• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.365-366
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• 2007

High quality cathode with high deposition rate of thin films and long target life time is required for manufacturing TFT-LCD and semiconductor. We developed WV(wide view) sputtering cathode with wide erosion area and high deposition rate. Ti thin film thickness variation in WV cathode is below 5% for 380 kWh target life time. Al thin film thickness using normal cathode is decreased about 20%. By using WV cathode, target using efficiency was improved 40%. in comparison with normal cathode.

• 한국전기전자재료학회논문지
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• 제17권11호
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• pp.1143-1148
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• 2004

In this study, photoresist stripping in semiconductor or LCD (liquid crystal display) fabrication processes using DIO, was investigated. In order to obtain the high PR stripping efficiency of DIO. we have developed new ozone-generating system with high ozone concentration and ozone-resolving system with high contact ratio. In this study, we obtained ozone gas concentrations of 11 % by new ozone-generating system, ozone-resolving efficiency of 99.5 % and maximum solubility of 130 ppm in deionized water. We applied the newly designed equipments to photoresist stripping processes and obtained similar results to SPM(sulfuric-peroxide mixture) process characteristics.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.231-235
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• 2005

Recently, some semiconductor and LCD manufacturers require equipment suppliers to serve the data of composite noise for clean room. In this study, we evaluate the composite noise of clean room by numerically and experimentally. The value of experimental result is more higher than calculated one as much as 1$\sim$2dB(A).

• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2004년도 추계학술대회논문집
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• pp.50-61
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• 2004

Nowadays Laser Controllable Thermo-cleaving is the most promising method of cutting FPD(Flat Panel Display) glass in mass-production line. And this method can be used to cut other brittle materials such as quartz, sapphire, ceramic and semiconductor. The concept of this method is shown in Picture 1. Laser beam heats glass up to strain point not to melting point and cooling system chills glass to make maximum thermal stress in glass and then the thermal stress generates micro thermal crack in other words blind crack. Laser Controllable Thermo-cleaving controls the thermal stress to optimize the blind crack up to level of mass-production line.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.1676-1681
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• 2006

We report on Organic Vapor Phase Deposition $(OVPD^{(R)})$ an innovative deposition technology for organic light emitting device (OLED) and organic semiconductor manufacturing. The combination of $OVPD^{(R)}$ with Close Coupled Showerhead (CCS) technology results in manufacturing equipment with vast potential for cost effective manufacturing of OLED displays commercially competitive to LCD. The actual $OVPD^{(R)}$ equipment concept and design is discussed: Computational Fluid Dynamic (CFD) modeling is compared with experimental results proving the excellent controllability of the deposition process. Further other production relevant deposition properties are being reviewed e.g. high deposition rates and high organic material utilization efficiency of the $OVPD^{(R)}$ - Technology. Data from devices made by $OVPD^{(R)}$ show comparable/ superior performance to those fabricated with conventional vacuum thermal evaporation (VTE) techniques. An outlook on further potentials of $OVPD^{(R)}$ with respect to enabling advanced organic device structures is given.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2725-2730
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• 2007

Turbo-type molecular drag pumps ( MDPs ) are used in the liquid crystal display ( LCD ), semiconductor and other thin film industries. Siegbahn ( disk-type ) molecular drag pumps are used as high-pressure stages in the hybrid-type turbomolecular pumps, where they can operate in the viscous, the transition and the free molecular flow regime. In this study is performed to investigate the pumping characteristics of three-stage disk-type molecular drag pump ( DTDP ) in the molecular transition flow region. The experiments are measured using five vacuum pressure gauges in the positions for rotors of DTDP. The test is performed with nitrogen gas ( $N_2$ ).

• 한국기계가공학회지
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• 제6권4호
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• pp.28-35
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• 2007

Currently, most of all valves using at the semiconductor & LCD manufacturing process are packless type. Such valves are needed to have the functions to protect perfectly from the leakage of fluid by using bellows and diaphragm instead of the grand packing. But not only those valves made in Korea are not available at this point, but also advanced foreign manufacturers do not open enough their data on the basic technology. Otherwise although they open the data a little, they are almost data about stainless steel for pneumatic valves. In this paper, it was focused on the fluid valves for chemical & DI water based on the data of steel valves which are already using commercially. And also this study concentrated to collect the basic developing data of Eco-On/Off diaphragm valve by ourselves.

• 대한의용생체공학회:학술대회논문집
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• 대한의용생체공학회 1996년도 추계학술대회
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• pp.15-17
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• 1996

In this paper, the therapy radiation dose measurement system has been implemented by using a microcomputer after radiation was irradiated on diodes from the MM22 microtron accelerator. We have displayed 7-channel diode output values on the LCD after processing those in the 80196 MCU(Micro Computer Unit). Signal processing has been performed in the pulse mode because we can process the signal fast and use it to perform portal image by increasing a number of diode channels in the future. In order to verify the microcomputer based radiation measurement system of diodes, diode output values were compared with that of semiconductor.

• 한국정보처리학회:학술대회논문집
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• 한국정보처리학회 2009년도 춘계학술발표대회
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• pp.706-709
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• 2009

The informatization of Korea is accompanied by the great growth of new strategic export industry, as of mobile phone or semiconductor LCD. Speaking to the situation of mobile phone, Motorola swept over the American domestic market in the beginning of 1990s, digital mobile communication as CDMA developed swiftly in Korea. In 1996, the first year's CDMA users of Samsung were merely one million, nevertheless, the world's sales in the first half of this year is up to 92 million. In this p aper I design 3D application based on J2ME and implement a freely removable 3D object which happened in a 3D scen e by receiving the keyboard response of mobile device with WTK (Wireless ToolKit) simulator. It contains benefits of improvement of relative speed and high-level functionality such as scene graph, keyframe animation, etc.

• 한국산학기술학회:학술대회논문집
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• 한국산학기술학회 2004년도 춘계학술대회
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• pp.221-223
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• 2004

본 논문에서는 RF 플라즈마를 사용하는 공정장비의 임피던스 정합 특성 개선을 위해 RF Match 제어단의 제어 알고리즘과 하드웨어의 디지털화 방안에 대한 연구를 수행하였다. 개발된 제어단은 최적의 동작성능을 위하여 멀티 프리셋, 이득제어 기능 등 부가기능을 갖도록 설계/제작하였고, 또한 LCD 모듈의 설치를 통하여 RF Match의 실시간 상태 파악이 가능하도록 하였다. 개발된 제어단에 대한 실험결과로부터 RF 전력의 over/under shoot, 플라즈마 플리커 등의 현상이 제거되었고, 정합시간이 크게 단축되었음을 알 수 있었다.