• Title/Summary/Keyword: servo system

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CFD Analysis on the Internal Air Flow Control in a Wax Spin Coater of Silicon Wafer Polishing Station (실리콘 웨이퍼 연마장비용 왁스 스핀코팅장치의 내부기류 제어에 관한 전산유동해석)

  • Kim, Kyoung-Jin;Kim, Dong-Joo;Park, Joong-Youn
    • Journal of the Semiconductor & Display Technology
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    • v.10 no.1
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    • pp.1-6
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    • 2011
  • In this paper, the air flow induced by the rotating flat disk is numerically investigated in a hope to better understand the air flow structures inside the wax spin coater for a silicon wafer polishing station. Due to the complex inner geometry of actual spin coater such as the casing around the rotating ceramic block and servo motor, recirculation of air flow is inevitably found on the coating target if the internal space of spin coater is closed at the bottom and it could be the possible source of contamination on the wax coating. By numerical flow simulation, we found that it is necessary to install the air vent at the bottom and to apply the sufficient air suction in order to control the path of air flow and to eliminate the air recirculation zone above the spinning surface of coating target.

Development and Experiment of a Micropositioning Parallel Manipulator (마이크로포지셔닝 병렬평행기구의 개발 및 실험)

  • Cha, Young-Youp;Yoon, Kwon-Ha
    • Journal of Institute of Control, Robotics and Systems
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    • v.15 no.5
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    • pp.543-547
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    • 2009
  • This paper describes the design, simulation, development, and experiment of a six degree-of-freedom micropositioning parallel manipulator. A movable stage was supported with six links, each of which extends with a dc-servo micropositioning actuator. In case of parallel manipulator, while the solution of the inverse kinematics is easily found by the vectors of the links which are composed of the joint coordinates in base and platform, but forward kinematic is not easily solved because of the nonlinearity and complexity of the parallel manipulator's kinematic output equation with the multi-solutions. The movable range of the prototype was ${\pm}25mm$ in the x- and y-directions and ${\pm}12.5mm$ in the z-direction. The minimum incremental motion of the prototype was $1{\mu}m$ in the x- and y-directions and $0.5{\mu}m$ in the z-direction. The repeatability of the prototype was ${\pm}2{\mu}m$ in the x- and y-directions and ${\pm}1{\mu}m$ in the z-direction. The motion performance was also evaluated by not only the computer simulation of CAD model but also the experiment using a capacitive sensor system.

A study on design of instantaneous field of view of rosette scanning infrared seeker (로젯 주사 적외선 탐색기의 순시 시계 설계에 관한 연구)

  • 장성갑;홍현기;한성현;최종수
    • Journal of the Korean Institute of Telematics and Electronics S
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    • v.35S no.7
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    • pp.86-94
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    • 1998
  • The rosette-scan seeker is a device mounted on the infrared guided missile. It offers the positions and iamges of target to missiles servo system by scanning a space about target in rosette pattern with a single detector. An instantaneous field of view (IFOV), which is a diameter of a detector moving along the path of the rosette pattern, has the property that its smaller size provide the less interference of background signals and detector noise. If its size is too small to voer the total field of view (TFOV), however, it produces the invisible regions in the TFOV. In this case, the invisible regions cause the performance of the seeker to deteriorate. For full scan-coverage, it is necessary to design the small IFOV without the invisible regions in the TFOV, as possible. In this paper, we propose the new method of designing the smaller IFOV than the conventional method and verify full coverage of the scanned region. By comparing the nose equivalent flux density (NEFD) of the proposed method with the that of the conventional one, we confirm that the former is better than the latter in terms of performance.

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High Efficiency Drive of Dual Inverter Driven SPMSM with Parallel Split Stator

  • Lee, Yongjae;Ha, Jung-Ik
    • Journal of international Conference on Electrical Machines and Systems
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    • v.2 no.2
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    • pp.216-224
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    • 2013
  • This paper describes dual inverter drive for a fractional-slot concentrated winding permanent magnet synchronous machine (PMSM). PMSMs are widely used in many applications from small servo motors to few megawatts generators thanks to its high efficiency and torque density. Especially, fractional-slot concentrated winding PMSM is very popular in the applications where wide operation range is required because it shows very wide constant power speed ratios. High speed operation, however, requires lots of negative daxis current for reducing back-EMF regardless of output torque. Field weakening current does not contribute to the torque generation in surface mounted PMSM case and causes inverter and copper loss. To reduce the losses from field weakening current, this paper proposes PMSM with split stator and parallel dual inverter drive. Proposed parallel dual inverter drive reduces back-EMF and enables efficient drive at high speed and light load situation. Control strategy of proposed dual inverter system is established through loss analysis and simulation. Proposed concept is verified with practical experiment.

Development of a New Direct Shear Apparatus Considering the Boundary Conditions of Rock Joints (암반의 경계조건을 고려한 절리면 직접전단시험기 개발)

  • 이영휘;김용준
    • Journal of the Korean Geotechnical Society
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    • v.19 no.2
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    • pp.147-157
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    • 2003
  • The characteristics of a rock joint which influence the stability of rock mass structures such as cut slopes and tunnels are largely controlled by the conditions of the rock joint as well as its boundary conditions. The conditions of rock joints comprise asperity strength, roughness, and filling materials. Boundary conditions can be represented by assuming that the deformability(or stiffness) of the rock mass surrounding the joints is modelled by a spring with stiffness. A new direct shear apparatus was developed in this study, which adapts a servo control system using PID algorithm. This apparatus can be used to investigate the various aspects of shear characteristics of the rock joints at conditions of constant normal stress and constant normal stiffness and so on. The test results for saw-cut teeth joints show that shear strength should be evaluated by considering its specific boundary conditions far the design of tunnels and cut slopes.

A Study for Design of Fuzzy Controller with the Automatic Adjustment of Scale Factors (스케일 계수를 자동조정하는 퍼지제어기 설계에 관한 연구)

  • 이상윤;신위재
    • Journal of the Institute of Convergence Signal Processing
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    • v.3 no.4
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    • pp.42-48
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    • 2002
  • The case that cannot show the satisfactory control results with a modeling error and a shortage of related knowledge about a plant is if a fuzzy controller designed based on the plant model or the experience applies to an actual plant. We must adjust the scale factor which is a controller again in order to improve control performance in case of this and needs a lot of time and costs because this regulation process is carried out with a trial and error way We proposes the fuzzy controller that an automatic control adjust scale factors according to fuzzy logic and normalizer in this paper We confirmed that an automatic adjusted fuzzy controller displayed good performance than the fuzzy controller that scale factors was fixed through simulation. We implemented the controller using the DSP processor and applied in a hydraulic servo system. And then we observed an experimental results.

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Design of the Slider and Suspension for 4x1 Near-field Probe Array in Micro Optical Disk Drives (마이크로 광디스크 드라이브용 4x1 근접장 탐침 어레이를 위한 슬라이더와 서스펜션의 설계)

  • Hong, Eo-Jin;Jung, Min-Su;Oh, Woo-Seok;Park, No-Cheol;Yang, Hyun-Seok;Park, Young-Pil
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2004.11a
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    • pp.393-398
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    • 2004
  • The near-field scanning micro scope (NSOM) technique is in the spotlight as the next generation storage device. Many different types of read/write mechanism for NSOM have been introduced in the literature. In order for a near-field probe to be successfully implemented in the system, a suitable slider and suspension are needed to be properly designed. The optical slider is designed considering near-filed optics and probe array. The suspension generally supports slider performance, and tracking servo capacity in HDD. Moreover, the suspension for optical slider also should meet the optical characteristics, and is also required to satisfy shock performances for the mobility for the actuator. In this study, the optical slider and the suspension fer near-field probe array are designed and analyzed.

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A Study on the Design and Measurement of Pin Press-Fit Device for Fastening Differential Gear Case and Pinion Shaft (Differential gear case와 피니언 샤프트 체결을 위한 핀 압입 장치설계 및 측정에 관한 연구)

  • Jang, T.H.;Gwon, J.U.;Eum, J.H.;Kim, J.A.;Kim, T.G.
    • Journal of the Korean Society for Heat Treatment
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    • v.34 no.1
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    • pp.25-30
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    • 2021
  • The differential gear system is a device designed to distribute the driving force of both vehicle wheels and control the rotational speed when the vehicle turns on a curve. The differential device consists of a differential gear case, a ring gear, and a pressure ring. A differential pinion gear and side gear are mounted on the differential pinion shaft inside the differential gear case. In this study, a pin press-fitting device that mounts the pinier gear and side gear to the differential pinion shaft in the differential gear case was designed, and a jig device for pin press-fitting using servo press was developed. In addition, by precisely measuring the pin press-in load and press-in distance according to the pin hole diameter of the differential gear shaft, the optimization of the pin pressin process was established.

Design and Implementation of 3-Axis Control System using The Non-Linear Algorithm (비선형 알고리즘을 이용한 3축 제어 시스템의 설계 및 제작)

  • Cho, Byeong-Gwan;Lee, Hwan-Hee;Choi, Woo-Jin;Kim, Yu-Gi;Lee, Seung-Dae
    • The Journal of the Korea institute of electronic communication sciences
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    • v.17 no.5
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    • pp.833-840
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    • 2022
  • The precision of automation equipment and motors in factories is required, and global motor market has increased significantly. However, domestic motor technology lags behind foreign technology. In this thesis, the precision stability and efficiency were compared with a linear algorithm by applying a non-linear algorithm to a PLC servo motor and an Arduino step motor in order to improve the technology of the motor. The nonlinear algorithm was able to shorten the same driving reference time because the maximum speed of the motor was faster than the linear algorithm, and it was confirmed that the precision was improved due to the low curvature.

Development of the Maintenance Process Using Virtual Prototyping for the Equipment in the MSM's Unreachable Area of the Hot cell

  • Lee, Jong-Youl;Song, Tai-Gil;Kim, Sung-Hyun;Yoon, Ji-Sup
    • 제어로봇시스템학회:학술대회논문집
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    • 2003.10a
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    • pp.1354-1358
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    • 2003
  • The process equipment for handling high level radioactive materials like spent fuels is operated in a hot cell, due to high radioactivity. Thus, this equipment should be maintained and repaired optimally by a remotely operated manipulator. The master-slave manipulators(MSM) are widely used as a remote handling device in the hot cell. The equipment in the hot cell should be optimally placed within the workspace of the wall-mounted slave manipulator for the maintenance operation. But, because of the complexity in the hot cell, there would be some parts of the equipment that are not reached by the MSM. In this study, the maintenance process for these parts of the equipment is developed using virtual prototyping technology. To analyze the workspace of the maintenance device in the hot cell and to develop the maintenance processes for the process equipment, the virtual mock-up of the hot cell for the spent fuel handling process is implemented using IGRIP. For the implementation of the virtual mock-up, the parts of the equipment and maintenance devices such as the MSM and servo manipulator are modeled and assembled in 3-D graphics, and the appropriate kinematics are assigned. Also, the virtual workcell of the spent fuel management process is implemented in the graphical environment, which is the same as the real environment. Using this mock-up, the workspace of the manipulators in the hot cell and the operator's view through the wall-mounted lead glass are analyzed. Also, for the dedicated maintenance operation, the analyses for the detailed area of the end effectors in accordance with the slave manipulator's position and orientation are carried out. The parts of the equipment that are located outside of the MSM's workspace are specified and the maintenance process of the parts using the servo manipulator that is mounted in the hot cell is proposed. To monitor the process in the hot cell remotely, the virtual display system by a virtual camera in the virtual work cell is also proposed. And the graphic simulation using a virtual mock-up is performed to verify the proposed maintenance process. The maintenance process proposed in this study can be effectively used in the real hot cell operation and the implemented virtual mock-up can be used for analyzing the various hot cell operations and enhancing the reliability and safety of the spent fuel management.

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