contribute to the torque generation in surface mounted PMSM case and causes inverter and copper loss. To reduce the losses from field weakening current, this paper proposes PMSM with split stator and parallel dual inverter drive. Proposed parallel dual inverter drive reduces back-EMF and enables efficient drive at high speed and light load situation. Control strategy of proposed dual inverter system is established through loss analysis and simulation. Proposed concept is verified with practical experiment.

암반의 경계조건을 고려한 절리면 직접전단시험기 개발 (Development of a New Direct Shear Apparatus Considering the Boundary Conditions of Rock Joints)

  • 이영휘;김용준
    • 한국지반공학회논문집
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    • 제19권2호
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    • pp.147-157
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    • 2003
  • 사면이나 터널과 같은 암반 구조물의 안정성에 영향을 미치는 절리면은 크게 절리면의 상태(돌기 강도, 충전재, 돌기 경사)와 주위 암반에 의해 구속되는 경계조건에 따라 지배된다. 본 연구에서는 암반 구조물에 작용하는 경계조건 과 절리상태에 따른 전단특성을 규명하기 위하여 PID 알고리즘에 의해 서보제어가 되는 절리면 전단시험 장비를 개발하였다. 그리고 돌기 경사가 일정한 톱니형 형상의 절리면에 대하여 일련의 실험을 수행하여 시험장비의 제어성능을 확인하고 사면이나 터널과 같이 경계조건이 다른 암반구조물에서는 전단강도 평가기법을 달리하여야 함을 알 수 있었다.

스케일 계수를 자동조정하는 퍼지제어기 설계에 관한 연구 (A Study for Design of Fuzzy Controller with the Automatic Adjustment of Scale Factors)

  • 이상윤;신위재
    • 융합신호처리학회논문지
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    • 제3권4호
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    • pp.42-48
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    • 2002
  • 플랜트 모델이나 경험에 근거하여 설계된 퍼지제어기를 실제 플랜트에 적용할 경우, 모델링 오차와 플랜트에 대한 관련지식의 부족으로 만족할 만한 제어 결과를 나타내지 못할 경우가 있다 이 경우 제어성능을 향상시키기 위해 제어기의 제어인자를 다시 조정하여야 하고, 이 조정과정은 시행착오방법으로 수행되기 때문에 많은 시간과 비용을 필요로 한다. 본 논문에서는 퍼지 논리와 정규화에 따라 스케일 계수를 자동조정하는 퍼지 제어기를 제안한다 모의 실험을 통하여 스케일 계수가 자동조정되는 퍼지제어기가 스케일 계수가 고정된 퍼지 제어기보다 좋은 성능을 보임을 확인하였다. 그리고 DSP 프로세서를 사용하여 설계한 제어기를 구현한 후 실험결과를 관측하였다.

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마이크로 광디스크 드라이브용 4x1 근접장 탐침 어레이를 위한 슬라이더와 서스펜션의 설계 (Design of the Slider and Suspension for 4x1 Near-field Probe Array in Micro Optical Disk Drives)

  • 홍어진;정민수;오우석;박노철;양현석;박영필
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2004년도 추계학술대회논문집
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    • pp.393-398
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    • 2004
  • The near-field scanning micro scope (NSOM) technique is in the spotlight as the next generation storage device. Many different types of read/write mechanism for NSOM have been introduced in the literature. In order for a near-field probe to be successfully implemented in the system, a suitable slider and suspension are needed to be properly designed. The optical slider is designed considering near-filed optics and probe array. The suspension generally supports slider performance, and tracking servo capacity in HDD. Moreover, the suspension for optical slider also should meet the optical characteristics, and is also required to satisfy shock performances for the mobility for the actuator. In this study, the optical slider and the suspension fer near-field probe array are designed and analyzed.

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Differential gear case와 피니언 샤프트 체결을 위한 핀 압입 장치설계 및 측정에 관한 연구 (A Study on the Design and Measurement of Pin Press-Fit Device for Fastening Differential Gear Case and Pinion Shaft)

  • 장태환;권진욱;엄지현;김정아;김태규
    • 열처리공학회지
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    • 제34권1호
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    • pp.25-30
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    • 2021
  • The differential gear system is a device designed to distribute the driving force of both vehicle wheels and control the rotational speed when the vehicle turns on a curve. The differential device consists of a differential gear case, a ring gear, and a pressure ring. A differential pinion gear and side gear are mounted on the differential pinion shaft inside the differential gear case. In this study, a pin press-fitting device that mounts the pinier gear and side gear to the differential pinion shaft in the differential gear case was designed, and a jig device for pin press-fitting using servo press was developed. In addition, by precisely measuring the pin press-in load and press-in distance according to the pin hole diameter of the differential gear shaft, the optimization of the pin pressin process was established.

비선형 알고리즘을 이용한 3축 제어 시스템의 설계 및 제작 (Design and Implementation of 3-Axis Control System using The Non-Linear Algorithm)

  • 조병관;이환희;최우진;김유기;이승대
    • 한국전자통신학회논문지
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    • 제17권5호
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    • pp.833-840
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    • 2022
  • 산업 현장에서 자동화 장비 및 모터의 정밀도가 요구되고 있고 전 세계 모터 시장 규모는 많이 증가하였지만, 국내 모터 기술은 해외 기술보다 뒤처져 있다. 본 논문에서는 모터의 기술 향상을 위해 PLC 서보 모터와 아두이노 스텝모터에 비선형 알고리즘을 적용하여 정밀도 안정도, 효율을 선형 알고리즘과 비교하였다. 비선형 알고리즘이 선형 알고리즘에 비해 모터의 최고 속도가 빨라 같은 구동 기준 소요 시간을 단축할 수 있었으며 곡률이 적어 정밀도가 향상되는 것을 확인하였다.

Development of the Maintenance Process Using Virtual Prototyping for the Equipment in the MSM's Unreachable Area of the Hot cell

  • Lee, Jong-Youl;Song, Tai-Gil;Kim, Sung-Hyun;Yoon, Ji-Sup
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2003년도 ICCAS
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    • pp.1354-1358
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    • 2003
  • The process equipment for handling high level radioactive materials like spent fuels is operated in a hot cell, due to high radioactivity. Thus, this equipment should be maintained and repaired optimally by a remotely operated manipulator. The master-slave manipulators(MSM) are widely used as a remote handling device in the hot cell. The equipment in the hot cell should be optimally placed within the workspace of the wall-mounted slave manipulator for the maintenance operation. But, because of the complexity in the hot cell, there would be some parts of the equipment that are not reached by the MSM. In this study, the maintenance process for these parts of the equipment is developed using virtual prototyping technology. To analyze the workspace of the maintenance device in the hot cell and to develop the maintenance processes for the process equipment, the virtual mock-up of the hot cell for the spent fuel handling process is implemented using IGRIP. For the implementation of the virtual mock-up, the parts of the equipment and maintenance devices such as the MSM and servo manipulator are modeled and assembled in 3-D graphics, and the appropriate kinematics are assigned. Also, the virtual workcell of the spent fuel management process is implemented in the graphical environment, which is the same as the real environment. Using this mock-up, the workspace of the manipulators in the hot cell and the operator's view through the wall-mounted lead glass are analyzed. Also, for the dedicated maintenance operation, the analyses for the detailed area of the end effectors in accordance with the slave manipulator's position and orientation are carried out. The parts of the equipment that are located outside of the MSM's workspace are specified and the maintenance process of the parts using the servo manipulator that is mounted in the hot cell is proposed. To monitor the process in the hot cell remotely, the virtual display system by a virtual camera in the virtual work cell is also proposed. And the graphic simulation using a virtual mock-up is performed to verify the proposed maintenance process. The maintenance process proposed in this study can be effectively used in the real hot cell operation and the implemented virtual mock-up can be used for analyzing the various hot cell operations and enhancing the reliability and safety of the spent fuel management.

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