• 한국재료학회:학술대회논문집
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• 한국재료학회 2012년도 춘계학술발표대회
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• pp.92-92
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• 2012

Chalcopyrite-type Cu(In,Ga)Se2 (CIGS) is one of the most attractive compound semiconductor materials for thin film solar cells. Among various approaches to prepare the CIGS thin film, the powder process offers an extremely simple and materials-efficient method. Here, we present the mechano-chemical synthesis of CIGS compound powders and their use as an ink material for screen-printing. During the synthesis process, milling time and speed were varied in the range of 10~600 min and 100~300 rpm, respectively. Both phase evolution and powder characteristics were carefully monitored by X-ray diffraction (XRD) method, scanning electron microscope (SEM) observation, and particle size analysis by scanning mobility particle spectrometer (SMPS) and aerodynamic particle sizer (APS). We found the optimal milling condition as 200 rpm for 120 min but also found that a monolithic phase of CIGS powders without severe particle aggregation was difficult to be obtained by the mechano-chemical milling alone. Therefore, the optimized milling condition was combined with an adequate heat-treatment (300oC for 60 min) to provide the monolithic CIGS powder of a single phase with affordable particle characteristics for the preparation of CIGS thin film. The powder was used to prepare an ink for screen printing with which dense CIGS thin films were fabricated under the controlled selenization. The morphology and electrical properties of the thin films were analyzed by SEM images and hall measurement, respectively.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.91-91
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• 2015

반도체 공정의 발전에 의해 최근 생산되는 메모리 등은 십 수 나노미터까지 좁아진 선 폭을 갖게 되었다. 이러한 이유로, 기존에는 큰 문제를 발생시키지 않던 나노미터 영역의 입자들이 박막 증착 공정과 같은 반도체 제조공정 수율을 저감시키게 되었다. 따라서 오염입자의 유입을 막거나 제어하기 위해 transmission electron microscopy (TEM)나 scanning electron microscopy (SEM)과 같은 전자현미경을 활용한 비 실시간 입자 측정 방법 및 광원을 이용하는 in-situ particle monitor (ISPM) 및 전기적 이동도를 이용한 scanning mobility particle sizer (SMPS) 등 다양한 원리를 이용한 실시간 입자 측정방법이 현재 사용중에 있다. 이 중 진공 내 입자의 수농도를 측정하기 위해 개발된 particle beam mass spectrometer (PBMS) 기술은 박막 증착 공정 등 chemical vapor deposition (CVD) 방법을 이용하는 진공공정에서 활용 가능하여 개발이 진행되어 왔다. 본 연구에서는 PBMS의 한계점인 입자 밀도, 형상 등의 특성분석이 용이하도록 PBMS와 scanning electron microscopy (SEM), 그리고 energy dispersive spectroscopy (EDS) 기술을 결합하여 입자의 직경별 개수농도, 각 입자의 형상 및 성분을 함께 측정 가능하도록 하였다. 협소한 반도체 제조공정 내부 공간에 적용 가능하도록 기존 PBMS 대비 크기 또한 소형화 하였다. 각 구성요소인 공기역학 집속렌즈, electron gun, 편향판, 그리고 패러데이 컵의 설치 및 물리적인 교정을 진행한 후 입자발생장치를 통해 발생시킨 sodium chloride 입자를 상압 입자 측정 및 분류장치인 SMPS 장치를 이용하여 크기별로 분류시켜 압력차를 통해 PBMS로 유입시켜 측정을 진행하였다. 나노입자의 입경분포, 형상 및 성분을 측정결과를 토대로 장치의 측정정확도를 교정하였다. 교정된 장치를 이용하여 실제 박막 증착공정 챔버의 배기라인에서 발생하는 입자의 수농도, 형상 및 성분의 복합특성 측정이 가능하였으며, 최종적으로 실제 공정에 적용가능하도록 장치 교정을 완료하였다.

• 한국산학기술학회논문지
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• 제13권9호
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• pp.4334-4340
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• 2012

본 연구에서는 미세 액적을 발생시키는 액적 발생 장치를 개발 제작하고 이에 대한 성능 평가를 실시하였다. 액적 발생 장치는 spray-evaporation method를 기초로 제작하였으며, 0.3mm, 0.5mm의 오리피스를 사용하였다. 압축 공기 공급 압력을 1bar에서 4bar로 증가시키면서 공급 압력에 따른 발생되는 액적 크기의 미세 정도를 비교하였다. 또한 SMPS(Scanning Mobility Particle Sizer)와 OPC(Optical Particle Counter)를 이용하여 서로 다른 오리피스를 장착한 액적 발생 장치에서 발생되는 액적의 크기 분포를 측정하였다. 연구 결과, 0.3mm 오리피스를 장착한 장치에서 발생되는 액적은 $0.3{\mu}m$ 인근의 크기가 가장 많았으며, 미립화되는 입자는 매우 안정적이었다. 또한 0.5mm 오리피스를 장착한 장치가 0.3mm 오리피스를 장착한 장치에 비해 발생되는 액적의 크기가 큰 것으로 나타났다. 이러한 액적 발생 장치는 입자의 미세한 응집 현상이 나타나는데, 이것은 내부 액체가 미세한 액적으로 미립화되어 분사되기 때문인 것으로 사료된다. 본 연구에서 제작한 액적 발생 장치는 미세 입자를 미립화하기 위한 에어로졸 발생 장치로 사용 가능한 것으로 판단된다.

• Safety and Health at Work
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• 제14권2호
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• pp.215-221
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• 2023

Background: There is little information about the airborne hazardous agents released during the heat treatment when manufacturing a welding material. This study aimed to evaluate the airborne hazardous agents generated at welding material manufacturing sites through area sampling. Methods: concentration of airborne particles was measured using a scanning mobility particle sizer and optical particle sizer. Total suspended particles (TSP) and respirable dust samples were collected on polyvinyl chloride filters and weighed to measure the mass concentrations. Volatile organic compounds and heavy metals were analyzed using a gas chromatography mass spectrometer and inductively coupled plasma mass spectrometer, respectively. Results: The average mass concentration of TSP was 683.1±677.4 ㎍/m³, with respirable dust accounting for 38.6% of the TSP. The average concentration of the airborne particles less than 10 ㎛ in diameter was 11.2-22.8×10⁴ particles/cm³, and the average number of the particles with a diameter of 10-100 nm was approximately 78-86% of the total measured particles (<10 ㎛). In the case of volatile organic compounds, the heat treatment process concentration was significantly higher (p < 0.05) during combustion than during cooling. The airborne heavy metal concentrations differed depending on the materials used for heat treatment. The content of heavy metals in the airborne particles was approximately 32.6%. Conclusions: Nanoparticle exposure increased as the number of particles in the air around the heat treatment process increases, and the ratio of heavy metals in dust generated after the heat treatment process is high, which may adversely affect workers' health.

• 한국산업보건학회지
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• 제28권3호
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• pp.273-282
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• 2018

Objectives: Dustiness of nanomaterials is considered as exposure index of essential material. Research on dustiness of nanomaterial is needed to control exposure in workplaces. Method: Dustiness measurement using vortex shaker were installed in the laboratory. Nanomaterials, 1 g, was put in the glass test tube and shaked using vortex shaker. Aerosol dispersed was measured using scanning mobility particle sizer(SMPS) and optical particle counter(OPC). Mass concentration using PVC filter and cassette was measured and TEM grid sampling was conducted. Total particle concentration and size distribution were calculated. Image and chemical composition of particles in the air were observed using transmission electron microscopy and energy dispersive X-ray spectrometer. Eleven different test nanomaterials were used in the study. Results: Rank of mass concentration and particle number concentration were coincided in most cases. Rank of nanomateirals with low concentration were not coincided. Two types of fumed silica had the highest mass concentration and particle number concentration. Indium tin oxide, a mixture of indium oxide and tin oxide, had high mass concentration and particle number concentration. Indium oxide had very low mass concentration and particle number concentration. Agglomeration of nanoparticles in the air were observed in TEM analysis and size distribution. In this study, mass concentration and particle number concentration were coincided and two index can be used together. The range of dustiness in particle number concentration were too wide to measure in one method. Conclusion: Particle number concentration ranged from low concentration to high concentration depend on type of nanomaterial, and varied by preparation and amount of nanomaterial used. Further study is needed to measure dustiness of all nanomaterial as one reference method.

• Journal of Korean Society for Atmospheric Environment
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• 제22권E2호
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• pp.78-88
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• 2006

In order to study the characteristics of cloud, a real-scale experiment for cloud generation was carried out using an extinct vertical mine (430 m height) located in the northeastern Honshu, Japan. The dry particles generated from the three-step concentrations of NaCl solutions were used for cloud generation. The number size distributions of initial dry particles and cloud droplets were monitored by Scanning Mobility Particle Sizer (SMPS) and Forward Scattering Spectrometer Probe (FSSP) at bottom and upper sites of pit, respectively. The polymeric water absorbent film (PWAF) method was employed to measure liquid water content ($W_L$) as a function of droplet size. Moreover the chemical properties of individual droplet replicas were determined by micro-PIXE. The CCN number concentration shows the lognormal form in dependence of the particle size, while the number size distributions of droplets are bimodal showing the peaks around $9{\mu}m$ and $20{\mu}m$ for every case. In comparison to background mineral particles, right shifting of size distribution line for NaCl particles was occurred. When NaCl solutions with three-step different concentrations were neulized, $W_L$ shows the strong droplet size dependence. It varied from $10.0mg\;m^{-3}$ up to $13.6mg\;m^{-3}$ with average $11.6mg\;m^{-3}$. A good relationship between $W_L$ and cloud droplet number concentration was obtained. Both chemical inhomogeneities (mixed components with mineral and C1) and homogeneities (only mineral components or C1) in individual droplet replicas were obviously observed from micro-PIXE elemental images.

• 한국대기환경학회지
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• 제20권3호
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• pp.411-419
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• 2004

Titania particles are widely used as a photocatalyst to treat various contaminants in air and water. Titania particles were formed by vapor-phase oxidation of titanium tetraisopropoxide (TTIP) in a tube furnace between 773 and 1,273 K. The effect of process variables such as furnace temperature, flow rate of carrier air, and flow rate of sheath air on powder size and phase characteristics was investigated using a scanning mobility particle sizer (SMPS), transmission electron microscopy (TEM) and X-ray diffraction (XRD). The size distribution of synthesized titania particles was characterized with mode diameter and peak concentration. The mode diameter ranging from 20 to 80 nm decreased with increasing flow rates of sheath air and carrier air, and increased with increasing furnace temperature. The peak concentration increased with increasing flow rates of sheath air and carrier air The best synthetic condition for high production rate can be derived from the experimental data set represented by mode diameter and peak concentration. The crystal structure of synthesized titania particles was found to be anatase phase, ensuring high photocatalytic potential.

• 한국입자에어로졸학회지
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• 제6권2호
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• pp.91-103
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• 2010

Size-segregated number concentration and scattering coefficient of urban aerosols were measured using an SMPS (scanning mobility particle sizer) and a nephelometer, respectively in Seoul, Korea, during the winter season of 2003. The average number concentrations of ultrafine particles (20~100 nm) and accumulation mode particles (100~600 nm) were $2,170\;particles\;cm^{-3}$ and $1,521\;particles\;cm^{-3}$, respectively. The scattering coefficient at the wavelength of 550 nm ranged from $62.6Mm^{-1}$ to $330.1Mm^{-1}$ and average value was $163.4Mm^{-1}$. The peak concentrations of ultrafine particles and accumulation mode particles were simultaneously recorded between 6:00 and 9:00 A.M., indicating the effect of vehicle emissions which are major air pollution sources in the urban atmosphere. On average, the number concentration of ultrafine particles was 1.4 times higher than that of accumulation mode particles, although it was a little higher during the morning peak time. The variation of aerosol scattering coefficient was in good agreement with that of accumulation mode particle number concentration rather than that of ultrafine particle number concentration.g coefficient was in good agreement with that of accumulation mode particle number concentration rather than that of ultrafine particle number concentration.

• KEPCO Journal on Electric Power and Energy
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• 제8권2호
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• pp.103-110
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• 2022

Ultrafine Particle number and size distributions were simultaneously measured at rural area around the power plant in Dangjin, South Korea. New Particle formation and growth events were frequently observed during January, 2021 and classified based on their strength and persistence as well as the variation in geometric mean diameter(GMD) on January 12, 21 and 17. In this study, we investigated mechanisms of new particle growth based on measurements using a high resolution time of flight aerosol mass spectrometer(HR-ToF-AMS) and a scanning mobility particle sizer(SMPS). On Event days(Jan 12 and 21), the total average growth rate was found to be 8.46 nm/h~24.76 nm/hr. These growth rate are comparable to those reported for other urban and rural sites in South Korea using different method. Comparing to the Non-Event day(Jan 17), New Particle Growth mostly occurred when solar radiation is peaked and relative humidity is low in daytime, moreover enhanced under the condition of higher precusors, NO₂ (39.9 vs 6.2ppb), VOCs(129.5 vs 84.6ppb), NH₃(11 vs 4.7ppb). The HR-ToF-AMS PM_1.0 composition shows Organic and Ammoniated nitrate were dominant species effected by emission source in domestic. On the other hand, The Fraction of Ammoniated sulfate was calculated to be approximately 16% and 31% when air quality is inflow from China. Longer term studies are needed to help resolve the relative contributions of each precusor species on new particle growth characteristics.

• 한국입자에어로졸학회지
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• 제7권4호
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• pp.113-121
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• 2011

The aerosol nanoparticles are suspected to be exposed to workers in nanomaterial manufacturing facilities. However, the exposure assessment method has not been established. One of important issues is to characterize background level of nanoparticles in workplaces. In this study, intensive aerosol measurements were made at a $TiO_2$ manufacturing laboratory for five consecutive days in May of 2010. The $TiO_2$ nanoparticles were manufactured by the thermal-condensation process in a heated tube furnace. The particle number size distribution was measured using a scanning mobility particle sizer every 5 min, in order to detect particles ranging from 14.5 to 664 nm in diameter. Total particle number concentration shows a severe diurnal variation irrespective of manufacturing process, which was governed by nanoparticles smaller than 50 nm in diameter. During the background monitoring periods, significant peak concentrations were observed between 2 p.m. and 3 p.m. due to the infiltration of secondary aerosol particles formed by photochemical smog. Although significant increase in nanoparticle concentration was also observed during the manufacturing process twice among three times, these particle peak concentrations were lower than those observed during the background measurement. It is suggested that the investigation of background particle contamination is needed prior to conducting main exposure assessment in nanomaterial manufacturing workplaces or laboratories.