• 제목/요약/키워드: semi-conductor laser

검색결과 23건 처리시간 0.022초

Blue Multi-Laser-Diode Annealing(BLDA) Technologies for Poly-Si Films

  • Ogino, Yoshiaki;Iida, Yasuhiro;Sahota, Eiji;Terao, Motoyasu;Chen, Yi;Noguchi, Takashi
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
    • /
    • pp.945-947
    • /
    • 2009
  • We developed a new laser irradiation (BLDA: Blue Multi-Laser-Diode Annealing) system. The system forms the uniform line beam, which is constructed by 48 pieces of semiconductor lasers. This new system has achieved high laser output stability and the highly accurate beam shape by adopting a reliable laser control, the auto-focus control in addition to an original laser photosynthesis technology and the beam homogenizing technology. It was confirmed to crystallize the Si films effectively with good quality.

  • PDF

회절 광학 소자 기반 적응형 전조등 시스템 연구 (A Study on Adaptive Front-Lighting System based on Diffractive Optical Element)

  • 신성욱;박승호;유경선;노명재
    • 산업과 과학
    • /
    • 제2권4호
    • /
    • pp.28-35
    • /
    • 2023
  • 본 논문에서는 적응형 전조등 시스템 규정 중 일반도로 모드, 고속도로 모드, 젖은도로 모드를 만족하는 배광의 형성을 위한 회절 광학 소자를 설계하였으며, 이를 GDSII 스트림 형식의 파일로 도출하였다. 회절 광학 요소를 통해 형성된 배광의 유효성 및 백색광 구현 여부 확인을 위하여 각각 Field Tracing, Ray Tracing 기반의 시뮬레이션을 진행하여 변환빔 측정점에 대한 위치 요구사항 및 광도 요구사항의 만족을 확인하였다. 본 연구를 기반으로 적응형 전조등을 구현하는 경우, 광도의 대비 재현 및 단순한 구조의 적응형 전조등 시스템 구현이 가능할 것으로 예상된다.

Burr Control in Meso-Punching Process

  • Shin Hong Gue;Shin Yong Seung;Kim Byeong Hee;Kim Heon Young
    • Journal of Mechanical Science and Technology
    • /
    • 제19권4호
    • /
    • pp.968-975
    • /
    • 2005
  • The shearing process for the sheet metal is normally used in the precision elements such as semi-conductor components. In these precision elements, the burr formation brings a bad effect on the system assembly and demands the additional de-burring process, so this imposes high cost on manufacturing. In this paper, we have developed the in-situ auto-aligning precision meso-punching system to investigate the burr formation mechanism and ultimately minimize burr. Firstly, we introduced the punch-die contact sensing method to align the punch and the die at initial state prior to the punching process. Secondly, by using the low-price semi-con­ductor laser, burr formed on the edges is measured intermittently during the punching process. We could, finally, make burr on the sheet metal uniformized and minimized by controlling of the precision X - Y table, $1\;{\mu}m$ resolution, and measuring burr height by semiconductor laser. Experimental results show the validity of our system for pursuing the burr-free punched elements.

레이저를 이용한 박판 버의 정밀측정 (Precision measuring of burrs on sheet metal using the laser)

  • 신홍규;홍남표;김헌영;김병희
    • 한국정밀공학회:학술대회논문집
    • /
    • 한국정밀공학회 2003년도 춘계학술대회 논문집
    • /
    • pp.1824-1827
    • /
    • 2003
  • The sheet metal shearing process is normally used in the precision elements such as semi-conductor components. In precision elements, burrs usually reduce the quality of machined parts and cause interference, jamming and misalignment during assembly procedures and because of their sharpness, they can be safety hazard to personnel. Furthermore, not only burrs are hard to predict and avoid, but also deburring, the process of removing burrs, is time-consuming and costly. In order to get the burr-free parts, therefore, we developed the precise burr measuring system using the laser. The laser burr measuring system consists of the laser probe, the photo detector, the achromatic doublet lens, and the rotary & the X-Y table. In previous reports, we used simple vertical measuring method. But, as we used relatively bigger laser spot diameter and had the limited reflection angle, it was difficult to obtain the precise measuring results. So called, the spot size effect makes the profile of burr measured distorted and the burr height measured smaller. By introducing the novel laser measuring method which employing the achromatic lens system and the tilting mechanism, we could make the spot size smaller and get the appropriate beam direction angle. Through the experiments, the accuracy of the developed system is proved. The burr height measured during the punching process can be used for automatic deburring and in-situ aligning.

  • PDF

반도체 레이저를 이용한 박판 버의 실시간 측정 (The realtime measurement of burrs on sheet metal using the semiconductor laser)

  • 홍남표;신홍규;김헌영;김병희
    • 한국소성가공학회:학술대회논문집
    • /
    • 한국소성가공학회 2003년도 추계학술대회논문집
    • /
    • pp.107-110
    • /
    • 2003
  • The sheet metal shearing process is normally used in the precision elements such as semi-conductor components. In precision elements, burrs usually reduce the quality of machined parts and cause interference, jamming and misalignment during assembly procedures and because of their sharpness, they can be safety hazard to personnel. Furthermore, not only burrs are hard to predict and avoid, but also deburring, the process of removing burrs, is time-consuming and costly. In order to get the burr-free parts, therefore, we developed the precise burr measuring system using the laser. Using the X-Y precious table, we used vertical measuring method. Through the laser measurement system, we gain the minute analog signal, so this signal was amplified by the electric circuit. Finally, we gained the realtime burr data using A/D converter, PC. By introducing the novel laser measuring method which employing vertical measurement mechanism, we could get fast and precious burr data. Through the experiments, the accuracy of the developed system is proved. The burr height measured during the punching process can be used for automatic deburring and in-situ aligning.

  • PDF

평판 디스플레이용 Laser Direct Imaging에 관한 연구( I ) (A Study on the Laser Direct Imaging for FPD ( I ))

  • Kang, H.S.;Kim, K.R.;Kim, H.W.;Hong, S.K.
    • 한국레이저가공학회:학술대회논문집
    • /
    • 한국레이저가공학회 2005년도 추계학술발표대회 논문집
    • /
    • pp.37-41
    • /
    • 2005
  • When screen size of the Flat Panel Display (FPD) becomes larger, the traditional photo-lithography using photomasks and UV lamps might not be possible to make patterns on Photo Resist (PR) material due to limitation of the mask size. Though the maskless photo-lithography using UV lasers and scanners had been developed to implement large screen display, it was very slow to apply the process for mass-production systems. The laser exposure system using 405 nm semi-conductor lasers and Digital Micromirror Devices (DMD) has been developed to overcome above-mentioned problems and make more than 100 inches FPD devices. It makes very fine patterns for full HD display and exposes them very fast. The optical engines which contain DMD, Micro Lens Array (MLA) and projection lenses are designed for 10 to 50 ${\mu}m$ bitmap pattern resolutions. The test patterns for LCD and PDP displays are exposed on PR and Dry Film Resists (DFR) which are coated or laminated on some specific substrates and developed. The fabricated edges of the sample patterns are well-defined and the results are satisfied with tight manufacturing requirements.

  • PDF

회절 격자를 이용한 레이저 엔코더의 광 신호처리 (Optical Signal Processing of Laser Encoder Using Diffraction Grating)

  • 김수진;은재정;최평석
    • 융합신호처리학회 학술대회논문집
    • /
    • 한국신호처리시스템학회 2000년도 추계종합학술대회논문집
    • /
    • pp.145-148
    • /
    • 2000
  • Position-determining capacity is a very important condition in equipments for manufacturing semi-conductor or various instruments to measure physical displacement quantities of a moving object in submicron such as a distance of movement, direction, etc. and the accuracy of total system is influenced by detecting accuracy of these equipments. Therefore in this paper we have optically made up laser linear encoder based on optical diffraction principle to measure these displacement quantities and have processed optical signal using hardware-setup. In consequence we had acquired displacement for movement of scale using a diffraction grating by the accuracy of 0.5${\mu}{\textrm}{m}$ and had digitalized moving quantities of scale.

  • PDF

반도체레이져를 이용한 온도 및 농도의 계측 (Temperature and Concentration measurement using Semi-conductor diode laser)

  • 정대헌;노동순;지전유이
    • 한국연소학회:학술대회논문집
    • /
    • 한국연소학회 2000년도 제21회 KOSCO SYMPOSIUM 논문집
    • /
    • pp.168-174
    • /
    • 2000
  • A diode laser sensor system based on absorption spectroscopy techniques has been developed to measure $CO_2$ concentration and temperature non-intrusively in high temperature combustion environments using a 2.0 ${\mu}m$ DFB(Distributed Feedback) laser. Two optics was fabricated in pig-tail fashion and all optical components were implemented in a single box. The evolution of measurement sensitivity was done using test cell by changing sweep frequency and $CO_2$ concentration. Gas temperature was determined from the ratio of integrated line strengths. Species concentration was determined from the integrated line intensity and the measured temperature. The result show that the system has 2% error in wide operation frequency range and accuracy of $CO_2$ concentration was about 3%. The system was applied to measure temperature and concentration in the combustion region of a premixed $CH_4$ +air triangular flame. The measurement results of gas temperature agreed well with thermocouple results. Many considerations were taken into account to reduce optical noise, etalon effect, beam steering and base line matching problem. The evaluations results and actual combustion measurement demonstrate the practical and applicability for in-situ and real time combustion monitoring in a practical system.

  • PDF

레이저 간섭계에 의한 테이블의 처짐측정과 FEA에 의한 이의 검증 (A Study on the measurement of Table Deflection using Laser Interferometer and It's Inspection using FEA)

  • 이승수
    • 한국공작기계학회:학술대회논문집
    • /
    • 한국공작기계학회 1998년도 추계학술대회 논문집
    • /
    • pp.204-209
    • /
    • 1998
  • The acceleration of the performance of machine tools influences the development of the semi-conductor and optical technology as the development of NC and measurement technology. We can mention that a traction role of the acceleration for the development like that depends on the development of the measurement technics Stylus instrument method, STM, SEM, Laser interferometer method which are used for measuring the quasi-static error of machine tools. Because the measurement has been done to unload condition without considering of mechanical stiffness in the case of machining center as we measure the quasi-static error of machine tools on general studies, people who works on the spot has many problems on the data value. Therefor we will help working more accurately on the spot by measuring, analyzing, displaying the deflection of the table and support shaft when we load on the table and the support shaft of machining center using laser interferometer. Also we try to settle new conception of the measurement method and more accurate grasp of the deflection tendency by verifing the tendency of the error measured through the comparison of the simulated error using ANSYS, a common finite element analysis program, which is able to measure heat deformation, material deformation, and error resulted form this study.

  • PDF

치과용 레이저 조사가 배양 치수 섬유모세포에 미치는 영향에 관한 연구 (The EFFECTS OF DENTAL LASER ON PULP FIBROBLAST IN VITRO)

  • 정혜전;민병순
    • Restorative Dentistry and Endodontics
    • /
    • 제22권2호
    • /
    • pp.519-535
    • /
    • 1997
  • The responses of human pulp fibroblastic cells to Ga-As Semi-Conductor-Dens-Bio Laser (Frequency: 5 Hz~10,000 Hz Model: SD-101A RCA, U.SA)) were examined in vitro using pulp fibroblastic cells obtained from the pulp tissue of human tooth. The mitogenic effect of soft laser was assessed by measuring the MTT assay. The morphologic effect for soft laser showed under the scanning and transmission electron microscopy. The results as follows; 1. The mitogenic response of the soft laser was not observed until 4th time of radiation, while the mitogenic response at 4th time increased mitogenic effect by as much as 1.7 fold compared to the control value. 2. The mitogenic response of the soft laser on pulp fibroblast differ from the mitogenic response on other fibroblasts. 3. In scanning electron microscopic study, The microvilli of cell surface increased gradually with width and length after laser radiation, it demonstrate that development of microvilli have close connection with differentiation of cells. 4. Under the transmission electron microscope, The laser-treated cells maintained their elongated shape and a high degree of cellular polarization. The large cell body containing a well developed Golgi complex, a large number of profiles of rough endoplasmic reticulum, and great numbers of mitochondria. 5. The laser-treated cells maintained the long straight bundles of closely apposed microfilaments or individual filaments forming a cross-linked network. These findings suggest that the laser may have important roles in promotion of pulp healing and consequently may be useful for clinical application in pulp regenerative procedures.

  • PDF