Etching Characteristics of GST thin film using Inductively Coupled Plasma of $Cl_2$ /Ar gas mixtures
($Cl_2/Ar$ 유도결합 플라즈마를 이용한 GST 박막의 식각 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2005.11a
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- pp.65-66
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- 2005